CN205634157U - Base plate is got and is put device - Google Patents
Base plate is got and is put device Download PDFInfo
- Publication number
- CN205634157U CN205634157U CN201620504639.8U CN201620504639U CN205634157U CN 205634157 U CN205634157 U CN 205634157U CN 201620504639 U CN201620504639 U CN 201620504639U CN 205634157 U CN205634157 U CN 205634157U
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- substrate
- mechanical arm
- mechanical
- base plate
- rotating shaft
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- 239000000758 substrate Substances 0.000 claims description 414
- 238000010521 absorption reaction Methods 0.000 claims description 14
- 241000251468 Actinopterygii Species 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 210000004247 hand Anatomy 0.000 description 24
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a base plate is got and is put device relates to base plate handling device technical field, for solving when taking out the base plate from the base plate box in, because of bumping between base plate and the base plate box or cutting the problem of rubbing phenomenons such as resulting in base plate production damage, fish tail to pieces. Base plate is got and is put device includes supporting bench, arm and a manipulator, wherein, the arm is installed prop up on the supporting bench, the arm can be relative prop up supporting bench and go up and down to remove, just the arm extending with shorten, the manipulator with arm rotatable coupling, the manipulator rotates, and the interior base plate that takes out of waiting that takes place to deflect of drive base plate box rotates, behind the base plate recurrence normal condition that the messenger waited to take out, the manipulator takes out waits the base plate that takes out, the state of normal condition when waiting that the base plate that takes out does not take place to deflect. The utility model provides a base plate is got and is put device is used for getting puts the base plate.
Description
Technical field
This utility model relates to substrate transfer apparatus technical field, particularly relates to a kind of substrate fetching device.
Background technology
Substrate is generally horizontally disposed in substrate box, to facilitate substrate transport to destination.Substrate is transported
After being passed to destination, it usually needs substrate is taken out in substrate box, so that substrate is carried out post processing work
Sequence.
At present, substrate fetching device is generally utilized to be taken out in substrate box by substrate, substrate fetching device bag
Include mechanical hand, when substrate is taken out in substrate box, first the substrate prong of mechanical hand is reached to be removed
The lower section of substrate, and make substrate prong carrying substrate to be removed, then make mechanical hand increase, substrate
Prong drives substrate to be removed to rise, and makes substrate to be removed separate, so with the bracer in substrate box
After make substrate prong move, drive substrate to be removed to exit substrate box, it is achieved by substrate to be removed from
Take out in substrate box.
But, in substrate is loaded in substrate box or transport substrate time, substrate may in substrate box
Occurred level deflects, when using aforesaid substrate fetching device to be taken out from substrate box by the substrate of deflection, partially
Can collide or scratch between the substrate and the substrate box that turn, cause substrate to produce the phenomenons such as breakage, scuffing.
Utility model content
The purpose of this utility model is to provide a kind of substrate fetching device, for solving substrate from substrate
When taking out in box, substrate is caused to produce breakage, draw because colliding between substrate and substrate box or scratch
The technical problem of the phenomenons such as wound.
To achieve these goals, the following technical scheme of this utility model offer:
A kind of substrate fetching device, including supporting platform, mechanical arm and mechanical hand, wherein, described mechanical arm
Be arranged on described support platform, described mechanical arm can the most described support platform lifting moving, and described machinery
Arm is extending and shortens；Described mechanical hand is rotatably connected with described mechanical arm.
When the substrate fetching device using this utility model to provide takes out substrate in substrate box, if base
Substrate to be removed in plate box is deflecting, and by adjusting mechanical hand, first makes mechanical hand take towards waiting
The yawing moment of the substrate gone out rotates, and then makes the substrate that mechanical hand carrying is to be removed, then makes mechanical hand
The yawing moment of substrate the most to be removed rotates, and drives substrate rotating to be removed, makes base to be removed
Plate is at substrate box internal regression normal condition, i.e. make substrate to be removed in substrate box internal regression to not occurring
The state of deflection, then takes out substrate in substrate box, accordingly it is possible to prevent by substrate from substrate box
During interior taking-up, substrate collides with substrate box or scratches, thus it is existing to prevent substrate from producing breakage, scuffing etc.
As.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing being further appreciated by of the present utility model, constitutes this practicality new
A part for type, schematic description and description of the present utility model is used for explaining this utility model, and
Do not constitute improper restriction of the present utility model.In the accompanying drawings:
The structural representation of the substrate fetching device that Fig. 1 provides for this utility model embodiment；
The structural representation of the substrate box that Fig. 2 provides for this utility model embodiment；
Fig. 3 is the location diagram one of mechanical hand and substrate to be removed；
Fig. 4 is the location diagram two of mechanical hand and substrate to be removed；
Fig. 5 is the location diagram three of mechanical hand and substrate to be removed；
Fig. 6 is the location diagram four of mechanical hand and substrate to be removed.
Reference:
100-substrate fetching device, 10-supports platform,
11-the first rotating shaft, 20-mechanical arm,
21-the first mechanical arm, 22-the second mechanical arm,
23-the second rotating shaft, 24-the 3rd rotating shaft,
30-mechanical hand, 31-support beam,
32-substrate prong, 33-range sensor,
34-vacuum absorption holes, 200-substrate box,
210-substrate separate space, 220-props up bracer.
Detailed description of the invention
In order to further illustrate the substrate fetching device that this utility model embodiment provides, below in conjunction with explanation
Book accompanying drawing is described in detail.
Refer to Fig. 1, the substrate fetching device 100 that this utility model embodiment provides include supporting platform 10,
Mechanical arm 20 and mechanical hand 30, wherein, mechanical arm 20 is arranged on support platform 10, and mechanical arm 20 can
Relative support platform 10 lifting moving, and mechanical arm 20 is extending and shortens；Mechanical hand 30 and mechanical arm 20
Being rotatably connected, mechanical hand 30 rotates, and the substrate to be removed deflected in driving substrate box 200 turns
Dynamic, after making substrate to be removed return normal condition, mechanical hand 30 takes out substrate to be removed, normal shape
The state when substrate that state is to be removed does not deflects.
When being embodied as, this utility model embodiment provide substrate fetching device 100 include support platform 10,
Mechanical arm 20 and mechanical hand 30, mechanical arm 20 is arranged on support platform 10, and mechanical hand 30 is arranged on machine
In mechanical arm 20；Mechanical arm 20 can relative support platform 10 lifting moving, i.e. mechanical arm 20 can relative support
Platform 10 above-below direction along Fig. 1 moves, during mechanical arm 20 relative support platform 10 lifting moving, and band motivation
Tool hands 30 relative support platform 10 lifting moving；Mechanical arm 20 can extend in horizontal plane and shorten, such as
Mechanical arm 20 can in horizontal plane along Fig. 1 left and right directions elongation and shorten, mechanical arm 20 is at horizontal plane
Interior along Fig. 1 left and right directions elongation and shorten time, driving mechanical hands 30 left and right directions along Fig. 1 moves；
Mechanical hand 30 is rotatably connected with mechanical arm 20, and mechanical hand 30 can rotate by relative mechanical arm 20；Such as Fig. 2
Shown in, there is in substrate box 200 lumen therethrough, relative two cavity wall of lumen therethrough is respectively arranged with one
Multipair bracer 220 of one correspondence, lumen therethrough is divided into multiple bases that stacking is arranged by multipair bracer 220
Plate separate space 210, can place a substrate in each substrate separate space 210, and a bracer 220 is used for supporting substrate,
When using aforesaid substrate fetching device 100 to take out substrate to be removed in substrate box 200, mechanical hand
The substrate that 30 carryings are to be removed, and drive substrate to be removed to exit the substrate separate space 210 of substrate box 200.
When the substrate fetching device using above-described embodiment to provide takes out base to be removed in substrate box 200
During plate, can first adjusting mechanical arm 20, make mechanical arm 20 driving mechanical hands 30 relative support platform 10 increase
Or decline, mechanical hand 30 moves to the substrate box 200 substrate separate space 210 corresponding with substrate to be removed,
Mechanical hand 30 is relative with the opening of substrate separate space 210, and i.e. mechanical hand 30 and substrate to be removed are towards base
The side of plate separate space 210 is relative, and the such as right flank of the substrate that mechanical hand 30 is to be removed with Fig. 2 is relative；
Then according to substrate to be removed deflection angle during occurred level deflection in corresponding substrate separate space 210
And yawing moment, regulate mechanical hand 30, make mechanical hand 30 relative mechanical arm 20 along substrate to be removed
Yawing moment rotate, mechanical hand 30 along substrate to be removed polarization direction rotate angle with to be removed
The deflection angle of substrate is identical；Then adjusting mechanical arm 20, make mechanical arm 20 extend in horizontal plane, make
Mechanical hand 30 reaches the lower section of substrate to be removed, and makes mechanical hand 30 carry substrate to be removed；So
Rear adjusting mechanical arm 20, makes mechanical arm 20 driving mechanical hands 30 relative support platform 10 rise, to be removed
Substrate is lifted by mechanical hand 30, and bracer 220 corresponding with in substrate box 200 separates；Then adjust
Joint mechanical hand 30, makes mechanical hand 30 relative mechanical arm 20 along the negative side of the yawing moment of substrate to be removed
To rotation, the angle that mechanical hand 30 rotates along the opposite direction of the yawing moment of substrate to be removed is with to be removed
The deflection angle of substrate identical, mechanical hand 30 drives substrate to be removed to return normal condition, i.e. waits to take
The state that the substrate gone out deflects in non-occurred level；Then adjusting mechanical arm 20, make mechanical arm 20 in level
Shortening in face, mechanical arm 20 driving mechanical hands 30 exits the substrate separate space 210 of substrate box 200, thus will
Substrate to be removed takes out in substrate box 200.
For example, take out in substrate box 200 when the substrate fetching device using above-described embodiment to provide
During substrate to be removed, mechanical hand 30 move to substrate box 200 substrate corresponding with substrate to be removed every
After at chamber 210, as in figure 2 it is shown, set up three-dimensional cartesian coordinate system, the X-axis of three-dimensional cartesian coordinate system is put down
Row through direction of the lumen therethrough of substrate box 200 in Fig. 2, the Y-axis of three-dimensional cartesian coordinate system is parallel to
The length direction of the opening of the substrate separate space 210 of substrate box 200, the Z of three-dimensional cartesian coordinate system in Fig. 2
Axle is perpendicular to the length direction of the opening of the substrate separate space 210 of substrate box 200 in Fig. 2, say, that
The X/Y plane that the X-axis of three-dimensional cartesian coordinate system and Y-axis are constituted is parallel to horizontal plane；As it is shown on figure 3,
In three-dimensional cartesian coordinate system, substrate to be removed deflects in X/Y plane the most along clockwise direction,
The yawing moment of substrate the most to be removed is clockwise direction, the deflection angle of substrate to be removed in Fig. 3
For α；Yawing moment according to substrate to be removed and deflection angle, regulate mechanical hand 30, make mechanical hand
30 relative mechanical arms 20 rotate along the yawing moment of substrate to be removed, and mechanical hand 30 is along base to be removed
The angle that the yawing moment of plate rotates is identical with the deflection angle of substrate to be removed, and i.e. mechanical hand 30 is along figure
In 3 rotationally clockwise, the angle that mechanical hand 30 rotates is α, and now, mechanical hand 30 is with to be removed
Substrate between position relationship as shown in Figure 4.
After mechanical hand 30 has rotated along the yawing moment of substrate to be removed, then by mechanical arm 20
Driving mechanical hands 30, makes mechanical hand 30 reach the lower section of substrate to be removed, and mechanical hand 30 carries to be waited to take
The substrate gone out；Then by mechanical arm 20 driving mechanical hands 30, mechanical hand 30 moves, makes to be removed
Substrate separates with a corresponding bracer 220, now, and the position between mechanical hand 30 and substrate to be removed
Relation is as shown in Figure 5；Then regulation mechanical hand 30, makes mechanical hand 30 relative mechanical arm 20 along to be removed
The opposite direction of yawing moment of substrate rotate, mechanical hand 30 is along yawing moment anti-of substrate to be removed
The angle that direction rotates is identical with the deflection angle of substrate to be removed, i.e. mechanical hand 30 inverse time along Fig. 3
Pin direction rotates, and the angle that mechanical hand 30 rotates is α, now, mechanical hand 30 and substrate to be removed it
Between position relationship as shown in Figure 6；Then substrate box 200 is exited by mechanical arm 20 driving mechanical hands 30
Substrate separate space 210, substrate to be removed exits the substrate separate space 210 of substrate box 200 with mechanical hand 30,
Thus substrate to be removed is taken out in substrate box 200.
From the foregoing, when the substrate fetching device 100 using this utility model embodiment to provide is from substrate
When taking out substrate in box 200, can first mobile mechanical arm 20, by mechanical arm 20 driving mechanical hands 30,
Mechanical hand 30 is relative with the substrate to be removed in substrate box 200；Then occur according to substrate to be removed
The deflection angle of horizontal deflection and yawing moment, regulate mechanical hand 30, make mechanical hand 30 relative mechanical arm
20 towards substrate to be removed yawing moment rotate, mechanical hand 30 is towards the deflection side of substrate to be removed
Identical with the deflection angle of substrate to be removed to the angle rotated；Then adjusting mechanical arm 20, mechanical arm
20 driving mechanical handss 30 move horizontally, and mechanical hand 30 reaches the lower section of substrate to be removed, mechanical hand 30
Carry substrate to be removed；Then adjusting mechanical arm 20, mechanical arm 20 driving mechanical hands 30 rises, and treats
The substrate taken out bracer 220 with substrate box 200 under the drive of mechanical hand 30 separates；Then machine is made
The yawing moment of the substrate that tool hands 30 relative mechanical arm 20 is the most to be removed rotates, and mechanical hand 30 is inversely treated
The angle that the yawing moment of the substrate taken out rotates is identical with the deflection angle of substrate to be removed；Then adjust
Joint mechanical arm 20, mechanical arm 20 driving mechanical hands 30 moves horizontally, and mechanical hand 30 drives base to be removed
Plate exits substrate box 200, completes to take out substrate to be removed in substrate box 200.From the foregoing,
When the substrate fetching device 100 using this utility model embodiment to provide takes out substrate in substrate box 200
Time, by adjusting mechanical hand 30, make mechanical hand 30 rotate and inverse towards the yawing moment of substrate to be removed
Rotate to the yawing moment of substrate to be removed, make substrate to be removed recover to just in substrate box 200
Often state, substrate the most to be removed is in the state of not occurred level deflection, then in substrate box 200
Substrate is taken out in substrate box 200, during accordingly it is possible to prevent substrate is taken out in substrate box 200
Substrate collides with substrate box 200 or scratches, thus prevents substrate from producing the phenomenons such as breakage, scuffing.
It is noted that the substrate fetching device 100 that above-described embodiment provides can pick and place horizontal positioned
Substrate in substrate box 200, in actual applications, the substrate fetching device 100 that above-described embodiment provides
Can also pick and place the substrate being vertically placed in substrate box 200, now, mechanical arm 20 is towards supporting platform 10
Moving horizontally and move horizontally away from supporting platform 10, mechanical arm 20 can extend in perpendicular and contract
Short, mechanical hand 30 is rotatably connected with mechanical arm 20, picks and places the base being vertically placed in substrate box 200
The process of plate is similar, at this no longer with the process of the above-mentioned substrate picking and placeing and lying in a horizontal plane in substrate box 200
Repeat.It should be noted that in above-described embodiment, substrate can be underlay substrate, liquid crystal display substrate,
Optical substrate etc..
It is worthy of note, the substrate fetching device 100 that above-described embodiment provides can be also used for substrate
It is loaded in substrate box 200, when using aforesaid substrate fetching device 100, substrate is loaded in substrate box 200
Time interior, mechanical hand 30 bearing substrate can be first passed through；Then adjusting mechanical arm 20, by mechanical arm 20
Driving mechanical hands 30 rises or falls, and makes mechanical hand 30 drive substrate to move to substrate box 200 correspondence
The opening part of substrate separate space 210；Then regulation mechanical hand 30, makes mechanical hand 30 relative mechanical arm 20
Rotate, put orientation with regulate substrate, make substrate be in the deflection of opposing substrate box 200 non-occurred level
State；Then adjusting mechanical arm 20, by mechanical arm 20 driving mechanical hands 30, make mechanical hand 30 stretch
In substrate separate space 210；Then adjusting mechanical arm 20, are declined by mechanical arm 20 driving mechanical hands 30,
Substrate contacts with the bracer 220 in substrate box 200, bracer 220 bearing substrate, substrate and machinery
Hands 30 separates；Then adjusting mechanical arm 20, by mechanical arm 20 driving mechanical hands 30, make mechanical hand 30
Exit substrate separate space 210, it is achieved be loaded in by substrate in substrate box 200.
Therefore, when using aforesaid substrate fetching device 100 to be loaded in substrate box 200 by substrate, machine
After tool hands 30 drives substrate to move to substrate box 200 opening part of corresponding substrate separate space 210, can
By regulation mechanical hand 30, to make mechanical hand 30 relative mechanical arm 20 rotate, to regulate putting of substrate
Orientation, makes substrate be in the state of opposing substrate box 200 non-occurred level deflection, is then loaded by substrate
In corresponding substrate separate space 210, to prevent substrate from colliding with substrate box 200 when loading or cutting to pieces
Rub, thus prevent substrate from producing the phenomenons such as breakage, scuffing.
Please continue to refer to Fig. 1, in the substrate fetching device that this utility model embodiment provides, mechanical hand
30 include support beam 31 and the multiple substrate prongs 32 being set in parallel in support beam 31, support beam 31
Being rotatably connected with mechanical arm 20, multiple substrate prongs 32 are concordant away from the end of support beam 31；Multiple
In substrate prong 32, at least two substrate prong 32 being respectively arranged with range sensor 33, substrate is pitched
Tooth 32 away from the end of support beam 31 substrate to be removed with in substrate box 200 relative to time, Distance-sensing
Device 33 detects the corresponding substrate prong 32 end away from support beam 31 with substrate to be removed towards machinery
Distance between the side of hands 30.
When being embodied as, mechanical hand 30 includes support beam 31 and multiple substrate prong 32, wherein, supports
Beam 31 is rotatably connected with mechanical arm 20, and multiple substrate prongs 32 are set in parallel in support beam 31,
The quantity of substrate prong 32 is multiple, and in actual applications, the quantity of substrate prong 32 can be two
Or two or more；When support beam 31 relative mechanical arm 20 rotates, multiple substrate prong 32 also relative mechanical
Arm 20 rotates；In multiple substrate prongs 32, at least two substrate prong 32 is respectively arranged with distance and passes
Sensor 33, such as, when the quantity of substrate prong 32 is two, set on two substrate prongs 32 respectively
Put range sensor 33, when the quantity of substrate prong 32 is three, two of which substrate prong can be chosen
32, and it is respectively provided with range sensor 33 on two the substrate prongs 32 chosen, it is also possible at three bases
Range sensor 33 it is respectively provided with on plate prong 32, when the quantity of substrate prong 32 is more than three, can
To choose two of which substrate prong 32, and on two the substrate prongs 32 chosen, it is respectively provided with distance biography
Sensor 33, it is also possible to choose plural substrate prong 32, and at the two or more substrate prong chosen
Range sensor 33 it is respectively provided with, it is also possible on each substrate prong 32, be respectively provided with distance pass on 32
Sensor 33；When mechanical hand 30 being moved to the substrate box 200 substrate separate space corresponding with substrate to be removed
At 210, substrate prong 32 is relative away from the substrate that the end of support beam 31 is to be removed with in substrate box 200
Time, range sensor 33 detects the corresponding substrate prong 32 end away from support beam 31 with to be removed
Substrate is towards the distance between the side of mechanical hand 30.
Illustrate as a example by two the substrate prongs 32 that be arranged in parallel in support beam 31 below, refer to
Fig. 1, mechanical hand 30 includes support beam 31 and two the substrate prongs 32 being set in parallel in support beam 31,
It is respectively arranged with range sensor 33 on two substrate prongs 32.As in figure 2 it is shown, when by mechanical hand 30
At the mobile substrate separate space 210 corresponding with substrate to be removed to substrate box 200, substrate prong 32 away from
The end of support beam 31 substrate to be removed with in substrate box 200 relative to time, range sensor 33 detects
Corresponding substrate prong 32 away from end and the substrate to be removed of support beam 31 towards the side of mechanical hand 30
Distance between face, as it is shown on figure 3, according to the range sensor on the substrate prong 32 in left side in Fig. 3
The testing result of the range sensor 33 in the detection structure of 33 and the substrate prong 32 on right side, obtains figure
In 3, the distance between upper end and the downside of substrate to be removed of the substrate prong 32 in left side is h1,
In Fig. 3, the distance between upper end and the downside of substrate to be removed of the substrate prong 32 on right side is h2,
In Fig. 3, the distance between substrate prong 32 and the substrate prong 32 on right side in left side is l, it is assumed that to be removed
Substrate lower surface and the Y-axis of three-dimensional cartesian coordinate system between angle be α, substrate the most to be removed
The deflection angle of occurred level deflection is α, then can obtain deflection angle α and distance h1, distance h2Between
Relation:
After formula (1) is processed, can obtain:
According to formula (2), and utilize corresponding substrate prong 32 that range sensor 33 detects away from
The end of support beam 31 and substrate to be removed, towards the distance between the side of mechanical hand 30, can obtain
The deflection angle of substrate to be removed, the yawing moment of substrate to be removed then can be according to distance h1And distance
h2Size determine, such as, as it is shown on figure 3, distance h1More than distance h2Time, substrate edge the most to be removed
Deflection clockwise in Fig. 3, the yawing moment of the substrate of the biggest taking-up is clockwise direction in Fig. 3,
Distance h1Less than distance h2Time, substrate the most to be removed is counterclockwise deflection along Fig. 3, the biggest taking-up
The yawing moment of substrate is counter clockwise direction in Fig. 3；According to taking the deflection angle of substrate to be removed with inclined
Turn direction, regulate mechanical hand 30, make the support beam 31 deflection side along substrate to be removed of mechanical hand 30
Rotate to relative mechanical arm 20；After substrate to be removed is lifted by the substrate prong 32 of mechanical hand 30, adjust
Joint mechanical hand 30, makes the support beam 31 opposite direction along the yawing moment of substrate to be removed of mechanical hand 30
Relative mechanical arm 20 rotates；Then mechanical hand 30 is made to drive substrate to be removed to exit substrate box 200, real
Now substrate to be removed is taken out in substrate box 200.
By range sensor 33 detect correspondence substrate prong 32 away from support beam 31 end with wait to take
The substrate gone out is towards the distance between the side of mechanical hand 30, and then obtains the deflection angle of substrate to be removed
Degree and yawing moment, control the support beam 31 of mechanical hand 30, make support beam 31 drive substrate prong 32 edge
The yawing moment relative mechanical arm 20 of substrate to be removed rotates corresponding angle, and makes support beam 31 carry
Dynamic substrate prong 32 rotates along the opposite direction relative mechanical arm 20 of the yawing moment of substrate to be removed accordingly
Angle, thus convenient substrate to be removed is taken out from substrate box 200 in, prevent substrate generation breakage,
The phenomenons such as scuffing.
It is worthy of note, the quantity of substrate prong 32 is multiple, and at three or three above substrate forks
When being respectively provided with range sensor 33 on tooth 32, can respectively according to two of which substrate prong 32 away from
The end of support beam 31 and substrate to be removed are towards the distance between the side of mechanical hand 30, and acquisition is many
Then multiple test angles are averaged by individual test angle, and the meansigma methods of multiple test angles is for waiting to take
The deflection angle of the substrate gone out.It is so designed that, deflection angle accurate of substrate to be removed can be improved
Degree.
In this utility model embodiment, range sensor 33 can be reflective photoelectric sensor, reflection
Formula photoelectric sensor is arranged on the substrate prong 32 end away from support beam 31 of correspondence.For example,
As it is shown on figure 3, reflective photoelectric sensor is arranged on the upper end of substrate prong 32.When by reflective
Substrate prong 32 corresponding to photoelectric sensor detection is away from the end of support beam 31 and substrate court to be removed
During distance between the side of mechanical hand 30, the transmitting terminal of reflective photoelectric sensor is first made to take towards waiting
The substrate gone out sends optical signal, when optical signal moves to substrate to be removed, is reflected by substrate to be removed,
Optical signal is then back to reflective photoelectric sensor, and the receiving terminal of reflective photoelectric sensor receives optical signal,
Spread speed according to optical signal and receiving terminal receive optical signal and transmitting terminal launch between optical signal time
Between poor, the substrate prong 32 end and the substrate court to be removed away from support beam 31 of correspondence can be obtained
Distance between the side of mechanical hand 30.
In above-described embodiment, the length direction of substrate prong 32 can be put down with the length direction of support beam 31
OK, the most multiple substrate prongs 32 are arranged on the support beam 31 end away from mechanical arm 20, or, base
The length direction of plate prong 32 can be in a certain angle with the length direction of support beam 31, or, substrate
The length direction of prong 32 can be vertical with the length direction of support beam 31.
In the substrate fetching device that this utility model embodiment provides, please continue to refer to Fig. 1, substrate prong
The length direction of 32 is vertical with the length direction of support beam 31, and multiple substrate prongs 32 are along support beam 31
Length direction uniform intervals is arranged.The length direction of substrate prong 32 hangs down with the length direction of support beam 31
Directly, parallel with the length direction of support beam 31 with the length direction of substrate prong 32 or phase in a certain angle
Ratio, can improve the uniform force of the regional of support beam 31, improves substrate prong 32 and carries base
Stability during plate.Multiple substrate prongs 32 are arranged along the length direction uniform intervals of support beam 31, can
To improve the uniform force of the regional of support beam 31 further, improve substrate prong 32 and carry base
Stability during plate.
In the above-described embodiments, the structure of mechanical arm 20 can be multiple, and such as, mechanical arm 20 is permissible
It is to include the expansion link that multiple expansion link saves, or, mechanical arm 20 can be screw mandrel.At this utility model
In embodiment, please continue to refer to Fig. 1, mechanical arm 20 includes the first mechanical arm 21 and the second mechanical arm 22,
One end of first mechanical arm 21 is rotatably connected with supporting platform 10, one end and first of the second mechanical arm 22
Mechanical arm 21 is rotatably connected away from the one end supporting platform 10, the first mechanical arm 21 and the second mechanical arm 22
Rotate the most in the same plane；Mechanical hand 30 and the second mechanical arm 22 are away from one end of the first mechanical arm 21
It is rotatably connected.When being embodied as, in Fig. 1, the right-hand member of the first mechanical arm 21 is rotatable with support platform 10
Connecting, the right-hand member of the second mechanical arm 22 and the left end of the first mechanical arm 21 are rotatably connected, mechanical hand 30
The left end of support beam 31 and the second mechanical arm 22 be rotatably connected, the first mechanical arm 21 relative support platform
Rotational plane during 10 rotation and second mechanical arm 22 rotational plane when the first mechanical arm 21 rotates
In being generally aligned in the same plane, when the first mechanical arm 21 relative support platform 10 rotate, the second mechanical arm 22 relative
When first mechanical arm 21 rotates, it is possible to achieve mechanical arm 20 extends and shortens, thus driving mechanical hands 30
Mobile.
It addition, the first mechanical arm 21 is rotatably connected, when the first mechanical arm 21 props up relatively with supporting platform 10
When support platform 10 rotates, mechanical arm 20 relative support platform 10 rotates, and therefore, carries when using above-described embodiment
When the substrate fetching device 100 of confession takes out substrate in substrate box 200, adjust the first mechanical arm 21, make
First mechanical arm 21 relative support platform 10 rotates, without position or the support platform of moving substrate box 200
The position of 10, can take out in the substrate box 200 in any orientation being placed on substrate fetching device 100
Substrate, thus improve the suitability of substrate fetching device 100.
First mechanical arm 21 is rotatably connected with supporting platform 10, can be that setting can phase on support platform 10
To supporting the rotary shaft that platform 10 rotates, the first mechanical arm 21 is fixedly connected with the rotating shaft, or, permissible
Being fixedly installed rotary shaft supporting on platform 10, the first mechanical arm 21 is rotatably connected with rotary shaft；Second
Mechanical arm 22 is rotatably connected with the first mechanical arm 21, can be that setting can phase on the first mechanical arm 21
The rotary shaft that first mechanical arm 21 is rotated, the second mechanical arm 22 is fixedly connected with the rotating shaft, or,
Can be fixedly installed rotary shaft on the first mechanical arm 21, the second mechanical arm 22 rotatably connects with rotary shaft
Connect；Mechanical hand 30 is rotatably connected with the second mechanical arm 22, can be to arrange on the second mechanical arm 22
The rotary shaft that can rotate relative to the second mechanical arm 22, mechanical hand 30 is fixedly connected with the rotating shaft, or,
Can be fixedly installed rotary shaft on the second mechanical arm 22, mechanical hand 30 is rotatably connected with rotary shaft.
In this utility model embodiment, please continue to refer to Fig. 1, support and be provided with the first rotating shaft on platform 10
11, the first rotating shaft 11 can rotate by relative support platform 10, and the first rotating shaft 11 can relative support platform 10 liters
Fall is mobile, and the first mechanical arm 21 is fixing with the first rotating shaft 11 to be connected；It is provided with on first mechanical arm 21
Two rotating shafts 23, the second rotating shaft 23 can rotate relative to the first mechanical arm 21, the second mechanical arm 22 and second turn
Axle 23 is fixing to be connected；Being provided with the 3rd rotating shaft 24 on second mechanical arm 22, the 3rd rotating shaft 24 can relative
Two mechanical arms 22 rotate, and mechanical hand 30 is fixing with the 3rd rotating shaft 24 to be connected；First rotating shaft 11, second turn
Axle 23 and the 3rd rotating shaft 24 are connected with motor respectively.
In this utility model embodiment, driven first rotating shaft the 11, second rotating shaft 23 and respectively by motor
3rd rotating shaft 24, drives the first mechanical arm 21 relative support platform 10 to rotate by the first rotating shaft 11, passes through
Second rotating shaft 23 drives the second mechanical arm 22 to rotate relative to the first mechanical arm 21, by the 3rd rotating shaft 24
Driving mechanical hands 30 rotates relative to the second mechanical arm 22, can improve the first mechanical arm 21 respectively and relatively prop up
Platform 10 rotates, the second mechanical arm 22 rotates relative to the first mechanical arm 21, mechanical hand 30 relative second in support
Stability when mechanical arm 22 rotates.
Please continue to refer to Fig. 1, in the substrate fetching device 100 that this utility model embodiment provides, machinery
Hands 30 is provided with the vacuum absorption holes 34 adsorbing substrate to be removed.When being embodied as, mechanical hand
30 include that support beam 31 and the multiple substrate prongs 32 being arranged in support beam 31, support beam 31 are fixed
Being arranged in the 3rd rotating shaft 24 on the second mechanical arm 22, substrate prong 32 is provided with vacuum absorption holes 34,
Such as, the quantity of substrate prong 32 is two, and each substrate prong 32 is provided with vacuum absorption holes 34,
The quantity of the vacuum absorption holes 34 on each substrate prong 32 can be one, it is also possible to is two or two
More than individual.When substrate prong 32 moves to the lower section of substrate to be removed, by vacuum absorption holes 34
By substrate adsorption to be removed on substrate prong 32, substrate to be removed is close to substrate prong 32,
When substrate prong 32 drives substrate to be removed to move, it is possible to prevent substrate opposing substrate prong to be removed
32 slide, thus prevent substrate to be removed from the phenomenons such as breakage, scuffing occurring further.
In order to prevent substrate to be removed from the phenomenons such as breakage, scuffing occurring further, vacuum absorption holes 34
Opening part is provided with sucker, and sucker connects with vacuum absorption holes 34.For example, Fig. 1, machine are referred to
The quantity of the substrate prong 32 of tool hands 30 is two, each substrate prong 32 is provided with two vacuum and inhales
Attached hole 34, the opening part of each vacuum absorption holes 34 is additionally provided with sucker, sucker and corresponding vac sorb
Hole 34 connects.When adsorbing substrate to be removed, by the substrate that sucker suction is to be removed, with to be removed
Substrate directly contacts is sucker, be possible to prevent substrate to be removed directly to contact with vacuum absorption holes 34
Time vacuum absorption holes 34 hole wall scratch substrate to be removed, thus prevent substrate to be removed from sending out further
The phenomenons such as raw breakage, scuffing.
In the substrate fetching device 100 that this utility model embodiment provides, mechanical hand 30 is additionally provided with
Electrostatic removal device.When being embodied as, electrostatic removal device can be arranged on the substrate prong of mechanical hand 30
On 32.The setting of electrostatic removal device, when substrate to be removed is taken out in substrate box 200, permissible
Remove the electrostatic on substrate to be removed, thus prevent dust, foreign body etc. from sticking on substrate to be removed.
In the description of above-mentioned embodiment, specific features, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.
The above, detailed description of the invention the most of the present utility model, but protection domain of the present utility model
It is not limited thereto, the technology model that any those familiar with the art discloses at this utility model
In enclosing, change can be readily occurred in or replace, all should contain within protection domain of the present utility model.Cause
This, protection domain of the present utility model should be as the criterion with described scope of the claims.
Claims (9)
1. a substrate fetching device, it is characterised in that include supporting platform, mechanical arm and mechanical hand, its
In, described mechanical arm is arranged on described support platform, and described mechanical arm can move in the lifting of the most described support platform
Dynamic, and described mechanical arm is extending and shortens；Described mechanical hand is rotatably connected with described mechanical arm, institute
State mechanical hand to rotate, the substrate rotating to be removed deflected in driving substrate box, make base to be removed
After plate returns normal condition, described mechanical hand takes out substrate to be removed, and described normal condition is to be removed
Substrate state when not deflecting.
Substrate fetching device the most according to claim 1, it is characterised in that described mechanical hand includes
Support beam and the multiple substrate prongs being set in parallel in described support beam, described support beam and described machinery
Arm is rotatably connected, and multiple described substrate prongs are concordant away from the end of described support beam；
In multiple described substrate prongs, substrate prong described at least two is respectively arranged with range sensor,
Described substrate prong away from the end of described support beam and the substrate in substrate box relative to time, described distance passes
Sensor detects the corresponding described substrate prong end away from described support beam with substrate towards described mechanical hand
Side between distance.
Substrate fetching device the most according to claim 2, it is characterised in that described range sensor
For reflective photoelectric sensor, the described substrate prong that described reflective photoelectric sensor is arranged on correspondence is remote
End from described support beam.
Substrate fetching device the most according to claim 2, it is characterised in that described substrate prong
Length direction is vertical with the length direction of described support beam, and multiple described substrate prongs are along described support beam
Length direction uniform intervals is arranged.
Substrate fetching device the most according to claim 1, it is characterised in that described mechanical arm includes
First mechanical arm and the second mechanical arm, one end of described first mechanical arm is rotatably connected with described support platform,
One end of described second mechanical arm is rotatably connected away from one end of described support platform with described first mechanical arm,
Described first mechanical arm and described second mechanical arm rotate the most in the same plane；Described mechanical hand is with described
Second mechanical arm is rotatably connected away from one end of described first mechanical arm.
Substrate fetching device the most according to claim 5, it is characterised in that set on described support platform
Being equipped with the first rotating shaft, described first rotating shaft can rotate relative to described support platform, and described first rotating shaft can be relative
Described support platform lifting moving, described first mechanical arm is fixing with described first rotating shaft to be connected；
Being provided with the second rotating shaft on described first mechanical arm, described second rotating shaft can the most described first machinery
Arm rotates, and described second mechanical arm is fixing with described second rotating shaft to be connected；
Being provided with the 3rd rotating shaft on described second mechanical arm, described 3rd rotating shaft can the most described second machinery
Arm rotates, and described mechanical hand is fixing with described 3rd rotating shaft to be connected；
Described first rotating shaft, described second rotating shaft and described 3rd rotating shaft are connected with motor respectively.
7. according to the arbitrary described substrate fetching device of claim 1-6, it is characterised in that described machinery
Hands is provided with the vacuum absorption holes adsorbing substrate to be removed.
Substrate fetching device the most according to claim 7, it is characterised in that described vacuum absorption holes
Opening part be provided with sucker, described sucker connects with described vacuum absorption holes.
9. according to the arbitrary described substrate fetching device of claim 1-6, it is characterised in that described machinery
It is additionally provided with electrostatic removal device on hand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620504639.8U CN205634157U (en) | 2016-05-27 | 2016-05-27 | Base plate is got and is put device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620504639.8U CN205634157U (en) | 2016-05-27 | 2016-05-27 | Base plate is got and is put device |
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| Publication Number | Publication Date |
|---|---|
| CN205634157U true CN205634157U (en) | 2016-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620504639.8U Expired - Fee Related CN205634157U (en) | 2016-05-27 | 2016-05-27 | Base plate is got and is put device |
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| Country | Link |
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| CN (1) | CN205634157U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108381572A (en) * | 2017-01-16 | 2018-08-10 | 浙江国自机器人技术有限公司 | The robot prong component of device and corresponding means of defence are knocked over anticollision |
| WO2018161569A1 (en) * | 2017-03-08 | 2018-09-13 | 京东方科技集团股份有限公司 | System and method for monitoring temperature of substrate heating furnace |
| CN109205285A (en) * | 2017-06-29 | 2019-01-15 | 日本电产三协株式会社 | The hand and industrial robot of industrial robot |
| CN110534665A (en) * | 2019-07-16 | 2019-12-03 | 福建华佳彩有限公司 | A kind of substrate screening buffer storage |
| CN110865620A (en) * | 2019-11-27 | 2020-03-06 | 郑州旭飞光电科技有限公司 | Online sampling inspection system and method for substrate glass and packaging system |
| CN111254067A (en) * | 2018-12-03 | 2020-06-09 | 长光华大基因测序设备（长春）有限公司 | Clamping positioner of biochip |
| US11131504B2 (en) | 2017-03-08 | 2021-09-28 | Boe Technology Group Co., Ltd. | Temperature monitoring system and method for a substrate heating furnace |
| CN116062476A (en) * | 2023-03-31 | 2023-05-05 | 成都思越智能装备股份有限公司 | Method for automatically correcting and taking glass sheet by mechanical arm and sheet taking device |
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2016
- 2016-05-27 CN CN201620504639.8U patent/CN205634157U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108381572A (en) * | 2017-01-16 | 2018-08-10 | 浙江国自机器人技术有限公司 | The robot prong component of device and corresponding means of defence are knocked over anticollision |
| WO2018161569A1 (en) * | 2017-03-08 | 2018-09-13 | 京东方科技集团股份有限公司 | System and method for monitoring temperature of substrate heating furnace |
| US11131504B2 (en) | 2017-03-08 | 2021-09-28 | Boe Technology Group Co., Ltd. | Temperature monitoring system and method for a substrate heating furnace |
| CN109205285A (en) * | 2017-06-29 | 2019-01-15 | 日本电产三协株式会社 | The hand and industrial robot of industrial robot |
| CN109205285B (en) * | 2017-06-29 | 2021-04-27 | 日本电产三协株式会社 | Hand of industrial robot and industrial robot |
| CN111254067A (en) * | 2018-12-03 | 2020-06-09 | 长光华大基因测序设备（长春）有限公司 | Clamping positioner of biochip |
| CN110534665A (en) * | 2019-07-16 | 2019-12-03 | 福建华佳彩有限公司 | A kind of substrate screening buffer storage |
| CN110534665B (en) * | 2019-07-16 | 2022-04-05 | 福建华佳彩有限公司 | Substrate arrangement caching device |
| CN110865620A (en) * | 2019-11-27 | 2020-03-06 | 郑州旭飞光电科技有限公司 | Online sampling inspection system and method for substrate glass and packaging system |
| CN116062476A (en) * | 2023-03-31 | 2023-05-05 | 成都思越智能装备股份有限公司 | Method for automatically correcting and taking glass sheet by mechanical arm and sheet taking device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161012 |