CN207158319U - Substrate loads and uninstalling system and device - Google Patents

Abstract

The utility model discloses a kind of substrate loading and uninstalling system and device.Substrate loads and uninstalling system includes substrate storing apparatus and substrate loads and discharge mechanism.Substrate storing apparatus is storing at least one substrate and comprising support body and multiple support members.Support body has two opposite sides.Support member is set parallel to each other and is connected to these opposite sides of support body in the first direction, and at least partly these support members are positioned essentially at sustained height.Substrate loads and discharge mechanism has multiple substrate-levitating units, the setting spaced in parallel to each other in the first direction of these substrate-levitating units.Wherein, when substrate loads and discharge mechanism loads or unloads carried base board, at least one substrate-levitating unit is between two these adjacent support members.The utility model can improve the unit volume storage amount of substrate storing apparatus.

Description

Substrate loads and uninstalling system and device

Technical field

It the utility model is related to a kind of substrate loading and uninstalling system and device.

Background technology

Substrate (such as glass substrate) is stored to avoid substrate from producing collision or broken using cassette mostly by general panel factory Split.

In known technology, substrate is supported in the two opposite sides that the support body of cassette can be connected to using such as support member, with Avoid substrate weight in itself and cause to bend or deform.When wanting by taking out substrate in cassette, can be jacked up first with substrate After unit (such as roller) leaves support member by upward (along Z-direction) the jack-up substrate in lower section of support member, substrate transmission is recycled Unit sends out substrate to the outside of cassette, and then will for example, by robotic arm or conveying device (conveyer belt covers band) Substrate is transported to other positions.

However, due to needing to jack up unit (such as idler wheel mechanism) by the downside jack-up substrate of substrate using substrate to leave Support member, therefore, larger operating distance is needed in vertical direction so that two adjacent supporting pieces are in the direction of vertical substrate It can not be too close in (Z-direction), otherwise, substrate, which jacks up unit, may collide the substrate on upper strata when jacking up substrate, cause The rupture of top substrate layer.Also due to two adjacent supporting pieces in z-direction can not be too close to so that the substrate reception of cassette Amount can not be improved further, in order to store more substrates, it is necessary to purchased more cassette, caused the storage cost of substrate indirectly It is higher.

Therefore, how a kind of unit volume storage amount of substrate for improving storage device is provided and then reduces the receipts of substrate The substrate of cost received loads and uninstalling system and device turn into one of important topic.

Utility model content

In view of above-mentioned problem, the purpose of this utility model is loaded for a kind of substrate of offer and uninstalling system and device, its The spacing of the support member (along Z-direction) of substrate storing apparatus can be shortened, thus improve the unit volume storage amount of substrate.

For the above-mentioned purpose, load according to a kind of substrate of the present utility model and uninstalling system include substrate storing apparatus with And substrate loads and discharge mechanism.Substrate storing apparatus is storing at least one substrate and comprising support body and multiple supports Part.Support body has two opposite sides.Support member is set parallel to each other and is connected to these opposite sides of support body in the first direction, and At least partly these support members are positioned essentially at sustained height.Substrate loads and discharge mechanism has multiple substrate-levitating units, The setting spaced in parallel to each other in the first direction of these substrate-levitating units.Wherein, when substrate is loaded and discharge mechanism is loaded or unloaded During carried base board, at least one substrate-levitating unit is between two these adjacent support members.

For the above-mentioned purpose, load according to a kind of substrate of the present utility model and discharge mechanism, itself and substrate storing apparatus Coordinate, substrate storing apparatus is storing at least one substrate and have two phases comprising support body and multiple support members, support body Offside, these support members are set parallel to each other and are connected to these opposite sides of support body in the first direction, and at least partly these Support member is positioned essentially at sustained height, and substrate is loaded and discharge mechanism is characterised by, including multiple substrate-levitating units, this A little substrate-levitating unit settings spaced in parallel to each other in the first direction；Wherein, when substrate loads and discharge mechanism loads or unloading During substrate, at least one substrate-levitating unit is between two these adjacent support members.

In one embodiment, substrate is glass substrate, resin substrate, metal substrate or ceramic substrate.

In one embodiment, substrate-levitating unit has major axis in a second direction, second direction and first direction reality It is vertical in matter.

In one embodiment, at least partly these support members have different height on third direction, and in third party There is certain distance to each other upwards, the distance is between 5 to 20 millimeters, third direction and first direction substantial orthogonality.

In one embodiment, substrate-levitating unit includes air flotation cell or ultrasonic floating unit.

In one embodiment, substrate loads and discharge mechanism further has at least one substrate gear unit, substrate Gear unit is adjacent at least one substrate-levitating unit.

In one embodiment, substrate gear unit has major axis in a second direction, second direction and first direction reality It is vertical in matter.

In one embodiment, substrate gear unit includes clamping device or mechanical arm.

In one embodiment, when substrate loads and discharge mechanism loads or unloads carried base board, at least one substrate transmission Unit is between two these adjacent support members.

In one embodiment, support body further has open side, and when substrate loading and discharge mechanism loads or unloading base During plate, entered by open side or leave substrate storing apparatus.

In one embodiment, when substrate loads and discharge mechanism loads or before unloading carried base board, substrate storing apparatus this These substrate-levitating units of a little support members and substrate loading and discharge mechanism relatively move along third direction, third direction and the One direction substantial orthogonality.

In one embodiment, substrate storing apparatus or substrate load and discharge mechanism by lowering or hoisting gear and along third party To movement.

As described above, in substrate of the present utility model loading and uninstalling system with device, utilizing substrate to load and unload The setting spaced in parallel to each other in the first direction of the substrate-levitating unit of device, and when substrate loading and discharge mechanism are in substrate reception When loading in device or unload carried base board, make at least one substrate-levitating unit between two these adjacent support members.Thus, For known technology, substrate of the present utility model loads and uninstalling system provides base with device by substrate-levitating unit The upward support of plate (floating) strength so that operating distance in vertical direction is less than the operation of the idler wheel mechanism of known technology Distance, therefore, the utility model can shorten the support member of substrate storing apparatus along the spacing of Z-direction, thus can improve substrate receipts Receive the unit volume storage amount of device, and then the storage cost of substrate can be reduced.

Brief description of the drawings

Fig. 1 is a kind of substrate loading of the utility model preferred embodiment and the schematic diagram of uninstalling system.

Fig. 2 and Fig. 3 is respectively substrate loading and application schematic diagram and the side of uninstalling system of embodiment of the present utility model Depending on schematic diagram.

Fig. 4 is the embodiment schematic diagram of the substrate gear unit of substrate of the present utility model loading and discharge mechanism.

Shown in Fig. 5, it is another embodiment of the substrate gear unit of substrate of the present utility model loading and discharge mechanism Schematic diagram.

Embodiment

Hereinafter with reference to relevant drawings, illustrate to be loaded according to the substrate of the utility model preferred embodiment and uninstalling system with Carry and put, wherein identical element will be illustrated with identical reference.

First direction D1, second direction D2 and third direction D3, first direction D1, second are shown in following icon Direction D2 is substantially mutually orthogonal to one another with third direction D3.Wherein, the direction in " height " that third direction D3 refers to, typically may be used Referred to as Z-direction or Z-direction.

Fig. 1 is loaded for a kind of substrate of the utility model preferred embodiment and the schematic diagram of uninstalling system 1, Fig. 2 and Fig. 3 Respectively the substrate loading of the utility model embodiment and the application schematic diagram and schematic side view of uninstalling system 1.

As shown in Figure 1 to Figure 3, substrate loads and uninstalling system 1 includes substrate storing apparatus 2 and substrate loads and unloading Device 3, substrate storing apparatus 2 is loaded with substrate and the fit applications of discharge mechanism 3.Substrate depicted in Fig. 1, which is loaded and unloaded, to be carried Put 3 positioned at the downside of substrate storing apparatus 2 simply to illustrate, in practical application, both can be positioned over not according to the actual requirements Same position, moved again when applying.Substrate storing apparatus 2 can be used to store at least one substrate 20 that (Fig. 2 does not illustrate substrate 20), substrate 20 may be, for example, glass substrate, resin substrate, metal substrate or ceramic substrate, and keeps flat and store in parallel to each other In in substrate storing apparatus 2.In addition, substrate loading and discharge mechanism 3 can be used to the base that will be accommodated in substrate storing apparatus 2 Plate 20 moves outward to outside, or substrate 20 is moved to the internal storage of substrate storing apparatus 2 by outside.

The substrate storing apparatus 2 of the present embodiment includes support body 21, multiple connecting pieces 22 and multiple support members 23.Support body 21 for the benefit of transport preferably rectangular frame structure.Wherein, support body 21 has open side 211 and accommodation space (not indicating), Substrate 20 can be deposited into the accommodation space of support body 21 by open side 211, or by open side 211 by substrate 20 by support body Taken out in 21 accommodation space.Therefore, when substrate loading and discharge mechanism 3 load or unload carried base board 20, substrate 20 is by open side 211 enter or leave substrate storing apparatus 2.

D1 is arranged at intervals at two opposite sides of support body 21 to connecting piece 22 in the first direction.Here, with the phase of open side 211 It is respectively arranged with multiple connecting pieces 22 on two adjacent relative sides and these connecting pieces 22 interval is connected to support body 21 and is Example.In practical application, can optic placode 20 size or thickness adjust two adjacent connection parts 22 in the first direction dl between Away from.Wherein, connecting piece 22 can weld, welding, bonding, fastening, fit, sealed or at least one chimeric or its combination And be connected to two opposite sides of support body 21 or be integrally formed with support body 21, the utility model does not limit.

D1 is set parallel to each other and is connected to these of two opposite sides of support body 21 these support members 23 in the first direction On connecting piece 22, moreover, at least partly these support members 23 are positioned essentially at sustained height (in third direction D3 or Z-direction It is highly identical), to provide the bracing force to single substrate 20.Therefore, when substrate storing apparatus 2 stores substrate 20, substrate 20 lower surface can lean against on the support member 23 of substantial sustained height respectively, to be carried by support member 23 and supporting substrate 20, make it from bending or deform.When substrate 20 is larger and thin, two support members 23 D1 in the first direction spacing need to be compared with It is small.Wherein, these support members 23 can be supporting line body (wire) or support rod body (stick), be not intended to limit.In addition, support member 23 both ends can weld, welding, bonding, fastening, fit, sealed or at least one chimeric and connect with connecting piece 22 Connect.In addition, at least partly these support members 23 have certain distance d (Fig. 3) to each other on third direction D3, distance d can Between 5 to 20 millimeters (5mm≤d≤20mm).Specifically, in the present embodiment, the support member 23 of every 6 sustained heights For one group to support at least one substrate 20, different height then has different groups of support member 23 on third direction D3, and On three direction D3, (distance d) can be between 5 to 20 millimeters, for example, for the spacing between two adjacent support members 23 10mm。

Substrate loads and discharge mechanism 3 has multiple substrate-levitating units 31, and these substrate-levitating units 31 are along first party To D1 settings spaced in parallel to each other.The present embodiment is with the D1 settings spaced in parallel to each other in the first direction of 5 substrate-levitating units 31 Exemplified by.Wherein, substrate-levitating unit 31 can be for example comprising air flotation cell or ultrasonic floating unit or its combination.Air flotation cell is Bracing force is produced by blow gas, and ultrasonic floating unit is to produce the strength to float by ultrasonic.The present embodiment Substrate-levitating unit 31 by taking air flotation cell as an example, be such as, but not limited to made with aluminium extruded type, and can be air flotation strip (air- Floating bar) or air floating table (air-floating table).Here, by taking air flotation strip as an example.Air flotation strip has along second The major axis of direction D2 extensions, its upper side is provided with multiple outlet holes 311, with by being blown out upwards by outlet hole 311 Gas provides the bracing force that substrate 20 floats.Outlet hole 311 can be that array arranges, and can be that one-dimensional or two-dimensional array arranges Or irregular alignment.Here, the strength to be floated by taking two-dimensional arrangements as an example with average offer substrate 20.

In addition, the substrate of the present embodiment loads and discharge mechanism 3 further has at least one substrate gear unit 32, base Plate gear unit 32 is adjacent at least one substrate-levitating unit 31, substrate 20 can be moved into by substrate gear unit 32 or Remove substrate storing apparatus 2.In other words, in the present embodiment, it is to rely on substrate-levitating list to rise substrate 20 along third direction D3 The floating strength that member 31 is provided, but it is to rely on substrate gear unit 32 that moving substrate 20, which enters or left substrate storing apparatus 2, Transmission.Wherein, substrate gear unit 32 can at least include at least one roller, refining bar or crawler belt (such as roller rotate come Transmit substrate 20, or with crawler belt or refine the movement of bar and transmit substrate 20).The substrate gear unit 32 of the present embodiment passes for rolling Moving cell, and exemplified by being respectively arranged at two opposite sides of substrate-levitating unit 31 comprising multiple rollers 321, pass through these rollings The rotation movable substrate 20 of wheel 321.In various embodiments, a roller 321 can also is arranged at substrate-levitating list One side of member 31 or center, the utility model are not intended to limit.

In certain embodiments, as shown in figure 4, it is the substrate biography of substrate of the present utility model loading and discharge mechanism 3 The embodiment schematic diagram of moving cell 32, in addition to roller 321, substrate gear unit 32 can further include connecting rod 322, connecting rod 322 both sides connect roller 321 respectively, and connecting rod 322 has the major axis of D2 extensions in a second direction.In certain embodiments, Also (other of roller 321 can be only arranged respectively in two opposite sides of nearest from open side 211 and corresponding substrate-levitating unit 31 The two opposite sides of substrate-levitating unit 31 there is no roller)；Or in further embodiments, nearest from open side 211 There is row's roller 321 on substrate gear unit 32 corresponding to the outside of support member 23, by making these rollers 321 touch base The lower surface of the leading edge of plate 20 (leading edge of substrate 20 slightly protrudes above outermost support member 23), so that it may pass through the rotation of roller 321 To transmit substrate 20.

In addition, in some other embodiments, as shown in figure 5, it is substrate of the present utility model loading and discharge mechanism 3 Another embodiment schematic diagram of substrate gear unit 32, substrate gear unit 32 can further include mechanical arm 323 or clamping Mechanism (figure does not illustrate), substrate 20 by absorption outside open side 211 or is accepted by mechanical arm 323 (or clamping device), or Person catches the leading edge of substrate 20 or the both ends of leading edge to be displaced outwardly substrate 20 by mechanical arm 323 (or clamping device) And substrate storing apparatus 2 is left, then and by mechanical arm 323 or by other conveyer (such as crawler belt) movement be sent to Other places.The embodiment of aforesaid substrate gear unit 32 is simply illustrated, unavailable to limit the utility model.

Referring again to Fig. 2 and Fig. 3, before substrate loads and discharge mechanism 3 loads or unloaded carried base board 20, substrate storing apparatus 2 these support members 23 load with substrate and these substrate-levitating units 31 of discharge mechanism 3 move along third direction D3 is relative It is dynamic.Here, substrate storing apparatus 2 or substrate load and discharge mechanism 3 can be by lowering or hoisting gear (figure is not shown) and along third party Moved to D3, substrate loading and discharge mechanism 3 is entered the accommodating of substrate storing apparatus 2 by the bottom of substrate storing apparatus 2 Interior volume.In other words, it can be loaded with substrate and discharge mechanism 3 is motionless, lowering or hoisting gear makes substrate storing apparatus 2 in third direction Decline on D3, or substrate storing apparatus 2 is motionless, lowering or hoisting gear make substrate load and discharge mechanism 3 on third direction D3 on Rise, the utility model is not intended to limit.

Therefore, when substrate loads and discharge mechanism 3 loads or unloaded carried base board 20 in the accommodation space of substrate storing apparatus 2 When, at least one substrate-levitating unit 31 is acted between two these adjacent support members 23.The present embodiment is to unload Exemplified by carried base board 20, and each substrate-levitating unit 31 is between two these adjacent support members 23.Work as substrate When floating unit 31 reaches a certain height but does not touch the lower surface of substrate 20 also, so that it may by these outlet holes 311 to Upper blow gas and provide substrate 20 it is upward part support (floatings) strength with reduce frictional force or provide completely support Power, unit (idler wheel mechanism) is jacked up without substrate is fully utilized as known in substrate is jacked up by the lower section of support member upwards 20, substrate 20 is left support member.Wherein, the blow gas of substrate-levitating unit 31 and make the upward levitation height of substrate 20 can be small In or equal to roller 321 radius, so, substrate gear unit 32 (the present embodiment includes multiple rollers 321) still can contact Substrate 20, to provide both frictional force.At the same time, because substrate gear unit 32 (multiple rollers 321) is adjacent to substrate Between two relative sides of floating unit 31 and two adjacent support members 23, therefore, using substrate gear unit 32 (roller 321 rotates clockwise) makes substrate 20 mobile to the direction (D1 in the first direction) of open side 211, afterwards, can be such as Fig. 5 It is shown, recycle clamping device or mechanical arm 323 to catch the leading edge of substrate 20 outside open side 211, to assist substrate 20 Substrate storing apparatus 2 is left to be displaced outwardly.Above-mentioned is the process for unloading carried base board 20, and the process for loading substrate 20 can be above-mentioned stream Journey on the contrary, will not be repeated here.

As noted previously, as in the substrate loading and uninstalling system 1 and substrate loading and discharge mechanism 3 of the present embodiment, and It is not to jack up substrate 20 upwards by the lower section of substrate 20 by substrate jack-up unit (such as idler wheel mechanism) to leave support member 23 (directly jacking up substrate known as idler wheel mechanism, substrate is left support member certain altitude), but utilize substrate to load and unload The D1 settings spaced in parallel to each other in the first direction of the substrate-levitating unit 31 of device 3, and make at least one substrate-levitating unit 31 Between two these adjacent support members 23, to provide the bracing force of substrate 20.Due to the operation essence of substrate-levitating unit 31 Degree is higher, and operating distance in vertical direction needs larger operation in vertical direction less than the idler wheel mechanism of known technology Distance, therefore the substrate loading and uninstalling system 1 or substrate of the present embodiment load and discharge mechanism 3 can shorten substrate storing apparatus Spacing (hypotelorism that can make two support member 23 be 5mm~20mm) of 2 support member 23 along Z-direction, thus can improve base The unit volume storage amount of plate storage device 2, and then the storage cost of substrate 20 can be reduced.

In summary, loaded in substrate of the present utility model and uninstalling system using substrate with device, being loaded and being unloaded The setting spaced in parallel to each other in the first direction of the substrate-levitating unit of device, and when substrate loading and discharge mechanism are in substrate reception When loading in device or unload carried base board, make at least one substrate-levitating unit between two these adjacent support members.Thus, phase Than for known technology, substrate of the present utility model loads and uninstalling system provides substrate with device by substrate-levitating unit Upward support (floating) strength so that operating distance in vertical direction be less than known technology idler wheel mechanism operation away from From therefore, the utility model can shorten the support member of substrate storing apparatus along the spacing of Z-direction, thus can improve substrate reception The unit volume storage amount of device, and then the storage cost of substrate can be reduced.

Illustrative is the foregoing is only, rather than is restricted.It is any right without departing from spirit and scope of the present utility model Its equivalent modifications carried out or change are intended to be limited solely by appended claims.

Claims (20)

1. a kind of substrate loads and uninstalling system, it is characterised in that including：

Substrate storing apparatus, to store at least one substrate, the substrate storing apparatus includes：

Support body, there are two opposite sides；And

Multiple support members, be set parallel to each other in the first direction and be connected to the support body the opposite side, and at least The part support member is positioned essentially at sustained height；And

Substrate loads and discharge mechanism, has multiple substrate-levitating units, the substrate-levitating unit along the first direction that This parallel interval is set；

Wherein, when the substrate loads and discharge mechanism loads or unloads the substrate, at least one substrate-levitating list Member is between two adjacent support members.

2. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, the substrate is glass base Plate, resin substrate, metal substrate or ceramic substrate.

3. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, the substrate-levitating unit With major axis in a second direction, the second direction and the first direction substantial orthogonality.

4. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, at least partly described support Part has different height on third direction, and has certain distance to each other on the third direction, and the distance is situated between Between 5 to 20 millimeters, the third direction and the first direction substantial orthogonality.

5. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, the substrate-levitating unit Include air flotation cell or ultrasonic floating unit.

6. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, the substrate is loaded and unloaded Carry to put and further there is at least one substrate gear unit, the substrate gear unit is adjacent at least one substrate Floating unit.

7. substrate according to claim 6 loads and uninstalling system, it is characterised in that wherein, the substrate gear unit With major axis in a second direction, the second direction and the first direction substantial orthogonality.

8. substrate according to claim 6 loads and uninstalling system, it is characterised in that wherein, the substrate gear unit Include clamping device or mechanical arm.

9. substrate according to claim 6 loads and uninstalling system, it is characterised in that wherein, load when the substrate and Discharge mechanism loads or when unloading the substrate, at least one substrate gear unit positioned at two adjacent support members it Between.

10. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, the support body further has There is open side, when the substrate loads and discharge mechanism loads or unloads the substrate, entered or left by the open side The substrate storing apparatus.

11. substrate according to claim 1 loads and uninstalling system, it is characterised in that wherein, load when the substrate and Before discharge mechanism loads or unloads the substrate, the support member of the substrate storing apparatus is loaded and unloaded with the substrate The substrate-levitating unit of device relatively moves along third direction, and the third direction substantially hangs down with the first direction Directly.

12. substrate according to claim 11 loads and uninstalling system, it is characterised in that wherein, the substrate reception dress Put or the substrate loads and discharge mechanism is moved by lowering or hoisting gear along the third direction.

13. a kind of substrate loads and discharge mechanism, it coordinates with substrate storing apparatus, it is characterised in that the substrate reception dress Put to store at least one substrate and there is two opposite sides, the branch comprising support body and multiple support members, the support body Support member is set parallel to each other and is connected to the opposite side of the support body in the first direction, and at least partly described support member Sustained height is positioned essentially at, the substrate is loaded and discharge mechanism is characterised by, including：

Multiple substrate-levitating units, along first direction setting spaced in parallel to each other；

Wherein, when the substrate loads and discharge mechanism loads or unloads the substrate, at least one substrate-levitating list Member is between two adjacent support members.

14. substrate according to claim 13 loads and discharge mechanism, it is characterised in that wherein, the substrate-levitating list Member has major axis in a second direction, the second direction and the first direction substantial orthogonality.

15. substrate according to claim 13 loads and discharge mechanism, it is characterised in that wherein, at least partly described branch Support member has different height on third direction, and has certain distance, the distance to each other on the third direction Between 5 to 20 millimeters, the third direction and the first direction substantial orthogonality.

16. substrate according to claim 13 loads and discharge mechanism, it is characterised in that wherein, the substrate-levitating list Member includes air flotation cell or ultrasonic floating unit.

17. substrate according to claim 13 loads and discharge mechanism, it is characterised in that wherein, the substrate load and Discharge mechanism further has at least one substrate gear unit, and the substrate gear unit is adjacent at least one substrate Floating unit.

18. substrate according to claim 17 loads and discharge mechanism, it is characterised in that wherein, the substrate transmission is single Member has major axis in a second direction, the second direction and the first direction substantial orthogonality.

19. substrate according to claim 17 loads and discharge mechanism, it is characterised in that wherein, the substrate transmission is single Member includes clamping device or mechanical arm.

20. substrate according to claim 17 loads and discharge mechanism, it is characterised in that wherein, when the substrate loads And discharge mechanism loads or when unloading the substrate, at least one substrate gear unit is located at two adjacent support members Between.