CN207581916U - A kind of distribution device of rotary target - Google Patents
A kind of distribution device of rotary target Download PDFInfo
- Publication number
- CN207581916U CN207581916U CN201721242030.9U CN201721242030U CN207581916U CN 207581916 U CN207581916 U CN 207581916U CN 201721242030 U CN201721242030 U CN 201721242030U CN 207581916 U CN207581916 U CN 207581916U
- Authority
- CN
- China
- Prior art keywords
- charge
- gas
- head
- casing
- air outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model is suitable for magnetic control sputtering vacuum coating technical field.The utility model discloses a kind of distribution devices of rotary target, it is in charge of head (20), two synchronous outlet duct structures (30) including air inlet pipe (10), first, it is characterized in that, described first is in charge of head (20) for T shapes, head (20) is in charge of in air inlet pipe (10) connection first, it is in charge of the another both ends of head (20) and respectively connected synchronous outlet duct structures, the synchronous outlet duct structures (30) is in charge of head (32), two gas-distributing pipes (33), air outlet pipe (34), casing (35) equipped with straight tube (31), second；The beneficial effects of the utility model are：Magnetic control sputtering vacuum coating needs to be passed through reaction gas, and this programme is identical by the distance of gas outlet to stomata, and each hole energy while outlet ensure out that the gas output in each hole is identical, ensure that Film color is uniform.
Description
Technical field
The utility model is related to magnetic control sputtering vacuum coating technical field, more particularly to a kind of distribution device of rotary target.
Background technology
Magnetron sputtering plating field is substantially using planar cathode and rotating cathode at present (cathode is otherwise referred to as target)
Mode carries out, and under certain vacuum environment, by the comprehensive function of magnetic field and electric field, make the regional area shape of target material surface
Into aura, target particle from target material surface is sputtered out, places substrate in aura area at this time, it is possible to be formed in substrate surface
The film layer formed by target particle.And certain vacuum environment is realized by being passed through inert gas；It is situated between if necessary to be formed
Plasma membrane layer is then needed to be passed through reaction gas, such as form TiN film layer, be needed using Ti targets, and be passed through Ar gas and N2Gas.
Due to the requirement of batch production, the planar cathode of rectangle and the rotating cathode of long cartridge type, gas are generally used
Generally it is passed near cathode using stainless steel tracheae；Since tracheae is entered by one end, and the other end is blocked, in tracheae
An equal amount of stomata is uniformly opened on wall；May result in the gas come out by stomata in this way is different amount, close to tracheae
The stomata tolerance for being passed through mouth can be on the high side, separate to be passed through the stomata tolerance of mouth with regard on the low side；More than stomata tolerance, the table of corresponding substrate
Face mask layer color will be partially deep.This just needs a kind of device of venthole while discharge equally amount gas that can allow.
Utility model content
The utility model mainly solving the technical problems that provide a kind of distribution device of rotary target, a kind of rotary target
Distribution device, the distance for allowing gas outlet to stomata is identical, and each hole energy outlet, and gas output is identical simultaneously ensures Film color
Uniformly.
To solve the above-mentioned problems, the utility model provides a kind of distribution device of rotary target, including air inlet pipe, first point
Tube head, two synchronous outlet duct structures, described first is in charge of head for T shapes, and head is in charge of in air inlet pipe connection first, and first to be in charge of head another
Both ends respectively connected synchronous outlet duct structures, and the synchronous outlet duct structures are in charge of head, two points of gas equipped with straight tube, second
Pipe, air outlet pipe, casing；The gas-distributing pipe is L-shaped, and head is in charge of in straight tube connection second, and the second another both ends for being in charge of head connect respectively
One end of gas-distributing pipe, the other end of two gas-distributing pipes pass through the through-hole of casing, are inserted into the side opening of air outlet pipe, the both ends of air outlet pipe are set
There is chock plug, and respectively there are a discharge stomata in the both sides of air outlet pipe, for air outlet pipe in casing, the side of casing is equipped with row's end outlet
Hole, the both ends of casing are equipped with casing chock plug.
It further says, each whole venthole corresponds to each venthole.
It further says, the distance of each whole venthole to the air outlet pipe is equal.
It further says, the other end in gas-distributing pipe passes through the through hole of casing to take weld equipped with first, adopts
Take welded seal.
It further says, the other end of two gas-distributing pipe, which is inserted at the side opening of air outlet pipe, is equipped with the second weld, takes
Welded seal.
It further says, described second is in charge of head connect to form U-shaped with two gas-distributing pipes.
