CN106637088A - Nozzle flapper and vapor deposition device - Google Patents
Nozzle flapper and vapor deposition device Download PDFInfo
- Publication number
- CN106637088A CN106637088A CN201611132190.8A CN201611132190A CN106637088A CN 106637088 A CN106637088 A CN 106637088A CN 201611132190 A CN201611132190 A CN 201611132190A CN 106637088 A CN106637088 A CN 106637088A
- Authority
- CN
- China
- Prior art keywords
- nozzle
- deflector
- plate
- nozzle flapper
- flapper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
Abstract
The invention relates to the technical field of manufacturing of display devices, and discloses a nozzle flapper and a vapor deposition device, so as to improve the phenomenon of stacking of vapor molecules in a nozzle, reduce the blockage of the nozzle, improve the working efficiency of the vapor deposition device, and save a vapor deposition material. The nozzle flapper provided by the embodiment of the invention comprises a plate-shaped body and guide plates, the plate-shaped body is provided with a plurality of openings, the guide plates are arranged correspondingly to each opening of the plate-shaped body, and the guide plates are connected with the plate-shaped body, and are used for guiding the vapor molecules of the vapor deposition material beyond the vapor deposition scope of the nozzle.
Description
Technical field
The present invention relates to display device manufacture technology field, more particularly to a kind of nozzle flapper and evaporation coating device.
Background technology
OLED display screen has the characteristic that colour gamut is wide and contrast is high, except being widely used TV and computer etc.
Beyond display device, also gradually tend to using to mobile terminals such as mobile phones.In the manufacturing process of OLED panel, the steaming of organic material
Plating is an important link.
OLED evaporation coating devices in the course of the work, are operated if necessary to suspend the evaporation to substrate, general to be kept off using nozzle
Nozzle is blocked by plate, so as to the vapour molecule for preventing deposition material is deposited with substrate.As illustrated in figs. ia and ib, evaporation coating device
Including deposition material containing cavity 01, the nozzle being arranged above deposition material containing cavity 01 02, the limit for being arranged at 02 both sides of nozzle
Making sheet 03 and the baffle plate 04 of nozzle 02 can be blocked, wherein, nozzle 02 includes the multiple mouthpieces being arranged side by side.
As shown in Figure 1a, when being deposited with to substrate 05, mask plate 06 is positioned over into the top of nozzle 02, substrate 05 is put
The top of mask plate is placed in, baffle plate 04 is opened, after deposition material is heated to vapor state, vapour molecule is with free molecular flow's
Mode sprays and is attached to the surface of substrate 05 and forms evaporation pattern from the mouthpiece of nozzle 02；As shown in Figure 1 b, when without the need for base
When plate 05 is deposited with, baffle plate 04 is moved to above nozzle 02, so that vapour molecule cannot be diffused on substrate.
In prior art, as the device space is limited, the size of baffle plate is typically small, blocks effect in order to ensure baffle plate
Really, need to keep less distance between baffle plate and nozzle, its technological deficiency is that the shielding mode can cause a large amount of steams point
Son is deposited between nozzle and baffle plate and quickly cannot discharge, or even can cause spray nozzle clogging, so as to have influence on evaporation coating device
Normal work.Sometimes, need to carry out cleaning of beginning to speak to deposition material containing cavity to dredge nozzle, this can cause to evaporate material
Scrap.
The content of the invention
A kind of nozzle flapper and evaporation coating device are embodiments provided, it is existing with the accumulation for improving vapour molecule at nozzle
As reducing spray nozzle clogging, improving the work efficiency of evaporation coating device, save deposition material.
The nozzle flapper that the present invention is provided includes：
Plate-like body, with multiple openings；
The deflector that each opening of correspondence plate-like body is arranged, the deflector are connected with plate-like body, for steaming
The vapour molecule of plating material is directed at outside the evaporation scope of nozzle.
Nozzle flapper in the embodiment of the present invention is provided with opening, when nozzle flapper is blocked above nozzle, deposition material
Vapour molecule quickly can be diffused to through opening and under the guide functions of deflector outside the evaporation scope of nozzle, and not
The surface of substrate can be attached to.Compared to existing technology, the nozzle flapper in the program can effectively improve steam point at nozzle
The packing phenomenon of son, reduces spray nozzle clogging, improves the work efficiency of evaporation coating device, saves deposition material.
Preferably, the plurality of opening laid out in parallel, corresponding deflector includes first respectively with the plurality of opening
Split flow plate and Part II deflector, the Part I deflector and Part II deflector relative nozzle center are in symmetrical
Arrange.
Deflector in the program includes two parts, and two parts deflector relative nozzle center is symmetrical set, steam
After molecule is diffused out from opening, spread to the position away from nozzle center, the evolving path is shorter, and diffusion velocity is larger.
