200832598 九、發明說明 * 【發明所屬之技術領域】 本發明係關於具有：四角框狀的外框；及架設於該外 框的對向邊之間的複數根架條，且將此等架條的上面當成 單片工件的載置面之單片搬運用承盤，且係關於防止間隔 物之破損、及間隔物彼此的接觸所引起的粉塵之發生的技 術。 【先前技術】 所謂單片搬運用承盤，係將以薄型顯示裝置的玻璃基 板爲代表的板狀物當成搬運對象者（例如參照專利文獻1) 。本案申請人已提案出能夠多段堆疊之單片搬運用承盤（ 以下，僅記爲承盤）（例如日本專利特願2005-2 1 4 1 59號（以 下，稱爲先行申請案））。於此承盤中，配設有用以防止承 受所被堆疊之其它承盤的荷重，並且藉由外框等之金屬所 形成的部分彼此之接觸所引起的粉塵之發生的間隔物。 於先行申請案所記載的間隔物，係設爲以超高分子量 (高密度）聚乙烯（UPE)爲材料的樹脂製之一體成形品。採 用此種樹脂之理由是，在將複數片的承盤予以堆疊時’上 下的間隔物即使相互接觸的情形時，不容易因磨耗而引起 粉塵發生，因此，由於粉塵附著所引起的工件之污染可以 有效地防止。 [專利文獻1]日本專利特開2004- 1 6848 4號公報 200832598 【發明內容】 [發明所欲解決之課題] 本案申請人從事以大型液晶電視的玻璃基板 承盤的開發，計劃將收納有該玻璃基板的承盤數 予以堆疊。但是，如前述之樹脂製的間隔物之耐 不很大，因此，在將收容有重量物之玻璃基板的 數十片予以堆疊的情形時，會對存在於層積狀態 承盤的間隔物施以大的荷重，在最壞的情形時， 間隔物破壞，而有引起工件污染之虞。此種不良 由於伴隨近年來的液晶電視的大型化之玻璃基板 ，及堆疊之承盤的片數之增加，間隔物的負擔增 更爲顯著。 本發明係爲了解決以上問題點而完成者，在 備：不容易發生粉塵，且剛性優異的間隔物之單 承盤。 [解決課題之手段] 申請專利範圍第1項所記載之本發明，係以 角框狀的外框；及架設於該外框的對向邊之間的 條，且將此等架條的上面當成單片工件的載置面 運用承盤爲對象。於前述外框設置有間隔物，用 將複數片承盤作成多段狀的堆疊狀態時，承受所 其他承盤的荷重，並且藉由前述外框等之金屬所 分彼此之接觸所引起的粉塵之發生。而且，前述 爲工件之 十片以上 壓強度並 大型承盤 的下方之 甚至產生 ，特別是 的大型化 加而變得 於提供具 片搬運用 具有：四 複數根架 之單片搬 以防止在 被堆疊之 形成的部 間隔物， -5- 200832598 係由：芯塊；及裝著於該芯塊的上下之上下一對的疊加構 件所構成，前述上下疊加構件係以耐磨耗性材所形成，前 述芯塊係以比前述疊加構件強度更高的材料所形成。 如申請專利範圍第2項所記載之本發明，可以於前述 上下疊加構件之任何其中一方形成疊加凸部，且於另外一 方的疊加構件形成與前述疊加凸部凹凸卡合之疊加凹部。 如申請專利範圍第3項所記載之本發明，前述芯塊， 係可以設爲具備：中空塊狀的本體部；及從該本體部突出 所形成的腕部之金屬成形品。 如申請專利範圍第4項所記載之本發明，將藉由用以 使前述承盤從堆疊狀態間離之承盤收納匣的支撐爪所支撐 的被支撐部，設置於前述下方疊加構件，並使前述被支撐 部，形成爲：當將該下方疊加構件裝著於前述芯塊時，會 與前述腕部接觸。 [發明效果] 如申請專利範圍第1項所記載之本發明般，以強度高 的材料來形成芯塊時，可以使間隔物本身的剛性充分強化 ，能夠有效地防止堆疊狀態中之間隔物的變形、及伴隨此 之破壞。另外，藉由以耐磨耗材來形成被裝著於間隔物本 體的上下之堆機構造，可以抑制在堆疊狀態中，間隔物彼 此接觸所引起的粉塵之發生，能夠確實地防止工件的污染 。如前述般，如依據申請專利範圍第1項所記載之本發明 ，可以獲得粉塵不容易發生，且剛性優異的間隔物。 -6- 200832598 如申請專利範圍第2項所記載般，如於上下的疊加構 件形成疊加凸部與疊加凹部時，可以使彼兩者在堆疊狀態 中凹凸卡合，於將複數片的承盤予以堆疊來搬運之狀態下 ，可以確實地防止承盤偏離移動、落下。 如申請專利範圍第3項所記載之本發明般，如於芯塊 設置腕部時’可以該腕部爲主體來承受來自作用於承盤的 承盤收納匣之支撐爪的外力，能夠謀求間隔物的剛性提升 。另外，如將本體部設爲中空塊狀時，在對腕部施加有外 力之情形時，可以藉由中空部分稍微變形而使應力分散， 進而，藉由中空部分，也可以謀求承盤的輕量化。 如申請專利範圍第4項所記載之本發明般，將藉由用 以使前述承盤從堆疊狀態間離之承盤收納匣的支撐爪而被 支撐的被支撐部，設置於下方的疊加構件，並使前述被支 撐部，形成爲：當將該下方的疊加構件裝著於前述芯塊時 ，會與前述腕部接觸來形成時，可以有效地防止因支撐爪 與下方的疊加構件之接觸所引起的粉塵之發生。 【實施方式】 以下，針對關於本發明之單片搬運用承盤的實施形態 ，參照圖面來做說明。第1圖係表示單片搬運用承盤之整 體構成平面圖，第2圖係表示將單片搬運用承盤予以堆疊 的狀態圖，第3圖係表示藉由輥輪輸送機之單片搬運用承 盤的搬運狀態圖，第4圖係間隔物的分解圖，第5圖係表示 將間隔物組裝於框架之狀態圖。另外，在本實施形態中’ 200832598 將第1圖中以箭頭Y1所示方向當成前後方向，將與該方向 正交的方向（箭頭Y2)規定爲左右方向。 如第1圖所示般，單片搬運用承盤（以下，僅記爲[承 盤])1係具有：中空四角框狀的外框2 ;及架設於此外框2 的左右之對向邊之間的複數根（在本實施形態中爲8根）的 架條3，將此等架條3的上面當成單片工件（以下，僅記爲 「工件」）4的載置面。此種承盤1係如第2圖所示般，複數 片的承盤1係在被堆疊爲多段狀之狀態下被搬運至潔淨室 內，且藉由藉由承盤收納匣（以下，僅記爲收納匣）5而一 片一片被取出。然後，如第3圖所示般，載置於具有搬運 輥輪8之輥輪輸送機（以下，僅記爲輸送機）7，而被搬運至 特定的處理裝置。另外，關於本實施形態之承盤1，係將 大型的液晶電視之玻璃基板當成工件4。 如第1圖所示般，外框2係由：前後方向（Y1)走向之二 根框架10、10;及左右方向（Y2)走向之二根框架11、11之 合計4根的框架所形成，且係在將此等框架10、1 1組成長 方四角形狀後，以角落架條20與接合金屬件21來將構成角 落部之相鄰的框架1 〇、1 1彼此予以接合所形成。各框架1 〇 、1 1係對金屬製（S U S 3 0 4)的板材施以衝壓加工所形成者， 如第2圖及第3圖所示般，爲具備：外側平坦部1 2 ;及形成 於比該外側平坦部1 2還低的位置之內側平坦部1 3 ;及連接 此等內側平坦部1 3與外側平坦部1 2之傾斜部1 4。具有被以 輥輪輸送機7之搬運輥輪8所承受之向下的輥輪承受面（以 下，僅記爲「承受面」）1 6之凸緣壁1 5，係呈階段狀朝外 200832598 方向突出形成於外側平坦部1 2。 各架條3係以SUS 3 04等之金屬爲材料之左右長的長條 狀的衝壓加工品，如第1圖及第2圖所示般，係形成爲具有 成爲工件載置面的腹板3 1之剖面棚狀。各架條3係其左右 方向的兩端部以兩端夾持狀被卡止於左右的框架10、10的 內側平坦部13、13之間，並且介由托架22而由傾斜部14及 外側平坦部1 2所支撐。 於第2圖及第3圖中，符號34係表示用以支撐工件4之 載置銷。此載置銷34係被設置於架條3的腹板3 1的上面之 左右方向的等間隔位置。載置銷3 4係以耐磨耗性高的 PEEK(聚醚醚酮）或UPE(超高分子量聚乙烯）等所形成，即 使重複搭載工件4，也不會由於磨耗而產生粉塵，不會污 染工件4。 於構成外框2之四邊的各框架1 〇、1 1的外側平坦部1 2 ，設置有間隔物25，其係如第2圖及第3圖所示般，在設爲 將承盤1上下堆疊成多段狀之狀態時，承受所被堆疊之其 他承盤1的荷重，並且用以防止藉由外框2等之金屬所形成 的部分彼此之接觸所導致的粉塵之發生。在本實施形態中 ，如第1圖所示般，於各框架1 〇、1 1之等間隔位置裝置有 各3個，合計十二個之間隔物2 5。 如第4圖及第5圖所示般，各間隔物25係由：芯塊40( 第4(b)圖）；及裝著於該芯塊40的上面之上疊加構件50(第 4(a)圖）；及裝著於芯塊40的下面之下疊加構件60(第4(c) 圖）所構成。另外，於以下，如第1至第4圖所示般，參照 -9 - 200832598 裝著於前後方向（Y1)走向之框架10的間隔物25來做說明。 第4(b)圖所示之芯塊40，係具有：四角立方體狀的本 體部4 1 ;及從該本體部4 1的前後側面突出外方向所形成的 一對腕部42、42 ;及突出設置於本體部41的上面中央之卡 合凸部43 ;及凹陷形成於本體部41的下面中央之卡合凹部 44之鋁壓鑄成形品。本體部41係呈現具有左右面開口之前 後一對的空隙45、45之中空塊狀，腕部42、4 2係從區分該 空隙45之前後壁的外側面之各面朝前後的水平方向突出形 成。卡合凸部43係由：圓柱部43a ;及設置於該圓柱部43a 的上方，且隨者向上而行，周側面的直徑尺寸變小的推拔 狀之圓錐梯部43b所構成。卡合凹部44係以卡合凸部43 — 面被導引而插入，來決定位置之方式，以：圓柱孔部44a ;及連通此圓柱孔部44a，且隨著向上方而行，對向間隔 變小之推拔狀的圓錐梯部44b所構成。 弟4(a)圖所不之上暨加構件50’係具備：藉由卡合片 5 1而被裝著於芯塊40的上密之平板狀的平板體52 ;及突出 設置於平板體52的上面中央，覆蓋芯塊40的卡合凸部43之 疊加凸部53，且此等卡合片51、平板體52及疊加凸部53係 一體成形的樹脂成形品。疊加凸部53係以：圓柱部53a ; 及設置於此圓柱部53a之上方，且隨著朝向上方而行，直 徑尺寸變小之推拔狀的圓錐梯部53b所構成。此等圓柱部 5 3 a與圓錐梯部5 3 b的周側面之境界部、及圓錐梯部5 3 b 的周側面與上面的境界部，係設爲無銳角之平滑的曲面形 狀。於疊加凸部53的內部形成有用以接受芯塊40的卡合凸 -10- 200832598 部43之收容空隙53c，於平板體52的下面之盤面中央開設 有連通收容空隙53c之開口部52a。 於上疊加構件5 0，在平板體5 2的左右緣形成有前後各 二根，合計4根的卡合片5 1。各卡合片5 1係以：從平板體 5 2的左右緣朝向下方以單邊保持狀延伸出之臂部5 1 a ;及 形成於臂部51a的下端之卡合爪51b所構成，藉由卡合爪 5 1b卡合於芯塊40的空隙45之開口緣，上疊加構件50被裝 著固定於芯塊40。 下疊加構件60係具有：藉由四個卡合片61而被裝著於 芯塊40的下面之底壁部62 ;及從底壁部62的前後周緣朝上 方向立設的前後一對的側壁部63、63 ;及從此等側壁部63 、6 3的上端朝前後水平方向延伸，被收納匣5的支撐爪5 a 所承受之被支撐部64、64，此等係一體成形的樹脂成形品 。於底壁部62的中央部形成有卡合於上疊加構件50的疊加 凸部53之疊加凹部65。疊加凹部65係以：圓柱孔部65a ; 及設置於此圓柱孔部65a的上方，且隨著朝上方而行，直 徑尺寸變小的推拔狀之圓錐梯部65b所構成。各卡合片61 係以：從底壁部62的左右緣各二根朝上方延伸爲單邊保持 狀之臂部61a;及形成於此臂部61a的上端之卡合爪61b所 構成，藉由四個之卡合片61卡合於芯塊40的空隙45之開口 緣，下疊加構件60被裝著固定於芯塊40。 於此等芯塊40的腕部42、及下疊加構件60的被支撐部 64的中央部，係設置有容許對於外框2之安裝用的螺絲70 ( 參照第5圖）的插入之螺絲孔42a、64a。 -11 - 200832598 關於本實施形態之上下的疊加構件50、60，係以耐磨 耗性優異的聚醚醚酮樹脂（以下，記爲PEEK樹脂）爲材料 。即上下疊加構件5 0、6 0係以耐磨耗材所形成。此外，如 先前敘述般，芯塊40爲金屬製（鋁製），該芯塊40係以比上 下疊加構件50、60強度更高的材料所形成。 如前述之間隔物2 5，係如第5圖所示般，在藉由卡合 片51、61，上下疊加構件50、60被裝著固定於芯塊40而成 爲單元零件化之狀態下，藉由螺絲7 0而被螺絲固定於框架 1 〇的外側平坦部1 2。然後，在堆疊承盤1時，存在於上方 側之承盤1的下疊加構件60的疊加凹部65與存在於下方側 之承盤1的上疊加構件5 0之疊加凸部5 3凹凸卡合，可以將 承盤1、1堆積爲上下多段狀。另外，如第5圖所示般，藉 由收納匣5的二股狀的支撐爪5a舉起間隔物25的被支撐部 64，從堆疊狀態可以使承盤1間離並取出。 如依據由前述之構成所形成的本實施形態，以強度高 的材料（鋁）來形成構成間隔物25之芯塊40，可以充分地強 化間隔物25本身的剛性，能有效地防止堆疊狀態中之間隔 物25的變形、及伴隨此之破壞。另外，藉由以耐磨耗性材 來形成裝著於芯塊4 0的上下之疊加構件5 0、6 0，可以抑制 在堆疊狀態下間隔物25彼此接觸所引起的粉塵之發生，能 夠確實地防止工件4的污染。藉此，可以獲得不容易發生 粉麈，且剛性優異的間隔物2 5。 另外，於上下疊加構件5 0、60形成疊加凸部5 3與疊加 凹部65，可以將該兩者如圖示般堆疊之狀態下使其卡合。 -12- 200832598 藉此，在將複數片承盤1予以堆疊搬運之狀態下’可以確 實防止承盤1偏離移動、落下。 於由耐磨耗材所形成之下方側疊加構件60形成藉由收 納匣5之支撐爪5 a而被支撐的被支撐部64 ’可以有效地防 止由於支撐爪5 a與下方側疊加構件6 0之接觸所引起的粉 塵之發生。 於芯塊40設置腕部42時，來自作用於承盤1之收納匣5 的支撐爪5a的外力能以該卡合凸部43爲主體來承受，此 點也可以謀求間隔物25之剛性提升。另外’從中空塊狀的 本體部41突出形成腕部42，雖僅少量’但是對於腕部42可 以賦予朝上下方向移位之餘地，因此，可以有效地防止基 於應力集中，腕部42從伸出基端部（根部）折曲、破壞之不 良。進而，藉由於芯塊40設置中空部，也可以謀求輕量化 與材料成本之降低。 如於疊加凸部53設置推拔狀的圓錐梯部53b時，在將 承盤1堆疊爲上下多段狀時，該圓錐梯部5 3 b的周側面先 抵接疊加凹部65的圓柱孔部65a的內壁面，可以謀求此等 疊加凸部53與疊加凹部65的對位作業的容易化，對承盤1 的堆疊作業的作業效率之提升有貢獻。此外，將圓柱部 5 3 a與圓錐梯部5 3 b的周側面之境界部、及圓錐梯部5 3 b 的周側面與上面之境界部設爲無銳角之平滑的曲面形狀時 ，可以防止因境界部的破壞所引起的粉塵之發生。此外， 能夠使圓柱部53a的周側面之高度尺寸（上下尺寸）變小， 可以抑制疊加凸部5 3與疊加凹部6 5卡合時之上方側的承盤 -13- 200832598 1之落下衝擊，得以防止載置於承盤1之工件4的破壞事故 【圖式簡單說明】 第1圖係表示關於本發明之單片搬運用承盤的整體構 成平面圖。 第2圖係表示將單片搬運用承盤予以堆疊之狀態圖。 第3圖係表示藉由輥輪輸送機之單片搬運用承盤的搬 運狀態圖。 第4圖（a)係表示上疊加構件，（b)係表示芯塊，係 表示下疊加構件。 第5圖係表示將間隔物組裝於框架之狀態圖。 【主要元件符號說明】 1 :單片搬運用承 2 :外框 3 :架條 4 :單片工件（工件） 5 :承盤收納匣 5a :支撐爪 2 5 :間隔物 40 :芯塊 4 1 :芯塊的本體部 42 :芯塊的腕部 -14 - 200832598 5 0 ··疊加構件（上） 5 3 :疊加凸部 60 :疊加構件（下） 64 :下方側之疊加構件的被支撐部 6 5 :疊加凹部 -15-200832598 IX. OBJECT DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to an outer frame having a quadrangular frame shape, and a plurality of framing strips spanned between opposite sides of the outer frame, and the same The upper surface is a single-piece carrier for mounting a single-piece workpiece, and is a technique for preventing the occurrence of dust due to breakage of the spacer and contact between the spacers. [Prior Art] The carrier for a single-piece conveyance is a member to be conveyed by a glass substrate typified by a glass substrate of a thin display device (see, for example, Patent Document 1). The applicant of the present invention has proposed a single-piece carrier for stacking in a plurality of stages (hereinafter, only referred to as a tray) (for example, Japanese Patent Application No. 2005-2 1 4 1 59 (hereinafter