In use, interaction of the rotary target by electric field and magnetic field so that target surface particle is sputtered out, is deposited on target
On product surface in front, film layer is formed；If necessary to form media coating, then need to be passed through reaction gas；Gas is from air inlet
Pipe is in charge of head to first and respectively enters two synchronous outlet duct structures, and into after synchronous outlet duct structures, gas is from straight tube to the
Two are in charge of head, then to two gas-distributing pipes, and are transported to air outlet pipe from the other end of two gas-distributing pipes, then go out from the venthole of air outlet pipe
Come, from venthole outlet to casing, gas is finally discharged by whole venthole；Since the distance of whole venthole to venthole is equal,
So whole venthole can be vented simultaneously, the gas of equivalent is discharged, ensures that Film color is uniform.
The beneficial effects of the utility model are：Magnetic control sputtering vacuum coating needs to be passed through reaction gas, and this programme is conceded
The distance of gas port to stomata is identical, and each hole energy while outlet ensure out that the gas output in each hole is identical, ensure that Film color is equal
It is even.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, and the attached drawing in describing is this practicality
Some novel embodiments, to those skilled in the art, without creative efforts, can be with
Other accompanying drawings are obtained according to these attached drawings.
Fig. 1 is that the utility model implements structural profile illustration.
Fig. 2 is the A-A sectional views of the utility model embodiment Fig. 1.
With reference to embodiment, and with reference to attached drawing, the realization of the utility model aim, functional characteristics and advantage are made into one
Walk explanation.
Specific embodiment
In order to make the purpose, technical scheme and advantage of utility model clearer, implement below in conjunction with the utility model
Attached drawing in example, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that described reality
It is utility model part of the embodiment to apply example, instead of all the embodiments.Based on the embodiment in the utility model, this field
It is new to belong to this practicality for those of ordinary skill's all other embodiments obtained under the premise of creative work is not made
The range of type protection.
Embodiment one
Refering to shown in 1 Fig. 2 of attached drawing, a kind of distribution device of rotary target, be in charge of first 20 including air inlet pipe 10, first,
Two synchronous outlet duct structures 30, described first is in charge of first 20 for T shapes, and the connection of air inlet pipe 10 first is in charge of first 20, and first is in charge of
First 20 another both ends respectively connected synchronous outlet duct structures 30, and the synchronous outlet duct structures 30 are in charge of equipped with straight tube 31, second
First 32, two gas-distributing pipes 33, air outlet pipe 34, casings 35；The gas-distributing pipe 33 is L-shaped, and the connection of straight tube 31 second is in charge of first 32, the
The two another both ends for being in charge of first 32 connect one end of gas-distributing pipe 33 respectively, and the other end of two gas-distributing pipes 33 passes through the through-hole of casing 35
351, it is inserted into the side opening 341 of air outlet pipe 34, the both ends of air outlet pipe 34 are equipped with chock plug 342, and the both sides of air outlet pipe 34 respectively have one
Stomata 343 is discharged, for air outlet pipe 34 in casing 35, the side of casing 35 is equipped with row's end venthole 352, the both ends of casing 35
Equipped with casing chock plug 353.
Specifically：The interaction that rotary target passes through electric field and magnetic field so that target surface particle is sputtered out, is deposited on target
On product surface in front, film layer is formed；If necessary to form media coating, then need to be passed through reaction gas；Gas is from air inlet
Pipe 10 to the first is in charge of first 20 and respectively enters two synchronous outlet duct structures 30, into after synchronous outlet duct structures 30, gas from
Straight tube 31 to the second is in charge of first 32, then to two gas-distributing pipes 33, and is transported to air outlet pipe 34 from the other end of two gas-distributing pipes 33, then
It is come out from the venthole 343 of air outlet pipe 34, from 343 outlet of venthole to casing 35, gas is finally discharged by whole venthole 352；
Since the distance of whole venthole 352 to venthole 343 is equal, so whole venthole 352 can be vented simultaneously, the gas of equivalent is discharged
Body ensures that Film color is uniform.
Refering to shown in 1 Fig. 2 of attached drawing, each whole venthole 352 corresponds to each venthole 343.
Refering to shown in 1 Fig. 2 of attached drawing, the distance of each whole venthole 352 to the air outlet pipe 34 is equal.
First is equipped at the through-hole 351 of casing 35 refering to shown in 1 Fig. 2 of attached drawing, the other end in gas-distributing pipe 33 passes through
Weld 331 is taken, takes welded seal.
Refering to shown in 1 Fig. 2 of attached drawing, the other end of two gas-distributing pipe 33, which is inserted at the side opening 341 of air outlet pipe 34, is equipped with the
Two welds 332, take welded seal.
It connect to form U shapes with two gas-distributing pipes 33 refering to shown in 1 Fig. 2 of attached drawing, described second is in charge of first 32.