Preferably, the mouthpiece of each opening corresponding nozzle of plate-like body is arranged.The steam point for spraying can be made from mouthpiece
Son is directly spread out from opening, and the evolving path is shorter, so as to further improve the packing phenomenon of vapour molecule at nozzle.
Preferably, the deflector is straight panel shape deflector.
Preferably, the end of the deflector has horizontal water conservancy diversion eaves.Horizontal water conservancy diversion eaves makes vapour molecule spread from eaves side
Go out, there is to vapour molecule certain horizontal water conservancy diversion effect, the effect of the water conservancy diversion of deflector can be improved.
Optionally, the deflector is structure as a whole with the plate-like body, or the deflector and the tabular sheet
Body is detachably connected.
Preferably, the opening is diagonal cut joint, and the incline direction of the diagonal cut joint is parallel to deflector..In the program
Opening can also play certain water conservancy diversion effect, i.e. vapour molecule and begin to spread according to the direction of water conservancy diversion into opening.
Preferably, the periphery of the plate-like body is with the convex edge arranged towards nozzle.Convex edge in the program can hinder
The vapour molecule gone out from edge-diffusion below gear nozzle flapper, can improve the occlusion effect of nozzle flapper.
Preferably, the nozzle flapper is metallic nozzle baffle plate.Metallic nozzle baffle plate has preferable ductility, is easy to add
Work, and be adapted to be deposited with environment.
Present invention also offers a kind of evaporation coating device, including the nozzle flapper described in any of the above-described technical scheme.
Evaporation coating device in the embodiment can improve the packing phenomenon of vapour molecule at nozzle, reduce spray nozzle clogging, carry
The work efficiency of high evaporation coating device, saves deposition material.
Description of the drawings
Fig. 1 a are structural representation when prior art evaporation coating device baffle plate is opened；
Fig. 1 b are structural representation when prior art evaporation coating device baffle plate is closed；
Fig. 2 is nozzle flapper sectional view in one embodiment of the invention；
Fig. 3 is nozzle flapper top view in one embodiment of the invention；
Fig. 4 is nozzle flapper side view in one embodiment of the invention；
Fig. 5 uses schematic diagram for nozzle flapper in one embodiment of the invention；
Fig. 6 is evaporation coating device schematic diagram in one embodiment of the invention.
Reference：
Prior art part：
01- deposition material containing cavities；
02- nozzles；
03- restriction plates；
04- baffle plates；
05- substrates；
06- mask plates；
Part of the present invention：
1- nozzle flappers；
10- plate-like bodies；
11- is open；
12- deflectors；
The horizontal water conservancy diversion eaves of 121-；
122- Part I deflectors；
123- Part II deflectors；
13- convex edges；
2- nozzles；
21- mouthpieces.
Specific embodiment
In order to improve the packing phenomenon of vapour molecule at nozzle, spray nozzle clogging is reduced, improves the work efficiency of evaporation coating device,
Deposition material is saved, a kind of nozzle flapper and evaporation coating device is embodiments provided.To make the purpose of the present invention, technical side
Case and advantage are clearer, and by the following examples the present invention is described in further detail.
Referring to figs. 2 to Fig. 4, nozzle flapper provided in an embodiment of the present invention 1 includes：
Plate-like body 10, with multiple openings 11；
The deflector 12 that each opening 11 of correspondence plate-like body 10 is arranged, deflector 12 are connected with plate-like body 10, are used
Outside the vapour molecule of deposition material to be directed at the evaporation scope of nozzle 2.
Nozzle flapper 1 in the embodiment of the present invention is provided with opening 11, and nozzle flapper 1 is blocked when 2 top of nozzle, is deposited with material
The vapour molecule of material quickly can diffuse to through opening and under the guide functions of deflector nozzle 2 evaporation scope it
Outward, without being attached to the surface of substrate.Compared to existing technology, the nozzle flapper 1 in the program can effectively improve nozzle 2
The packing phenomenon of place's vapour molecule, reduces nozzle 2 and blocks, improve the work efficiency of evaporation coating device, save deposition material.
As shown in Figures 2 and 3, in a preferred embodiment, 11 laid out in parallel of multiple openings, are open 11 points with multiple
Corresponding deflector 12 does not include Part I deflector 122 and Part II deflector 123,122 He of Part I deflector
123 relative nozzle of Part II deflector, 2 center is symmetrical set.
Deflector 12 in the program includes two parts, and 2 center of two parts deflector relative nozzle is symmetrical set, i.e.,
The water conservancy diversion direction of each deflector 12 both facing to 2 edge of nozzle, after vapour molecule is diffused out from opening 11, to 2 side of nozzle
The position diffusion of edge, the evolving path are shorter, and diffusion velocity is larger.
As shown in figure 5, in a preferred embodiment, the mouthpiece of each 11 corresponding nozzle 2 of opening of plate-like body 10
21 are arranged.The vapour molecule for spraying can be made from mouthpiece 21 directly to spread out from opening 11, the evolving path is shorter, so as to enter one
Step improves the packing phenomenon of vapour molecule at nozzle 2.
The concrete shape of deflector 12 is not limited, and deflector 12 can be straight panel shape deflector, or, deflector 12
End has horizontal water conservancy diversion eaves 121.Horizontal water conservancy diversion eaves 121 makes vapour molecule spread out from eaves side, has one to vapour molecule
Fixed horizontal water conservancy diversion effect, can improve the effect of the water conservancy diversion of deflector 12.
Deflector 12 is not limited with the connected mode of plate-like body 10, and deflector 12 can be integrated knot with plate-like body 10
Structure, the nozzle flapper 1 for such as being obtained using the mode of punching press；Certainly, deflector 12 can also be detachably to connect with plate-like body 10
Connect, maintain easily and change deflector 12.
Fig. 2 is refer to, the opening 11 of nozzle flapper 1 is diagonal cut joint, and the incline direction of diagonal cut joint is parallel to deflector 12.Should
Opening 11 in scheme can also play certain water conservancy diversion effect, i.e. vapour molecule and the side according to water conservancy diversion is begun to into opening 11
To diffusion.
Fig. 2 and Fig. 4 is refer to, the periphery of plate-like body 10 is with the convex edge 13 arranged towards nozzle 2.It is convex in the program
The vapour molecule gone out from edge-diffusion below nozzle flapper 1 can be stopped along 13, that can improve nozzle flapper 1 blocks effect
Really.
Specifically, nozzle flapper 1 can be metallic nozzle baffle plate.Metallic nozzle baffle plate has preferable ductility, is easy to
Processing, and be adapted to be deposited with environment.
As shown in fig. 6, present invention also offers a kind of evaporation coating device, including the nozzle flapper 1 of any of the above-described technical scheme.
Evaporation coating device in the embodiment can improve the packing phenomenon of vapour molecule at nozzle 2, reduce nozzle 2 and block,
The work efficiency of evaporation coating device is improved, deposition material is saved.
Obviously, those skilled in the art can carry out various changes and modification without deviating from this to the embodiment of the present invention
Bright spirit and scope.So, if these modifications of the present invention and modification belong to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to comprising these changes and modification.
Claims (10)
1. a kind of nozzle flapper, it is characterised in that include：
Plate-like body, with multiple openings；
The deflector that each opening of correspondence plate-like body is arranged, the deflector is connected with plate-like body, for being deposited with material
The vapour molecule of material is directed at outside the evaporation scope of nozzle.
2. nozzle flapper as claimed in claim 1, it is characterised in that the plurality of opening laid out in parallel, is opened with the plurality of
Corresponding deflector includes Part I deflector and Part II deflector, the Part I deflector and second to mouth respectively
Part deflector relative nozzle center is symmetrical set.
3. nozzle flapper as claimed in claim 1, it is characterised in that the mouthpiece of each opening corresponding nozzle of plate-like body sets
Put.
4. nozzle flapper as claimed in claim 1, it is characterised in that the deflector is straight panel shape deflector.
5. nozzle flapper as claimed in claim 1, it is characterised in that the end of the deflector has horizontal water conservancy diversion eaves.
6. nozzle flapper as claimed in claim 1, it is characterised in that the deflector is integrated knot with the plate-like body
Structure, or the deflector is detachably connected with the plate-like body.
7. nozzle flapper as claimed in claim 1, it is characterised in that the opening is diagonal cut joint, the inclination of the diagonal cut joint
It is oriented parallel to deflector.
8. the nozzle flapper as described in any one of claim 1～7, it is characterised in that the periphery of the plate-like body has court
To the convex edge that nozzle is arranged.
9. the nozzle flapper as described in any one of claim 1～7, it is characterised in that the nozzle flapper is metallic nozzle gear
Plate.
