CN207376139U - Orient the energy-saving and high efficient polycrystalline silicon ingot or purifying furnace of water-cooling - Google Patents
Orient the energy-saving and high efficient polycrystalline silicon ingot or purifying furnace of water-cooling Download PDFInfo
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- CN207376139U CN207376139U CN201721261756.7U CN201721261756U CN207376139U CN 207376139 U CN207376139 U CN 207376139U CN 201721261756 U CN201721261756 U CN 201721261756U CN 207376139 U CN207376139 U CN 207376139U
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Abstract
The utility model is related to production of polysilicon technologies, it is desirable to provide a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling.This kind orients the energy-saving and high efficient polycrystalline silicon ingot or purifying furnace of water-cooling, including furnace body, heat-insulation cage, graphite protective plate, oriented heat dissipating block, bottom thermal insulation board, heat-insulated blinds, water-cooled copper plate, water-cooled copper, graphite support column, heat-insulated sliding door, silica crucible, top heater, side heater.The bottom water cooling of the utility model has orientation effect, simply carries out rotating jet flow to DS blocks, the work without influencing heater, therefore Cooling and Heat Source is entirely isolated without interaction, avoids the phenomenon that heater power rises during the promotion of stove heat-insulation cage；Bottom thermal insulation board and the cooperation of heat-insulated blinds realize the adjustable of continuous cold, meet the radiating requirements of crystal growing stage；And heating and melting stage, bottom thermal insulation sliding door completely close, and play certain heat insulation, further reduce scattering and disappearing for stove heat, realize stove energy-saving effect.
Description
Technical field
The utility model is on technical field of polysilicon production, more particularly to a kind of energy-saving height for orienting water-cooling
Imitate polycrystalline silicon ingot or purifying furnace.
Background technology
Polycrystalline ingot furnace is the professional equipment for being used to prepare solar-grade polysilicon ingot, with being surging forward for photovoltaic industry
And it is rapidly developed.The production process of the polycrystalline cast ingot process that actually melting silicon materials recrystallize is, it is necessary to by charging, take out very
Empty, heating, fusing, the long brilliant, processes such as anneal, cool down, coming out of the stove.
In recent years, domestic and international enterprise has carried out positive exploration to improve the transfer efficiency of polycrystalline silicon ingot casting cell piece
And experiment, seed-grain method high-efficiency polycrystalline are methods more ripe and feasible at present.When being fed using this method, need first in crucible bottom
One layer of broken silicon wafers or silicon particle are spread as seed crystal, then continues to load polycrystalline silicon material above；During fusing, ensure silicon material on to
Under melt layer by layer, it is to be melted to the seed crystal for being covered with broken silicon wafers when redirect into next step, can realize that melt is formed based on seed crystal
Homogeneous nucleation；And during long crystalline substance, on the basis of seed crystal, crystal grain that is tiny and being evenly distributed is formed on melt bottom, and then raw upwards
The long silicon ingot for forming low defect high-quality；By the verification of numerous enterprises in industry, the high-efficiency polycrystalline produced using seed-grain method, together
More common ingot casting polycrystalline battery efficiency improves more than 0.2% under the conditions of sample, through being widely popularized in each producer at home.
Seed-grain method high-efficiency polycrystalline technique can realize the key takeaway of efficient ingot casting it is main there are two, during a melting process
Need to ensure seed crystal effectively and it is uniform retain, the uniformity and up rightness of second grain growth when being exactly long crystalline substance process.Tool
For body, seed-grain method high-efficiency polycrystalline technique core is exactly the reservation of seed crystal, but since there is non-remelting crystallization silicon heavy stone used as an anchor bottom
Seed crystal silicon material, therefore the more common casting ingot method of effective rate of utilization low 8% or so, on the premise of ensuring that seed crystal is all effectively retained
Seed crystal height is lower, and the more smooth then silicon ingot remelting crystallization of fusing interface is more, and it is also just more to efficiently use part.Secondly, seed crystal
100% be effectively retained the basis for having established efficient ingot casting, the homogeneous nucleation of seed crystal how is made full use of under corresponding long brilliant process
Advantage, ensure the crystal grain after nucleation uniformly and vertical-growth then influence the final effect of high-efficiency polycrystalline.
Current polycrystalline silicon ingot or purifying furnace, the mode that generally use heat-insulation cage is promoted carry out the reservation of seed crystal and long brilliant control,
This is a kind of non-homogeneous, weak domination radiating mode.When seed crystal retains, after opening cage heat dissipation, DS block surrounding rapid heat dissipations, temperature meeting
It is colder, the temperature gradient of horizontal direction is formed, the thermal uniformity of DS blocks is difficult to ensure that seed crystal retention is poor.In addition, open cage
Mode, which radiates, can take away more heat transfer, influence heater work, form a pair of cold and hot contradiction, show as on heater power continues
Rise final increase power consumption.And under crystal growth phase, heat-insulation cage hoisting way, graphite crucible surrounding is straight as DS blocks
It connects and is irradiated on lower furnace chamber furnace wall, heat forms degree of supercooling after being pulled away, silicon liquid heterogeneous nucleation directly on silica crucible wall is raw
The crystal grain of the oblique growth of output counteracts the effect of seed crystal homogeneous nucleation, reduces the efficient quality of silicon heavy stone used as an anchor, shows as surrounding silicon
The oblique growth of crystal grain of block and relatively low battery conversion efficiency.
Utility model content
The main purpose of the utility model is that overcome deficiency of the prior art, providing a kind of can overcome heat-insulation cage to be promoted
The polycrystalline silicon ingot or purifying furnace of the insufficient orientation water-cooling of radiating mode.In order to solve the above technical problems, the solution of the utility model
Scheme is：
A kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling is provided, including furnace body, further includes heat-insulation cage, stone
Black backplate, oriented heat dissipating block, bottom thermal insulation board, heat-insulated blinds, water-cooled copper plate, water-cooled copper, graphite support column, heat-insulated sliding door, stone
English crucible, top heater, side heater；
The silica crucible is arranged in furnace body, and graphite protective plate is equipped with around silica crucible；The oriented heat dissipating
Block is installed on by (multiple) graphite support column in furnace body, is enclosed the silica crucible equipped with graphite protective plate and is mounted on by graphite protective plate
The upper surface of oriented heat dissipating block；
(heat-insulation cage forms the cage that top and side are closed to the heat-insulation cage by the curing carbon felt of stainless steel insert and heat preservation
Body) it is lifted in furnace body, it encloses the silica crucible equipped with graphite protective plate and is arranged in heat-insulation cage；The top heater, side add
Hot device is mounted in the space between heat-insulation cage and graphite protective plate, and top heater, side heater are separately positioned on quartz
Crucible the upper surface of and side；
The in vivo bottom of stove is fixed with water-cooled copper plate, and water-cooled copper plate is inlaid with water-cooled copper, and water-cooled copper passes through
Bottom of furnace body, which leads to, to be set to outside furnace body；The heat-insulated sliding door include symmetrical two parts sliding door, sliding door be do not slot it is solid
Structure, heat-insulated sliding door is arranged on the top of water-cooled copper plate, and left and right two parts sliding door is connected to motor, passes through the electricity of left and right
Machine is driven, and can realize automatic folding (being moved left and right by the guide rail on water-cooled copper plate)；The heat-insulated blinds bag
Symmetrical two parts blinds is included, blinds is the notching construction for being provided with slot, and heat-insulated blinds is arranged on the top of heat-insulated sliding door,
And left and right two parts blinds is connected to motor, is driven by the motor of left and right, can realize to move left and right and (pass through water cooling
Guide rail on copper coin is moved left and right)；The bottom thermal insulation board is arranged on the top of heat-insulated blinds, and bottom thermal insulation board is oriented with support
The graphite support column of radiating block is fixed, and is installed on the bottom of heat insulation stove and heat-insulation cage is fitted close, and bottom thermal insulation board separates for portion
Slot structure, can and heat-insulated blinds cooperating, by the movement of heat-insulated blinds, realize closing and the opening of slot.
As a further improvement, the water-cooled copper plate and water-cooled copper are fixed by brazing mode.
As a further improvement, heat-insulated sliding door uses the heat-insulated sliding door of carbon felt material.
As a further improvement, the heat-insulated blinds uses the heat-insulated blinds of carbon felt material.
As a further improvement, the bottom thermal insulation board uses the bottom thermal insulation board of carbon felt material.
As a further improvement, the water-cooled copper plate uses the copper coin of red copper material.
Compared with prior art, the beneficial effects of the utility model are：
The utility model uses the radiating mode of water-cooled copper plate, according to specific heat capacity formula c=Δ Q/m Δ T, wherein c be than
Thermal capacitance, Δ Q are heat, and m is quality, and Δ T is the temperature difference, the heat Δ Q that when identical silicon material crystallization discharges is certain, and quality m is certain
In the case of, specific heat capacity c is bigger, and temperature difference T is smaller, and since the specific heat of water is big, water temperature disengaging variation is small after heat absorption, and selected by copper coin
Red copper material, have the characteristics that heat conduction radiate soon it is uniform, therefore when working entire oriented heat dissipating block intensity of cooling it is big and
Uniformly.When partly melting high efficient technology, melt the stage, the interface that seed crystal melts can be more horizontal, reaches preferable seed crystal and retains effect
Fruit.Likewise, crystal growing stage, intensity of cooling is big and can uniformly ensure the vertical of crystal growth, avoids the heterogeneous of crucible wall
Nucleation, ensure that the effect of high-efficiency polycrystalline.
In addition, compared to the radiating mode that heat-insulation cage is promoted, the bottom water cooling of the utility model has orientation effect,
Rotating jet flow simply is carried out to DS blocks, the work without influencing heater, therefore Cooling and Heat Source be entirely isolated and without interaction,
Avoid the phenomenon that heater power rises during the promotion of stove heat-insulation cage.Bottom thermal insulation board and the cooperation of heat-insulated blinds realize continuous cold
It is adjustable, meet the radiating requirements of crystal growing stage.And heating and melting stage, bottom thermal insulation sliding door completely close, play centainly every
Thermal effect further reduces scattering and disappearing for stove heat, realizes stove energy-saving effect.
Description of the drawings
Fig. 1 is the structure diagram of the utility model.
Reference numeral in figure is：1 furnace body；2 heat-insulation cages；3 graphite protective plates；4 oriented heat dissipating blocks；5 bottom thermal insulation boards；6 is heat-insulated
Blinds；7 water-cooled copper plates；8 water-cooled coppers；9 graphite support columns；10 heat-insulated sliding doors；11 silica crucibles；12 side heaters；13 tops
Portion's heater.
Specific embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings：
The energy-saving and high efficient polycrystalline silicon ingot or purifying furnace of a kind of orientation water-cooling as shown in Figure 1, including furnace body 1, heat-insulation cage
2nd, graphite protective plate 3, oriented heat dissipating block 4, bottom thermal insulation board 5, heat-insulated blinds 6, water-cooled copper plate 7, water-cooled copper 8, graphite support column 9,
Heat-insulated sliding door 10, silica crucible 11, top heater 13, side heater 12.
The silica crucible 11 is arranged in furnace body 1, and graphite protective plate 3 is equipped with around silica crucible 11；It is described fixed
It is installed on to radiating block 4 by multiple graphite support columns 9 in furnace body 1, encloses the silica crucible 11 equipped with graphite protective plate 3 and pass through graphite
Backplate 3 is mounted on the upper surface of oriented heat dissipating block 4.
The heat-insulation cage 2 is made of the cage body of top and side closing the curing carbon felt of stainless steel insert and heat preservation,
It is lifted in furnace body 1, encloses the silica crucible 11 equipped with graphite protective plate 3 and be arranged in heat-insulation cage 2；The top heater 13, side
Portion's heater 12 is mounted in the space between heat-insulation cage 2 and graphite protective plate 3, and top heater 13, side heater 12 divide
Silica crucible 11 the upper surface of and side are not arranged on.
Bottom in the furnace body 1 is fixed with water-cooled copper plate 7, and water-cooled copper plate 7 is inlaid with water-cooled copper 8, and water-cooled copper 8
The other end led to by 1 bottom of furnace body and be set to outside furnace body 1.Water-cooled copper plate 7 uses red copper material, and red copper has heat conduction, and heat dissipation is equal soon
The characteristics of even.
The heat-insulated sliding door 10 includes symmetrical two parts sliding door, and sliding door is the solid construction do not slotted；Heat-insulated shifting
Door 10 is arranged on the top of water-cooled copper plate 7, is moved left and right by the guide rail on water-cooled copper plate 7, and left and right two parts sliding door
Motor is connected to, is driven by the motor of left and right, can realize automatic folding.Heat-insulated sliding door 10 uses carbon felt material
Material.
The heat-insulated blinds 6 includes symmetrical two parts blinds, and blinds has the fluting knot similar with bottom thermal insulation board 5
Structure；Heat-insulated blinds 6 is arranged on the top of heat-insulated sliding door 10, is moved left and right by the guide rail on water-cooled copper plate 7, and left and right two
Part blinds is connected to motor, is driven by the motor of left and right, can realize high-precision move left and right.Heat-insulated blinds
6 use carbon felt material.
The bottom thermal insulation board 5 is arranged on the top of heat-insulated blinds 6, the graphite branch of bottom thermal insulation board 5 and support oriented heat dissipating block 4
Dagger 9 is fixed, and is installed on the bottom of heat insulation stove and heat-insulation cage 2 is fitted close, and bottom thermal insulation board 5 is part notching construction, can and
Heat-insulated 6 cooperating of blinds by the movement of heat-insulated blinds 6, realizes closing and the opening of slot.Bottom thermal insulation board 5 uses carbon felt
Material.
Melt the stage in polycrystalline cast ingot, heat-insulated blinds 6 and heat-insulated sliding door 10 are completely in closed state, it is ensured that with bottom water
Cold copper coin 7 is isolated, and utmostly reduce water-cooled copper plate 7 increases power consumption due to heat absorption.It is heat-insulated when technique enters crystal growing stage
Sliding door 10 is first turned on, and at this time since the heat-insulated blinds 6 in upper strata is also not switched on, the temperature decline of oriented heat dissipating block 4 is less.Lower floor every
While hot sliding door 10 is opened, the heat-insulated blinds 6 in upper strata is also slowly opened, and makes what is radiated between water-cooled copper plate 7 and oriented heat dissipating block 4
Space gradually increases, and specific aperture can be adjusted according to technique, so as to uniformly cool down oriented heat dissipating block 4, is formed from bottom to top
Vertical temperature gradient, meet the brilliant temperature gradient requirement of polycrystalline length, ensure the vertical of crystal growth, avoid the different of crucible wall
Matter is nucleated, and ensure that the effect of high-efficiency polycrystalline.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.Those of ordinary skill in the art can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.
Claims (6)
1. a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling, including furnace body, which is characterized in that further include heat-insulated
Cage, graphite protective plate, oriented heat dissipating block, bottom thermal insulation board, heat-insulated blinds, water-cooled copper plate, water-cooled copper, graphite support column, heat-insulated shifting
Door, silica crucible, top heater, side heater；
The silica crucible is arranged in furnace body, and graphite protective plate is equipped with around silica crucible；The oriented heat dissipating block leads to
It crosses graphite support column to be installed in furnace body, encloses the silica crucible equipped with graphite protective plate and oriented heat dissipating block is mounted on by graphite protective plate
Upper surface；
The heat-insulation cage is lifted in furnace body, is enclosed the silica crucible equipped with graphite protective plate and is arranged in heat-insulation cage；The top adds
Hot device, side heater are mounted in the space between heat-insulation cage and graphite protective plate, and top heater, side heater are distinguished
It is arranged on silica crucible the upper surface of and side；
The in vivo bottom of stove is fixed with water-cooled copper plate, and water-cooled copper plate is inlaid with water-cooled copper, and water-cooled copper passes through furnace body
Bottom, which leads to, to be set to outside furnace body；The heat-insulated sliding door includes symmetrical two parts sliding door, and sliding door is the solid construction do not slotted,
Heat-insulated sliding door is arranged on the top of water-cooled copper plate, and left and right two parts sliding door is connected to motor, by left and right motor into
Row driving, can realize automatic folding；The heat-insulated blinds includes symmetrical two parts blinds, and blinds is provided with slot
Notching construction, heat-insulated blinds is arranged on the top of heat-insulated sliding door, and left and right two parts blinds is connected to motor, passes through left and right
Motor be driven, can realize and move left and right；The bottom thermal insulation board is arranged on the top of heat-insulated blinds, bottom thermal insulation board and support
The graphite support column of oriented heat dissipating block is fixed, and is installed on the bottom of heat insulation stove and heat-insulation cage tight fit, and bottom thermal insulation board is portion
Separate slot structure, can and heat-insulated blinds cooperating, by the movement of heat-insulated blinds, realize closing and the opening of slot.
2. a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling according to claim 1, which is characterized in that
The water-cooled copper plate and water-cooled copper are fixed by brazing mode.
3. a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling according to claim 1, which is characterized in that
Heat-insulated sliding door uses the heat-insulated sliding door of carbon felt material.
4. a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling according to claim 1, which is characterized in that
The heat-insulated blinds uses the heat-insulated blinds of carbon felt material.
5. a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling according to claim 1, which is characterized in that
The bottom thermal insulation board uses the bottom thermal insulation board of carbon felt material.
6. a kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling according to claim 1, which is characterized in that
The water-cooled copper plate uses the copper coin of red copper material.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721261756.7U CN207376139U (en) | 2017-09-28 | 2017-09-28 | Orient the energy-saving and high efficient polycrystalline silicon ingot or purifying furnace of water-cooling |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721261756.7U CN207376139U (en) | 2017-09-28 | 2017-09-28 | Orient the energy-saving and high efficient polycrystalline silicon ingot or purifying furnace of water-cooling |
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| CN207376139U true CN207376139U (en) | 2018-05-18 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523865A (en) * | 2017-09-28 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling |
| CN108842181A (en) * | 2018-09-26 | 2018-11-20 | 深圳市石金科技股份有限公司 | A kind of energy conservation polycrystalline ingot furnace |
-
2017
- 2017-09-28 CN CN201721261756.7U patent/CN207376139U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523865A (en) * | 2017-09-28 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of energy-saving and high efficient polycrystalline silicon ingot or purifying furnace for orienting water-cooling |
| CN108842181A (en) * | 2018-09-26 | 2018-11-20 | 深圳市石金科技股份有限公司 | A kind of energy conservation polycrystalline ingot furnace |
| CN108842181B (en) * | 2018-09-26 | 2024-03-26 | 深圳市石金科技股份有限公司 | Energy-saving polycrystalline ingot furnace |
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