CN205473968U - Evacuating device for vacuum coating equipment - Google Patents
Evacuating device for vacuum coating equipment Download PDFInfo
- Publication number
- CN205473968U CN205473968U CN201620082236.9U CN201620082236U CN205473968U CN 205473968 U CN205473968 U CN 205473968U CN 201620082236 U CN201620082236 U CN 201620082236U CN 205473968 U CN205473968 U CN 205473968U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- vacuum coating
- adapter
- storehouse
- taken over
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Physical Vapour Deposition (AREA)
Abstract
The utility model provides an evacuating device for vacuum coating equipment, including the vacuum coating storehouse, include still that two U types are taken over to take over with the vacuum, four extraction openings of inner wall symmetric distribution in vacuum coating storehouse, the both ends that the U type was taken over are link up with an extraction opening respectively, and the both ends that the vacuum was taken over are link up with the middle part that the U type was taken over respectively, and the middle part of vacuum takeover has the joint of bleeding. The beneficial effects of the utility model are that furthest's reduction evacuation divides other influence to vacuum coating intracavity air current, makes the coating film layer more even.
Description
Technical field
This utility model relates to a kind of vacuum coating equipment vacuum extractor.
Background technology
One bleeding point is often set in the vacuum lumen of vacuum coating equipment in existing technology, so leads
Having caused the air-flow in vacuum lumen the most uneven, when plated film, plating material or the sputtering target of the indoor evaporation of plating spatters
The dispersion of the atom that goes out, ion is uneven, the most rigid uniformity of plated film.
Summary of the invention
Problem to be solved in the utility model is to provide a kind of vacuum coating equipment vacuum extractor, overcomes
Deficiency of the prior art.
For solving above-mentioned technical problem, the technical solution adopted in the utility model is: vacuum coating equipment is used
Vacuum extractor, including vacuum coating storehouse, also includes two U-shaped adapters and vacuum adapter, described vacuum
Symmetrical four bleeding points of inwall in plated film storehouse, the two ends of described U-shaped adapter are taken out respectively described in one
QI KOU is through, and the two ends of described vacuum adapter are through with the middle part of described U-shaped adapter respectively, described vacuum
The middle part of adapter has air extraction connector.
Further, each described bleeding point is respectively provided with baffle-box, described baffle-box and described vacuum coating
Internal and described U-shaped adapter the inwall in storehouse is the most through.
This utility model has the advantage that with good effect: owing to using technique scheme, maximum limit
The impact on vacuum coating intracavity air-flow difference of the minimizing evacuation of degree, makes film plating layer more uniform.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present utility model；
In figure: 1-vacuum coating storehouse；2-baffle-box；3-air extraction connector；4-U type is taken over；5-vacuum connects
Pipe.
Detailed description of the invention
As it is shown in figure 1, this utility model provides a kind of vacuum coating equipment vacuum extractor, including true
Empty plated film storehouse 1, also includes two U-shaped adapters 4 and vacuum adapter 5, the inwall pair in vacuum coating storehouse 1
Claiming distribution four bleeding points, the two ends of U-shaped adapter 4 are through with a bleeding point respectively, vacuum adapter 5
Two ends through with the middle part of U-shaped adapter 4 respectively, the middle part of vacuum adapter 5 has air extraction connector 3.
During use, air extraction connector 3 is connected with external vacuum pump, due to the path of each bleeding point to vacuum pump
The most identical, and each bleeding point is symmetrically distributed on vacuum coating storehouse 1, therefore vacuum is to gas in storehouse
The interference of stream is cancelled out each other, it is to avoid the coating process intermediate ion air-flow inequality respectively caused due to evacuation
The generation of even phenomenon.
Being respectively provided with baffle-box 2 on each bleeding point, baffle-box 2 is internal with vacuum coating storehouse 1 and U-shaped connects
The inwall of pipe 4 is the most through.The setting of baffle-box 2 further functions as the effect of buffering.
Above embodiment of the present utility model is described in detail, but described content has been only this practicality newly
The preferred embodiment of type, it is impossible to be considered for limiting practical range of the present utility model.Fan Yiben is practical
Equalization change and the improvement etc. that novel application range is made, all should still belong to patent of the present utility model and contain
Within the scope of lid.
Claims (2)
1. vacuum coating equipment vacuum extractor, including vacuum coating storehouse, it is characterised in that: also wrap
Include two U-shaped adapters and vacuum adapter, symmetrical four bleeding points of inwall in described vacuum coating storehouse,
The two ends of described U-shaped adapter are through with a described bleeding point respectively, and the two ends of described vacuum adapter are respectively
Through with the middle part of described U-shaped adapter, the middle part of described vacuum adapter has air extraction connector.
Vacuum coating equipment vacuum extractor the most according to claim 1, it is characterised in that:
Being respectively provided with baffle-box on each described bleeding point, described baffle-box is internal and described with described vacuum coating storehouse
The inwall of U-shaped adapter is the most through.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620082236.9U CN205473968U (en) | 2016-01-27 | 2016-01-27 | Evacuating device for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620082236.9U CN205473968U (en) | 2016-01-27 | 2016-01-27 | Evacuating device for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205473968U true CN205473968U (en) | 2016-08-17 |
Family
ID=56619159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620082236.9U Expired - Fee Related CN205473968U (en) | 2016-01-27 | 2016-01-27 | Evacuating device for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205473968U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114196933A (en) * | 2021-12-10 | 2022-03-18 | 佛山市佛欣真空技术有限公司 | Air exhaust opening structure for vacuum coating machine |
-
2016
- 2016-01-27 CN CN201620082236.9U patent/CN205473968U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114196933A (en) * | 2021-12-10 | 2022-03-18 | 佛山市佛欣真空技术有限公司 | Air exhaust opening structure for vacuum coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160817 Termination date: 20190127 |