CN208077949U - Structure for propping and holding door plate of container - Google Patents
Structure for propping and holding door plate of container Download PDFInfo
- Publication number
- CN208077949U CN208077949U CN201820438916.9U CN201820438916U CN208077949U CN 208077949 U CN208077949 U CN 208077949U CN 201820438916 U CN201820438916 U CN 201820438916U CN 208077949 U CN208077949 U CN 208077949U
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- Prior art keywords
- gasket
- container
- supporting structure
- angle
- container door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- 238000010276 construction Methods 0.000 description 3
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- 239000004696 Poly ether ether ketone Substances 0.000 description 2
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- 238000006062 fragmentation reaction Methods 0.000 description 2
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- 230000001788 irregular Effects 0.000 description 2
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- 238000002360 preparation method Methods 0.000 description 2
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- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a door plate supporting structure of a container, which comprises a container with an opening; the door plate is covered with the opening; the abutting piece is arranged on the door panel; and a plurality of holding units closely arranged on the holding member, each of the holding units comprising: a gasket; at least one convex angle arranged on the gasket; at least one reentrant corner, locate on said spacer; and at least two elastic arms connected with the left side and the right side of the gasket.
Description
Technical field
It is the utility model is related to container door supporting structure technology, more particularly to a kind of through fillet petaloid portion, at least one
Salient angle, at least a re-entrant angle and gasket are total to the container door supporting structure that structure is asterism shape structure.
Background technology
In existing semiconductor industry, storage and transport in relation to the related lamellar article such as wafer, light shield or substrate
Play important role.Due to be attached under microcosmic processing procedure, such as on wafer, light shield or substrate component fine particle or
Because the facts such as collision defect are transported in storage, the yield on entire manufacture of semiconductor can be all influenced.
In view of above-mentioned reason, many kinds of containers dedicated for such high-accuracy dustless operation of needs are designed at present,
To store or deliver the related lamellar article such as relevant wafer, light shield or substrate.Fig. 1 is please referred to, Fig. 1 is existing container
Door-plate supporting structure schematic diagram.
In existing container, front open type standard wafer box (the Front Opening Unified such as by taking Fig. 1 as an example
Pod, FOUP), structure include a container 10, the wherein one side of container 10 have one opening 12 can provide wafer input and it is defeated
Go out, and several slots 11 are internally provided with to house several wafers in container.One door-plate 20 is covered with the opening 12 of container 10 and is closed, uses
To protect several wafers inside container 10.
And there is aforementioned door-plate 20 outer surface 24 and an inner surface 22, the outer surface 24 of door-plate 20 can be equipped at least one
Stud structure (not shown), to container 10 described in opening and closing of fault.
In the art, the inner surface 22 of door-plate 20 would generally be provided with supporting piece 30, be set to the inner surface 22 of door-plate 20
Upper to support unit 32 close to 20 midline position of door-plate, and with several, close-packed arrays are on the supporting piece 30, with to avoid wafer
Dystopy is generated because of vibrations or is moved toward 12 direction centre of opening.
In the technology of Fig. 1, several settings for supporting unit 32 are clamped symmetrical two on wafer by the way of both arms mostly
Point, to limit the breakage that wafer vibrations generate.But no matter which kind of mechanism its clamping or support are designed as, existing mechanism design
In have the shortcomings that mostly it is many, include both arms design mechanism it is complicated, have the shortcomings that die sinking cost increase.
In addition, the design of both arms, which can increase several units 32 that support, supports or is clamped the area contacted when wafer.This
Sample one will cause particle to generate increased risk, or in the case of unbalance stress, lead to wafer breakage or fall into number
In a gap supported between unit 32.
