CN110021542A - Container door supporting structure - Google Patents
Container door supporting structure Download PDFInfo
- Publication number
- CN110021542A CN110021542A CN201810274351.XA CN201810274351A CN110021542A CN 110021542 A CN110021542 A CN 110021542A CN 201810274351 A CN201810274351 A CN 201810274351A CN 110021542 A CN110021542 A CN 110021542A
- Authority
- CN
- China
- Prior art keywords
- gasket
- supporting structure
- container
- container door
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003491 array Methods 0.000 claims abstract description 8
- 235000012431 wafers Nutrition 0.000 description 50
- 238000010586 diagram Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101000931462 Homo sapiens Protein FosB Proteins 0.000 description 1
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 102100020847 Protein FosB Human genes 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of container door supporting structures, including a container, have an opening；One door-plate is closed with the vent cover；One supporting piece is set on the door-plate；And it is several support unit, close-packed arrays are on the supporting piece, and each described to support unit include: a gasket；An at least salient angle is set on the gasket；An at least re-entrant angle is set on the gasket；And at least two elasticity arms, it is connect with the gasket left and right sides.
Description
Technical field
The present invention relates to container door supporting structure technology, in particular to it is a kind of through fillet petaloid portion, an at least salient angle,
An at least re-entrant angle and gasket are total to the container door supporting structure that structure is asterism shape structure.
Background technique
In existing semiconductor industry, storage and transport in relation to the related lamellar article such as wafer, light shield or substrate
Play important role.Due to be attached under microcosmic processing procedure, such as on wafer, light shield or substrate component fine particle or
Because the facts such as collision defect are transported in storage, the yield on entire manufacture of semiconductor can be all influenced.
In view of above-mentioned reason, many kinds of containers dedicated for such high-accuracy dustless operation of needs are designed at present,
To store or deliver the related lamellar article such as relevant wafer, light shield or substrate.Fig. 1 is please referred to, Fig. 1 is existing container
Door-plate supporting structure schematic diagram.
Front open type standard wafer box (Front Opening Unified in existing container, such as by taking Fig. 1 as an example
Pod, FOUP), structure include a container 10, container 10 wherein one side have one opening 12 can provide wafer input and it is defeated
Out, and inside container several slots 11 are equipped with to accommodate several wafers.One door-plate 20 is covered with the opening 12 of container 10 and is closed, uses
To protect several wafers inside container 10.
And aforementioned door-plate 20 has an outer surface 24 and an inner surface 22, the outer surface 24 of door-plate 20 can be equipped at least one
Stud structure (not shown), to container 10 described in opening and closing of fault.
In the art, the inner surface 22 of door-plate 20 would generally be provided with supporting piece 30, be set to the inner surface 22 of door-plate 20
Upper to support unit 32 close to 20 midline position of door-plate, and with several, close-packed arrays are on the supporting piece 30, with to avoid wafer
Dystopy or mobile toward 12 direction centres of opening is generated because of vibration.
In the technology of Fig. 1, several settings for supporting unit 32 are clamped symmetrical two on wafer by the way of both arms mostly
Point, to limit the breakage that wafer vibration generates.But no matter which kind of mechanism its clamping or support are designed as, existing mechanism design
In have the shortcomings that mostly many, the mechanism including both arms design is complicated, has the shortcomings that mold opening cost rises.
In addition, the design of both arms, which will increase several units 32 that support, supports or clamps the area contacted when wafer.This
Sample one will cause particle to generate increased risk, or in the case where unbalance stress, lead to wafer breakage or fall into number
In a gap supported between unit 32.
Summary of the invention
The present invention proposes a kind of container door supporting structure, it is intended to solve its wafer restraint knot of the wafer cassette of prior art
The problem of structure is complicated and wafer is easily trapped into the gap between limited part and causes the damage of wafer.To achieve the above object, originally
Invention proposes a kind of container door supporting structure, including a container, has an opening；One door-plate is closed with the vent cover；
One supporting piece is set on the door-plate；And it is several support unit, close-packed arrays are each described to support on the supporting piece
Unit includes: a gasket；An at least salient angle is set on the gasket；An at least re-entrant angle is set on the gasket；And at least
Two elasticity arms are connect with the gasket left and right sides.
