CN208869719U - A kind of quasi- monocrystalline ingot casting furnace body heating mechanism - Google Patents
A kind of quasi- monocrystalline ingot casting furnace body heating mechanism Download PDFInfo
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- CN208869719U CN208869719U CN201821368599.4U CN201821368599U CN208869719U CN 208869719 U CN208869719 U CN 208869719U CN 201821368599 U CN201821368599 U CN 201821368599U CN 208869719 U CN208869719 U CN 208869719U
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- ingot casting
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Abstract
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of quasi- monocrystalline ingot casting furnace body heating mechanism.The quasi- monocrystalline ingot casting furnace body heating mechanism, including upper furnace body, lower furnace body, steel cage and heating room, the lower furnace body is equipped with upper furnace body, and heating room is equipped in lower furnace body, and heating is indoor to be equipped with more root bottom part heating poles, each heating pole passes through electrode connecting shaft respectively and connect with bottom electrode, steel cage is equipped in the upper furnace body, steel cage is located on heating room, and steel cage and heating room connectivity part are equipped with heat-conducting block, the steel cage side wall surrounding is respectively equipped with side heat bar, and steel cage top portion is equipped with top heating pole.The beneficial effect is that: structure is simple, upper furnace body and lower furnace body using top, in, lower three parts independent temperature individually heat, and corresponding three individual temperature measuring points, to obtain more reasonable regional temperature.
Description
Technical field
The utility model belongs to single crystal growing furnace technical field, and in particular to a kind of quasi- monocrystalline ingot casting furnace body heating mechanism.
Background technique
Quasi- monocrystalline ingot furnace is one kind in inert gas (based on nitrogen, helium) environment, with graphite heater by polycrystalline
The fusing of the polycrystalline materials such as silicon is the equipment of the technique growth dislocation-free monocrystalline based on quasi- monocrystalline ingot furnace, quasi- monocrystalline (Mono
Like) it is the technique based on polycrystalline cast ingot, single crystal seed is used by part when long brilliant, it is similar with electrical property to obtain appearance
The polysilicon chip of monocrystalline, this technology that monocrystalline silicon is formed by way of ingot casting, power consumption is only more than common polycrystalline silicon, gives birth to
The quality of the monocrystalline silicon of production is close to pulling of silicon single crystal, and briefly, this technology is exactly the cost with polysilicon, produces monocrystalline silicon
Technology, the quasi- monocrystalline technology of volume production is largely to have seed crystal ingot casting instantly, and this technology first puts seed crystal, silicon material doped chemical
It sets in crucible, seed crystal is normally at crucible bottom, reheats and melts silicon material, and seed crystal is kept not melted away completely, finally controls
System cooling, adjusts the temperature gradient of solid liquid phase, it is ensured that monocrystalline is grown since seed crystal position, and the difficult point of this technology is to ensure that
In the fusing silicon material stage, seed crystal is not melted completely, also controls the distribution of temperature gradient, this is to improve crystal growth speed
The key of degree and crystal quality is needed to reach 1450 in furnace and be taken the photograph to meet technique requirement of the quasi- monocrystalline for temperature gradient
Air door, the process that Lai Jinhang gradually cools down, and the suitable thermal field of Temperature Distribution are opened in the case where family name's degree, not only crystal growth is suitable
Benefit, and quality is higher；If the Temperature Distribution of thermal field be not it is quite reasonable, grow monocrystalline during be easy to produce it is various lack
It falls into, influences quality, situation is serious morphotropism growth is occurred and do not come out monocrystalline.
Utility model content
In order to make up for the defects of the prior art, the utility model provides a kind of quasi- monocrystalline ingot casting furnace body heating mechanisms.
The utility model is achieved by the following technical solution:
A kind of quasi- monocrystalline ingot casting furnace body heating mechanism, including upper furnace body, lower furnace body, steel cage and heating room, the lower furnace
Body is equipped with upper furnace body, and heating room is equipped in lower furnace body, and heating is indoor to be equipped with more root bottom part heating poles, each heating pole difference
It is connect by electrode connecting shaft with bottom electrode, steel cage is equipped in the upper furnace body, steel cage is located on heating room, steel cage and heating
Room connectivity part is equipped with heat-conducting block, and the steel cage side wall surrounding is respectively equipped with side heat bar, and steel cage top portion is equipped with top heating pole,
Side heat bar and top heating pole pass through heating pole electrode respectively and connect with corresponding upper electrode, are equipped in the lower furnace body
Bottom temperature transducer, upper furnace body side are equipped with middle part temperature transducer, and upper furnace body upper end is equipped with top temperature measurement sensor, top
Heating pole, side heat bar and bottom-heated bar external controller are simultaneously respectively controlled.
Further, it is equipped with side insulation board between the steel cage side wall and side heat bar, heats indoor side wall and is equipped with
Multi-layer bottom insulation board.
Further, it is extended at the top of the upper furnace body and is equipped with air inlet pipe in steel cage, air inlet pipe extends at steel cage equipped with more
Layer air inlet pipe insulation board.
Further, the upper electrode is externally provided with electrode hood.
Further, the upper furnace body side is equipped with vacuum pumping hole, and steel cage top portion is equipped with multiple ventholes, the gas in steel cage
Body is extracted out by each venthole through vacuum pumping hole, its internal holding vacuum state is made.
Further, the upper electrode is connected by flexible joining part with corresponding heating pole electrode, and flexible joining part is that copper bar is soft
Connection.
Further, the top heating pole, side heat bar are laid in corresponding position at S-shaped respectively.
Further, the top heating pole is assemblied in steel cage top portion, top heating pole and steel cage top by heating pole sunpender
Insulated bag at the top of multilayer is equipped between portion, steel cage is arranged in upper furnace body by erecting jib.
Further, the upper furnace body is equipped with multiple gas vents.
The beneficial effects of the utility model are: structure is simple, upper furnace body and lower furnace body using top, in, lower three parts it is independent
Temperature control individually heats, and corresponding three individual temperature measuring points, to obtain more reasonable regional temperature.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Attached drawing 1 is the utility model axis side diagrammatic cross-section；
Attached drawing 2 is the utility model side axle section side schematic diagram.
In figure, 1 upper furnace body, 2 lower furnace bodies, 3 steel cages, 4 heating rooms, 5 bottom-heated bars, 6 heat-conducting blocks, 7 side heat bars, 8
Top heating pole, 9 side insulation boards, 10 heating pole sunpenders, 11 heating pole electrodes, 12 erecting jibs, 13 upper electrodes, 14 soft companies
Fitting, 15 air inlet pipe insulation boards, 16 vacuum pumping holes, 17 electrode hoods, 18 top temperature measurement sensors, 19 air inlet pipe, 20 gas vents,
21 ventholes, 22 bottom temperature transducers, 23 electrode connecting shafts, 24 bottom electrodes, 25 middle part temperature transducers, 26 top heat preservations
Plate, 27 bottom holding plates.
Specific embodiment
Attached drawing 1,2 is a kind of specific embodiment of the utility model.A kind of quasi- monocrystalline ingot casting furnace body of the utility model adds
Heat engine structure, including upper furnace body 1, lower furnace body 2, steel cage 3 and heating room 4, the lower furnace body 2 is equipped with upper furnace body 1, in lower furnace body 2
Equipped with heating room 4, heating is equipped with more root bottom part heating poles 5 in room 4, and each heating pole passes through electrode connecting shaft 23 and bottom respectively
Portion's electrode 24 connects, and steel cage 3 is equipped in the upper furnace body 1, and steel cage 3 is located on heating room 4, and steel cage 3 is set with heating 4 connectivity part of room
There is heat-conducting block 6, the 3 side wall surrounding of steel cage is respectively equipped with side heat bar 7, is equipped with top heating pole 8, side at the top of steel cage 3
Heating pole 7 and top heating pole 8 are connected by heating pole electrode 11 with corresponding upper electrode 13 respectively, in the lower furnace body 2
Equipped with bottom temperature transducer 22,1 side of upper furnace body is equipped with middle part temperature transducer 25, and 1 upper end of upper furnace body is equipped with top temperature measurement
Sensor 18, top heating pole 8, side heat bar 7 and 5 external controller of bottom-heated bar are simultaneously respectively controlled.
Further, it is equipped with side insulation board 9 between 3 side wall of steel cage and side heat bar 7, heats on 4 inner sidewall of room
Equipped with multi-layer bottom insulation board 27.
Further, it is extended at the top of the upper furnace body 1 and is equipped with air inlet pipe 19 in steel cage 3, air inlet pipe 19 extends at steel cage 3
Equipped with 19 insulation board 15 of multilayer air inlet pipe.
Further, the upper electrode 13 is externally provided with electrode hood 17.
Further, 1 side of upper furnace body is equipped with vacuum pumping hole 16, is equipped with multiple ventholes 21, steel cage at the top of steel cage 3
Gas in 3 is extracted out by each venthole 21 through vacuum pumping hole 16, its internal holding vacuum state is made.
Further, the upper electrode 13 is connected by flexible joining part 14 with corresponding heating pole electrode 11, flexible joining part 14
It is flexible coupling for copper bar.
Further, the top heating pole 8, side heat bar 7 are laid in corresponding position at S-shaped respectively.
Further, the top heating pole 8 is assemblied in 3 inner top of steel cage by heating pole sunpender 10, top heating pole 8 with
Steel cage is equipped with insulated bag 26 at the top of multilayer between 3 top, and steel cage 3 is arranged in upper furnace body 1 by erecting jib 12.
Further, the upper furnace body 1 is equipped with multiple gas vents 20.
A kind of quasi- monocrystalline ingot casting furnace body heating mechanism of the utility model, when use upper furnace body 1 and lower furnace body 2 divide for top,
In, lower three parts independent temperature individually heat, lower furnace body 2 heating room 4 in each more root bottom part heating poles 5 by electrode connection
The letter that axis 23 and bottom electrode 24 are connected with corresponding controller, and detected according to the bottom temperature transducer 22 in lower furnace body 2
It number is controlled by corresponding controller, the top heating pole 8 and side heat bar 7 in upper furnace body 1 are respectively by corresponding
Upper electrode 13 is connected with corresponding controller, and according to the top temperature measurement sensor 18 and middle part temperature transducers in upper furnace body 1
The signal that device 25 detects is controlled by corresponding controller, to obtain more reasonable regional temperature.
The utility model is not limited to above embodiment, anyone, which should learn, makes under the enlightenment of the utility model
There is same or similar technical solution with the utility model, each fall within the protection scope of the utility model.
Technology that the utility model is not described in detail, shape, construction portion are well-known technique.
Claims (9)
1. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism, including upper furnace body, lower furnace body, steel cage and heating room, which is characterized in that
The lower furnace body is equipped with upper furnace body, and lower furnace body is interior equipped with heating room, and heating is indoor equipped with more root bottom part heating poles, described respectively to add
Hot rod passes through electrode connecting shaft respectively and connect with bottom electrode, and steel cage is equipped in the upper furnace body, and steel cage is located on heating room, steel
Cage and heating room connectivity part are equipped with heat-conducting block, and the steel cage side wall surrounding is respectively equipped with side heat bar, and steel cage top portion is equipped with top
Portion's heating pole, side heat bar and top heating pole pass through heating pole electrode respectively and connect with corresponding upper electrode, under described
Bottom temperature transducer is equipped in furnace body, upper furnace body side is equipped with middle part temperature transducer, and upper furnace body upper end is equipped with top temperature measurement
Sensor, top heating pole, side heat bar and bottom-heated bar external controller are simultaneously respectively controlled.
2. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the steel cage side wall
It is equipped with side insulation board between side heat bar, heats indoor side wall and is equipped with multi-layer bottom insulation board.
3. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the upper furnace body top
Portion extends to and is equipped with air inlet pipe in steel cage, and air inlet pipe, which extends to, is equipped with multilayer air inlet pipe insulation board at steel cage.
4. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the upper electrode
It is externally provided with electrode hood.
5. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the upper furnace body one
Side is equipped with vacuum pumping hole, and steel cage top portion is equipped with multiple ventholes, and the gas in steel cage is by each venthole through vacuum pumping hole
Extraction makes its internal holding vacuum state.
6. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the upper electrode
It is connected by flexible joining part with corresponding heating pole electrode, flexible joining part is flexible coupling for copper bar.
7. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the top heating
Bar, side heat bar are laid in corresponding position at S-shaped respectively.
8. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: the top heating
Bar is assemblied in steel cage top portion by heating pole sunpender, and insulated bag at the top of multilayer, steel are equipped between top heating pole and steel cage top portion
Cage is arranged in upper furnace body by erecting jib.
9. a kind of quasi- monocrystalline ingot casting furnace body heating mechanism according to claim 1, it is characterised in that: on the upper furnace body
Equipped with multiple gas vents.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821368599.4U CN208869719U (en) | 2018-08-24 | 2018-08-24 | A kind of quasi- monocrystalline ingot casting furnace body heating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821368599.4U CN208869719U (en) | 2018-08-24 | 2018-08-24 | A kind of quasi- monocrystalline ingot casting furnace body heating mechanism |
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| CN208869719U true CN208869719U (en) | 2019-05-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201821368599.4U Active CN208869719U (en) | 2018-08-24 | 2018-08-24 | A kind of quasi- monocrystalline ingot casting furnace body heating mechanism |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111850683A (en) * | 2020-07-31 | 2020-10-30 | 刘穗 | Heat balance's high-efficient type ingot furnace |
| CN111945222A (en) * | 2020-08-14 | 2020-11-17 | 刘穗 | Ingot furnace with tail gas treatment function |
| CN113433191A (en) * | 2021-03-17 | 2021-09-24 | 江苏甫瑞微纳传感科技有限公司 | Ring heating type gas sensor and preparation method thereof |
-
2018
- 2018-08-24 CN CN201821368599.4U patent/CN208869719U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111850683A (en) * | 2020-07-31 | 2020-10-30 | 刘穗 | Heat balance's high-efficient type ingot furnace |
| CN111850683B (en) * | 2020-07-31 | 2021-12-24 | 扬州晶樱光电科技有限公司 | Heat balance's high-efficient type ingot furnace |
| CN111945222A (en) * | 2020-08-14 | 2020-11-17 | 刘穗 | Ingot furnace with tail gas treatment function |
| CN113433191A (en) * | 2021-03-17 | 2021-09-24 | 江苏甫瑞微纳传感科技有限公司 | Ring heating type gas sensor and preparation method thereof |
| CN113433191B (en) * | 2021-03-17 | 2024-01-16 | 江苏甫瑞微纳传感科技有限公司 | Annular heating type gas sensor and preparation method thereof |
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