CN206319080U - It is a kind of effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove - Google Patents
It is a kind of effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove Download PDFInfo
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- CN206319080U CN206319080U CN201621428634.8U CN201621428634U CN206319080U CN 206319080 U CN206319080 U CN 206319080U CN 201621428634 U CN201621428634 U CN 201621428634U CN 206319080 U CN206319080 U CN 206319080U
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Abstract
The utility model discloses a kind of method of crystal growth by crystal pulling stove that can effectively prevent from polluting in stove, including grate and body of heater, temperature measuring equipment is set on the body of heater, the bottom of furnace body sealing sets body of heater seat, body of heater seat is fixedly installed on grate, it is provided with the body of heater seat on fusion boiler support bar, fusion boiler support bar and fusion boiler is set；The body of heater that sealing is set at the top of the body of heater is covered, and is provided with the carry crystalline style relative and coaxial with fusion boiler support bar, and the crystalline style lower end that carries sets seed crystal clamping device；Correspond to fusion boiler region outside body of heater and heating boiler clothing is set, heating furnace set top, which is set, sets jacket outside muff, muff.The utility model moves heating and temperature-controlling component, water-cooled furnace part by outer, greatly reduces pollution problem in stove caused by volatile matter generation in high temperature lower furnace body, is conducive to improving and controls long crystalline substance work condition environment in stove, improves and stable crystal quality.
Description
Technical field
The utility model belongs to lifting crystal growth technical field, specifically relates to a kind of czochralski method for effectively preventing from polluting in stove
Crystal growing furnace.
Background technology
The method of lifting crystal growth is Czochralski in pioneering growing method in 1918, letter from melt
Claim CZ methods.There is monocrystal material of the brilliant environment of most fatal defect, i.e. length to growth in traditional method of crystal growth by crystal pulling equipment
Pollution problem, characteristic feature is：Long crystalline substance chamber is larger, and outside is respectively provided with water-cooled, and the long crystalline substance of crystal growth material is in sealed chamber
Middle progress, lengthen brilliant material in fusion boiler, and mode of heating adopts heating boiler clothing heating mostly (also has Resistant heating）, also
And long brilliant material is in same chamber including muff and heat-insulating material etc., and body of heater chamber interior is placed in, i.e.,.When long
Between under hot environment, heating boiler clothing, muff, exothermic material and heat-insulating material etc. can produce volatile matter, so as to pollute long crystalline substance
Material, and the monocrystalline purity requirement grown reaches 99.99995-99.99999%, forms natural contradiction, material requirements is very pure,
But always there is pollutant in growth course, long brilliant optimal growing environment is no pollution, therefore, to grow the target of high-purity
Crystal, prevents that the pollution in burner hearth from being to overcome the key of this problem, it is necessary to which developing a kind of can effectively prevent stove internal pollution
Method of crystal growth by crystal pulling stove.
Utility model content
The utility model aims to provide a kind of simple in construction, is easy to implement, can effectively prevent from producing under furnace interior part high temperature
Volatile matter opposite long crystal produce the pollution problem of pollution, it is ensured that long brilliant high-purity.
What the purpose of this utility model was realized in：Including grate and body of heater, temperature measuring equipment, institute are set on the body of heater
State bottom of furnace body sealing and body of heater seat is set, body of heater seat is fixedly installed on grate, fusion boiler support is provided with the body of heater seat
Fusion boiler is set on bar, fusion boiler support bar；The body of heater that sealing is set at the top of the body of heater is covered, and is provided with and is supported with fusion boiler
Bar it is relative and coaxial carry crystalline style, the crystalline style lower end that carries sets seed crystal clamping device；Correspond to fusion boiler outside the body of heater
Region sets heating boiler clothing, and heating furnace set top, which is set, sets jacket outside muff, muff.
The purpose of this utility model is to overcome prior art to be placed in because of heater block in body of heater, caused by component materials
It is also easy to produce volatile matter at high temperature and pollutes furnace inner environment, long brilliant operating mode, disturbs the accuracy of temperature measuring equipment thermometric in influence stove,
So as to which the drawbacks of influenceing crystal growth quality, the utility model moves heating and temperature-controlling component, water-cooled furnace part by outer, will
Moved to outside induction coil, muff, the associated components such as heat-insulating material outside the body of heater of sealing, the only graphite melting of quartz parcel in stove
Pot and long brilliant material；Meanwhile, stainless steel body of heater seat and body of heater lid set water-cooling system respectively, to reduce both temperature,
Prevent that it from producing volatile matter at high temperature.Pumped vacuum systems has been also convenient for pouring hydrogen or inert gas during pulling single crystal material.
Flange plate type stainless steel body of heater lid can be moved up and down, and facilitate dress to take long brilliant material and crystal.The external heating boiler clothing of the utility model,
Muff, heat-insulating material has been prevented from when growing volatile section bar material list crystalline substance, when material melts become molten soup, great Liang Hui
Stimulating food pollutes these parts, and occurs the problem of reduce its operating efficiency.Therefore, the utility model is fundamentally overcome in stove
Volatile matter pollution problem, is conducive to improving and controls long crystalline substance work condition environment in stove, improve and stable crystal quality.
Brief description of the drawings
Fig. 1 is the utility model overall structure half-section diagram；
Fig. 2 is the fusion boiler structure sectional view of the utility model；
In figure：1 ~ grate, 2 ~ fusion boiler support bar, 3 ~ fusion boiler, 4 ~ body of heater seat, 4a ~ blast pipe, 4b ~ vacuum interface tube,
4c ~ body of heater seat water-cooled interface tube, 5 ~ body of heater, 6, body of heater lid, 6a ~ body of heater lid water-cooled interface tube, 7 ~ carry crystalline style, 8 ~ temperature measuring equipment, 9
~ blast pipe, the brilliant liquation of 10 ~ length, 11 ~ sealed connecting component, 12 ~ crystal, 13 ~ muff, 14 ~ heating boiler clothing, 15 ~ jacket, 16 ~
Seed crystal clamping device.
Embodiment
The utility model is further described below in conjunction with the accompanying drawings, but the utility model is not subject in any way
Limitation.
The method of crystal growth by crystal pulling stove that can effectively prevent from polluting in stove as shown in Figure 1 and 2, including grate 1 and body of heater 5, institute
Setting temperature measuring equipment 8 on body of heater 5 is stated, the sealed bottom of body of heater 5 sets body of heater seat 4, and body of heater seat 4 is fixedly installed on grate 1,
Setting fusion boiler 3 on fusion boiler support bar 2, fusion boiler support bar 2 is provided with the body of heater seat 4；The top of body of heater 5 is sealed
On the body of heater lid 6 of setting, be provided with it is relative and coaxial with fusion boiler support bar 2 carry crystalline style 7, the lower end of crystalline style 7 that carries is set
Seed crystal clamping device 16；The outside of body of heater 5 corresponds to the region of fusion boiler 3 and sets heating boiler clothing 14, and the top of heating boiler clothing 14 is set
Muff 13 is put, the outside of muff 13 sets jacket 15.
The body of heater 5 is high purity quartz tubular type body of heater, and the body of heater 5 is high purity quartz tubular type body of heater, and its two ends sets method
Body of heater lid 6 and the body of heater seat 5 of blue tray type structure, the burner hearth for sealing cavate is made up of sealing ring and body of heater 5, and burner hearth connection takes out true
Empty set is united；Correspond to fusion boiler 3 outside quartz ampoule and heating boiler clothing 14 be set, the heating boiler clothing 14 is that induction type heats ring set,
Its outer setting muff 13.
3rd, it is according to claim 1 or claim 2 effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove, it is characterized in that：Institute
State the body interior of muff 13 and heater strip is set, its outside coated heat-insulating material.
The fusion boiler 3 is high purity graphite crucible, its ultrafine geothite quartziferous protective case.
The body of heater seat 4, body of heater lid 6 make for stainless steel material, coordinate respectively with the bottom of body of heater 5 or end sealing；Institute
Water-circulating cooling device, connection body of heater lid water-cooled interface tube 6a are set respectively in the body for stating body of heater seat 4 and/or body of heater lid 6.
Body of heater seat water-cooled interface tube 4c is set on described body of heater 4 top adpting flanges of seat, its internal water circulation is connected
Pipeline；4 bottoms of body of heater seat set air-control device, including blast pipe 4a and vacuum line interface 4b.
The fusion boiler support bar 2 and the dynamic cooperation of body of heater 4 bottom bonnet seals of seat；Fusion boiler support bar 2 pushes up section centre bore
With the bottom node stationary fit of fusion boiler 3, the bottom of fusion boiler support bar 2 connection drive mechanism；It is described to carry on crystalline style 7 and body of heater lid 6
Centre bore sealing it is dynamic coordinate, carry the top attachment pulling apparatus of crystalline style 7.
The two ends of body of heater 5 are connected with body of heater seat 4 and the sealing of body of heater lid 6 respectively by sealing neck and sealed connecting component 11
Connect.
The sealed connecting component 11 is high-temperature resistant seal ring.
During utility model works, crystal growing furnace is carried out first after inspection comprehensively, cleaning, be put into fusion boiler
Crystal growth material, closes and is vacuumized in system, beginning system；It is powered and heats up to induction type heating ring set, muff simultaneously, plus
After crystal growth material to molten condition in heat fusing pot, propose crystalline style decline, by the seed crystal of clamping stretch into fusion boiler and with
The long brilliant material of melting, immediately follow procedure slowly lift crystalline style and start seeding, start long brilliant operation, until completing.Together
When, body of heater seat and the circulation in body of heater lid are started working, it is ensured that its relatively low temperature, it is to avoid produce volatile matter.
Claims (9)
1. a kind of can effectively prevent the method for crystal growth by crystal pulling stove of pollution in stove, including grate（1）And body of heater（5）, the body of heater
（5）Upper setting temperature measuring equipment（8）, the body of heater（5）Sealed bottom sets body of heater seat（4）, body of heater seat（4）It is fixedly installed on grate
（1）On, the body of heater seat（4）On be provided with fusion boiler support bar（2）, fusion boiler support bar（2）Upper setting fusion boiler（3）；Institute
State body of heater（5）The body of heater lid that top sealing is set（6）On, it is provided with and fusion boiler support bar（2）Relative and coaxial carries crystalline style
（7）, it is described to carry crystalline style（7）Lower end sets seed crystal clamping device（16）；It is characterized in that：The body of heater（5）Outside corresponds to melting
Pot（3）Region sets heating boiler clothing（14）, heat boiler clothing（14）Top sets muff（13）, muff（13）Outside sets exhausted
Hot jacket（15）.
2. the method for crystal growth by crystal pulling stove of pollution in stove is effectively prevented according to claim 1, it is characterized in that：The body of heater
（5）For high purity quartz tubular type body of heater, the body of heater（5）For high purity quartz tubular type body of heater, its two ends sets flange plate type structure
Body of heater lid（6）With body of heater seat（5）, pass through sealing ring and body of heater（5）The burner hearth of sealing cavate is constituted, burner hearth connection, which is vacuumized, is
System；Correspond to fusion boiler outside quartz ampoule（3）Heating boiler clothing is set（14）, the heating boiler clothing（14）Ring is heated for induction type
Set, its outer setting muff（13）.
3. according to claim 1 or claim 2 effectively prevent the method for crystal growth by crystal pulling stove of pollution in stove, it is characterized in that：It is described to protect
Temperature set（13）Body interior sets heater strip, its outside coated heat-insulating material.
4. the method for crystal growth by crystal pulling stove of pollution in stove is effectively prevented according to claim 1, it is characterized in that：The fusion boiler
（3）For high purity graphite crucible, its ultrafine geothite quartziferous protective case.
5. the method for crystal growth by crystal pulling stove of pollution in stove is effectively prevented according to claim 1, it is characterized in that：The body of heater seat
（4）, body of heater lid（6）Made for stainless steel material, respectively with body of heater（5）Bottom or end sealing coordinate；The body of heater seat（4）
And/or body of heater lid（6）Body in water-circulating cooling device is set respectively, connect body of heater lid water-cooled interface tube（6a）.
6. the method for crystal growth by crystal pulling stove polluted in stove is effectively prevented according to claim 1 or 5, it is characterized in that：Described
Body of heater seat（4）Body of heater seat water-cooled interface tube is set on the adpting flange of top（4c）, connect its internal water circulation pipe；Body of heater seat
（4）Bottom sets air-control device, including blast pipe（4a）With vacuum line interface（4b）.
7. the method for crystal growth by crystal pulling stove of pollution in stove is effectively prevented according to claim 1, it is characterized in that：The fusion boiler
Support bar（2）With body of heater seat（4）Bottom bonnet seal is dynamic to be coordinated；Fusion boiler support bar（2）Push up section centre bore and fusion boiler（3）Bottom
Portion's pole stationary fit, fusion boiler support bar（2）Bottom connects drive mechanism；It is described to carry crystalline style（7）With body of heater lid（6）On center
Hole sealing is dynamic to be coordinated, and carries crystalline style（7）Top attachment pulling apparatus.
8. the method for crystal growth by crystal pulling stove of pollution in stove is effectively prevented according to claim 1, it is characterized in that：The body of heater
（5）Two ends are by sealing neck and sealed connecting component（11）Respectively with body of heater seat（4）With body of heater lid（6）It is tightly connected.
9. the method for crystal growth by crystal pulling stove of pollution in stove is effectively prevented according to claim 8, it is characterized in that：The sealing connects
Fitting（11）For high-temperature resistant seal ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621428634.8U CN206319080U (en) | 2016-12-24 | 2016-12-24 | It is a kind of effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621428634.8U CN206319080U (en) | 2016-12-24 | 2016-12-24 | It is a kind of effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove |
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| Publication Number | Publication Date |
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| CN206319080U true CN206319080U (en) | 2017-07-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621428634.8U Active CN206319080U (en) | 2016-12-24 | 2016-12-24 | It is a kind of effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757311A (en) * | 2016-12-24 | 2017-05-31 | 昆明沃特尔机电设备有限公司 | A kind of method of crystal growth by crystal pulling stove that can effectively prevent from being polluted in stove |
-
2016
- 2016-12-24 CN CN201621428634.8U patent/CN206319080U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757311A (en) * | 2016-12-24 | 2017-05-31 | 昆明沃特尔机电设备有限公司 | A kind of method of crystal growth by crystal pulling stove that can effectively prevent from being polluted in stove |
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