Wherein, several support being closely adjacent to each other makes through an at least salient angle with an at least re-entrant angle between unit
In close proximity to and at least salient angle on each gasket is equal with an at least re-entrant angle quantity between the gasket.
It include an at least salient angle and the structure of an at least re-entrant angle through gasket, so that the gap between gasket is in irregular shape, to avoid crystalline substance
The lamellar articles such as round or substrate vibration unexpected during transport due to, generates dystopy, and the gap fallen between gasket causes to damage
It is bad.In addition, reduce and wafer or substrate and other items and several contacts area supported between unit, also belong to effect of the invention it
One.
Above to summary of the invention, it is therefore intended that it is of the invention it is several towards and technical characteristic make a basic explanation.
Invention summary is not to detailed statement of the invention, therefore its purpose is not enumerating key or important set of the invention especially
Several concepts of the invention only are presented in a manner of concise nor being used to define the scope of the present invention in part.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is existing container door supporting structure schematic diagram；
Fig. 2 is the door-plate inner surface schematic diagram of present pre-ferred embodiments；
Fig. 3 supports cell schematics for present pre-ferred embodiments；
Fig. 4 is the door-plate inner surface schematic diagram of another preferred embodiment of the present invention；
Fig. 5 supports cell schematics for further embodiment of this invention.
Drawing reference numeral explanation:
| Label | Title | Label | Title |
| 10 | Container | 32b | Salient angle |
| 11 | Slot | 32c | Re-entrant angle |
| 12 | Opening | 32d | Elasticity arm |
| 20 | Door-plate | 32d’ | Elasticity arm |
| 22 | Inner surface | 32e | Fillet petaloid portion |
| 24 | Outer surface | 32f | Support portion |
| 26 | Groove | 41 | First bending |
| 30 | Supporting piece | 42 | Second bending |
| 32 | Support unit | d1 | First distance |
| 32a | Gasket | d2 | Second distance |
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts it is all its
His embodiment, shall fall within the protection scope of the present invention.
In the present invention unless specifically defined or limited otherwise, term " connection ", " fixation " etc. shall be understood in a broad sense,
For example, " fixation " may be a fixed connection, it may be a detachable connection, or integral；It can be mechanical connection, be also possible to
Electrical connection；It can be directly connected, the connection inside two elements or two can also be can be indirectly connected through an intermediary
The interaction relationship of a element, unless otherwise restricted clearly.It for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
The container 10 of the embodiment of the present invention can refer to the container in Fig. 1 signal, mainly include a container 10, container 10 its
There is middle one side an opening 12 can provide wafer input and output, and several to accommodate equipped with several slots 11 inside container
Wafer；One door-plate 20,12 hamper of opening with container 10, to protect several wafers inside container 10, door-plate 20 has one
Outer surface 24 and an inner surface 22, the outer surface 24 of door-plate 20 can be equipped with an at least bolt structure (not shown), opening or
Close the container 10.
It is the door-plate inner surface schematic diagram of present pre-ferred embodiments referring to Fig. 2, Fig. 2.Based on container provided in Fig. 1
10 structures, Fig. 2 of the present invention disclose the supporting piece 30 of the embodiment of the present invention, are set on the inner surface 22 of door-plate 20 close to door-plate 20
Midline position；And it is several support unit 32, close-packed arrays are generated with to avoid wafer because of vibration on the supporting piece 30
Dystopy is mobile toward 12 direction centres of opening.
In the present embodiment, container 10 be front open type standard wafer box (Front Opening Unified Pod,
FOUP), and in other possible embodiments, container 10 can also be standard wafer feeder (Standard Mechanical
Interface, SMIF) or front open type wafer feeder (Front Opening Shipping Box, FOSB) etc..As long as can
Using all flat sheet containers 10 or carrier of structure of the invention, should all be included in the scope of the present invention, the present invention is simultaneously
The type of container 10 without restriction.
