CN202164386U - Single crystal furnace made of ultra-pure germanium - Google Patents
Single crystal furnace made of ultra-pure germanium Download PDFInfo
- Publication number
- CN202164386U CN202164386U CN2011202266143U CN201120226614U CN202164386U CN 202164386 U CN202164386 U CN 202164386U CN 2011202266143 U CN2011202266143 U CN 2011202266143U CN 201120226614 U CN201120226614 U CN 201120226614U CN 202164386 U CN202164386 U CN 202164386U
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- Prior art keywords
- crucible
- fixed
- quartz
- ultra
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013078 crystal Substances 0.000 title claims abstract description 43
- 229910052732 germanium Inorganic materials 0.000 title claims abstract description 29
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title claims abstract 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 47
- 239000010453 quartz Substances 0.000 claims abstract description 27
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 12
- 239000010439 graphite Substances 0.000 claims abstract description 12
- 238000007789 sealing Methods 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 239000002826 coolant Substances 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 7
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 239000007770 graphite material Substances 0.000 abstract description 2
- 230000006698 induction Effects 0.000 abstract description 2
- 238000002844 melting Methods 0.000 abstract 2
- 230000008018 melting Effects 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000004321 preservation Methods 0.000 abstract 1
- 238000013022 venting Methods 0.000 abstract 1
- VGRFVJMYCCLWPQ-UHFFFAOYSA-N germanium Chemical compound [Ge].[Ge] VGRFVJMYCCLWPQ-UHFFFAOYSA-N 0.000 description 20
- 239000000463 material Substances 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000007123 defense Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000004223 radioprotective effect Effects 0.000 description 1
- 230000035924 thermogenesis Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011202266143U CN202164386U (en) | 2011-06-30 | 2011-06-30 | Single crystal furnace made of ultra-pure germanium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011202266143U CN202164386U (en) | 2011-06-30 | 2011-06-30 | Single crystal furnace made of ultra-pure germanium |
Publications (1)
Publication Number | Publication Date |
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CN202164386U true CN202164386U (en) | 2012-03-14 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2011202266143U Expired - Lifetime CN202164386U (en) | 2011-06-30 | 2011-06-30 | Single crystal furnace made of ultra-pure germanium |
Country Status (1)
Country | Link |
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CN (1) | CN202164386U (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102206859A (en) * | 2011-06-30 | 2011-10-05 | 白尔隽 | Ultrahigh-purity germanium single crystal preparation process and special equipment |
CN103422163A (en) * | 2013-09-06 | 2013-12-04 | 上海森松压力容器有限公司 | Device and method for growing sapphire single crystals |
CN105803530A (en) * | 2015-01-19 | 2016-07-27 | 丰田自动车株式会社 | Single crystal production apparatus |
CN108342770A (en) * | 2017-01-25 | 2018-07-31 | 上海新昇半导体科技有限公司 | Seedholder and single crystal pulling stove |
CN112725890A (en) * | 2020-12-25 | 2021-04-30 | 清远先导材料有限公司 | Crystal growth apparatus and crystal growth method |
-
2011
- 2011-06-30 CN CN2011202266143U patent/CN202164386U/en not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102206859A (en) * | 2011-06-30 | 2011-10-05 | 白尔隽 | Ultrahigh-purity germanium single crystal preparation process and special equipment |
CN102206859B (en) * | 2011-06-30 | 2013-02-13 | 白尔隽 | Ultrahigh-purity germanium single crystal preparation process and special equipment |
CN103422163A (en) * | 2013-09-06 | 2013-12-04 | 上海森松压力容器有限公司 | Device and method for growing sapphire single crystals |
CN105803530A (en) * | 2015-01-19 | 2016-07-27 | 丰田自动车株式会社 | Single crystal production apparatus |
US9982366B2 (en) | 2015-01-19 | 2018-05-29 | Toyota Jidosha Kabushiki Kaisha | Single crystal production apparatus |
CN108342770A (en) * | 2017-01-25 | 2018-07-31 | 上海新昇半导体科技有限公司 | Seedholder and single crystal pulling stove |
CN112725890A (en) * | 2020-12-25 | 2021-04-30 | 清远先导材料有限公司 | Crystal growth apparatus and crystal growth method |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHENZHEN UNIV Effective date: 20131030 Owner name: YUNNAN LINCANG XINYUAN GERMANIUM CO., LTD. Free format text: FORMER OWNER: BAI ERJUN Effective date: 20131030 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Bai Erjuan Inventor after: Zheng Zhipeng Inventor after: Gao Dexi Inventor after: Mi Jiarong Inventor after: Sun Huibin Inventor after: Xie Tianmin Inventor after: Zhao Haige Inventor after: Li Xueyang Inventor before: Bai Erjuan |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: BAI ERJUN TO: BAI ERJUN ZHENG ZHIPENG GAO DEXI MI JIARONG SUN HUIBIN XIE TIANMIN ZHAO HAIGE LI XUEYANG Free format text: CORRECT: ADDRESS; FROM: 518060 SHENZHEN, GUANGDONG PROVINCE TO: 677000 LINCANG, YUNNAN PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20131030 Address after: 677000 Yunnan province Lincang Linxiang District busy River Street office busy River Community magpie nest Group No. 168 Patentee after: Yunnan Lincang Xinyuan Germanium Co., Ltd. Patentee after: Shenzhen University Address before: 518060 Institute of nuclear technology, Shenzhen University, 3688 Nanhai Road, Shenzhen, Guangdong, Nanshan District, China Patentee before: Bai Erjuan |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20120314 |