10. a kind of evaporation coating device, it is characterised in that include the nozzle flapper as described in any one of claim 1～9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611132190.8A CN106637088B (en) | 2016-12-09 | 2016-12-09 | A kind of nozzle flapper and evaporation coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611132190.8A CN106637088B (en) | 2016-12-09 | 2016-12-09 | A kind of nozzle flapper and evaporation coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106637088A true CN106637088A (en) | 2017-05-10 |
| CN106637088B CN106637088B (en) | 2019-05-24 |
Family
ID=58824955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611132190.8A Active CN106637088B (en) | 2016-12-09 | 2016-12-09 | A kind of nozzle flapper and evaporation coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106637088B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568224A (en) * | 2016-01-28 | 2016-05-11 | 京东方科技集团股份有限公司 | Shielding device used for evaporation and evaporation equipment |
| CN107604316A (en) * | 2017-09-21 | 2018-01-19 | 上海升翕光电科技有限公司 | A kind of evaporation source nozzle baffle mechanism |
| CN108103451A (en) * | 2017-12-29 | 2018-06-01 | 上海升翕光电科技有限公司 | A kind of OLED vapor deposition line sources equipped with reflector |
| CN108842134A (en) * | 2018-08-29 | 2018-11-20 | 郑州华晶新能源科技有限公司 | A kind of oil shielding volatilization device |
| CN109666898A (en) * | 2019-01-03 | 2019-04-23 | 福建华佳彩有限公司 | A kind of crucible for evaporation source |
| WO2019127684A1 (en) * | 2017-12-28 | 2019-07-04 | 深圳市华星光电半导体显示技术有限公司 | Evaporation source and evaporation apparatus |
| CN112553577A (en) * | 2019-09-26 | 2021-03-26 | 宝山钢铁股份有限公司 | Vacuum coating device for improving vacuum coating yield |
| CN113265621A (en) * | 2021-06-22 | 2021-08-17 | 京东方科技集团股份有限公司 | Evaporation source equipment, evaporation method thereof and evaporation system |
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| EP1754799A2 (en) * | 2005-08-12 | 2007-02-21 | Agfa-Gevaert | Method for manufacturing of storage phosphor plates. |
| CN101655315A (en) * | 2008-08-22 | 2010-02-24 | 三星移动显示器株式会社 | Inner plate and crucible assembly for deposition having the same |
| CN101750639A (en) * | 2008-12-15 | 2010-06-23 | 鸿富锦精密工业（深圳）有限公司 | Optical coating device |
| CN103834921A (en) * | 2014-02-28 | 2014-06-04 | 上海和辉光电有限公司 | Evaporation source check plate structure |
| KR101532740B1 (en) * | 2014-07-18 | 2015-06-30 | 주식회사 선익시스템 | Nozzle for evaporation source |
| CN105039913A (en) * | 2015-09-01 | 2015-11-11 | 京东方科技集团股份有限公司 | Vapor deposition material clearing device and vapor deposition device |
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Patent Citations (6)
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|---|---|---|---|---|
| EP1754799A2 (en) * | 2005-08-12 | 2007-02-21 | Agfa-Gevaert | Method for manufacturing of storage phosphor plates. |
| CN101655315A (en) * | 2008-08-22 | 2010-02-24 | 三星移动显示器株式会社 | Inner plate and crucible assembly for deposition having the same |
| CN101750639A (en) * | 2008-12-15 | 2010-06-23 | 鸿富锦精密工业（深圳）有限公司 | Optical coating device |
| CN103834921A (en) * | 2014-02-28 | 2014-06-04 | 上海和辉光电有限公司 | Evaporation source check plate structure |
| KR101532740B1 (en) * | 2014-07-18 | 2015-06-30 | 주식회사 선익시스템 | Nozzle for evaporation source |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105568224A (en) * | 2016-01-28 | 2016-05-11 | 京东方科技集团股份有限公司 | Shielding device used for evaporation and evaporation equipment |
| CN107604316A (en) * | 2017-09-21 | 2018-01-19 | 上海升翕光电科技有限公司 | A kind of evaporation source nozzle baffle mechanism |
| CN107604316B (en) * | 2017-09-21 | 2019-05-10 | 上海升翕光电科技有限公司 | A kind of evaporation source nozzle baffle mechanism |
| WO2019127684A1 (en) * | 2017-12-28 | 2019-07-04 | 深圳市华星光电半导体显示技术有限公司 | Evaporation source and evaporation apparatus |
| CN108103451A (en) * | 2017-12-29 | 2018-06-01 | 上海升翕光电科技有限公司 | A kind of OLED vapor deposition line sources equipped with reflector |
| CN108842134A (en) * | 2018-08-29 | 2018-11-20 | 郑州华晶新能源科技有限公司 | A kind of oil shielding volatilization device |
| CN108842134B (en) * | 2018-08-29 | 2024-01-16 | 郑州华晶新能源科技有限公司 | Oil shielding volatilizing device |
| CN109666898A (en) * | 2019-01-03 | 2019-04-23 | 福建华佳彩有限公司 | A kind of crucible for evaporation source |
| CN112553577A (en) * | 2019-09-26 | 2021-03-26 | 宝山钢铁股份有限公司 | Vacuum coating device for improving vacuum coating yield |
| CN113265621A (en) * | 2021-06-22 | 2021-08-17 | 京东方科技集团股份有限公司 | Evaporation source equipment, evaporation method thereof and evaporation system |
| CN113265621B (en) * | 2021-06-22 | 2023-11-07 | 京东方科技集团股份有限公司 | Evaporation source equipment, evaporation method thereof and evaporation system |
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|---|---|
| CN106637088B (en) | 2019-05-24 |
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