As discussed with the present embodiment, the container 10 for being responsible for storage wafer is front open type standard wafer box (Front Opening
Unified Pod, FOUP), the number for the several slots 11 being internally provided with is 13, and is arranged on the supporting piece 30
Several 32 numbers of unit that support also are 13.
In the present embodiment, the number of wafers that container 10 can accommodate is 13 (13Slots), and in other possible realities
It applies in example, the number of wafers that the number of several slots 11, several numbers for supporting unit 32 and container 10 can accommodate all may
More than or less than 13, the present invention should not be as limit.
Can be with reference to shown in Fig. 2 and Fig. 3, Fig. 3 supports cell schematics for present pre-ferred embodiments.In this implementation
In example, 20 inner surface 22 of door-plate is additionally provided with a groove 26 close to midline position, to engage the supporting piece 30, the master of groove 26
Syllabus is can also to reduce the anteroposterior diameter size of whole container 10 other than being used to the 10 several wafers in inside of buffer container.
In the present embodiment, it all includes a gasket 32a that close-packed arrays, which support unit 32 in each on supporting piece 30,；Extremely
A few salient angle 32b, is set on the gasket 32a, and each at least salient angle 32b protrudes the gasket 32a about 7-9 milli
The distance of rice (mm), preferably 9 millimeters (mm) of distance.
An at least re-entrant angle 32c is set on the gasket 32a, and each at least re-entrant angle 32c is recessed the pad
The distance of piece 32a about 7-9 millimeter (mm), preferably 9 millimeters (mm) of distance；And two elasticity arm 32d, individually with the pad
Connection at left and right sides of piece 32a.
Elasticity arm 32d is designed as arc in the present embodiment, the gasket 32a to be propped up, make the gasket 32a away from
With a distance from about 9 millimeters of the door-plate 20 (mm).
Whereby, when the door-plate 20 in the present embodiment is closed with the lid of container 10, the wafer for being held in gasket 32a can penetrate gasket
Two elasticity arm 32d buffering at left and right sides of 32a.Wherein, be closely adjacent to each other it is described it is several support unit 32 between, through it is described at least
An one salient angle 32b and at least re-entrant angle 32c makes between the gasket 32a in close proximity to and described on each gasket 32a
An at least salient angle 32b is equal with an at least re-entrant angle 32c quantity；More precisely, since each gasket 32a must be with head and the tail
Mutually the mode of rank combines, therefore the mechanism of at least a salient angle 32b and an at least re-entrant angle 32c between two neighboring gasket 32a must count
Amount is consistent, it is enable to match.
When door-plate 20 is closed with the preparation lid of container 10, the wafer of 10 accommodated inside of container can gasket that is first and supporting unit 32
32a contact, while two elasticity arm 32d being driven to generate deformation, so that groove 26 toward 20 inner surface 22 of door-plate of two elasticity arm 32d
It sets and is recessed inwardly, it, can be firmly when each wafer of 10 accommodated inside of container is when lid closes completely for door-plate 20 and container 10
It is held on gasket 32a and limits wafer toward the movement of 12 directions of opening.
In addition, through at least structure of a salient angle 32b and an at least re-entrant angle 32c, an and at least salient angle 32b on gasket 32a
Make between the gasket 32a with an at least re-entrant angle 32c in close proximity to unexpected vibration during can avoid wafer because of transport
And dystopy is generated, the gap fallen between gasket 32a and the breakage or fragmentation that cause wafer.
It please refers to shown in Fig. 4, is the door-plate inner surface schematic diagram of another preferred embodiment of the present invention.In the present embodiment
In, it includes: a gasket 32a that close-packed arrays, which support unit 32 all in each on supporting piece 30,；An at least salient angle 32b, is set to
On the gasket 32a, and the distance of each at least salient angle 32b protrusion gasket about 7-9 millimeters (mm), preferably
The distance of 9 millimeters (mm)；An at least re-entrant angle 32c is set on the gasket 32a, and each at least re-entrant angle 32c is recessed
The distance of the gasket 32a about 7-9 millimeter (mm), preferably 9 millimeters (mm) of distance；And four elasticity arm 32d ', elastic force
Arm 32d ' two-by-two with connect at left and right sides of the gasket 32a, and each elasticity arm 32d ' is arc, to by the gasket 32a
It props up, makes the gasket 32a apart from the distance of about 9 millimeters of the door-plate 20 (mm).
It is same as the embodiment of Fig. 2 and Fig. 3, the single elasticity arm 32d ' design of embodiment is the machine close to continuous S type in Fig. 4
Structure design.Cell schematics can be supported for further embodiment of this invention with initial reference to Fig. 5, Fig. 5.For list in the embodiment of Fig. 5
The description of a elasticity arm 32d ' can also be applied to the embodiment of Fig. 2 and Fig. 3, and the present invention is not limited thereto.In the embodiment of Fig. 5
In, elasticity arm elasticity arm 32d ' is propped up d1 after first distance through contrary first bending 41 by elasticity arm 32d ', then thoroughly
It crosses and gasket 32a is propped up into second distance d2 with the second bending 42.And in the embodiment, first distance d1 and second distance
The summation of d2 is gasket 32a between door-plate 20 at a distance from 9 millimeters (mm).
Whereby, when door-plate 20 and the lid of container 10 close, the wafer for being held in gasket 32a can be through at left and right sides of gasket 32a
Four elasticity arm 32d ' buffering.Wherein, the several units 32 that support being closely adjacent to each other are through at least a salient angle 32b and the institute
Stating an at least re-entrant angle 32c makes between the gasket 32a in close proximity to and at least salient angle 32b on each gasket 32a
It is equal with an at least re-entrant angle 32c quantity.
The embodiment of Fig. 4, can effectively and more using two-by-two with the four elasticity arm 32d ' that connect at left and right sides of the gasket 32a
The seesaw movement for further preventing gasket 32a to generate；Further prevent wafer from generating the risk of friction or damage whereby.This
Outside, it is contemplated that gasket 32a has a possibility that load-bearing, and in the embodiment of Fig. 2 to Fig. 3, elasticity arm 32d (32d ') more can be such as Fig. 5
In embodiment it is the same, in each elasticity arm 32d ' close to 20 inner surface 22 of door-plate side be arranged a support portion 32f.
In the 5 embodiment of figure 5, support portion 32f can be rounded triangle.Certainly, the external form of support portion 32f can also be with
It is round or the geometric figures such as rectangle, the present invention is not limited thereto.Support portion 32f can be provided when gasket 32a load-bearing is heavier
When, it is applied to the extra support power of elasticity arm 32d ', reaches and more preferably supports effect.
It, more can be with if to further increase the load-bearing capacity of gasket 32a in addition, in other possible implementation patterns
Cross is set using its center of gravity as crosspoint at the back side (i.e. close to the side of 20 inner surface 22 of door-plate) of gasket 32a or is waited
Angular one intersects rib.Through intersect rib provide structural thickness, further greatly improve gasket 32a load-bearing capacity and
Its structural stability, the present invention is not limited thereto.
Therefore, when door-plate 20 is closed with the preparation lid of container 10, the wafer of 10 accommodated inside of container can be first and supports unit 32
Gasket 32a contact, while four elasticity arm 32d ' being driven to generate deformation, so that four elasticity arm 32d ' are toward 20 inner surface 22 of door-plate
26 position of groove is recessed inwardly, and allows each wafer of 10 accommodated inside of container in door-plate 20 and the lid conjunction completely of container 10, can
It is mobile toward 12 directions of opening to be firmly held on gasket 32a and limit wafer.