Utility model content
The utility model proposes a kind of container door supporting structures, it is intended to solve its wafer limitation of the wafer cassette of prior art
The problem of part is complicated and wafer is easily trapped into the gap between limited part and causes the damage of wafer.To realize above-mentioned mesh
, the utility model proposes a kind of container door supporting structures to have an opening including a container；One door-plate, and it is described
Vent cover is closed；One supporting piece is set on the door-plate；And it is several support unit, close-packed arrays are on the supporting piece, each
The unit that supports includes：One gasket；An at least salient angle is set on the gasket；An at least re-entrant angle is set on the gasket；
And at least two elasticity arms, it is connect with the gasket left and right sides.
Wherein, several support being closely adjacent to each other makes through an at least salient angle with an at least re-entrant angle between unit
In close proximity to and at least salient angle on each gasket is equal with an at least re-entrant angle quantity between the gasket.
Include an at least salient angle and the structure of an at least re-entrant angle through gasket so that the gap between gasket is in irregular shape, to avoid crystalline substance
Circle or the vibrations unexpected during transport of the lamellar article such as substrate due to, generates dystopy, and the gap fallen between gasket causes to damage
It is bad.In addition, reduction and wafer or substrate and other items and several contacts area supported between unit, also belong to the effect of the utility model
One of fruit.
Above to the summary of the utility model, it is therefore intended that the utility model it is several towards and technical characteristic make a base
This explanation.Detailed statement of the utility model summary not to the utility model, therefore its purpose is not enumerating this practicality especially newly
This reality only is presented in a manner of concise nor for defining the scope of the utility model in the key or significant components of type
With novel several concepts.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, the structure that can also be shown according to these attached drawings obtains other attached drawings.
Fig. 1 is existing container door supporting structure schematic diagram；
Fig. 2 is the door-plate inner surface schematic diagram of the utility model preferred embodiment；
Fig. 3 supports cell schematics for the utility model preferred embodiment；
Fig. 4 is the door-plate inner surface schematic diagram of another preferred embodiment of the utility model；
Fig. 5 supports cell schematics for another embodiment of the utility model.
Drawing reference numeral explanation：
| Label | Title | Label | Title |
| 10 | Container | 32b | Salient angle |
| 11 | Slot | 32c | Re-entrant angle |
| 12 | Opening | 32d | Elasticity arm |
| 20 | Door-plate | 32d’ | Elasticity arm |
| 22 | Inner surface | 32e | Fillet petaloid portion |
| 24 | Outer surface | 32f | Support portion |
| 26 | Groove | 41 | First bending |
| 30 | Supporting piece | 42 | Second bending |
| 32 | Support unit | d1 | First distance |
| 32a | Gasket | d2 | Second distance |
The embodiments will be further described with reference to the accompanying drawings for the realization, functional characteristics and advantage of the utility model aim.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describing, it is clear that described embodiment is only a part of the embodiment of the utility model, rather than all
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, shall fall within the protection scope of the present invention.
In the present invention unless specifically defined or limited otherwise, term " connection ", " fixation " etc. should do broad sense reason
Solution, for example, " fixation " may be a fixed connection, may be a detachable connection, or integral；It can be mechanical connection, also may be used
To be electrical connection；It can be directly connected, can also can be indirectly connected through an intermediary the connection inside two elements
Or the interaction relationship of two elements, unless otherwise restricted clearly.It for the ordinary skill in the art, can be with
The concrete meaning of above-mentioned term in the present invention is understood as the case may be.
The container 10 of the utility model embodiment can refer to the signal of the container in Fig. 1, include mainly a container 10, in container
There is 10 wherein one sides an opening 12 can provide wafer input and output, and be internally provided with several slots 11 in container with accommodating
Several wafers；One door-plate 20,12 hamper of opening with container 10, to protect several wafers inside container 10, door-plate 20 to have
There are an outer surface 24 and an inner surface 22, the outer surface 24 of door-plate 20 can be equipped with an at least bolt structure (not shown), to open
Open or close the container 10.