referred to as an advanced application). In the retainer, a spacer for preventing the occurrence of dust caused by the contact between the portions formed by the metal such as the outer frame and the like by the load of the other of the stacked trays is provided. The spacer described in the prior application is a resin molded article made of ultrahigh molecular weight (high density) polyethylene (UPE). The reason for using such a resin is that when the plurality of sheets are stacked, the spacers of the upper and lower sides are not likely to cause dust due to abrasion even when they are in contact with each other. Therefore, the contamination of the workpiece due to the adhesion of the dust is caused. Can be effectively prevented. [Patent Document 1] Japanese Patent Laid-Open No. 2004- 1 6848 No. 200832598 [Summary of the Invention] [Problems to be Solved by the Invention] The applicant of the present invention is engaged in the development of a glass substrate holder for a large-sized liquid crystal television, and plans to accommodate the The number of the glass substrates is stacked. However, since the resin-made spacer is not very resistant to the above, when the tens of sheets of the glass substrate in which the weight is accommodated are stacked, the spacer existing in the laminated state is applied. With a large load, in the worst case, the spacer is destroyed, and there is a flaw in the contamination of the workpiece. Such a defect is accompanied by an increase in the number of sheets of the glass substrate which has been increased in recent years, and the increase in the number of sheets of the stacked trays. The present invention has been made in order to solve the above problems, and is a single-seat of a spacer which is less likely to generate dust and has excellent rigidity. [Means for Solving the Problem] The present invention described in claim 1 is an outer frame having a corner frame shape; and a strip spanned between opposite sides of the outer frame, and the upper surface of the outer frame The mounting surface of a single piece of workpiece is used as a target. A spacer is provided in the outer frame, and the load of the other retainer is received when the plurality of retainers are stacked in a plurality of stages, and the dust is caused by the contact of the metal of the outer frame or the like. occur. Further, the above-mentioned ten-piece or more compressive strength of the workpiece and even the lower portion of the large-sized retaining plate are generated, and in particular, the large-scale addition of the workpiece is provided to provide a single-piece transfer with four or more root frames to prevent the being The spacer formed by the stack, -5-200832598 is composed of: a core block; and a superposed member attached to the upper and lower sides of the core block, and the upper and lower stacked members are formed of wear-resistant materials. The core block is formed of a material having a higher strength than the above-mentioned superposed member. According to the invention as recited in claim 2, the superimposed convex portion may be formed on any one of the upper and lower superimposing members, and the superimposed concave portion may be formed in the other superimposed member. In the invention according to the third aspect of the invention, the core block may be a main body portion having a hollow block shape and a metal molded article of a wrist portion formed by projecting from the main body portion. According to the invention as recited in claim 4, the supported portion supported by the supporting claw for accommodating the retainer from the stacked state of the retainer is disposed on the lower stacking member, and The supported portion is formed to be in contact with the wrist portion when the lower superimposing member is attached to the core block. [Effect of the Invention] When the core block is formed of a material having high strength as in the invention described in the first aspect of the invention, the rigidity of the spacer itself can be sufficiently strengthened, and the spacer in the stacked state can be effectively prevented. Deformation, and the damage accompanying it. Further, by forming the upper and lower stacker structures attached to the spacer body by the wear-resistant consumables, it is possible to suppress the occurrence of dust caused by the contact of the spacers in the stacked state, and it is possible to reliably prevent the contamination of the workpiece. As described above, according to the invention described in the first aspect of the patent application, it is possible to obtain a spacer which is less likely to generate dust and has excellent rigidity. -6- 200832598 As described in the second paragraph of the patent application, if the superimposed convex portion and the superimposed concave portion are formed by the superimposing members on the upper and lower sides, the concave and convex portions can be engaged in the stacked state, and the plurality of sheets can be engaged. In the state of being stacked and transported, it is possible to surely prevent the retainer from shifting and falling. In the case of the present invention described in the third aspect of the patent application, if the wrist is provided with a wrist, the external force of the support claw from the retainer receiving jaw of the retainer can be received as the main body, and the interval can be obtained. The rigidity of the object is increased. Further, when the main body portion is formed in a hollow block shape, when an external force is applied to the wrist portion, the stress can be dispersed by slightly deforming the hollow portion, and the hollow portion can also be used to lighten the disk. Quantify. According to the invention described in the fourth aspect of the invention, the supported portion supported by the supporting claw for accommodating the retainer from the stacked state of the retainer is disposed on the lower superimposing member. And the support portion is formed such that when the lower superimposing member is attached to the core block, it is formed in contact with the wrist portion, and the contact between the support claw and the underlying superimposing member can be effectively prevented. The occurrence of dust caused. [Embodiment] Hereinafter, an embodiment of a single-sheet transporting tray according to the present invention will be described with reference to the drawings. Fig. 1 is a plan view showing the entire configuration of a single-sheet transporting tray, Fig. 2 is a view showing a state in which a single-sheet transporting tray is stacked, and Fig. 3 is a view showing a single-piece conveying by a roller conveyor. Fig. 4 is an exploded view of the spacer, and Fig. 5 is a view showing a state in which the spacer is assembled to the frame. Further, in the present embodiment, '200832598, the direction indicated by the arrow Y1 in the first figure is referred to as the front-rear direction, and the direction orthogonal to the direction (arrow Y2) is defined as the left-right direction. As shown in Fig. 1, the single-sheet transporting tray (hereinafter, simply referred to as "the tray") 1 has a hollow frame-shaped outer frame 2 and a left-right opposite side of the frame 2 The cradle 3 of a plurality of roots (eight in the present embodiment) is used as a mounting surface of a single piece of workpiece (hereinafter, simply referred to as "workpiece") 4 as the upper surface of the slats 3. As shown in Fig. 2, the plurality of retaining discs 1 are transported into the clean room in a state of being stacked in a plurality of stages, and are accommodated by the retainer (hereinafter, only One piece was taken out for the storage of 匣)5. Then, as shown in Fig. 3, it is placed on a roller conveyor (hereinafter, simply referred to as a conveyor) 7 having a transport roller 8 and transported to a specific processing device. Further, in the retainer 1 of the present embodiment, the glass substrate of the large liquid crystal television is used as the workpiece 4. As shown in Fig. 1, the outer frame 2 is formed by two frames 10 and 10 which run in the front-rear direction (Y1) and four frames of the total of the two frames 11 and 11 which are oriented in the left-right direction (Y2). After the frames 10 and 1 1 are formed into a rectangular shape, the frame members 20 and the joining metal members 21 are used to join the adjacent frames 1 and 1 forming the corner portions. Each frame 1 〇 and 1 1 are formed by press-forming a metal (SUS 3 0 4) plate material, and as shown in FIGS. 2 and 3, the outer flat portion 1 2 is formed and formed. The inner flat portion 1 3 at a position lower than the outer flat portion 1 2 and the inclined portion 14 of the inner flat portion 1 3 and the outer flat portion 1 2 are connected. The flange wall 15 having the downward roller receiving surface (hereinafter, simply referred to as "bearing surface") received by the conveying roller 8 of the roller conveyor 7 is in the form of a step outward facing 200832598 The direction is formed to be formed on the outer flat portion 1 2 . Each of the racks 3 is formed of a long and long strip-shaped press-worked product made of a metal such as SUS 3 04 as a material, and as shown in FIGS. 1 and 2, is formed to have a web serving as a workpiece mounting surface. 3 1 section shed shape. Each of the rails 3 has its both end portions in the left-right direction sandwiched between the inner flat portions 13 and 13 of the left and right frames 10 and 10, and is inclined by the bracket 22 and The outer flat portion 12 is supported. In Figs. 2 and 3, reference numeral 34 denotes a mounting pin for supporting the workpiece 4. This mounting pin 34 is provided at an equally spaced position in the left-right direction of the upper surface of the web 3 1 of the truss 3. The mounting pin 34 is formed of PEEK (polyether ether ketone) or UPE (ultra high molecular weight polyethylene) having high abrasion resistance, and even if the workpiece 4 is repeatedly mounted, dust does not occur due to abrasion, and Contaminated workpiece 4. A spacer 25 is provided on the outer flat portion 1 2 of each of the frames 1 〇 and 1 1 constituting the four sides of the outer frame 2, and as shown in FIGS. 2 and 3, the tray 1 is placed up and down. When stacked in a multi-stage state, the load of the other retainers 1 to be stacked is received, and the occurrence of dust caused by the contact of the portions formed by the metal of the outer frame 2 or the like is prevented. In the present embodiment, as shown in Fig. 1, three devices are provided at equal intervals between the frames 1 and 1 and a total of twelve spacers 25 are provided. As shown in FIGS. 4 and 5, each spacer 25 is composed of a core block 40 (Fig. 4(b)); and a superimposing member 50 mounted on the upper surface of the core block 40 (4th ( a) Fig.); and a superposed member 60 (Fig. 4(c)) mounted under the lower surface of the pellet 40. In the following, as shown in the first to fourth figures, the spacer 25 in which the frame 10 which is oriented in the front-rear direction (Y1) is attached will be described with reference to -9 - 200832598. The core block 40 shown in Fig. 4(b) has a four-corner cube-shaped main body portion 4 1 and a pair of wrist portions 42 and 42 formed to protrude outward from the front and rear side surfaces of the main body portion 41; An engaging convex portion 43 projecting from the center of the upper surface of the main body portion 41; and an aluminum die-cast molded product having a recessed concave portion 44 formed at the center of the lower surface of the main body portion 41. The main body portion 41 has a hollow block shape having a pair of gaps 45 and 45 before and after the left and right opening, and the wrist portions 42 and 42 protrude from the front surface of the rear side wall of the rear wall before the gap 45 is distinguished from the front and rear horizontal directions. form. The engaging convex portion 43 is composed of a cylindrical portion 43a and a push-shaped conical step portion 43b which is provided above the cylindrical portion 43a and which is upwardly arranged to have a smaller diameter dimension on the circumferential side surface. The engaging recessed portion 44 is inserted and guided by the engaging convex portion 43 to determine the position, such as the cylindrical hole portion 44a; and the cylindrical hole portion 44a, and the upward direction, the opposite direction The push-shaped conical ladder portion 44b having a small interval is formed. The upper part 4(a) is provided with a flat plate body 52 which is attached to the upper core plate 40 by the engaging piece 51, and is protruded from the flat plate body. The center of the upper surface of the cover 52 covers the superimposed convex portion 53 of the engaging convex portion 43 of the core block 40, and the engaging piece 51, the flat plate body 52, and the superimposed convex portion 53 are integrally molded resin molded articles. The superimposed convex portion 53 is composed of a cylindrical portion 53a and a push-shaped conical step portion 53b which is provided above the cylindrical portion 53a and which is formed to face upward and has a reduced diameter. The boundary portion between the cylindrical portion 5 3 a and the circumferential side surface of the conical step portion 5 3 b and the boundary surface portion of the conical step portion 5 3 b and the upper boundary portion are formed into a smooth curved shape having no acute angle. A receiving space 53c for receiving the engaging projection -10-200832598 portion 43 of the core block 40 is formed inside the superimposed convex portion 53, and an opening portion 52a that communicates with the receiving space 53c is formed in the center of the disk surface of the lower surface of the flat plate 52. In the upper stacking member 50, a total of four front and rear, and a total of four engaging pieces 51 are formed on the right and left edges of the flat plate 52. Each of the engaging pieces 51 is composed of an arm portion 51a extending from a left and right edge of the flat plate 52 toward the lower side and an engaging claw 51b formed at a lower end of the arm portion 51a. The upper stacking member 50 is attached to the core block 40 by the engaging claws 5 1b being engaged with the opening edge of the gap 45 of the core block 40. The lower stacking member 60 has a bottom wall portion 62 that is attached to the lower surface of the core block 40 by four engaging pieces 61, and a pair of front and rear portions that are erected upward from the front and rear peripheral edges of the bottom wall portion 62. The side wall portions 63 and 63 and the supported portions 64 and 64 which are received by the support claws 5 a of the crucible 5 are extended in the horizontal direction from the upper end of the side wall portions 63 and 63, and are integrally molded. Product. A superimposed concave portion 65 that is engaged with the superimposed convex portion 53 of the upper superposing member 50 is formed at a central portion of the bottom wall portion 62. The superimposed concave portion 65 is composed of a cylindrical hole portion 65a and a push-shaped conical step portion 65b which is disposed above the cylindrical hole portion 65a and which is formed to face upward and has a reduced diameter. Each of the engaging pieces 61 is composed of an arm portion 61a extending from the left and right edges of the bottom wall portion 62 to the upper side, and an engaging claw 61b formed at the upper end of the arm portion 61a. The lower engaging member 60 is attached and fixed to the core block 40 by the four engaging pieces 61 being engaged with the opening edge of the gap 45 of the core block 40. In the center portion of the arm portion 42 of the core block 40 and the supported portion 64 of the lower stacking member 60, screw holes for inserting the screws 70 (refer to FIG. 5) for attaching the outer frame 2 are provided. 42a, 64a. -11 - 200832598 The superposed members 50 and 60 which are used in the above embodiment are made of a polyetheretherketone resin (hereinafter referred to as PEEK resin) having excellent abrasion resistance. That is, the upper and lower superimposing members 50 and 60 are formed of wear-resistant consumables. Further, as described above, the pellet 40 is made of metal (made of aluminum), and the pellet 40 is formed of a material having a higher strength than the upper and lower superposed members 50, 60. As shown in FIG. 5, the spacers 25 are attached to the core block 40 by the engagement pieces 51 and 61, and the spacers 51 and 61 are attached to the core block 40 to form a unit. The screw is fixed to the outer flat portion 1 2 of the frame 1 by screws 70. Then, when the retainer 1 is stacked, the superimposed concave portion 65 of the lower superimposing member 60 of the retainer 1 present on the upper side is in contact with the superimposed convex portion 5 of the upper superimposing member 50 of the retainer 1 present on the lower side. The trays 1 and 1 can be stacked into a plurality of sections. Further, as shown in Fig. 5, the supported portion 64 of the spacer 25 is lifted by the two-legged supporting claws 5a of the housing 5, and the retainer 1 can be separated and taken out from the stacked state. According to the present embodiment formed by the above-described configuration, the core block 40 constituting the spacer 25 is formed of a high-strength material (aluminum), whereby the rigidity of the spacer 25 itself can be sufficiently enhanced, and the stacked state can be effectively prevented. The deformation of the spacer 25 and the accompanying damage. Further, by forming the upper and lower superposed members 50 and 60 attached to the pellets 40 with the wear-resistant material, it is possible to suppress the occurrence of dust caused by the contact of the spacers 25 in the stacked state, and it is possible to confirm The contamination of the workpiece 4 is prevented. Thereby, it is possible to obtain the spacer 25 which is less prone to whitefly and which is excellent in rigidity. Further, the superposed convex portions 5 3 and the superimposed concave portions 65 are formed on the upper and lower superimposing members 50, 60, and the two can be engaged in a state of being stacked as shown. -12- 200832598 By this, it is possible to surely prevent the retainer 1 from moving off and falling while the plurality of sheets 1 are stacked and transported. The supported portion 64' supported by the lower side superimposing member 60 formed of the wear-resistant consumable member by the supporting claw 5a of the housing 5 can effectively prevent the support member 5a and the lower-side superimposing member 60 from being effectively prevented. The occurrence of dust caused by contact. When the arm portion 42 is provided with the arm portion 42, the external force from the supporting claw 5a of the housing case 5 acting on the retainer 1 can be received mainly by the engaging convex portion 43, and the rigidity of the spacer 25 can be improved. . Further, 'the arm portion 42 is formed to protrude from the hollow block-shaped main body portion 41, and only a small amount is formed, but the wrist portion 42 can be displaced in the vertical direction. Therefore, the stress concentration can be effectively prevented, and the wrist portion 42 can be prevented from being stretched. Defects in the bending and destruction of the base end (root). Further, since the core block 40 is provided with a hollow portion, it is possible to reduce the weight and the material cost. When the push-shaped conical step 53b is provided in the superimposed convex portion 53, when the retainer 1 is stacked in a plurality of upper and lower stages, the circumferential side surface of the conical step portion 5 3 b first abuts against the cylindrical hole portion 65a of the superimposed concave portion 65. The inner wall surface can facilitate the alignment work of the superimposed convex portion 53 and the superimposed concave portion 65, and contributes to an improvement in the work efficiency of the stacking operation of the retainer 1. Further, when the boundary portion between the cylindrical portion 5 3 a and the circumferential side surface of the conical step portion 5 3 b and the peripheral side surface of the conical step portion 5 3 b and the upper boundary portion are formed into a smooth curved surface shape without an acute angle, it is possible to prevent The occurrence of dust caused by the destruction of the realm. Further, the height dimension (upper and lower dimensions) of the circumferential side surface of the cylindrical portion 53a can be made small, and the drop impact of the upper tray 13-200832598 1 when the superimposed convex portion 53 and the superimposed concave portion 65 are engaged can be suppressed. It is possible to prevent the damage of the workpiece 4 placed on the retainer 1 [Simplified description of the drawings] Fig. 1 is a plan view showing the overall configuration of the single-piece transporting retainer of the present invention. Fig. 2 is a view showing a state in which a single-piece conveyance tray is stacked. Fig. 3 is a view showing the transport state of the single-sheet transporting reel by the roller conveyor. Fig. 4(a) shows the upper stacking member, (b) shows the pellet, and the lower stacking member. Fig. 5 is a view showing a state in which spacers are assembled to a frame. [Description of main component symbols] 1 : Monolithic carrier 2 : Frame 3 : Frame 4 : Single workpiece (workpiece) 5 : Carrier 匣 5a : Supporting claw 2 5 : Spacer 40 : Core 4 1 : Body portion 42 of the core block: Wrist portion of the core block - 14 - 200832598 5 0 · Superimposed member (top) 5 3 : Superimposed convex portion 60 : Superposed member (lower) 64 : Supported portion of the superposed member on the lower side 6 5 : Overlay recess -15-