Each side increase separately an elasticity arm 32d ' because of gasket 32a again so that four elasticity arm 32d ' generate deformation and
Lever drives the process of elasticity arm 32d ' that can more consolidate.In addition, through at least a salient angle 32b and at least one is recessed on gasket 32a
The structure of angle 32c, and an at least salient angle 32a and an at least re-entrant angle 32c make between the gasket 32a in close proximity to can avoid
Wafer during transport unexpected vibration due to generate dystopy, the gap fallen between gasket 32a and cause wafer breakage or
Fragmentation.
In addition, for being to reduce setting for contact area in turn with gasket 32a single-contact for circular wafer in shape
Meter, can also efficiently reduce the fine particle generated by friction.
In several of the above embodiments where, the gasket 32a may also include four fillet petaloid portion 32e, be set to the pad two-by-two
The surrounding of piece 32a, and the fillet petaloid portion 32e of at least two sides salient angle 32b is mutually symmetrical；An at least re-entrant angle
The fillet petaloid portion 32e of the two sides 32c is mutually symmetrical, and the four fillets petaloid portion 32e, at least a salient angle 32b, institute
Stating an at least re-entrant angle 32c and gasket 32a and being total to structure is an asterism shape structure.
The so-called asterism shape structure of the present embodiment refers to a fillet petaloid portion 32e, at least salient angle 32b, at least a re-entrant angle 32c
It is starting point to each fillet petaloid portion 32e from gasket 32a center of gravity with gasket 32a and lacks intimate phase at a distance from salient angle 32b extension
Deng, the variation of torque when reducing unbalance stress, and then reduce the risk for supporting the damage of unit 32.
In other possible embodiments, the gasket 32a, which can also be, has at least a salient angle 32b and at least a re-entrant angle
Triangle, pentagon or other irregular shapes of 32c, the present invention should not all be to avoid as limit, purpose wafer because
Unexpected vibration generates dystopy during transport, and the gap fallen between gasket 32a causes wafer to damage.
In the embodiment of above-mentioned Fig. 2 to Fig. 5, several elastic constructions that supports unit 32 and can be one of the forming, such as heat
The elastic construction of plasticity, in addition to can reach at least two elasticity arm 32d (32d ') deformation, so that wafer can firmly be held in gasket
32a is upper outer, and elastic construction also has the effect of shock-absorbing, can avoid wafer and generates dystopy or opening toward container 10 because of unexpected vibration
12 directions of mouth are mobile.For several 32 close-packed arrays of unit that support on the supporting piece 30, the supporting piece 30 is sticked in door-plate 20
On the groove 26 of inner surface 22.And in the embodiment that other may be implemented based on concept of the present invention, supporting piece 30 can also be with door
20 inner surface 22 of plate is integrally formed.
In other possible embodiments, the place of gasket 32a and wafer contacts can coat a kind of abrasion performance with surface
Material, such as polyether-ether-ketone (PEEK) material, to reduce the generation of friction and particle dust.And the height of the present embodiment gasket 32a and
Width can be greater than the thickness of wafer, and the gap between gasket 32a is fallen into avoid moving up and down for wafer.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (12)
1. a kind of container door supporting structure, which is characterized in that container door supporting structure includes:
One container has an opening；
One door-plate is closed with the vent cover；
One supporting piece is set on the door-plate；
And it is several support unit, close-packed arrays are on the supporting piece, and each described to support unit include: a gasket；
An at least salient angle is set on the gasket；
An at least re-entrant angle is set on the gasket；
And at least two elasticity arms, it is connect with the gasket left and right sides；
Wherein, be closely adjacent to each other it is described it is several support between unit make through an at least salient angle and an at least re-entrant angle it is described
In close proximity to and at least salient angle on each gasket is equal with an at least re-entrant angle quantity between gasket.
2. container door supporting structure as described in claim 1, which is characterized in that the container is front open type standard wafer
Box.
3. container door supporting structure as described in claim 1, which is characterized in that be further provided with a groove, institute on the door-plate
It states groove and engages the supporting piece.
4. container door supporting structure as described in claim 1, which is characterized in that described in each at least salient angle protrusion
The distance that 7-9 millimeters of gasket.