It is the door-plate inner surface schematic diagram of the utility model preferred embodiment with reference to Fig. 2, Fig. 2.Provided in Fig. 1
10 structure of container, the utility model Fig. 2 disclose the supporting piece 30 of the utility model embodiment, are set to the inner surface 22 of door-plate 20
20 midline position of upper close door-plate；And it is several support unit 32, close-packed arrays are on the supporting piece 30, with to avoid wafer
Dystopy is generated because of vibrations or is moved toward 12 direction centre of opening.
In the present embodiment, container 10 be front open type standard wafer box (Front Opening Unified Pod,
FOUP), and in other possible embodiments, container 10 can also be standard wafer feeder (Standard Mechanical
Interface, SMIF) or front open type wafer feeder (Front Opening Shipping Box, FOSB) etc..As long as can
Using all flat sheet containers 10 or carrier of the utility model structure, should all be included in the scope of the utility model,
The utility model does not limit the type of container 10.
As discussed with the present embodiment, the container 10 for being responsible for storage wafer is front open type standard wafer box (Front Opening
Unified Pod, FOUP), the number for the several slots 11 being internally provided with is 13, and is arranged on the supporting piece 30
It is several support 32 number of unit also be 13.
In the present embodiment, the number of wafers that container 10 can house is 13 (13Slots), and in other possible realities
It applies in example, the number of wafers that the number of several slots 11, several numbers for supporting unit 32 and container 10 can house all may
More than or less than 13, the utility model should not be as limit.
Can be with reference to shown in Fig. 2 and Fig. 3, Fig. 3 supports cell schematics for the utility model preferred embodiment.At this
In embodiment, 20 inner surface 22 of door-plate is additionally provided with a groove 26 close to midline position, to engage the supporting piece 30, groove 26
Main purpose be that can also reduce the anteroposterior diameter ruler of whole container 10 other than being used for the several wafers in the inside of buffer container 10
It is very little.
In the present embodiment, it includes a gasket 32a that close-packed arrays support unit 32 all in each on supporting piece 30；Extremely
A few salient angle 32b, is set on the gasket 32a, and each at least salient angle 32b protrudes the gasket 32a about 7-9 millis
The distance of rice (mm), the distance of preferably 9 millimeters (mm).
An at least re-entrant angle 32c is set on the gasket 32a, and each at least re-entrant angle 32c is recessed the pad
The distance of piece 32a about 7-9 millimeter (mm), the distance of preferably 9 millimeters (mm)；And two elasticity arm 32d, individually with the pad
Connection at left and right sides of piece 32a.
Elasticity arm 32d is designed as arc in the present embodiment, the gasket 32a to be propped up, make the gasket 32a away from
With a distance from about 9 millimeters of the door-plate 20 (mm).
Whereby, when the door-plate 20 in the present embodiment is closed with the lid of container 10, gasket can be penetrated by being held in the wafer of gasket 32a
Two elasticity arm 32d bufferings at left and right sides of 32a.Wherein, be closely adjacent to each other it is described it is several support unit 32 between, through it is described at least
An one salient angle 32b and at least re-entrant angle 32c makes between the gasket 32a in close proximity to and described on each gasket 32a
An at least salient angle 32b is equal with an at least re-entrant angle 32c quantity；More precisely, since each gasket 32a must be with head and the tail
Mutually the mode of rank combines, therefore the mechanism of at least the salient angle 32b and an at least re-entrant angle 32c between two neighboring gasket 32a must count
Amount is consistent, it is enable to match.
When door-plate 20 is closed with the preparation lid of container 10, the wafer of 10 accommodated inside of container can gasket that is first and supporting unit 32
32a is contacted, while two elasticity arm 32d being driven to generate deformation so that grooves 26 of the two elasticity arm 32d toward 20 inner surface 22 of door-plate
It sets and is recessed inwardly, it, can be firmly when each wafer of 10 accommodated inside of container is in door-plate 20 and the lid conjunction completely of container 10
It is held on gasket 32a and limits wafer toward the movement of 12 directions of opening.
In addition, through the structure of an at least salient angle 32b and an at least re-entrant angle 32c on gasket 32a, and an at least salient angle 32b
Make between the gasket 32a in close proximity to unexpected vibrations during can avoid wafer because of transport with an at least re-entrant angle 32c
And dystopy is generated, the gap fallen between gasket 32a and the breakage or fragmentation that cause wafer.
It is the door-plate inner surface schematic diagram of another preferred embodiment of the utility model shown in please referring to Fig.4.In this implementation
In example, close-packed arrays support unit 32 all in each on supporting piece 30 and include：One gasket 32a；An at least salient angle 32b, if
In on the gasket 32a, and each at least salient angle 32b protrudes the distance of the gasket about 7-9 millimeters (mm), preferably
It is the distance of 9 millimeters (mm)；An at least re-entrant angle 32c is set on the gasket 32a, and each at least re-entrant angle 32c indents
Enter the distance of the gasket 32a about 7-9 millimeter (mm), the distance of preferably 9 millimeters (mm)；And four elasticity arm 32d ', bullet
Arm of force 32d ' two-by-two with connect at left and right sides of the gasket 32a, and each elasticity arm 32d ' is arc, to by the gasket
32a is propped up, and makes the gasket 32a apart from the distance of about 9 millimeters of the door-plate 20 (mm).
It is same as the embodiment of Fig. 2 and Fig. 3, the single elasticity arm 32d ' designs of embodiment are the machines close to continuous S types in Fig. 4
Structure designs.With initial reference to Fig. 5, Fig. 5 cell schematics can be supported for another embodiment of the utility model.It is right in the embodiment of Fig. 5
It can be also applied to the embodiment of Fig. 2 and Fig. 3 in the description of single elasticity arm 32d ', the utility model does not limit.In Fig. 5
Embodiment in, after elasticity arm elasticity arm 32d ' is propped up the first distance by elasticity arm 32d ' through the first opposite bending 41 of direction
D1, then gasket 32a is propped up into second distance d2 through with the second bending 42.And in the embodiment, the first distance d1 and
The summation of second distance d2 is gasket 32a between door-plate 20 at a distance from 9 millimeters (mm).
Whereby, when door-plate 20 and the lid of container 10 close, being held in the wafer of gasket 32a can penetrate at left and right sides of gasket 32a
Four elasticity arm 32d ' bufferings.Wherein, what is be closely adjacent to each other described several supports unit 32 at least a salient angle 32b and institute through described in
Stating an at least re-entrant angle 32c makes between the gasket 32a in close proximity to and at least salient angle 32b on each gasket 32a
It is equal with an at least re-entrant angle 32c quantity.
The embodiment of Fig. 4, can effectively and more using two-by-two with the four elasticity arm 32d ' that are connect at left and right sides of the gasket 32a
The seesaw movement for further preventing gasket 32a to generate；Further prevent wafer from generating the risk of friction or damage whereby.This
Outside, it is contemplated that gasket 32a has a possibility of load-bearing, and in the embodiment of Fig. 2 to Fig. 3, elasticity arm 32d (32d ') more can be such as Fig. 5
In embodiment it is the same, one support portion 32f is set close to the side of door-plate 20 inner surface 22 in each elasticity arm 32d '.
In the 5 embodiment of figure 5, support portion 32f can be rounded triangle.Certainly, the external form of support portion 32f can also
It is round or geometric figures, the utility model such as rectangle do not limit.Support portion 32f can be provided when gasket 32a load-bearing
When heavier, it is applied to the extra support power of elasticity arm 32d ', reaches and more preferably supports effect.
It, more can be with if to further increase the load-bearing capacity of gasket 32a in addition, in other possible implementation patterns
Cross is set using its center of gravity as crosspoint at the back side (i.e. close to the side of 20 inner surface 22 of door-plate) of gasket 32a or is waited
Angular one intersects rib.Through intersect rib provide structural thickness, further greatly improve gasket 32a load-bearing capacity and
Its structural stability, the utility model do not limit.
Therefore, when door-plate 20 is closed with the preparation lid of container 10, the wafer of 10 accommodated inside of container can be first and supports unit 32
Gasket 32a contact, while four elasticity arm 32d ' being driven to generate deformation so that four elasticity arm 32d ' are toward 20 inner surface 22 of door-plate
26 position of groove is recessed inwardly, and allows each wafer of 10 accommodated inside of container in door-plate 20 and the lid conjunction completely of container 10, can
To be firmly held on gasket 32a and limit wafer toward the movement of 12 directions of opening.
Each side increase separately an elasticity arm 32d ' because of gasket 32a again so that four elasticity arm 32d ' generate deformation and
The process of lever drives elasticity arm 32d ' can be consolidated more.In addition, through at least a salient angle 32b and at least one is recessed on gasket 32a
The structure of angle 32c, and an at least salient angle 32a and an at least re-entrant angle 32c make between the gasket 32a in close proximity to can avoid
Generate dystopy due to wafer vibrations unexpected during transport, the gap fallen between gasket 32a and the breakage that causes wafer or
Fragmentation.
In addition, for being to reduce setting for contact area in turn with gasket 32a single-contacts for circular wafer in shape
Meter, can also efficiently reduce the fine particle generated by friction.
In several of the above embodiments where, the gasket 32a may also include four fillet petaloid portion 32e, be set to the pad two-by-two
The surrounding of piece 32a, and the fillet petaloid portion 32e of at least both sides salient angle 32b is mutually symmetrical；An at least re-entrant angle
The fillet petaloid portion 32e of the both sides 32c is mutually symmetrical, and the four fillets petaloid portion 32e, at least a salient angle 32b, the institute
It is an asterism shape structure to state an at least re-entrant angle 32c and gasket 32a and be total to structure.
The so-called asterism shape structure of the present embodiment refers to a fillet petaloid portion 32e, at least salient angle 32b, at least a re-entrant angle 32c
It is starting point to each fillet petaloid portion 32e from gasket 32a centers of gravity with gasket 32a and lacks intimate phase at a distance from a salient angle 32b extensions
Deng, the variation of torque when reducing unbalance stress, and then reduce the risk for supporting the damage of unit 32.
In other possible embodiments, the gasket 32a, which can also be, has at least a salient angle 32b and at least a re-entrant angle
Triangle, pentagon or other irregular shapes of 32c, the utility model should not all be to avoid crystalline substance as limit, purpose
Unexpected vibrations generate dystopy during justifying because of transport, and the gap fallen between gasket 32a causes wafer to damage.
In the embodiment of above-mentioned Fig. 2 to Fig. 5, several elastic constructions that supports unit 32 and can be one of the forming, such as heat
The elastic construction of plasticity, in addition to can reach at least two elasticity arm 32d (32d ') deformation so that wafer can firmly be held in gasket
32a is upper outer, and elastic construction also has the effect of shock-absorbing, can avoid wafer and generates dystopy or opening toward container 10 because of unexpected vibrations
The movement of 12 directions of mouth.For several 32 close-packed arrays of unit that support on the supporting piece 30, the supporting piece 30 is sticked in door-plate 20
On the groove 26 of inner surface 22.And in other embodiments that may be implemented based on the utility model concept, supporting piece 30 also may be used
It is integrally formed with 20 inner surface 22 of door-plate.
In other possible embodiments, the place of gasket 32a and wafer contacts can coat a kind of abrasion performance with surface
Material, such as polyether-ether-ketone (PEEK) material, to reduce the generation of friction and particle dust.And the height of the present embodiment gasket 32a and
Width can be more than the thickness of wafer, and the gap between gasket 32a is absorbed in avoid moving up and down for wafer.
The above is only the preferred embodiment of the present invention, and it does not limit the scope of the patent of the present invention,
Under every utility model in the utility model is conceived, equivalent structure made based on the specification and figures of the utility model
Transformation, or directly/be used in other related technical areas indirectly and be included in the scope of patent protection of the utility model.
Claims (12)
1. a kind of container door supporting structure, which is characterized in that container door supporting structure includes：
One container has an opening；
One door-plate is closed with the vent cover；
One supporting piece is set on the door-plate；
And it is several support unit, close-packed arrays are each described to support unit and include on the supporting piece：One gasket；
An at least salient angle is set on the gasket；
An at least re-entrant angle is set on the gasket；
And at least two elasticity arms, it is connect with the gasket left and right sides；
Wherein, be closely adjacent to each other it is described it is several support between unit through an at least salient angle make with an at least re-entrant angle it is described
In close proximity to and at least salient angle on each gasket is equal with an at least re-entrant angle quantity between gasket.
2. container door supporting structure as described in claim 1, which is characterized in that the container is front open type standard wafer
Box.
3. container door supporting structure as described in claim 1, which is characterized in that be further provided with a groove, institute on the door-plate
It states groove and engages the supporting piece.
4. container door supporting structure as described in claim 1, which is characterized in that described in each at least salient angle protrusion
The distance that 7-9 millimeters of gasket.
5. container door supporting structure as described in claim 1, which is characterized in that each at least re-entrant angle is recessed described
The distance that 7-9 millimeters of gasket.
6. container door supporting structure as described in claim 1, which is characterized in that the thickness of the supporting piece is 9 millimeters.
7. container door supporting structure as described in claim 1, which is characterized in that at least two elasticity arms are arc, and
At least two elasticity arms prop up the gasket for this, make distance of the gasket apart from 9 millimeters of the door-plate.
8. container door supporting structure as described in claim 1, which is characterized in that the gasket further includes four fillet petaloids
Portion is set to the surrounding of the gasket two-by-two.
9. container door supporting structure as described in claim 1, which is characterized in that the circle of an at least salient angle both sides
Angle petaloid portion is mutually symmetrical, and the fillet petaloid portion of an at least re-entrant angle both sides is mutually symmetrical.
10. container door supporting structure as described in claim 1, which is characterized in that the four fillets petaloid portion, at least one convex
It is an asterism shape structure that angle, at least a re-entrant angle and gasket, which are total to structure,.
11. container door supporting structure as described in claim 1, which is characterized in that the bottom of each at least two elasticity arms
Face is further provided with an at least support portion.
12. container door supporting structure as described in claim 1, which is characterized in that the back side of the gasket is further provided with a friendship
Pitch rib.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW107200319 | 2018-01-08 | ||
| TW107200319U TWM559504U (en) | 2018-01-08 | 2018-01-08 | Holding structure of door panel for box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208077949U true CN208077949U (en) | 2018-11-09 |
Family
ID=62950228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820438916.9U Withdrawn - After Issue CN208077949U (en) | 2018-01-08 | 2018-03-29 | Structure for propping and holding door plate of container |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN208077949U (en) |
| TW (1) | TWM559504U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110021542A (en) * | 2018-01-08 | 2019-07-16 | 家登精密工业股份有限公司 | Container door supporting structure |
-
2018
- 2018-01-08 TW TW107200319U patent/TWM559504U/en unknown
- 2018-03-29 CN CN201820438916.9U patent/CN208077949U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110021542A (en) * | 2018-01-08 | 2019-07-16 | 家登精密工业股份有限公司 | Container door supporting structure |
| CN110021542B (en) * | 2018-01-08 | 2023-10-03 | 家登精密工业股份有限公司 | Container door plate supporting structure |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM559504U (en) | 2018-05-01 |
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Granted publication date: 20181109 Effective date of abandoning: 20231003 |
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