CN208440726U - A kind of crucible of single crystal furnace bar of multi-point support - Google Patents
A kind of crucible of single crystal furnace bar of multi-point support Download PDFInfo
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- CN208440726U CN208440726U CN201820831966.3U CN201820831966U CN208440726U CN 208440726 U CN208440726 U CN 208440726U CN 201820831966 U CN201820831966 U CN 201820831966U CN 208440726 U CN208440726 U CN 208440726U
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Abstract
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of crucible of single crystal furnace bar of multi-point support.For in existing crucible rod structure, the cooling effect of cooling water is unable to satisfy the abundant heat dissipation of crucible pole disc like top portion, so that easily there is localized hyperthermia in crucible pole top, so that the problem of crucible pole service life declines, the technical solution of the utility model is: including crucible pole, upgoing flow passages and downgoing flow passage are provided in crucible pole, upgoing flow passages are connected at the top of crucible pole with downgoing flow passage, a central support foot and multiple symmetrically arranged lateral bolster support foots are provided at the top of the crucible pole, central support foot is internally provided with cooling tributary waterway I, the both ends of the cooling tributary waterway I are connected to upgoing flow passages and downgoing flow passage respectively, the lateral bolster support foot is internally provided with cooling tributary waterway II, the both ends of cooling tributary waterway II are connected to upgoing flow passages and downgoing flow passage respectively.The utility model is suitable for single crystal growing furnace.
Description
Technical field
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of crucible of single crystal furnace bar of multi-point support.
Background technique
Single crystal growing furnace is one kind in inert gas (based on nitrogen, helium) environment, with graphite heater that polysilicon etc. is more
Brilliant material fusing, with the equipment of Grown by CZ Method dislocation-free monocrystalline.It is contained in a crucible after polycrystalline material fusing, crucible bottom
Portion is provided with crucible pole for rotating or driving crucible lifting.Due to being the heating for being heated to crucible around crucible pole
Device, therefore in single crystal growing furnace work, the temperature of crucible pole is very high, if high temperature will affect making for crucible pole without cooling
Use the service life.
Plate-like (as shown in Figure 1), the top of plate-like are usually arranged as in order to stronger in conjunction with crucible, at the top of crucible pole
Portion is bonded completely with crucible pallet.The crucible of high temperature can be transmitted by the top of crucible pallet and crucible pole plate-like to crucible pole big
The heat of amount.Existing crucible pole cooling technology is usually that a water pipe is arranged in the hollow cavity of crucible pole, will be cold by water pipe
But water is sent to the top of the hollow cavity of crucible pole, then flows down interlayer of the cooling water between water pipe and crucible pole.
Under this structure setting, the cooling effect of cooling water is unable to satisfy the abundant heat dissipation of crucible pole disc like top portion, makes
It obtains crucible pole top and localized hyperthermia easily occurs, so that crucible pole service life declines.
Utility model content
For in existing crucible rod structure, the cooling effect of cooling water is unable to satisfy the abundant of crucible pole disc like top portion and dissipates
Heat, so that localized hyperthermia easily occurs in crucible pole top, so that the problem of crucible pole service life declines, the utility model is mentioned
For a kind of crucible of single crystal furnace bar of multi-point support, its object is to: pass through the junction changed at the top of crucible pole with crucible pallet
Structure, reduce heat output of the crucible to crucible pole, reduce the cooling difficulty at the top of crucible pole, so that crucible pole
Cooling effect is more preferable, extends the service life of equipment.
The technical solution adopted in the utility model is as follows:
A kind of crucible of single crystal furnace bar of multi-point support, including crucible pole are provided with upgoing flow passages and downstream in crucible pole
Road, upgoing flow passages and downgoing flow passage are connected at the top of crucible pole, and central support foot and more is provided at the top of the crucible pole
A symmetrically arranged lateral bolster support foot, central support foot are internally provided with cooling tributary waterway I, the both ends of the cooling tributary waterway I
It is connected to respectively with upgoing flow passages and downgoing flow passage, the lateral bolster support foot is internally provided with cooling tributary waterway II, cooling tributary waterway
II both ends are connected to upgoing flow passages and downgoing flow passage respectively.
After the technical solution, using central support foot and lateral bolster support foot to crucible pallet shape at multi-point support, one
This structure of aspect can achieve the effect that well stable support crucible；On the other hand due to the top compared to traditional plate-like
The contact area of portion's this programme is small, thus the heat that crucible is transmitted to crucible pole is also less, reduces the cooling at the top of crucible pole
Difficulty avoids at the top of crucible pole so that the cooling effect of crucible pole is more preferable and localized hyperthermia occurs, to extend equipment
Service life.
Preferably, the angle with 45-75 degree of the axis of the setting direction and crucible pole of lateral bolster support foot, lateral support
The setting direction of foot is directed away from the direction of the axis of crucible pole.In the preferred embodiment, branch of the lateral bolster support foot to crucible pallet
Support is more stable, improves the bond strength of crucible pole Yu crucible pallet.
Preferably, it is provided with discoid strengthening section at the top of crucible pole, the central support foot and lateral bolster support foot are all provided with
It sets on strengthening section.Due to lateral bolster support foot have it is multiple, if support leg is directly connect with the top of columned crucible pole, meeting
Cause since the section of interconnecting piece is too small in conjunction with insecure.After strengthening section is set, lateral bolster support foot and crucible can be effectively improved
Bonded area at the top of bar enhances bond strength, so that further such that the bond strength of crucible pole and crucible pallet is higher.This
Outside, strengthening section is coarseer relative to crucible pole main body, can weaken the cooling water flow conduits that setting is hollow inside crucible pole and cause
Crucible pole intensity decline the problem of.
It is further preferred that the edge of strengthening section upper surface is arranged in lateral bolster support foot.
It is further preferred that being provided with haunched slab between lateral support underfooting portion and strengthening section lateral surface.
The bond strength of lateral bolster support foot and strengthening section can be further enhanced using above-mentioned preferred embodiment, so that side
Face support leg is stronger to be not easily broken.
It is further preferred that being provided with intake antrum and water chamber in strengthening section, the intake antrum bottom and upgoing flow passages connect
Logical, the intake antrum top is connected to one end of cooling tributary waterway I and cooling tributary waterway II respectively, and the water chamber bottom is under
The connection of row runner, the water chamber top are connected to the other end of cooling tributary waterway I and cooling tributary waterway II respectively.This preferred side
Intake antrum and water chamber is arranged in case, make all cooling tributary waterway I and cool down tributary waterway II respectively with above-mentioned two chamber,
So that the runner design in strengthening section is more orderly, the difficulty of processing of device is reduced.
Preferably, the shape of cooling tributary waterway I and cooling tributary waterway II is U-shaped.I He of cooling tributary waterway of the preferred structure
Cooling tributary waterway II has better cooling effect.
Preferably, upgoing flow passages are linear type, and the downgoing flow passage is helical form, and downgoing flow passage is set around upgoing flow passages
It sets.Downgoing flow passage is spiral decline, can slow down water velocity, enables cooling water that heat sufficiently occurs with heating position and hands over
It changes, reaches better cooling effect.And middle downgoing flow passage is the setting of an interlayer, the preferred embodiment compared with the existing technology
In, water flow is more uniform, and the possibility that regional area can not be contacted with cooling water occurs in the side for avoiding crucible pole, thus into one
Step avoids the damage of crucible pole caused by localized hyperthermia.
In conclusion by adopting the above-described technical solution, the beneficial effects of the utility model are:
1. since the contact area of top this programme compared to traditional plate-like is small, thus crucible is transmitted to crucible pole
Heat is also less, reduces the cooling difficulty at the top of crucible pole and avoids crucible so that the cooling effect of crucible pole is more preferable
There is localized hyperthermia at the top of bar, to extend the service life of equipment.
2. keep lateral bolster support foot more stable to the support of crucible pallet by the setting direction of optimization lateral bolster support foot,
Improve the bond strength of crucible pole Yu crucible pallet.
3. after strengthening section is arranged, can effectively improve the bonded area at the top of lateral bolster support foot and crucible pole, enhancing is combined
Intensity, so that further such that the bond strength of crucible pole and crucible pallet is higher.In addition, strengthening section is relative to crucible pole main body
It is coarseer, it can weaken and the problem of crucible pole intensity caused by hollow cooling water flow conduits declines is set inside crucible pole.
4. the bond strength that haunched slab further enhances lateral bolster support foot and strengthening section is arranged, so that lateral bolster support foot
It is stronger to be not easily broken.
Make cooling tributary waterway I and cooling tributary waterway II that there is better cooling effect 5. being set as U-shaped.
6. downgoing flow passage is spiral decline, water velocity can be slowed down, cooling water is sufficiently sent out with heating position
Heat exchange, reaches better cooling effect.And middle downgoing flow passage is the setting of an interlayer compared with the existing technology, this is preferably
In scheme, water flow is more uniform, and the possibility that regional area can not be contacted with cooling water occurs in the side for avoiding crucible pole, thus
Further avoid the damage of crucible pole caused by localized hyperthermia.
Detailed description of the invention
The utility model will illustrate by example and with reference to the appended drawing, in which:
Fig. 1 is the structural schematic diagram at the top of crucible pole in the prior art；
Fig. 2 is the cross-sectional view of the utility model；
Fig. 3 is the bottom view of the utility model.
Wherein, 1- crucible pallet, 2- crucible pole, 3- cooling water pipe, 4- central support foot, the cooling tributary waterway I of 5-, the side 6-
Support leg, the cooling tributary waterway II of 7-, 8- haunched slab, 9- water chamber, 10- intake antrum, 11- strengthening section, 12- downgoing flow passage, on 13-
Row runner.
Specific embodiment
All features disclosed in this specification or disclosed all methods or in the process the step of, in addition to mutually exclusive
Feature and/or step other than, can combine in any way.
It elaborates below with reference to Fig. 2, Fig. 3 to the utility model.
Embodiment 1
A kind of crucible of single crystal furnace bar of multi-point support, including crucible pole 2, be provided in crucible pole 2 upgoing flow passages 13 and under
Row runner 12, upgoing flow passages 13 and downgoing flow passage 12 are connected at the top of crucible pole 2, are provided in one at the top of the crucible pole 2
Heart support leg 4 and multiple symmetrically arranged lateral bolster support foots 6, central support foot 4 is internally provided with cooling tributary waterway I 5, described cold
But the both ends of tributary waterway I 5 are connected to upgoing flow passages 13 and downgoing flow passage 12 respectively, and the lateral bolster support foot 6 is internally provided with cold
But the both ends of tributary waterway II 7, cooling tributary waterway II 7 are connected to upgoing flow passages 13 and downgoing flow passage 12 respectively.
Preferably, in order to make lateral bolster support foot 6 that there is better intensity, the setting direction of lateral bolster support foot 6 and crucible pole 2
Axis the angle with 45-75 degree, the setting direction of lateral bolster support foot 6 is directed away from the direction of the axis of crucible pole 2.
In the present embodiment, the contact site of crucible pole 2 and crucible pallet 1 is only limitted to central support foot 4 and lateral bolster support foot 6
Top, total contact area is small, reduces crucible and passes through the heat that transmits to crucible pole 2 of crucible pallet 1.
Embodiment 2
On the basis of embodiment 1, discoid strengthening section 11,4 He of central support foot are provided at the top of crucible pole 2
Lateral bolster support foot 6 is arranged on strengthening section 11.The edge of 11 upper surface of strengthening section is arranged in lateral bolster support foot 6.The side
Haunched slab 8 is provided between 11 lateral surface of 6 lower part of support leg and strengthening section.Intake antrum 10 and water chamber are provided in strengthening section 11
9,10 bottom of intake antrum is connected to upgoing flow passages 13, and 10 top of intake antrum is propped up with cooling tributary waterway I 5 and cooling respectively
One end of water channel II 7 is connected to, and 9 bottom of water chamber is connected to downgoing flow passage 12, and 9 top of water chamber is propped up with cooling respectively
Water channel I 5 is connected to the other end of cooling tributary waterway II 7.The shape of the cooling tributary waterway I 5 and cooling tributary waterway II 7 is U-shaped.
The upgoing flow passages 13 are linear type, and the downgoing flow passage 12 is helical form, and downgoing flow passage 12 is arranged around upgoing flow passages 13.
Runner design through this embodiment, cooling water enters intake antrum 10 by upgoing flow passages 13, on the top of intake antrum 10
Portion, cooling water stream respectively enter cooling tributary waterway I 5 and cooling tributary waterway II 7 to respectively to central support foot 4 and lateral support
Foot 6 is cooled down, and is then imported water chamber 9 and is discharged via spiral helicine downgoing flow passage 12.
The specific embodiment of the application above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
The limitation to the application protection scope therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, under the premise of not departing from technical scheme design, various modifications and improvements can be made, these belong to this
The protection scope of application.
Claims (8)
1. a kind of crucible of single crystal furnace bar of multi-point support, including crucible pole (2), upgoing flow passages (13) are provided in crucible pole (2)
With downgoing flow passage (12), upgoing flow passages (13) are connected at the top of crucible pole (2) with downgoing flow passage (12), it is characterised in that: described
A central support foot (4) and multiple symmetrically arranged lateral bolster support foots (6), central support foot are provided at the top of crucible pole (2)
(4) be internally provided with cooling tributary waterway I (5), the both ends of the cooling tributary waterway I (5) respectively with upgoing flow passages (13) and downlink
Runner (12) connection, the lateral bolster support foot (6) are internally provided with cooling tributary waterway II (7), the both ends of cooling tributary waterway II (7)
It is connected to respectively with upgoing flow passages (13) and downgoing flow passage (12).
2. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 1, it is characterised in that: the lateral bolster support foot
(6) angle with 45-75 degree of the axis of setting direction and crucible pole (2), the setting direction direction of lateral bolster support foot (6)
The direction of axis far from crucible pole (2).
3. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 1, it is characterised in that: the crucible pole (2)
Top is provided with discoid strengthening section (11), and the central support foot (4) and lateral bolster support foot (6) are arranged at strengthening section
(11) on.
4. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 3, it is characterised in that: the lateral bolster support foot
(6) it is arranged at the edge of strengthening section (11) upper surface.
5. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 3, it is characterised in that: the lateral bolster support foot
(6) haunched slab (8) are provided between lower part and strengthening section (11) lateral surface.
6. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 3, it is characterised in that: the strengthening section (11)
In be provided with intake antrum (10) and water chamber (9), intake antrum (10) bottom is connected to upgoing flow passages (13), the intake antrum
(10) top is connected to one end of cooling tributary waterway I (5) and cooling tributary waterway II (7) respectively, and water chamber (9) bottom is under
Row runner (12) connection, water chamber (9) top with cooling tributary waterway I (5) and cool down the other end of tributary waterway II (7) respectively
Connection.
7. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 1, it is characterised in that: the cooling tributary waterway
The shape of I (5) and cooling tributary waterway II (7) is U-shaped.
8. a kind of crucible of single crystal furnace bar of multi-point support described in accordance with the claim 1, it is characterised in that: the upgoing flow passages
It (13) is linear type, the downgoing flow passage (12) is helical form, and downgoing flow passage (12) is arranged around upgoing flow passages (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820831966.3U CN208440726U (en) | 2018-05-31 | 2018-05-31 | A kind of crucible of single crystal furnace bar of multi-point support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820831966.3U CN208440726U (en) | 2018-05-31 | 2018-05-31 | A kind of crucible of single crystal furnace bar of multi-point support |
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| Publication Number | Publication Date |
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| CN208440726U true CN208440726U (en) | 2019-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820831966.3U Active CN208440726U (en) | 2018-05-31 | 2018-05-31 | A kind of crucible of single crystal furnace bar of multi-point support |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108486648A (en) * | 2018-05-31 | 2018-09-04 | 峨眉山市元素新材料科技有限公司 | A kind of crucible of single crystal furnace bar of multi-point support |
-
2018
- 2018-05-31 CN CN201820831966.3U patent/CN208440726U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108486648A (en) * | 2018-05-31 | 2018-09-04 | 峨眉山市元素新材料科技有限公司 | A kind of crucible of single crystal furnace bar of multi-point support |
| CN108486648B (en) * | 2018-05-31 | 2023-07-11 | 峨眉山市元素新材料科技有限公司 | Multipoint-supported crucible rod of single crystal furnace |
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Effective date of registration: 20210611 Address after: 614902 No.5, south section of Xingye Road, Jianong Town, Shawan District, Leshan City, Sichuan Province Patentee after: Sichuan JINGDING Technology Co.,Ltd. Address before: 614100 in maker dream factory, No.5, Xingxi Road, Fuxi Town, Emeishan City, Leshan City, Sichuan Province Patentee before: MOUNT EMEI CITY ELEMENTS AND NEW MATERIALS TECHNOLOGY Co.,Ltd. |