Above example is only to illustrate the technical solution of the utility model, rather than its limitations；Although with reference to aforementioned reality
Example is applied the utility model is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in each embodiment is stated to modify or to which part technical characteristic progress equivalent replacement, and these
Modifications or substitutions, the spirit and model of various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (6)
1. a kind of distribution device of rotary target is in charge of head (20), two synchronous outlet duct structures including air inlet pipe (10), first
(30), which is characterized in that described first is in charge of head (20) for T shapes, and head (20) is in charge of in air inlet pipe (10) connection first, and first is in charge of
The another both ends of head (20) respectively connected synchronous outlet duct structures (30), the synchronous outlet duct structures (30) equipped with straight tube (31),
Second is in charge of head (32), two gas-distributing pipes (33), air outlet pipe (34), casing (35)；The gas-distributing pipe (33) be L-shaped, straight tube
(31) head (32) is in charge of in connection second, and the second another both ends for being in charge of head (32) connect one end of gas-distributing pipe (33), two points of gas respectively
The other end for managing (33) passes through the through-hole (351) of casing (35), and the side opening (341) for being inserted into air outlet pipe (34) is inner, air outlet pipe (34)
Both ends be equipped with chock plug (342), and respectively there are a discharge stomata (343) in the both sides of air outlet pipe (34), and air outlet pipe (34) is in casing
(35) inner, the side of casing (35) is equipped with row's end venthole (352), and the both ends of casing (35) are equipped with casing chock plug (353).
A kind of 2. distribution devices of rotary target of according to claim 1, which is characterized in that each whole venthole (352)
Corresponding each venthole (343).
A kind of 3. distribution devices of rotary target of according to claim 2, which is characterized in that each whole venthole (352)
Distance to air outlet pipe (34) is equal.
4. a kind of distribution devices of rotary target of according to claim 1, which is characterized in that described in the another of gas-distributing pipe (33)
One end passes through and takes weld (331) equipped with first at the through-hole (351) of casing (35), takes welded seal.
5. a kind of distribution devices of rotary target of according to claim 1, which is characterized in that two gas-distributing pipe (33) it is another
One end, which is inserted at the side opening (341) of air outlet pipe (34), is equipped with the second weld (332), takes welded seal.
6. a kind of distribution devices of rotary target of according to claim 1, which is characterized in that described second be in charge of head (32) with
Two gas-distributing pipes (33) connection forms U-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721242030.9U CN207581916U (en) | 2017-09-26 | 2017-09-26 | A kind of distribution device of rotary target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721242030.9U CN207581916U (en) | 2017-09-26 | 2017-09-26 | A kind of distribution device of rotary target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207581916U true CN207581916U (en) | 2018-07-06 |
Family
ID=62727899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721242030.9U Expired - Fee Related CN207581916U (en) | 2017-09-26 | 2017-09-26 | A kind of distribution device of rotary target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207581916U (en) |
-
2017
- 2017-09-26 CN CN201721242030.9U patent/CN207581916U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103132044B (en) | A kind of shielding case improving planar target plated film homogeneity | |
| CN104099571A (en) | Evaporation source component, film deposition device and film deposition method | |
| CN106637088A (en) | Nozzle flapper and vapor deposition device | |
| CN207581916U (en) | A kind of distribution device of rotary target | |
| CN207581917U (en) | A kind of air pipe structure for magnetron sputtering | |
| CN206986277U (en) | A kind of glass ion plated film spray equipment | |
| CN209412304U (en) | A kind of magnetic control sputtering vacuum coating equipment that process gas is evenly distributed | |
| CN106756884A (en) | A kind of PECVD coating apparatus | |
| CN112281126B (en) | Reaction magnetron sputtering separation type gas distribution method | |
| CN205024316U (en) | Ash that separates of pure ion plating device filter turns over board | |
| CN203741411U (en) | PECVD (Plasma Enhanced Chemical Vapor Deposition) gas inlet structure | |
| CN109402585A (en) | A kind of magnetic control sputtering vacuum coating equipment that process gas is evenly distributed | |
| CN206337307U (en) | A kind of large-scale DLC film vacuum coater | |
| CN204779787U (en) | Magnetron sputtering target rifle | |
| CN205473968U (en) | Evacuating device for vacuum coating equipment | |
| CN208632637U (en) | Sputtering coating equipment | |
| CN211142152U (en) | Integrated capillary gas pipe gas supply device for improving PVD color uniformity | |
| CN206219655U (en) | A kind of nozzle flapper and evaporation coating device | |
| CN204999965U (en) | Magnetron sputtering intelligence air distributor | |
| CN203582958U (en) | Ion source cleaner used in coating equipment | |
| JP2009173975A5 (en) | ||
| CN207592775U (en) | A kind of powder Sputting film-plating apparatus | |
| CN105344571A (en) | Hot air nozzle for drying | |
| CN204874721U (en) | Can control electric field strength's sputter coating device | |
| CN204752843U (en) | Magnetron sputtering filming equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20200926 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |