CN209292515U - A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism - Google Patents
A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism Download PDFInfo
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- CN209292515U CN209292515U CN201821368528.4U CN201821368528U CN209292515U CN 209292515 U CN209292515 U CN 209292515U CN 201821368528 U CN201821368528 U CN 201821368528U CN 209292515 U CN209292515 U CN 209292515U
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- guide rail
- lower furnace
- air door
- sliding machine
- turntable
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Abstract
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism.The quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism, including lower furnace bottom shell, support base and track base, intermediate position is equipped with support sleeve in the lower furnace bottom shell, multiple track bases are equipped with by linking arm at the top of support sleeve, track base is equipped with guide rail, guide rail is equipped with sliding machine, transmission shaft is equipped in support sleeve, one end that transmission shaft is located at each guide rail is equipped with turntable, the sliding machine corresponded on each guide rail on turntable is equipped with pull rod, being connect by the drive shaft of lower furnace bottom outer casing bottom with driving equipment drives transmission shaft to be rotated, make transmission shaft that turntable be driven to be driven sliding machine by pull rod to be moved on guide rail, to make the connecting rod on each sliding machine that corresponding air door be driven to be driven.The beneficial effect is that: structure is simple, easy to use, avoids that stuck phenomenon occurs, brings guarantee safely to stove.
Description
Technical field
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of quasi- monocrystalline ingot furnace lower furnace body air door driver
Structure.
Background technique
Quasi- monocrystalline ingot furnace is one kind in inert gas (based on nitrogen, helium) environment, with graphite heater by polycrystalline
The fusing of the polycrystalline materials such as silicon is the equipment of the technique growth dislocation-free monocrystalline based on quasi- monocrystalline ingot furnace, quasi- monocrystalline (Mono
Like) it is the technique based on polycrystalline cast ingot, single crystal seed is used by part when long brilliant, it is similar with electrical property to obtain appearance
The polysilicon chip of monocrystalline, this technology that monocrystalline silicon is formed by way of ingot casting, power consumption is only more than common polycrystalline silicon, gives birth to
The quality of the monocrystalline silicon of production is close to pulling of silicon single crystal, and briefly, this technology is exactly the cost with polysilicon, produces monocrystalline silicon
Technology, the quasi- monocrystalline technology of volume production is largely to have seed crystal ingot casting instantly, and this technology first puts seed crystal, silicon material doped chemical
It sets in crucible, seed crystal is normally at crucible bottom, reheats and melts silicon material, and seed crystal is kept not melted away completely, finally controls
System cooling, adjusts the temperature gradient of solid liquid phase, it is ensured that monocrystalline is grown since seed crystal position, and the difficult point of this technology is to ensure that
In the fusing silicon material stage, seed crystal is not melted completely, also controls the distribution of temperature gradient, this is to improve crystal growth speed
The key of degree and crystal quality is needed to reach 1450 in furnace and be taken the photograph to meet technique requirement of the quasi- monocrystalline for temperature gradient
Air door, the process that Lai Jinhang gradually cools down, and the suitable thermal field of Temperature Distribution are opened in the case where family name's degree, not only can guarantee monocrystalline
Growth is smooth, and quality is higher；Traditional design can not solve smoothly to open and close air door at high temperature always, seriously
When there are also stuck phenomenon, carry out great hidden danger to stove safety belt.
Utility model content
In order to make up for the defects of the prior art, the utility model provides a kind of transmissions of quasi- monocrystalline ingot furnace lower furnace body air door
Mechanism.
The utility model is achieved by the following technical solution:
A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism, including lower furnace bottom shell, support base and track base, it is described
Intermediate position is equipped with support sleeve in lower furnace bottom shell, passes through linking arm at the top of support sleeve and is equipped with multiple track bases, track base
It is equipped with guide rail, guide rail is equipped with sliding machine, is equipped with transmission shaft in support sleeve, one end that transmission shaft is located at each guide rail is equipped with
Turntable, the sliding machine corresponded on turntable on each guide rail are equipped with pull rod, are set by the drive shaft of lower furnace bottom outer casing bottom with driving
Standby connection drives transmission shaft to be rotated, and makes transmission shaft that turntable be driven to be driven sliding machine by pull rod and is moved on guide rail
It is dynamic, to make the connecting rod on each sliding machine that corresponding air door be driven to be driven.
Further, four track bases are respectively equipped with by linking arm at the top of the support sleeve, four track bases are at cross
Type distribution, the exterior contour of turntable be it is cross, each end that turntable is located at cross passes through pull rod respectively and connect with sliding machine.
Further, the sliding machine bottom is equipped with two rows of pulleys, and the guide rail on track base is located between two rows of pulleys, leads to
It crosses each pulley and sliding machine sliding is realized in guide rail cooperation, the gap between pulley and guide rail is 0.5-1mm.
Further, the pulley and guide rail are tungsten alloy Steel material, and track base is used by the heat treatment of nitriding twice
High temperature resistant stainless steel.
Further, the pull rod is connect by universal shaft with sliding machine and turntable.
The beneficial effects of the utility model are: structure is simple, easy to use, track base carries out two using high temperature resistant stainless steel
Secondary nitriding heat treatment process guarantees the requirement that can reach design under the high temperature conditions, then tungsten alloy steel guide rail is cooperated to make to slide
Trolley can be slided smoothly by design requirement, and the gap design between pulley and guide rail, meet guide rail and pulley expansion is
Several requirements avoids that stuck phenomenon occurs, brings guarantee safely to stove.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Attached drawing 1 is the structural schematic diagram of the utility model；
Attached drawing 2 is the top view of the utility model；
Attached drawing 3 is the attachment structure schematic diagram of the utility model guide rail and sliding machine.
In figure, 1 lower furnace bottom shell, 2 guide rails, 3 pull rods, 4 sliding machines, 5 transmission shafts, 6 connecting rods, 7 pulleys, 8 turntables, 9
Track base, 10 universal shafts, 11 drive shafts, 12 support sleeves, 13 linking arms.
Specific embodiment
Attached drawing 1-3 is a kind of specific embodiment of the utility model.A kind of quasi- monocrystalline ingot furnace lower furnace body of the utility model
Air door driving mechanism, including lower furnace bottom shell 1, support base and track base 9, intermediate position is equipped with branch in the lower furnace bottom shell 1
Axle sleeve 12 is supportted, multiple track bases 9 are equipped with by linking arm 13 at the top of support sleeve 12, track base 9 is equipped with guide rail 2, on guide rail 2
Equipped with sliding machine 4, transmission shaft 5 is equipped in support sleeve 12, one end that transmission shaft 5 is located at each guide rail 2 is equipped with turntable 8, turntable 8
Sliding machine 4 on upper each guide rail 2 of correspondence is equipped with pull rod 3, is connected by the drive shaft 11 and driving equipment of lower 1 bottom of furnace bottom shell
Tape splicing moves transmission shaft 5 and is rotated, and makes transmission shaft 5 that turntable 8 be driven to be driven sliding machine 4 by pull rod 3 and is moved on guide rail 2
It is dynamic, to make the connecting rod 6 on each sliding machine 4 that corresponding air door be driven to be driven.
Further, four track bases 9, four track bases 9 are respectively equipped with by linking arm 13 at the top of the support sleeve 12
At cross distribution, the exterior contour of turntable 8 be it is cross, each end that turntable 8 is located at cross passes through pull rod 3 respectively and slides
Trolley 4 connects.
Further, 4 bottom of sliding machine is equipped with two rows of pulleys 7, the guide rail 2 on track base 9 be located at two rows of pulleys 7 it
Between, realize that sliding machine 4 slides by each pulley 7 and the cooperation of guide rail 2, the gap between pulley 7 and guide rail 2 is 0.5-1mm.
Further, the pulley 7 and guide rail 2 are tungsten alloy Steel material, and track base 9 is heat-treated using by nitriding twice
High temperature resistant stainless steel.
Further, the pull rod 3 is connect by universal shaft 10 with sliding machine 4 and turntable 8.
A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism of the utility model, track base 9 uses high temperature resistant when use
Stainless steel carries out secondary nitriding heat treatment process, guarantees the requirement that can reach design under the high temperature conditions, then cooperate tungsten alloy
Steel guide rail 2 enables sliding machine 4 smoothly to slide by design requirement, and in transmission process, transmission shaft 5 drives turntable 8 to rotate, and ten thousand
The axial movement of transmission shaft 5 is become to move along a straight line to bearing, allows four sliding machines 4 on four guide rails 2 towards four
Direction moves forward and backward simultaneously, to drive corresponding four door openings and closure, ensure that lower 1 bottom of furnace bottom shell
Ventilation and heat cooling effect improves the safety in utilization of stove.
The utility model is not limited to above embodiment, anyone, which should learn, makes under the enlightenment of the utility model
There is same or similar technical solution with the utility model, each fall within the protection scope of the utility model.
Technology that the utility model is not described in detail, shape, construction portion are well-known technique.
Claims (5)
1. a kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism, including lower furnace bottom shell, support base and track base, feature
It is, intermediate position is equipped with support sleeve in the lower furnace bottom shell, passes through linking arm at the top of support sleeve and is equipped with multiple guide rails
Seat, track base are equipped with guide rail, and guide rail is equipped with sliding machine, is equipped with transmission shaft in support sleeve, transmission shaft is located at each guide rail
One end be equipped with turntable, the sliding machine on each guide rail correspond on turntable equipped with pull rod, passes through the driving of lower furnace bottom outer casing bottom
Axis is connect with driving equipment drives transmission shaft to be rotated, and makes transmission shaft that turntable be driven to be driven sliding machine in guide rail by pull rod
On moved, to make connecting rod on each sliding machine that corresponding air door be driven to be driven.
2. a kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism according to claim 1, it is characterised in that: the branch
Four track bases are respectively equipped with by linking arm at the top of support axle sleeve, four track bases are at cross distribution, the exterior contour of turntable
To be cross, each end that turntable is located at cross passes through pull rod respectively and connect with sliding machine.
3. a kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism according to claim 1, it is characterised in that: the cunning
Dynamic trolley bottom is equipped with two rows of pulleys, and the guide rail on track base is located between two rows of pulleys, is cooperated by each pulley and guide rail real
Existing sliding machine sliding, the gap between pulley and guide rail are 0.5-1mm.
4. a kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism according to claim 3, it is characterised in that: the cunning
Wheel is tungsten alloy Steel material with guide rail, and track base uses the high temperature resistant stainless steel by the heat treatment of nitriding twice.
5. a kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism according to claim 1, it is characterised in that: the drawing
Bar is connect by universal shaft with sliding machine and turntable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821368528.4U CN209292515U (en) | 2018-08-24 | 2018-08-24 | A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821368528.4U CN209292515U (en) | 2018-08-24 | 2018-08-24 | A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209292515U true CN209292515U (en) | 2019-08-23 |
Family
ID=67651078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821368528.4U Active CN209292515U (en) | 2018-08-24 | 2018-08-24 | A kind of quasi- monocrystalline ingot furnace lower furnace body air door driving mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209292515U (en) |
-
2018
- 2018-08-24 CN CN201821368528.4U patent/CN209292515U/en active Active
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