5. container door supporting structure as described in claim 1, which is characterized in that each at least re-entrant angle is recessed described
The distance that 7-9 millimeters of gasket.
6. container door supporting structure as described in claim 1, which is characterized in that the supporting piece with a thickness of 9 millimeters.
7. container door supporting structure as described in claim 1, which is characterized in that at least two elasticity arms are arc, and
At least two elasticity arms prop up the gasket for this, make the gasket apart from 9 millimeters of the door-plate of distance.
8. container door supporting structure as described in claim 1, which is characterized in that the gasket further includes four fillet petaloids
Portion is set to the surrounding of the gasket two-by-two.
9. container door supporting structure as described in claim 1, which is characterized in that the circle of an at least salient angle two sides
Angle petaloid portion is mutually symmetrical, and the fillet petaloid portion of an at least re-entrant angle two sides is mutually symmetrical.
10. container door supporting structure as described in claim 1, which is characterized in that the four fillets petaloid portion, at least one convex
It is an asterism shape structure that angle, at least a re-entrant angle and gasket, which are total to structure,.
11. container door supporting structure as described in claim 1, which is characterized in that the bottom of each at least two elasticity arms
Face is further provided with an at least support portion.
12. container door supporting structure as described in claim 1, which is characterized in that the back side of the gasket is further provided with a friendship
Pitch rib.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW107100691A TWI641071B (en) | 2018-01-08 | 2018-01-08 | Container door retaining structure |
| TW107100691 | 2018-01-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110021542A true CN110021542A (en) | 2019-07-16 |
| CN110021542B CN110021542B (en) | 2023-10-03 |
Family
ID=65034286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810274351.XA Active CN110021542B (en) | 2018-01-08 | 2018-03-29 | Container door plate supporting structure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110021542B (en) |
| TW (1) | TWI641071B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09107026A (en) * | 1995-10-12 | 1997-04-22 | Shin Etsu Polymer Co Ltd | Wafer cassette for wafer receiving container |
| TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
| CN1639029A (en) * | 2002-02-26 | 2005-07-13 | 诚实公司 | Wafer container cushion system |
| US20050218034A1 (en) * | 2004-03-31 | 2005-10-06 | Yoshio Kawashima | Lid unit for thin plate supporting container |
| TW200605261A (en) * | 2004-06-11 | 2006-02-01 | Shinetsu Polymer Co | Container of substrate |
| JP2006324327A (en) * | 2005-05-17 | 2006-11-30 | Shin Etsu Polymer Co Ltd | Substrate accommodating container and its manufacturing method |
| TW200832600A (en) * | 2006-11-07 | 2008-08-01 | Shinetsu Polymer Co | Substrate container |
| CN101673696A (en) * | 2008-09-12 | 2010-03-17 | 家登精密工业股份有限公司 | Front-opening unified pod with wafer constraints arranged on door |
| CN101740435A (en) * | 2008-11-14 | 2010-06-16 | 家登精密工业股份有限公司 | Front-opened wafer box for fixing wafer restriction part module in mode of rotating, resisting and fixing |
| KR20110046035A (en) * | 2009-10-28 | 2011-05-04 | 박종익 | Front retainer |
| TW201740493A (en) * | 2016-02-05 | 2017-11-16 | 恩特葛瑞斯股份有限公司 | Cushion retainer for substrate container |
| CN208077949U (en) * | 2018-01-08 | 2018-11-09 | 家登精密工业股份有限公司 | Structure for propping and holding door plate of container |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5228568A (en) * | 1991-08-30 | 1993-07-20 | Shin-Etsu Handotai Co., Ltd. | Semiconductor wafer basket |
| US6951284B2 (en) * | 2001-11-14 | 2005-10-04 | Entegris, Inc. | Wafer carrier with wafer retaining system |
| US8528738B2 (en) * | 2006-06-13 | 2013-09-10 | Entegris, Inc. | Reusable resilient cushion for wafer container |
| WO2009060782A1 (en) * | 2007-11-09 | 2009-05-14 | Shin-Etsu Polymer Co., Ltd. | Retainer and substrate storing container |
| TWI337162B (en) * | 2008-07-31 | 2011-02-11 | Gudeng Prec Industral Co Ltd | A wafer container with constraints |
-
2018
- 2018-01-08 TW TW107100691A patent/TWI641071B/en active
- 2018-03-29 CN CN201810274351.XA patent/CN110021542B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09107026A (en) * | 1995-10-12 | 1997-04-22 | Shin Etsu Polymer Co Ltd | Wafer cassette for wafer receiving container |
| TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
| CN1639029A (en) * | 2002-02-26 | 2005-07-13 | 诚实公司 | Wafer container cushion system |
| US20050218034A1 (en) * | 2004-03-31 | 2005-10-06 | Yoshio Kawashima | Lid unit for thin plate supporting container |
| TW200605261A (en) * | 2004-06-11 | 2006-02-01 | Shinetsu Polymer Co | Container of substrate |
| JP2006324327A (en) * | 2005-05-17 | 2006-11-30 | Shin Etsu Polymer Co Ltd | Substrate accommodating container and its manufacturing method |
| TW200832600A (en) * | 2006-11-07 | 2008-08-01 | Shinetsu Polymer Co | Substrate container |
| CN101673696A (en) * | 2008-09-12 | 2010-03-17 | 家登精密工业股份有限公司 | Front-opening unified pod with wafer constraints arranged on door |
| CN101740435A (en) * | 2008-11-14 | 2010-06-16 | 家登精密工业股份有限公司 | Front-opened wafer box for fixing wafer restriction part module in mode of rotating, resisting and fixing |
| KR20110046035A (en) * | 2009-10-28 | 2011-05-04 | 박종익 | Front retainer |
| TW201740493A (en) * | 2016-02-05 | 2017-11-16 | 恩特葛瑞斯股份有限公司 | Cushion retainer for substrate container |
| CN208077949U (en) * | 2018-01-08 | 2018-11-09 | 家登精密工业股份有限公司 | Structure for propping and holding door plate of container |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201931503A (en) | 2019-08-01 |
| TWI641071B (en) | 2018-11-11 |
| CN110021542B (en) | 2023-10-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1116203C (en) | IC tray with self aligning pocket | |
| US6357595B2 (en) | Tray for semiconductor integrated circuit device | |
| KR20010037242A (en) | structure of leadframe for semiconductor package and mold for molding the same | |
| US20110155598A1 (en) | Reticle POD and supporting components therebetween | |
| US20060054532A1 (en) | Storing tray and storing device | |
| CN208077949U (en) | Structure for propping and holding door plate of container | |
| CN110021542A (en) | Container door supporting structure | |
| CN203774270U (en) | Wafer restriction module and front open unit pod (FOUP) | |
| CN208264959U (en) | Toter and its bearing assembly | |
| KR101160117B1 (en) | Semiconductor package | |
| CN107819092A (en) | A kind of battery tray | |
| US6505741B1 (en) | Tray for receiving semiconductor devices | |
| US8436452B2 (en) | Carrier for chip packages | |
| US6653728B1 (en) | Tray for ball grid array semiconductor packages | |
| US20070252269A1 (en) | Substrate structure for semiconductor package and package method thereof | |
| CN204167288U (en) | Flat no-lead packages body | |
| JP7361614B2 (en) | Semiconductor chip tray and method for storing semiconductor chips | |
| JP2001028391A (en) | Tray for storing semiconductor integrated circuit device | |
| TW202112629A (en) | Wafer cushion | |
| US20140083902A1 (en) | Package structure for substrate storage container | |
| CN220826792U (en) | Wafer anti-collision packaging box | |
| CN210182342U (en) | Single crystal rocking disc for electronic component | |
| CN213071118U (en) | Wafer bearing disc structure | |
| CN219916173U (en) | Mask plate supporting piece and photomask box | |
| KR20010028962A (en) | Tray for chip scale package(CSP) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |