TWM559504U - Holding structure of door panel for box - Google Patents

Abstract

The present invention provides a container door panel resisting structure, comprising a container having an opening; a door panel covering the opening; a resisting member disposed on the door panel; and a plurality of resisting units closely arranged on the opening Each of the resisting units comprises: a spacer; at least one lobes disposed on the spacer; at least one concave corner disposed on the spacer; and at least two elastic arms, and the spacer Connected on both sides.

Description

Container door plate resisting structure

The present invention provides a container door panel abutting structure, in particular a container door panel abutting structure which is formed into a star-shaped structure through a rounded lobed portion, at least one lobed corner, at least one concave corner and a gasket.

In the existing semiconductor industry, there is an important role in the storage and transportation of related thin-plate-shaped articles such as wafers, reticle or substrate. In the microscopic process, such as the deposition of tiny particles on components such as wafers, reticle or substrate or collisions due to storage and transportation, it will affect the yield of the entire semiconductor process.

In view of the above, many types of containers have been designed specifically for such high-precision dust-free operations for storing or carrying related sheet-like articles such as wafers, reticle or substrates. Please refer to FIG. 1 , which is a schematic view of a conventional container door panel resisting structure.

In an existing container, such as the former Front Opening Unified Pod (FOUP), which is illustrated in FIG. 1, the structure includes a container 10 having an opening 12 on one side of the container 10 for providing wafer input. And output, and a plurality of slots 11 are disposed inside the container to accommodate a plurality of wafers. A door panel 20 is capped to the opening 12 of the container 10 for protecting a plurality of wafers inside the container 10.

The door panel 20 has an outer surface 24 and an inner surface 22, and the outer surface of the door panel 20 The face 24 can be provided with at least one bolt structure (not shown) for opening or closing the container 10.

In the prior art, the inner surface 22 of the door panel 20 is generally provided with a resisting member 30 disposed on the inner surface 22 of the door panel 20 near the center line of the door panel 20, and is closely arranged in the plurality of resisting units 32. The resisting member 30 is used to prevent the wafer from being eccentric due to vibration or moving in the center of the opening 12 direction.

However, in the prior art of FIG. 1, the plurality of resisting units 32 are disposed in a plurality of arms to sandwich two points symmetrically on the wafer to limit damage caused by wafer vibration. However, no matter what kind of mechanism is used for clamping or supporting, most of the existing mechanism designs have many shortcomings, and the mechanism including the double-arm design is complicated, and has the disadvantage of increasing the cost of opening the mold.

In addition, the design of the arms increases the area with which the plurality of resisting units 32 are in contact with or holding the wafer. As a result, the risk of increasing the particles is increased, or the wafer is broken or falls into the gap between the plurality of resisting units 32 in the case of uneven force.

According to the prior art wafer cassette, the wafer restriction structure is complicated and the wafer is easily caught in the gap between the restriction members to cause damage of the wafer. The present invention proposes a container door panel resisting structure, comprising a container having an opening a door panel, which is closed to the opening; a resisting member is disposed on the door panel; and a plurality of resisting units are closely arranged on the resisting member, each of the resisting units comprising: a gasket; a lobes are disposed on the spacer; at least one concave corner is disposed on the spacer; and at least two elastic arms are coupled to the left and right sides of the spacer.

The at least one lobes and the at least one recessed corner are closely spaced between the plurality of resisting units adjacent to each other, and the at least one lobes and the at least one recessed corners on each of the shims equal. Passing through the structure including at least one lob and at least one concave corner The gap between the spacers is irregular, so that the thin plate-shaped articles such as wafers or substrates are ectopic due to sudden vibration during transportation, and the gaps between the spacers are damaged. In addition, reducing the contact area with articles such as wafers or substrates and a plurality of resisting units is also one of the effects of this creation.

The above brief description of this creation aims to provide a basic explanation of several aspects of the creation and technical features of the creation. The new brief description is not a detailed description of the creation, so its purpose is not to specifically list the key or important elements of the creation, nor to define the scope of the creation, but to present several concepts of the creation in a concise manner.

10‧‧‧ Container

11‧‧‧Slot

12‧‧‧ openings

20‧‧‧ Door panel

22‧‧‧ inner surface

24‧‧‧ outer surface

26‧‧‧ Groove

30‧‧‧Resistance

32‧‧‧Responsive unit

32a‧‧‧shims

32b‧‧‧ lobes

32c‧‧‧ concave corner

32d‧‧‧elastic arm

32d’‧‧‧ elastic arm

32e‧‧‧Support

32e‧‧‧Fillet lobes

41‧‧‧First bend

42‧‧‧ second bend

D1‧‧‧first distance

D2‧‧‧Second distance

FIG. 1 is a schematic view of a conventional container door panel resisting structure.

2 is a schematic view of the inner surface of the door panel of the preferred embodiment of the present invention.

FIG. 3 is a schematic diagram of a resisting unit of the preferred embodiment of the present invention.

4 is a schematic view of the inner surface of a door panel according to another preferred embodiment of the present invention.

FIG. 5 is a schematic diagram of a resisting unit according to still another embodiment of the present invention.

In order to understand the technical features and practical functions of the present invention, and to implement according to the contents of the specification, the following further describes the preferred embodiment as shown in the following figure:

The container 10 of the present embodiment can be illustrated with reference to the container of FIG. 1, and mainly includes a container 10 having an opening 12 on one side of the container 10 for providing wafer input and output, and a plurality of slots inside the container. 11 for accommodating a plurality of wafers; a door panel 20, and an opening 12 of the container 10, for protecting a plurality of wafers inside the container 10, the door panel 20 having an outer surface 24 And an inner surface 22, the outer surface 24 of the door panel 20 can be provided with at least one bolt structure (not shown) for opening or closing the container 10.

Next, please refer to FIG. 2. FIG. 2 is a schematic view showing the inner surface of the door panel according to the preferred embodiment of the present invention. Based on the structure of the container 10 provided in FIG. 1, the present invention 2 discloses a resisting member 30 of the present embodiment, which is disposed on the inner surface 22 of the door panel 20 near the center line of the door panel 20; and a plurality of resisting units 32, Tightly arranged on the resisting member 30 to prevent the wafer from being eccentric due to vibration or moving in the center of the opening 12 direction.

In this embodiment, the container 10 is a Front Opening Unified Pod (FOUP), and in other possible embodiments, the container 10 may also be a Standard Mechanical Interface (SMIF). Or Front Opening Shipping Box (FOSB), etc. All of the sheet-like sheet containers 10 or carriers to which the present construction structure can be applied are all included in the scope of the present invention, and the creation does not limit the type of the container 10.

As described in this embodiment, the container 10 for storing the wafer is a Front Opening Unified Pod (FOUP), and the number of the plurality of slots 11 provided therein is 13 and arranged in the The number of the plurality of resisting units 32 on the resisting member 30 is also 13.

That is, in this embodiment, the number of wafers that can be accommodated in the container 10 is 13 (13 Slots), and in other possible embodiments, the number of the plurality of slots 11, the number of the plurality of resisting units 32, and The number of wafers that can be accommodated in the container 10 may be greater or less than 13, and the creation should not be limited thereto.

Please refer to FIG. 2 and FIG. 3 at the same time. FIG. 3 is a schematic diagram of the resisting unit of the preferred embodiment of the present invention. In this embodiment, the inner surface 22 of the door panel 20 is further provided with a groove near the center line. 26, for engaging the resisting member 30, the purpose of the recess 26 is mainly to reduce the anteroposterior diameter of the entire container 10 in addition to buffering a plurality of wafers inside the container 10.

In this embodiment, each of the resisting units 32 closely arranged on the resisting member 30 includes a spacer 32a; at least one lobe 32b is disposed on the spacer 32a, and each of the at least one lobe 32b protrudes from the spacer 32a by a distance of about 7 to 9 millimeters (mm), preferably 9 millimeters (mm).

At least one concave corner 32c is disposed on the spacer 32a, and each of the at least one concave corner 32c is recessed into the spacer 32a by a distance of about 7-9 millimeters (mm), preferably 9 millimeters (mm). And two elastic arms 32d are individually connected to the left and right sides of the spacer 32a.

In the present embodiment, the elastic arm 32d is designed to be curved to support the spacer 32a such that the spacer 32a is spaced from the door panel 20 by a distance of about 9 millimeters (mm).

Thereby, when the door panel 20 of the present embodiment is covered with the container 10, the wafer resisting the spacer 32a can be buffered by the two elastic arms 32d on the left and right sides of the spacer 32a. Between the plurality of resisting units 32 adjacent to each other, the spacers 32a are closely spaced through the at least one lobe 32b and the at least one recessed corner 32c, and the at least one lobe on each of the spacers 32a 32b is equal in number to the at least one recessed corner 32c; more precisely, since each of the spacers 32a must be combined end to end, at least one lobe 32b and at least one recessed corner 32c between adjacent two spacers 32a The number of institutions must match to match.

When the door panel 20 and the container 10 are ready to be covered, the wafer contained in the container 10 first contacts the pad 32a of the resisting unit 32, and simultaneously causes the two elastic arms 32d to deform, so that the two elastic arms 32d are directed into the door panel 20. The groove 26 of the surface 22 is recessed inwardly. When each of the wafers accommodated inside the container 10 is completely covered by the door panel 20 and the container 10, it can be firmly held on the spacer 32a and limited. The wafer is moved in the direction of the opening 12.

In addition, the structure of the spacer 32a is at least one of the lobes 32b and the at least one recessed corner 32c, and at least one of the lobes 32b and the at least one recessed corner 32c bring the spacer 32a into close proximity, thereby avoiding the wafer being transported. Sudden vibrations cause eccentricity and fall into the gap between the shims 32a, causing breakage or chipping of the wafer.

Please refer to FIG. 4, which is a schematic view of the inner surface of the door panel according to another preferred embodiment of the present invention. In this embodiment, each of the resisting units 32 closely arranged on the resisting member 30 includes: a spacer 32a; at least one lobe 32b disposed on the spacer 32a, and each of the at least one convex The corner 32b protrudes from the spacer by a distance of about 7-9 millimeters (mm), preferably a distance of 9 millimeters (mm); at least one concave corner 32c is provided on the spacer 32a, and each of the at least one concave corner 32c The groove 32a is recessed by a distance of about 7-9 mm (mm), preferably 9 mm (mm); and the four elastic arms 32d', the elastic arms 32d' are two and two, and the spacer 32a is left and right. The side is connected, and each of the elastic arms 32d' is curved to support the spacer 32a such that the spacer 32a is about 9 millimeters (mm) away from the door panel 20.

As with the embodiment of Figures 2 and 3, the single resilient arm 32d' of the embodiment of Figure 4 is designed to be close to a continuous S-shaped mechanism. Referring to FIG. 5, FIG. 5 is a schematic diagram of a resisting unit according to still another embodiment of the present invention. The description of the single elastic arm 32d' in the embodiment of Fig. 5 can also be applied to the embodiment of Figs. 2 and 3, and the creation is not limited. In the embodiment of FIG. 5, the elastic arm 32d' propels the elastic arm elastic arm 32d' by a first distance d1 through the first bending 41 in the opposite direction, and then erects the spacer 32a through the second bending 42. The second distance d2. In these embodiments, the sum of the first distance d1 and the second distance d2 is a distance of 9 millimeters (mm) between the spacer 32a and the door panel 20.

Thereby, when the door panel 20 is covered with the container 10, the wafer resisting the spacer 32a can penetrate. The four elastic arms 32d' on the left and right sides of the spacer 32a are buffered. The plurality of resisting units 32 adjacent to each other are closely spaced between the spacers 32a through the at least one lobe 32b and the at least one recessed corner 32c, and the at least one lobe 32b on each of the spacers 32a is The at least one concave corner 32c is equal in number.

The embodiment of FIG. 4 adopts two elastic arms 32d' connected to the left and right sides of the spacer 32a, which can effectively and further prevent the movement of the jaws generated by the spacer 32a; thereby further preventing the wafer from being rubbed or damaged. risk. In addition, considering that the spacer 32a has the possibility of bearing, in the embodiment of FIGS. 2~3, the elastic arm 32d (32d') can be closer to the door panel of each elastic arm 32d' as in the embodiment of FIG. A support portion 32e is provided on one side of the inner surface 22 of the 20 .

In the embodiment of Figure 5, the support portion 32e can be a rounded triangle. Of course, the shape of the support portion 32e may also be a geometric shape such as a circle or a rectangle, and the creation is not limited. The support portion 32e can provide an additional supporting force applied to the elastic arm 32d' when the spacer 32a is heavier, achieving a better resisting effect.

In addition, in other possible embodiments, if the load-bearing capacity of the spacer 32a is to be further increased, the back surface of the spacer 32a (i.e., the side close to the inner surface 22 of the door panel 20) may be set with its center of gravity as an intersection. A glyph or an intersecting rib of an equilateral shape. The thickness of the structure provided by the cross ribs further greatly increases the load-bearing capacity of the spacer 32a and its structural stability, and the creation is not limited.

Therefore, when the door panel 20 and the container 10 are ready to be covered, the wafer accommodated inside the container 10 first contacts the spacer 32a of the resisting unit 32, and simultaneously drives the four elastic arms 32d' to deform, so that the four elastic arms 32d' The recess 26 of the inner surface 22 of the door panel 20 is recessed inwardly so that each wafer housed inside the container 10 can be firmly held on the spacer 32a and the crystal is restrained when the door panel 20 is completely covered with the container 10. The circle moves in the direction of the opening 12.

Further, by adding a resilient arm 32d' to each of the left and right sides of the spacer 32a, the process of deforming the four elastic arms 32d' and the lever driving the elastic arm 32d' can be more stable. In addition, the structure of the spacer 32a is at least one of the lobes 32b and the at least one recessed corner 32c, and at least one of the lobes 32a and the at least one recessed corner 32c bring the spacers 32a into close proximity, thereby avoiding the wafer being transported. Sudden vibrations cause eccentricity and fall into the gap between the shims 32a, causing breakage or chipping of the wafer.

In addition, for a wafer having a circular shape, a single point of contact with the spacer 32a to reduce the contact area can also effectively reduce minute particles generated by friction.

In the above embodiments, the spacer 32a may further include four rounded lobes 32e disposed on the periphery of the spacer 32a, and the rounded lobes on both sides of the at least one lobed 32b. 32e are symmetrical to each other; the rounded lobes 32e on both sides of the at least one concave corner 32c are symmetrical to each other, and the four rounded lobes 32e, the at least one lobes 32b, the at least one concave corner 32c are shared with the shims 32a Constructed as a star-shaped structure.

The star-shaped structure referred to in this embodiment means that the rounded lobes 32e, at least one lobes 32b, at least one concave corner 32c and the spacer 32a are offset from the center of gravity of the spacer 32a to each of the rounded lobes 32e and less. The distance at which a lobe 32b extends is nearly equal, reducing the change in moment when the force is uneven. This further reduces the risk of damage to the resisting unit 32.

In other possible embodiments, the spacer 32a may also be a triangular shape, a pentagon shape or other irregular shapes having at least one convex corner 32b and at least one concave corner 32c. The present invention should not be limited thereto, and the purpose is to avoid The wafer is ectopic due to sudden vibration during transportation, and the gap between the spacers 32a causes wafer damage.

In the above embodiments of FIGS. 2 to 5, the plurality of resisting units 32 may be an integrally formed elastic structure, such as a thermoplastic elastic structure, except that at least two elastic arms 32d (32d') may be achieved. The deformation enables the wafer to be stably held against the gasket 32a. The elastic structure also has the function of shock absorption, which can prevent the wafer from being displaced by the sudden vibration or moving toward the opening 12 of the container 10. A plurality of resisting units 32 are closely arranged on the resisting member 30, and the resisting members 30 are engaged with the recesses 26 of the inner surface 22 of the door panel 20. In other embodiments that may be implemented based on the present inventive concept, the resisting member 30 may also be integrally formed directly with the inner surface 22 of the door panel 20.

In other possible embodiments, the gasket 32a may be in contact with the wafer in a surface coated with a wear resistant material such as polyetheretherketone (PEEK) to reduce friction and particulate dust generation. The height and width of the spacer 32a in this embodiment may be greater than the thickness of the wafer to prevent the wafer from moving up and down and sinking into the gap between the spacers 32a.

However, the above is only the preferred embodiment of the present invention. When it is not possible to limit the scope of the creative implementation, the simple equivalent changes and modifications made according to the scope and description of the patent application are still It is within the scope of this creation.

Claims (12)

The container door panel resisting structure comprises: a container having an opening; a door panel covering the opening; a resisting member disposed on the door panel; and a plurality of resisting units closely arranged on the resisting member Each of the resisting units comprises: a spacer; at least one lobes disposed on the spacer; at least one concave corner disposed on the spacer; and at least two elastic arms, and the left and right sides of the spacer Connecting between the plurality of resisting units that are in close proximity to each other through the at least one lobe and the at least one recessed corner, and the at least one lobe on the spacer and the at least one The number of concave corners is equal. The container door panel resisting structure according to claim 1, wherein the container is a Front Opening Unified Pod (FOUP). The container door panel resisting structure according to claim 1, wherein the door panel further comprises a recess, the recess engaging the resisting member. The container door panel abutment structure of claim 1, wherein each of the at least one lobe protrudes the spacer by a distance of 7-9 millimeters (mm). The container door panel abutment structure of claim 1, wherein each of the at least one concave corner is recessed into the spacer by a distance of 7-9 millimeters (mm). The container door panel resisting structure according to claim 1, wherein the resisting member has a thickness of 9 mm. The container door panel resisting structure according to claim 1, wherein the at least two elastic arms are curved, and the at least two elastic arms support the spacer so that the spacer is 9 mm (mm) away from the door panel. . The container door panel resisting structure according to claim 1, wherein the spacer further comprises four rounded lobes, and two or two are disposed around the spacer. The container door panel abutting structure according to claim 8, wherein the rounded lobes on both sides of the at least one lobed are symmetrical to each other; the rounded lobes on both sides of the at least one concave corner are symmetrical to each other. The container door panel resisting structure of claim 8, wherein the four rounded lobes, the at least one lobes, the at least one recessed corner, and the spacer are co-structured into a star-shaped structure. The container door panel abutting structure according to claim 1, wherein at least one supporting portion is further provided on a bottom surface of each of the at least two elastic arms. The container door panel resisting structure according to claim 1, wherein the back surface of the gasket is further provided with a cross rib.