CN208915978U - A kind of movable material frame - Google Patents
A kind of movable material frame Download PDFInfo
- Publication number
- CN208915978U CN208915978U CN201821319622.0U CN201821319622U CN208915978U CN 208915978 U CN208915978 U CN 208915978U CN 201821319622 U CN201821319622 U CN 201821319622U CN 208915978 U CN208915978 U CN 208915978U
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- haul
- sliding rail
- blowing
- material frame
- connect
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Abstract
The utility model discloses a kind of movable material framves.It include: erecting bed；Blowing portion is connected to erecting bed by the first sliding rail, and the blowing portion can be moved relative to erecting bed along first direction a；The blowing portion can place multiple magazines along first direction a arrangement；First haul portion, including determine material portion and the first noumenon, it is described to determine material portion and connect with the first noumenon；The first noumenon is connected to erecting bed by the second sliding rail, and first haul portion can b be moved in a second direction relative to erecting bed；Meet the feeding and blowing demand of plurality of devices, saves material frame occupied space, promote the production efficiency of more plurality of devices.
Description
Technical field
The utility model relates to a kind of movable material framves.
Background technique
Existing placement material material frame is single feeding or discharge structure.It is single to put for using the occasion of plurality of devices
Glove material material frame is unfavorable for promoting working efficiency and saves material frame occupied space.
Utility model content
To solve prior art problem, the utility model proposes a kind of movable material framves.
The technical solution of the utility model are as follows: a kind of movable material frame includes:
Erecting bed；
Blowing portion is connected to erecting bed by the first sliding rail, and the blowing portion can be relative to erecting bed along first direction a
Movement；The blowing portion can place multiple magazines along first direction a arrangement；
First haul portion, including determine material portion and the first noumenon, it is described to determine material portion and connect with the first noumenon；The first noumenon
It is connected to erecting bed by the second sliding rail, first haul portion can b be moved in a second direction relative to erecting bed.
Further, the first direction a is perpendicular to second direction b.
It is further, described that determine material portion include collet, third sliding rail and the first driving portion；First driving portion is fixed on
The first noumenon；The collet is connected to the first noumenon by third sliding rail, and first driving portion drives the collet along third
Sliding rail is moved relative to the first noumenon.
Further, first driving portion includes driving motor, driven wheel, driving wheel and synchronous belt；The driving electricity
Machine is fixed with the first noumenon, and the driving motor output shaft is connect with driving wheel；The driven wheel is connect with collet；The synchronization
Band connection is connect with driving wheel, and the synchronous belt is connect with driven wheel.
Further, the collet includes the first folder portion, the second folder portion, adjusts cylinder and the second ontology；The adjusting gas
Cylinder includes fixed part and movable part, and the movable part can be moved relative to the fixed part；Fixed part is connect with the first folder portion,
The fixed part is connect with the second ontology；Movable part is connect with the second folder portion.
Further, the one end of the fixed part far from the first folder portion is connect with the second ontology.
Further, first haul portion includes the first material carrier platform and the second material carrier platform, first material carrier platform and the
Two material carrier platforms are individually fixed in the first noumenon, and first material carrier platform and the second material carrier platform constitute material containing plane.
Further, the movable material frame further includes backgauge portion and driving cylinder；The backgauge portion is provided with punishment in advance
Mouthful；For backgauge portion by driving cylinder to connect with blowing portion, driving cylinder can make backgauge portion mobile relative to blowing portion；The gear
Material portion is located between blowing portion and the first haul portion.
Further, the backgauge portion includes adjustment portion and multiple material blocking rods；Adjustment portion is connect with driving cylinder；It is described more
A material blocking rod is connect along perpendicular to driving cylinder direction of feed with adjustment portion respectively.
Further, the movable material frame further includes the second haul portion；Second haul portion includes the first haul
Sucker, the first haul sliding rail and the first haul motor；The first haul sucker is installed on the first haul sliding rail, the first haul electricity
Machine is installed on the first haul sliding rail and draws the first haul sucker and slides along the first haul sliding rail；Described first haul sliding rail one end
Close to the first haul portion.
Further, the movable material frame further includes third haul portion；Third haul portion includes the second haul
Sucker, the second haul sliding rail and the second haul motor；The second haul sucker is installed on the second haul sliding rail, second fortune
Material motor is connected to the second haul sliding rail and the second haul sucker is driven to slide along the second haul sliding rail；Second haul sliding rail
One end is close to the first haul portion, and the second haul sliding rail and the first haul sliding rail angle β ∈ [0 180].
