CN208869712U

CN208869712U - A kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism

Info

Publication number: CN208869712U
Application number: CN201821368572.5U
Authority: CN
Inventors: 华焱
Original assignee: Changzhou Si Jie Machinery Technology Co Ltd
Current assignee: Changzhou Si Jie Machinery Technology Co Ltd
Priority date: 2018-08-24
Filing date: 2018-08-24
Publication date: 2019-05-17
Anticipated expiration: 2028-08-24

Abstract

The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism.The quasi- monocrystalline ingot furnace lower furnace body cooling mechanism, including lower furnace bottom shell, support base, track base and air door mechanism, intermediate position is equipped with support sleeve in the lower furnace bottom shell, multiple track bases are equipped with by linking arm at the top of support sleeve, track base is equipped with guide rail, guide rail is equipped with sliding machine, the air door mechanism includes bottom plate and hot topic, bottom plate is located on aqueous cold plate, hot topic includes the first air door and the second air door, and each sliding machine passes through connecting rod respectively and is driven with corresponding first air door and the second air door.The beneficial effect is that: structure is simple, easy to use, avoids that stuck phenomenon occurs; guarantee heat dissipation effect, and the controllable water cooling heat exchange in bottom, the auxiliary heating of melting stage bottom; crystal growing stage radiates downward vertically, and effective protection bottom seed crystal brings safely guarantee to stove.

Description

A kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism

Technical field

The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism.

Background technique

Quasi- monocrystalline ingot furnace is one kind in inert gas (based on nitrogen, helium) environment, with graphite heater by polycrystalline The fusing of the polycrystalline materials such as silicon is the equipment of the technique growth dislocation-free monocrystalline based on quasi- monocrystalline ingot furnace, quasi- monocrystalline (Mono Like) it is the technique based on polycrystalline cast ingot, single crystal seed is used by part when long brilliant, it is similar with electrical property to obtain appearance The polysilicon chip of monocrystalline, this technology that monocrystalline silicon is formed by way of ingot casting, power consumption is only more than common polycrystalline silicon, gives birth to The quality of the monocrystalline silicon of production is close to pulling of silicon single crystal, and briefly, this technology is exactly the cost with polysilicon, produces monocrystalline silicon Technology, the quasi- monocrystalline technology of volume production is largely to have seed crystal ingot casting instantly, and this technology first puts seed crystal, silicon material doped chemical It sets in crucible, seed crystal is normally at crucible bottom, reheats and melts silicon material, and seed crystal is kept not melted away completely, finally controls System cooling, adjusts the temperature gradient of solid liquid phase, it is ensured that monocrystalline is grown since seed crystal position, and the difficult point of this technology is to ensure that In the fusing silicon material stage, seed crystal is not melted completely, also controls the distribution of temperature gradient, this is to improve crystal growth speed The key of degree and crystal quality is needed to reach 1450 in furnace and be taken the photograph to meet technique requirement of the quasi- monocrystalline for temperature gradient Air door, the process that Lai Jinhang gradually cools down are opened in the case where family name's degree, traditional design is by furnace body steel cage lifting implementation furnace body Heat dissipation, this radiating mode are unable to satisfy requirement of the quasi- monocrystalline for temperature gradient, are unfavorable for crystal growth, influence monocrystalline quality.

Utility model content

In order to make up for the defects of the prior art, the utility model provides a kind of quasi- monocrystalline ingot furnace lower furnace body heat dissipation machines Structure.

The utility model is achieved by the following technical solution:

A kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism, including lower furnace bottom shell, support base, track base and air door machine Structure, intermediate position is equipped with support sleeve in the lower furnace bottom shell, is equipped with multiple track bases by linking arm at the top of support sleeve, Track base is equipped with guide rail, and guide rail is equipped with sliding machine, and the air door mechanism includes bottom plate and hot topic, and bottom plate is located at aqueous cold plate On, hot topic includes the first air door and the second air door, and each sliding machine passes through connecting rod and corresponding first air door and second respectively Air door is driven.

Further, middle part position is located on the bottom plate to set there are two the second air door, the two of middle part position is located on bottom plate Second air door two sides are symmetrically arranged with the first air door, and the side that each air door bottom is located at bottom plate is equipped with drawing sliding block, draw sliding block and bottom Be located at bottom plate between plate and be equipped with sliding rail, sliding block is drawn to be slided on sliding rail on bottom plate, connecting rod through each drawings sliding block and Corresponding air door junction, which is equipped with, draws sliding block fixed plate, and bottom plate quadrangle is circular-shaped notch angle.

Further, it is equipped with transmission shaft in the support sleeve, transmission shaft is located at one end of each guide rail equipped with turntable, on turntable Sliding machine on corresponding each guide rail is equipped with pull rod, connect drive with driving equipment by the drive shaft of lower furnace bottom outer casing bottom and passes Moving axis is rotated, and is made transmission shaft that turntable be driven to be driven sliding machine by pull rod and is moved on guide rail, to make each cunning Connecting rod on dynamic trolley drives corresponding air door to be driven.

Further, four track bases are respectively equipped with by linking arm at the top of the support sleeve, four track bases are at cross Type distribution, the exterior contour of turntable be it is cross, each end that turntable is located at cross passes through pull rod respectively and connect with sliding machine.

Further, the sliding machine bottom is equipped with two rows of pulleys, and the guide rail on track base is located between two rows of pulleys, leads to It crosses each pulley and sliding machine sliding is realized in guide rail cooperation, the gap between pulley and guide rail is 0.5-1mm.

Further, the pulley and guide rail are tungsten alloy Steel material, and track base is used by the heat treatment of nitriding twice High temperature resistant stainless steel.

Further, the pull rod is connect by universal shaft with sliding machine and turntable.

Further, the aqueous cold plate quadrangle passes through support base respectively and is assemblied in lower furnace bottom shell, each support base and water cooling Disk junction is respectively equipped with assembling stand, and assembling stand is fixedly connected by attachment base with aqueous cold plate, is distributed in aqueous cold plate at zigzag shape There are two cooling lines, two cooling lines are connected separately with water inlet pipe and outlet pipe, respectively correspond on lower furnace bottom shell each cold But the water inlet pipe of pipeline and outlet pipe are equipped with cooling tube crossing, and the water inlet pipe of each cooling line passes through the external cooling in cooling tube crossing Water circulation system.

The beneficial effects of the utility model are: structure is simple, easy to use, track base carries out two using high temperature resistant stainless steel Secondary nitriding heat treatment process guarantees the requirement that can reach design under the high temperature conditions, then tungsten alloy steel guide rail is cooperated to make to slide Trolley can be slided smoothly by design requirement, and the gap design between pulley and guide rail, meet guide rail and pulley expansion is Several requirements avoids that stuck phenomenon occurs, and guarantees heat dissipation effect, and the controllable water cooling heat exchange in bottom, melting stage bottom auxiliary Heating, crystal growing stage radiate downward vertically, and effective protection bottom seed crystal brings safely guarantee to stove.

Detailed description of the invention

The utility model will be further described below with reference to the accompanying drawings.

Attached drawing 1 is the structural schematic diagram of the utility model track base；

Attached drawing 2 is the top view of the utility model；

Attached drawing 3 is the attachment structure schematic diagram of the utility model guide rail and sliding machine；

Attached drawing 4 is the structural schematic diagram of the utility model；

Attached drawing 5 is the utility model bottom plate and the attachment structure schematic diagram for drawing sliding block.

In figure, 1 lower furnace bottom shell, 2 guide rails, 3 pull rods, 4 sliding machines, 5 transmission shafts, 6 connecting rods, 7 pulleys, 8 turntables, 9 Track base, 10 universal shafts, 11 drive shafts, 12 support sleeves, 13 linking arms, 14 aqueous cold plates, 15 draw sliding block fixed plate, and 16 draw cunning Block, 17 sliding rails, 18 bottom plates, 19 chamferings, 20 attachment bases, 21 assembling stands, 22 water inlet pipes, 23 outlet pipes, 24 first air doors, 25 second Air door, 26 support bases.

Specific embodiment

Attached drawing 1-5 is a kind of specific embodiment of the utility model.A kind of quasi- monocrystalline ingot furnace lower furnace body of the utility model Cooling mechanism, including lower furnace bottom shell 1, support base, track base 9 and air door mechanism, intermediate position is set in the lower furnace bottom shell 1 There is support sleeve 12, passes through linking arm 13 at the top of support sleeve 12 and be equipped with multiple track bases 9, track base 9 is equipped with guide rail 2, leads Rail 2 is equipped with sliding machine 4, and the air door mechanism includes bottom plate 18 and hot topic, and bottom plate 18 is located on aqueous cold plate 14, and hot topic includes First air door 24 and the second air door 25, each sliding machine 4 pass through connecting rod 6 and corresponding first air door 24 and the second air door respectively 25 are driven.

Further, middle part position is located on the bottom plate 18 to set there are two the second air door 25, middle part is located on bottom plate 18 Two second air doors, 25 two sides of position are symmetrically arranged with the first air door 24, and the side that each air door bottom is located at bottom plate 18 is equipped with drawing sliding block 16, it draws and is located at bottom plate 18 between sliding block 16 and bottom plate 18 equipped with sliding rail 17, draw sliding rail 17 of the sliding block 16 on bottom plate 18 enterprising Row sliding, connecting rod 6 are equipped with corresponding air door junction through each drawing sliding block 16 and draw sliding block fixed plate 15, and 18 4 jiaos of bottom plate are Circular-shaped notch angle 19.

Further, transmission shaft 5 is equipped in the support sleeve 12, one end that transmission shaft 5 is located at each guide rail 2 is equipped with turntable 8, The sliding machine 4 corresponded on each guide rail 2 on turntable 8 is equipped with pull rod 3, passes through the drive shaft 11 and driving of lower 1 bottom of furnace bottom shell Equipment connection drives transmission shaft 5 to be rotated, and makes transmission shaft 5 that turntable 8 be driven to be driven sliding machine 4 on guide rail 2 by pull rod 3 It is moved, to make the connecting rod 6 on each sliding machine 4 that corresponding air door be driven to be driven.

Further, four track bases 9, four track bases 9 are respectively equipped with by linking arm 13 at the top of the support sleeve 12 At cross distribution, the exterior contour of turntable 8 be it is cross, each end that turntable 8 is located at cross passes through pull rod 3 respectively and slides Trolley 4 connects.

Further, 4 bottom of sliding machine is equipped with two rows of pulleys 7, the guide rail 2 on track base 9 be located at two rows of pulleys 7 it Between, realize that sliding machine 4 slides by each pulley 7 and the cooperation of guide rail 2, the gap between pulley 7 and guide rail 2 is 0.5-1mm.

Further, the pulley 7 and guide rail 2 are tungsten alloy Steel material, and track base 9 is heat-treated using by nitriding twice High temperature resistant stainless steel.

Further, the pull rod 3 is connect by universal shaft 10 with sliding machine 4 and turntable 8.

Further, 14 4 jiaos of the aqueous cold plate passes through support base 26 respectively and is assemblied in lower furnace bottom shell 1, each support base 26 It is respectively equipped with assembling stand 21 with 14 junction of aqueous cold plate, assembling stand 21 is fixedly connected by attachment base 20 with aqueous cold plate 14, water cooling Two cooling lines are distributed at zigzag shape in disk 14, two cooling lines are connected separately with water inlet pipe 22 and outlet pipe 23, under The water inlet pipe 22 and outlet pipe 23 that each cooling line is respectively corresponded on furnace bottom shell 1 are equipped with cooling tube crossing, each cooling line Water inlet pipe 22 passes through the external cooling water recirculation system in cooling tube crossing.

A kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism of the utility model, track base 9 is stainless using high temperature resistant when use Steel carries out secondary nitriding heat treatment process, guarantees the requirement that can reach design under the high temperature conditions, then tungsten alloy steel is cooperated to lead Rail 2 enables sliding machine 4 smoothly to slide by design requirement, and in transmission process, transmission shaft 5 drives turntable 8 to rotate, universal shaft It holds and becomes to move along a straight line by the axial movement of transmission shaft 5, allow four sliding machines 4 on four guide rails 2 towards four direction It moves forward and backward simultaneously, to drive corresponding four door openings and closure, the aqueous cold plate 14 in lower furnace bottom shell 1 is used Oxygen-free copper and the internal water route design at zigzag shape Two In and Two Out, it is ensured that water flow sufficiently takes away internal heat in furnace, ensure that The ventilation and heat cooling effect of lower 1 bottom of furnace bottom shell, improves the safety in utilization of stove.

The utility model is not limited to above embodiment, anyone, which should learn, makes under the enlightenment of the utility model There is same or similar technical solution with the utility model, each fall within the protection scope of the utility model.

Technology that the utility model is not described in detail, shape, construction portion are well-known technique.

Claims

1. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism, including lower furnace bottom shell, support base, track base and air door mechanism, It is characterized in that, intermediate position is equipped with support sleeve in the lower furnace bottom shell, it is equipped at the top of support sleeve by linking arm more A track base, track base are equipped with guide rail, and guide rail is equipped with sliding machine, and the air door mechanism includes bottom plate and hot topic, bottom plate On aqueous cold plate, hot topic includes the first air door and the second air door, and each sliding machine passes through connecting rod and corresponding first respectively Air door and the second air door are driven.

2. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 1, it is characterised in that: on the bottom plate Two the second air doors are equipped with positioned at intermediate position, the two second air door two sides that middle part position is located on bottom plate are symmetrically arranged with the first wind Door, the side that each air door bottom is located at bottom plate are equipped with drawing sliding block, draw and are located at bottom plate between sliding block and bottom plate equipped with sliding rail, draw Sliding block is slided on the sliding rail on bottom plate, and connecting rod, which is equipped with through each drawing sliding block with corresponding air door junction, draws sliding block solid Fixed board, bottom plate quadrangle are circular-shaped notch angle.

3. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 1, it is characterised in that: the support shaft Transmission shaft is equipped in set, one end that transmission shaft is located at each guide rail is equipped with turntable, and the sliding machine corresponded on each guide rail on turntable is set There is pull rod, is connect by the drive shaft of lower furnace bottom outer casing bottom with driving equipment and transmission shaft is driven to be rotated, make transmission shaft band Turn disk is driven sliding machine by pull rod and is moved on guide rail, corresponds to so that the connecting rod on each sliding machine be made to drive Air door be driven.

4. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 1, it is characterised in that: the support shaft Set top is respectively equipped with four track bases by linking arm, and four track bases are ten at cross distribution, the exterior contour of turntable Font, each end that turntable is located at cross pass through pull rod respectively and connect with sliding machine.

5. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 1, it is characterised in that: the sliding is small Vehicle bottom is equipped with two rows of pulleys, and the guide rail on track base is located between two rows of pulleys, realizes and slides by each pulley and guide rail cooperation Dynamic trolley sliding, the gap between pulley and guide rail are 0.5-1mm.

6. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 5, it is characterised in that: the pulley with Guide rail is tungsten alloy Steel material, and track base uses the high temperature resistant stainless steel by the heat treatment of nitriding twice.

7. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 3, it is characterised in that: the pull rod with Sliding machine is connected by universal shaft with turntable.

8. a kind of quasi- monocrystalline ingot furnace lower furnace body cooling mechanism according to claim 1, it is characterised in that: the aqueous cold plate Quadrangle passes through support base respectively and is assemblied in lower furnace bottom shell, and each support base and aqueous cold plate junction are respectively equipped with assembling stand, fills It is fixedly connected by attachment base with aqueous cold plate with seat, two cooling lines, two cooling tubes is distributed at zigzag shape in aqueous cold plate Road is connected separately with water inlet pipe and outlet pipe, respectively corresponds the water inlet pipe of each cooling line on lower furnace bottom shell and outlet pipe is equipped with The water inlet pipe at cooling tube crossing, each cooling line passes through the external cooling water recirculation system in cooling tube crossing.