Further, it is characterised in that: the movable material frame further includes the first blowing portion and the second blowing portion；It is described
The one end of first haul sliding rail far from the first haul portion is close to the first blowing portion；The second haul sliding rail is far from the first haul portion
One end close to the second blowing portion.
The utility model has the beneficial effects that: meeting the feeding and blowing demand of plurality of devices, saves material frame and occupy sky
Between, promote the production efficiency of more plurality of devices.
Detailed description of the invention
Fig. 1 is the utility model movable material frame structural schematic diagram；
Fig. 2 is partial enlarged view at z in Fig. 1；
Fig. 3 is chuck structure schematic diagram；
Fig. 4 is blowing portion and backgauge portion connection relationship diagram；
Fig. 5 is backgauge portion structural schematic diagram；
Fig. 6 is the second haul portion and third haul portion mounting structure schematic diagram.
Specific embodiment
For convenient for those skilled in the art understand that the technical solution of the utility model, below by the technical side of the utility model
Case is described in further detail in conjunction with specific embodiments.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, a kind of movable material frame 100 includes:
Erecting bed 20；For installing related components and placing associated electrical appliance equipment；The erecting bed 20 is arranged to spiral
Formula support leg adds roller structure；Roller structure facilitates equipment to carry, and after being transported to selected location, adjusts screw-type support foot,
Roller structure is set to be in vacant state, to prevent 100 position of movable material frame unstable；
Blowing portion 30 is connected to erecting bed 20 by the first sliding rail 31, and the blowing portion 30 can be relative to erecting bed 20
It is moved along first direction a, occasion is produced for various materials (including different sizes), needed specific material transportation to correspondence
Equipment (or the corresponding material of particular device is put back into specific magazine)；The blowing portion 30 can place multiple along first
The magazine of direction a arrangement, blowing portion 30 are in order to which the alignment of specific magazine is needed feeding or blowing along first direction a sliding
Position；
First haul portion 40, including determine material portion 41 and the first noumenon 42, it is described to determine material portion 41 and removed for the first haul portion 40
Material is fixed relative to 41 position of material portion is determined during fortune material, and 41 directing material of material portion is moved to along the track of setting depending on
Specific position, it is described to determine material portion 41 and connect with the first noumenon 42；The first noumenon 42 is connected to peace by the second sliding rail 43
Platform 20 is filled, first haul portion 40 can b be moved in a second direction relative to erecting bed 20, that is, determines the material energy in material portion 41
It is enough to be moved along the second sliding rail 43；Meet the use occasion of various materials blowing or feeding.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the first direction a is perpendicular to second direction b；Magazine is steady
Horizontal positioned, first direction a is that horizontal movement can reduce the vibration of magazine, to reduce deflection of the material in magazine；The
Second direction b is moved far from blowing portion 30 after one haul portion 40 takes out material, and material transportation is transported to particular device to be subsequent
Enough spaces are obtained, motion profile is most short, and it is safe and reliable to carry material.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, it is described determine material portion 41 include collet 411,412 and of third sliding rail
First driving portion 413；First driving portion 413 is fixed on the first noumenon 42；The collet 411 is connected by third sliding rail 412
It is connected to the first noumenon 42, first driving portion 413 drives the collet 411 along third sliding rail 412 relative to the first noumenon 42
Movement, protrudes into material along third sliding rail 412 convenient for collet 411 and takes out material, after taking out material, determines material portion 41 along third sliding rail
412 far from blowing portion 30；For the wafers sheet material such as semiconductor, a magazine is placed with multiple wafers, between wafer
Space is smaller, convenient for protruding into collet 411 between wafer.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, first driving portion 413 include driving motor, driven wheel,
Driving wheel and synchronous belt；The driving motor and the first noumenon 42 are fixed, and the driving motor output shaft is connect with driving wheel；Institute
Driven wheel is stated to connect with collet；The synchronous band connection is connect with driving wheel, and the synchronous belt is connect with driven wheel；Driving motor
It drives collet to protrude by synchronous belt or far from magazine, structure is simple, it is low in cost, it is easy to use and reliable.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the collet 411 includes the first folder portion 4111, the second folder portion
4112, cylinder 4113 and the second ontology 4114 are adjusted；The adjusting cylinder 4113 includes fixed part and movable part, passes through air pressure tune
Saving movable part can move relative to the close of fixed part or separation, the movable part relative to the fixed part；Fixed part with
The connection of first folder portion 4111, the fixed part are connect with the second ontology 4114；Movable part is connect with the second folder portion 4112, passes through gas
The first folder portion 4111 of voltage-controlled system is relative to the separation of the second folder portion 4112 or close；When needing wafer taking out magazine, the
One folder portion 4111 and the second folder portion 4112 are distributed in particular wafer piece two sides, and the second folder portion of pressure control 4112 is to the first folder portion
Wafer is fixed between the first folder portion 4111 and the second folder portion 4112 by 4111 movements；When placing wafer, by wafer
After magazine specific position, the second folder portion 4112 is separated relative to the first folder portion 4111, and collet 411 is far from magazine；Using
411 device of collet of one folder portion 4111 and the second folder portion 4112 composition can satisfy the small space feeding requirement such as wafer.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the one end and second of the fixed part far from the first folder portion 4111
Ontology 4114 connect, compared with the other connection types of fixed part, using institute it is necessary to collet 411 is increased under the premise of structure
Length, thus guarantee that the first folder portion 4111 and the second folder portion 4112 protrude into magazine and will not be interfered by other components, the first folder portion
4111 and second folder portion 4112 have sufficient space in magazine.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, first haul portion 40 includes the first material carrier platform 45 and second
Material carrier platform 46, first material carrier platform 45 and the second material carrier platform 46 are individually fixed in the first noumenon 42, first material carrier platform 45
Material containing plane is constituted with the second material carrier platform 46；Material is placed in material containing plane after first haul portion 40 taking-up material, after convenient
Continue and carry material, for subsequent in such a way that material is carried in absorption, suction tray needs to compress material and extracts air realization out again very
Suction is attached, and can only clamp edge at the one of material by the way of the first folder portion 4111 and the second collet 4112 clamping material,
Material can be damaged by version will be adsorbed directly compressing the material of clamping, and material, which is placed in, can place material after material containing plane and inhaled
Attached disk damages by pressure；Or first haul portion 40 place material before, material is placed in material containing plane again by the first haul portion 40 by material
It is transported to magazine.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the movable material frame 100 further includes backgauge portion 50 and drives
It takes offence cylinder 51；The backgauge portion 50 was provided with material mouth 501；Backgauge portion 50 is driven by driving cylinder 51 to connect with blowing portion 30
Cylinder 51 of taking offence can make backgauge portion 50 mobile relative to blowing portion 30；The backgauge portion 50 is located at blowing portion 30 and the first haul portion
Between 40, backgauge portion 50 is for preventing material in 30 motion process of blowing portion from dropping out magazine, specifically, being moved through in blowing portion 30
Cheng Zhong crosses material mouth 501 between multiple magazines, prevents material from dropping out from material mouth 501 is crossed；When needing feeding or blowing, drive
The mobile backgauge portion 50 of cylinder 51 of taking offence made the just corresponding magazine of material mouth 501, so that material was passed through material mouth 501 from magazine and takes out,
Or material can pass through material mouth 501 and be put into magazine.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the backgauge portion 50 includes adjustment portion 52 and multiple material blocking rods
53；Adjustment portion 52 is connect with driving cylinder 51；The multiple material blocking rod 53 respectively along perpendicular to driving 51 direction of feed of cylinder with
Adjustment portion 52 connects, for a magazine, as long as the one end for having at least one material blocking rod 53 to block magazine discharging can be realized as
Prevent the purpose that material drops out in magazine movement；The structure that multiple material blocking rods 53 are driven using adjustment portion 52 makes 50 knot of backgauge portion
Structure is simple.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the movable material frame 100 further includes the second haul portion 60；
Second haul portion 60 includes the first haul sucker 61, the first haul sliding rail 62 and the first haul motor 63；First fortune
Material sucker 61 is installed on the first haul sliding rail 62, and the first haul motor 63 is installed on the first haul sliding rail 62 and draws the first haul
Sucker 61 is slided along the first haul sliding rail 62；Described first haul sliding rail, 62 one end is close to the first haul portion 40；First haul is inhaled
Disk 61 can transport the material in the first haul portion 40 or material is transported to the first haul portion 40 by the first haul sucker 61,
The movable material frame 100 is set to meet the feed capacity to equipment.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the movable material frame 100 further includes third haul portion 70；
Third haul portion 70 includes the second haul sucker 71, the second haul sliding rail 72 and the second haul motor 73；Second fortune
Material sucker 71 is installed on the second haul sliding rail 72, and the second haul motor 73 is connected to described in the second haul sliding rail 72 and drive
Second haul sucker 71 is slided along the second haul sliding rail 72；Second haul sliding rail, 72 one end is close to the first haul portion 40, and second
62 angle β [0 180] of haul sliding rail 72 and the first haul sliding rail；Meet feed or the blowing requirement of many places equipment, promotes feed
Or blowing efficiency；When the first haul sucker 61 is in haul, material can be put into the first haul by the first haul sucker 71
Portion 40 transports the material in the first haul portion 40；Relative to using single haul portion (the second haul portion 60 or third haul
Portion 70) it is able to ascend working efficiency；Certainly, more haul portions can also be arranged in scheme implementer according to production needs；About
62 angle β ∈ [0 180] of two haul sliding rails 72 and the first haul sliding rail (unit is " ° "), as β=0,60 He of the second haul portion
Third haul portion 70 is overlapped in one direction, meets the feed demand of different spaces equipment；It even can be used for an equipment
Feeding and feeding, i.e., by material after being taken out in magazine, the second haul portion 60(or third haul portion 70) it is fed to equipment, equipment
After processing is completed, third haul portion 70(or the second haul portion 60) material processed put back into magazine, when the material in equipment
By third haul portion 70(or the second haul portion 60) take away after, the second haul portion 60(or third haul portion 70) can immediately will be quasi-
Standby material is placed in equipment；When β=90 °, second haul portion 60 is vertical with third haul portion 70；It is described when β=180 °
There is maximum spatial position between two haul portions 60 and third haul portion 70, can satisfy the feed demand of two production lines, one
Production line is fed by the second haul portion 60, and another production line is fed by third haul portion 70；Scheme implementer needs basis
The angle in the second haul portion of the actual conditions adjustment such as quantity, space layout and equipment placement of equipment 60 and third haul portion 70；
First Calibrator 601 is able to detect material B deflection angle；Second Calibrator 702 is for detecting object in third haul portion 70
The deflection angle of material.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, the movable material frame 100 further includes the first blowing portion 81
With the second blowing portion 82；The described one end of first haul sliding rail 62 far from the first haul portion 40 is close to the first blowing portion 81；It is described
The one end of second haul sliding rail 72 far from the first haul portion 40 is close to the second blowing portion 82；First blowing portion 81(second is put
Material portion 82) for placing the second haul portion 60(third haul portion 70) on material, therefore the first blowing portion 81(second
Blowing portion 82) it can be discharge position in equipment, or for the discharging device of transfer material, first is not limited herein
The specific installation site in blowing portion 81 and the second blowing portion 82.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, a kind of method for fetching removes the material B being placed in magazine A
Transport to the first blowing portion 81: blowing portion 30 is placed with various materials (different sizes and type), by the material in specific magazine A
B is transported to specific equipment；Meet plurality of devices feed simultaneously, replaces conventional single feed mode；
S1: blowing portion 30 is moved along the first sliding rail 31, makes corresponding first haul portion, 40 feeding position of the magazine A in blowing portion 30
It sets；It prepares for the first haul portion 40 from specific feeding position feeding；
Far from blowing portion 30 after material B in S2: the first haul portion 40 taking-up magazine A；Far from magazine after taking-up material B, prevent
Only because the carrying of material B is by the interference in blowing portion 30；
S3: the first haul sucker 61 adsorbs material B, and the first haul portion 40 is separated with material B；First haul sucker 61 is removed
Transport material；
S4: the first haul sucker 61 will adsorb material B along the first haul sliding rail 62 close to the first blowing portion 81, make material B
Positive corresponding first blowing portion 81；
S5: the first haul sucker 61 is moved along the direction perpendicular to material B, after material B is placed in the first blowing portion 81, the
One haul sucker 61 is separated with material B；That is the first haul sucker 61 places material B along the direction perpendicular to the first blowing portion 81,
Reduce placement material B and is placed in the deflection generated behind the first blowing portion 81 or friction of colliding with；Material B places safe and reliable；Backgauge
Portion 50, by driving cylinder 51 to connect, enables backgauge portion 50 to move relative to blowing portion 30 with blowing portion 30；The backgauge portion
50 were provided with material mouth 501；Backgauge portion 50 prevents material B deflection or material B in the movement of blowing portion 30 from dropping out damage, for cutting
The semiconductor crystal wafer on side, if the excessive needs of inflection point manually adjust；Material B, which is dropped out, to be likely to be broken；It transports in blowing portion 30
When dynamic, driving cylinder 51 made material mouth 501 between adjacent magazine；When needing feeding, driving cylinder 51 made material mouth 501 just
To magazine A, so that the first haul portion 40 was passed through material mouth 501 and take out material B from blowing portion 30；By using driving cylinder 51
The positional relationship between backgauge portion 50 and blowing portion 30 is adjusted, the position of material mouth 501 was adjusted, to meet backgauge portion 50 to putting
The backgauge demand in material portion 30, and meet feeding and blowing demand；First blowing portion 81, which can rotate, corrects the inclined of material B
Turn, the first Calibrator 601 is able to detect material B deflection angle；The angle needed due to the actual angle of material B relative to equipment
Degree has certain deviation, when deviation is in the range of equipment can correct, corrects deflection angle by the first blowing portion 81, makes
Material B meets the angle demand of equipment setting.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, a kind of discharging method, for material C to be put into magazine D: will be special
Fixed material C is put into specific magazine D, meets the blowing demand of plurality of devices, replaces conventional single discharge pattern；
A: material C is placed in the first blowing portion 81；First blowing portion 81 is discharge position or transfer object in equipment
Expect purposes；
B: the first haul sucker 61 adsorbs material C, and drives material C along the first haul sliding rail 62 close to the first haul portion
40；Material C is carried to the first haul portion 40 from the first blowing portion 81 by the first haul sucker 61；
After material C is placed in the first haul portion 40 by the c: the first haul sucker 61, first haul sucker 61 and material C points
From；Material C is located at the specific position in the first haul portion 40；
D: blowing portion 30 is moved along the first sliding rail 31, makes corresponding first haul portion, 40 discharge position of magazine D；Meet the first fortune
Material portion 40 is to magazine D blowing demand；
Material C is put into magazine D by the e: the first haul portion 40；Realize the blowing mesh that specific material C is put into specific magazine D
's.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, backgauge portion 50 is connect with blowing portion 30 by driving cylinder 51,
Backgauge portion 50 is set to move relative to blowing portion 30；The backgauge portion 50 was provided with material mouth 501；When blowing portion 30 moves,
Driving cylinder 51 made material mouth 501 between adjacent magazine；When needing blowing, driving cylinder 51 made 501 face material of material mouth
Box A enables the first haul portion 40 to pass through material mouth 501 and material B is put into blowing portion 30.
It is the preferred embodiment of the utility model above, is not used in restriction the technical solution of the utility model.It should approve,
Those skilled in the art made non-creative deformation or change after understanding technical solutions of the utility model, should also belong to
The protection or disclosure of the utility model.
Claims (12)
1. a kind of movable material frame, it is characterised in that: the movable material frame (100) includes erecting bed (20)；Blowing portion
(30), it is connected to erecting bed (20) by the first sliding rail (31), the blowing portion (30) can be relative to erecting bed (20) along
One direction a movement；The blowing portion (30) can place multiple magazines along first direction a arrangement；First haul portion (40), packet
It includes and determines material portion (41) and the first noumenon (42), it is described to determine material portion (41) and connect with the first noumenon (42)；The first noumenon (42)
It is connected to erecting bed (20) by the second sliding rail (43), first haul portion (40) can be relative to erecting bed (20) along second
Direction b movement.
2. movable material frame according to claim 1, it is characterised in that: the first direction a is perpendicular to second direction
b。
3. movable material frame according to claim 1, it is characterised in that: it is described determine material portion (41) include collet (411),
Third sliding rail (412) and the first driving portion (413)；First driving portion (413) is fixed on the first noumenon (42)；The collet
(411) it is connected to the first noumenon (42) by third sliding rail (412), first driving portion (413) drives the collet (411)
It is moved along third sliding rail (412) relative to the first noumenon (42).
4. movable material frame according to claim 3, it is characterised in that: first driving portion (413) includes driving
Motor, driven wheel, driving wheel and synchronous belt；The driving motor and the first noumenon (42) are fixed, the driving motor output shaft
It is connect with driving wheel；The driven wheel is connect with collet；The synchronous band connection is connect with driving wheel, the synchronous belt with it is driven
Wheel connection.
5. movable material frame according to claim 3 or 4, it is characterised in that: the collet (411) includes the first folder portion
(4111), the second folder portion (4112), adjusting cylinder (4113) and the second ontology (4114)；The adjusting cylinder (4113) includes solid
Determine portion and movable part, the movable part can be moved relative to the fixed part；Fixed part is connect with the first folder portion (4111), institute
Fixed part is stated to connect with the second ontology (4114)；Movable part is connect with the second folder portion (4112).
6. movable material frame according to claim 5, it is characterised in that: the fixed part is far from the first folder portion (4111)
One end connect with the second ontology (4114).
7. movable material frame according to claim 6, it is characterised in that: first haul portion (40) includes the first load
Material platform (45) and the second material carrier platform (46), first material carrier platform (45) and the second material carrier platform (46) are individually fixed in the first noumenon
(42), first material carrier platform (45) and the second material carrier platform (46) constitute material containing plane.
8. movable material frame according to claim 1, it is characterised in that: the movable material frame (100) further includes
Backgauge portion (50) and driving cylinder (51)；The backgauge portion (50) was provided with material mouth (501)；Backgauge portion (50) passes through driving gas
Cylinder (51) is connect with blowing portion (30), and driving cylinder (51) can make backgauge portion (50) mobile relative to blowing portion (30)；It is described
Backgauge portion (50) is located between blowing portion (30) and the first haul portion (40).
9. movable material frame according to claim 8, it is characterised in that: the backgauge portion (50) includes adjustment portion (52)
With multiple material blocking rods (53)；Adjustment portion (52) is connect with driving cylinder (51)；The multiple material blocking rod (53) respectively along perpendicular to
Driving cylinder (51) direction of feed is connect with adjustment portion (52).
10. movable material frame according to claim 1, it is characterised in that: the movable material frame (100) further includes
Second haul portion (60)；Second haul portion (60) includes the first haul sucker (61), the first haul sliding rail (62) and first
Haul motor (63)；The first haul sucker (61) is installed on the first haul sliding rail (62), the installation of the first haul motor (63)
In the first haul sliding rail (62) and draws the first haul sucker (61) and slide along the first haul sliding rail (62)；First haul is sliding
Rail (62) one end is close to the first haul portion (40).
11. movable material frame according to claim 10, it is characterised in that: the movable material frame (100) is also wrapped
Include third haul portion (70)；Third haul portion (70) includes the second haul sucker (71), the second haul sliding rail (72) and the
Two haul motors (73)；The second haul sucker (71) is installed on the second haul sliding rail (72), the second haul motor
(73) it is connected to the second haul sliding rail (72) and the second haul sucker (71) is driven to slide along the second haul sliding rail (72)；The
Two haul sliding rail (72) one end are close to the first haul portion (40), and the second haul sliding rail (72) and first haul sliding rail (62) angle
β∈[0 180]。
12. movable material frame according to claim 11, it is characterised in that: the movable material frame (100) is also wrapped
Include the first blowing portion (81) and the second blowing portion (82)；The one end of the first haul sliding rail (62) far from the first haul portion (40)
Close to the first blowing portion (81)；The one end of the second haul sliding rail (72) far from the first haul portion (40) is close to the second blowing portion
(82).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821319622.0U CN208915978U (en) | 2018-08-16 | 2018-08-16 | A kind of movable material frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821319622.0U CN208915978U (en) | 2018-08-16 | 2018-08-16 | A kind of movable material frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208915978U true CN208915978U (en) | 2019-05-31 |
Family
ID=66702756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821319622.0U Active CN208915978U (en) | 2018-08-16 | 2018-08-16 | A kind of movable material frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208915978U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109018801A (en) * | 2018-08-16 | 2018-12-18 | 深圳市矽电半导体设备有限公司 | A kind of movable material frame, method for fetching and discharging method |
-
2018
- 2018-08-16 CN CN201821319622.0U patent/CN208915978U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109018801A (en) * | 2018-08-16 | 2018-12-18 | 深圳市矽电半导体设备有限公司 | A kind of movable material frame, method for fetching and discharging method |
| CN109018801B (en) * | 2018-08-16 | 2024-04-30 | 矽电半导体设备(深圳)股份有限公司 | Movable material rack, material taking method and material discharging method |
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Address after: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd Address before: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |