CN201653918U - Chip appearance detection device - Google Patents
Chip appearance detection device Download PDFInfo
- Publication number
- CN201653918U CN201653918U CN2010201206668U CN201020120666U CN201653918U CN 201653918 U CN201653918 U CN 201653918U CN 2010201206668 U CN2010201206668 U CN 2010201206668U CN 201020120666 U CN201020120666 U CN 201020120666U CN 201653918 U CN201653918 U CN 201653918U
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- suction nozzle
- load plate
- camera
- transparent load
- detection
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Abstract
The utility model discloses a chip appearance detection device which comprises a soleplate, a feeding component mounted on the soleplate, a vision detection component, a receiving component and an upper computer, wherein the feeding component comprises a feeding camera, a feeding suction head and a bulk material disc; the vision detection component comprises a feeding plate on which a feeding hole is formed; the feeding plate is arranged between the top surface of a transparent carrying disc and the feeding suction head; the feeding suction head can be arranged through being aligned with the feeding hole of the feeding plate through a second horizontal driving device; a first detection camera and a third detection camera are arranged above the transparent carrying disc, and a second detection camera is arranged under the transparent carrying disc. The chip appearance detection device can detect the upper surface and the lower surface of a chip without overturning the chip by adopting the transparent carrying disc to reduce the damage and the pollution caused by turnover to the chip; and inconsistent standard caused by manual detection is reduced in a unified template detection manner, so that the production efficiency is improved, and the product quality is ensured.
Description
Technical field
The utility model relates to a kind of outward appearance machines, particularly relates to a kind of wafer appearance checkout equipment.
Background technology
Along with the develop rapidly of quartz crystal industry, product type also more and more is tending towards miniaturization, and present outward appearance to quartz wafer detects to be in manually with the naked eye directly to be observed or observe with magnifier.Owing to there is subjective factor, everyone test stone can be different.And along with the miniaturization of product, artificial naked-eye observation difficulty is increasing, so manual detection can not satisfy the requirement of market and processes.
Summary of the invention
The purpose of this utility model is to overcome the deficiency of prior art, and a kind of wafer appearance checkout equipment that can discern automatically, detect quartz wafer in bulk is provided.
Wafer appearance checkout equipment of the present utility model, it comprises base plate, be installed in the supply assembly on the described base plate, vision-based detection assembly and rewinding assembly, described supply assembly comprises the feed camera, feed suction nozzle and bulk cargo dish, described feed camera, feed suction nozzle and bulk cargo dish are respectively by coupled first, two, three horizontal drive apparatus can move back and forth by along continuous straight runs separately, described feed camera, the direction of motion of feed suction nozzle is parallel to each other and be provided with the direction of motion of described bulk cargo dish is vertical, described feed camera and feed suction nozzle can move to described bulk cargo dish directly over; Described vision-based detection assembly comprises the feedboard that has charging hole on it, described feedboard is arranged between transparent load plate end face and the feed suction nozzle, described feed suction nozzle can be aimed at the charging hole setting of described feedboard by described second horizontal drive apparatus, first detection camera and the 3rd detection camera are arranged on the top of transparent load plate and the second detection camera setting thereunder, each described detection camera and charging hole to be centered close to transparent load plate rotation center be on the same circumference in the center of circle, described transparent load plate can rotate in surface level by the driving that is connected the rotating driving device on its axis; Described rewinding assembly comprises the defective products rewinding motor that is connected with hairbrush on its output shaft, be arranged on the non-defective unit suction nozzle and the non-defective unit box and the defective products box that are arranged on transparent load plate below of described transparent load plate top, described non-defective unit suction nozzle by the 4th coupled horizontal drive apparatus can along continuous straight runs move to non-defective unit box and transparent load plate directly over, described hairbrush be arranged on transparent load plate directly over and be oppositely arranged with described defective products box, the pore of feed suction nozzle and non-defective unit suction nozzle links to each other with vacuum negative pressure device respectively, and the signal input part of a host computer links to each other and its signal output part and first to fourth horizontal drive apparatus with the feed camera and first to the 3rd detection camera, the signal input part of rotating driving device and defective products rewinding motor links to each other just to control it, counter-rotating, stop.
The beneficial effects of the utility model and advantage are: adopt transparent load plate to realize and need not can realize the upset of wafer the upper and lower surface of wafer is detected, reduced because upset causes damage and the pollution to wafer, and adopted unified template detection mode to reduce because the standard that manual detection causes is inconsistent; Adopt the robotization detection mode, and this device can realize continuous detecting, improve production efficiency, guarantee product quality.
Description of drawings
Fig. 1 is the general structure synoptic diagram of wafer appearance checkout equipment of the present utility model;
Fig. 2 is a supply assembly structural representation shown in Figure 1;
Fig. 3 is a vision-based detection modular construction synoptic diagram shown in Figure 1;
Fig. 4 is a rewinding modular construction synoptic diagram shown in Figure 1;
Fig. 5 is the front elevation of the described rewinding assembly of Fig. 4.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in detail.
Wafer appearance checkout equipment as shown in drawings, it comprises base plate, be installed in the supply assembly on the described base plate, vision-based detection assembly and rewinding assembly, described supply assembly comprises feed camera 1-1, feed suction nozzle 1-3 and bulk cargo dish 1-7, described feed camera 1-1, feed suction nozzle 1-3 and bulk cargo dish 1-7 are respectively by coupled first, two, three horizontal drive apparatus can move back and forth by along continuous straight runs separately, described feed camera 1-1, the direction of motion of feed suction nozzle 1-3 parallel to each other and with vertical setting of direction of motion of described bulk cargo dish 1-7, described feed camera 1-1 and feed suction nozzle 1-3 can move to described bulk cargo dish 1-7 directly over; Described vision-based detection assembly 2 comprises the feedboard 2-1 that has charging hole on it, described feedboard 2-1 is arranged between transparent load plate 2-7 end face and the feed suction nozzle 1-3, described feed suction nozzle 1-3 can aim at the charging hole setting of described feedboard 2-1 by described second horizontal drive apparatus, the top and the second detection camera 2-5 that the first detection camera 2-2 and the 3rd detection camera 2-6 are arranged on transparent load plate 2-7 are provided with thereunder, each described detection camera and charging hole to be centered close to transparent load plate 2-7 rotation center be on the same circumference in the center of circle, described transparent load plate 2-7 can rotate in surface level by the driving that is connected the rotating driving device on its axis; Described rewinding assembly comprises the defective products rewinding motor 3-9 that is connected with hairbrush on its output shaft, be arranged on the non-defective unit suction nozzle 3-1 and the non-defective unit box 3-2 and the defective products box 3-8 that are arranged on transparent load plate 2-7 below of described transparent load plate 2-7 top, described non-defective unit suction nozzle 3-1 by the 4th coupled horizontal drive apparatus can along continuous straight runs move to non-defective unit box 3-2 and transparent load plate 2-7 directly over, described hairbrush be arranged on transparent load plate directly over and be oppositely arranged with described defective products box 3-8, feed suction nozzle 1-3 links to each other with vacuum negative pressure device respectively with the pore of non-defective unit suction nozzle 3-1, it also comprises a host computer, and the signal input part of described host computer links to each other and its signal output part and first to fourth horizontal drive apparatus with the feed camera and first to the 3rd detection camera, the signal input part of rotating driving device and defective products rewinding motor 3-9 links to each other.Described transparent load plate can adopt materials such as full transparent glass, plastic plate.
Described first to fourth horizontal drive apparatus can comprise the mobile motor that links to each other with the signal output part of host computer respectively, the output shaft of described mobile motor links to each other with slide block in the guide rail slide block structure, described guide rail links to each other with described base plate by supporting construction respectively, and described feed suction nozzle 1-6, feed camera 1-1, bulk cargo dish 1-7 and non-defective unit suction nozzle 3-1 link to each other with described slide block by installing plate respectively.Certainly described first to fourth horizontal drive apparatus also can be motor-screw-nut structure or motor-cylinder piston structure.
The power source of first horizontal drive apparatus shown in Fig. 2 is feed mobile camera moving motor 1-2, and the power source of second horizontal drive apparatus moves motor 1-4 for the feed suction nozzle.It is on the slide block in the guide rail slide block structure that bulk cargo dish 1-7 is placed on bulk cargo dish shifting axle 1-8.Described feed suction nozzle 1-3 is installed on the feed suction nozzle installing plate 1-6, can be by the spacing between feed suction nozzle adjustment screw 1-5 adjustment feed suction nozzle 1-3 and the bulk cargo dish.
The power source of the 4th horizontal drive apparatus as shown in Figure 4 moves motor 3-5 for the non-defective unit suction nozzle, and described non-defective unit suction nozzle 3-1 is installed on the slide block of the 4th horizontal drive apparatus by non-defective unit suction nozzle installing plate 3-4.Can make non-defective unit suction nozzle 3-1 can adopt the negative pressure method directly the non-defective unit wafer on the transparent load plate to be picked up by adjusting the spacing between non-defective unit suction nozzle adjustment screw 3-3 adjustment non-defective unit suction nozzle 3-1 and the transparent load plate 2-7.
Described rotating driving device comprises the CD-ROM drive motor that links to each other with the signal output part of host computer, and the output shaft of described CD-ROM drive motor is vertically connected on the middle shaft position of described transparent load plate 2-7.Certain described rotating driving device also can be structures such as motor-gear.
Under the described transparent load plate and directly over be respectively arranged with lower plane blow head 3-6 and last plane blow head 3-7, two blow heads are used for the foreign material on the transparent load plate 2-7 are blown away, and keep the cleaning of transparent load plate 2-7.
Be respectively arranged with light source 2-3 and following light source 2-4 on the corresponding position of described first to the 3rd detection camera, be used for wafer illuminated and be convenient to camera and get phase.
The method of operating of the utility model device is as follows: (1) is placed on wafer to be detected on the bulk cargo dish 1-7, the bulk cargo dish 1-7 wafer that the along continuous straight runs to-and-fro movement will be deposited in together under the drive of the 3rd horizontal drive apparatus scatter, feed camera 1-1 drives feed camera 1-1 by first horizontal drive apparatus and moves, take the wafer position on the bulk cargo dish 1-7 and this signal is passed to host computer, then the wafer position data are sent to second, third horizontal drive apparatus; (2) drive feed suction nozzle 1-3 according to wafer position data second horizontal drive apparatus, simultaneously the 3rd horizontal drive apparatus drives bulk cargo dish 1-7 according to the wafer position data and moves feed suction nozzle 1-3 is moved to directly over the wafer, and feed suction nozzle 1-3 adopts the negative pressure method that wafer is picked up; (3) second horizontal drive apparatus drive feed suction nozzle 1-3 and move to directly over the feedboard 2-1, and feed suction nozzle 1-3 blows then, and wafer drops on the transparent load plate 2-7 by the charging hole on the feedboard 2-1; (4) transparent load plate 2-7 is by the rotating driving device driven rotary, wafer is rotated to first to the 3rd detection camera place, respectively wafer is carried out apparent size, lower surface outward appearance and the detection of upper surface outward appearance and testing result is reached the host computer analysis judging that wafer is non-defective unit or defective products; (5) transparent load plate 2-7 is by the rotating driving device driven rotary, in the time of under the non-defective unit wafer rotates to non-defective unit suction nozzle 3-1, according to the host computer synthetic determination is that the wafer of non-defective unit picks up wafer by negative pressure, the non-defective unit suction nozzle 3-1 that will be adsorbed with the non-defective unit wafer by the 4th horizontal drive apparatus moves to directly over the non-defective unit box 3-2, and non-defective unit suction nozzle 3-1 blows and makes wafer fall into non-defective unit box 3-2; (6) transparent load plate 2-7 is by the rotating driving device driven rotary, according to the host computer synthetic determination is that the wafer of defective products rotates to defective products rewinding motor 3-9 when being provided with the hairbrush place, and hairbrush sweeps wafer among the defective products box 3-8 under the drive of defective products rewinding motor 3-9.(7) repeat described step (1) to (6), until finishing processing; First to fourth horizontal drive apparatus, rotating driving device and the defective products rewinding motor 3-5 of described step (1) to the step (6) is according to the output signal start-stop of host computer.
Claims (5)
1. wafer appearance checkout equipment, it comprises base plate, be installed in the supply assembly on the described base plate, vision-based detection assembly and rewinding assembly, it is characterized in that: described vision-based detection assembly (2) comprises the feedboard (2-1) that has charging hole on it, described feedboard (2-1) is arranged between transparent load plate (2-7) end face and the feed suction nozzle (1-3), described feed suction nozzle (1-3) can be aimed at the charging hole setting of described feedboard (2-1) by described second horizontal drive apparatus, top and second detection camera (2-5) that first detection camera (2-2) and the 3rd detection camera (2-6) are arranged on transparent load plate (2-7) are provided with thereunder, each described detection camera and charging hole to be centered close to transparent load plate (2-7) rotation center be on the same circumference in the center of circle, described transparent load plate (2-7) can rotate in surface level by the driving that is connected the rotating driving device on its axis; Described rewinding assembly comprises the defective products rewinding motor (3-9) that is connected with hairbrush on its output shaft, be arranged on the non-defective unit suction nozzle (3-1) of described transparent load plate (2-7) top and be arranged on non-defective unit box (3-2) and defective products box (3-8) below the transparent load plate (2-7), described non-defective unit suction nozzle (3-1) by the 4th coupled horizontal drive apparatus can along continuous straight runs move to non-defective unit box (3-2) and transparent load plate (2-7) directly over, described hairbrush be arranged on transparent load plate directly over and be oppositely arranged with described defective products box (3-8), feed suction nozzle (1-3) links to each other with vacuum negative pressure device respectively with the pore of non-defective unit suction nozzle (3-1), and the signal input part of a host computer links to each other and its signal output part and first to fourth horizontal drive apparatus with the feed camera and first to the 3rd detection camera, the signal input part of rotating driving device and defective products rewinding motor (3-9) links to each other just to control it, counter-rotating, stop.
2. wafer appearance checkout equipment according to claim 1, it is characterized in that: described first to fourth horizontal drive apparatus comprises the mobile motor that links to each other with the signal output part of host computer respectively, the output shaft of described mobile motor links to each other with slide block in the guide rail slide block structure, described guide rail links to each other with described base plate by supporting construction respectively, and described feed suction nozzle (1-6), feed camera (1-1), bulk cargo dish (1-7) and non-defective unit suction nozzle (3-1) link to each other with described slide block by installing plate respectively.
3. wafer appearance checkout equipment according to claim 1, it is characterized in that: described rotating driving device comprises the CD-ROM drive motor that links to each other with the signal output part of host computer, and the output shaft of described CD-ROM drive motor is vertically connected on the middle shaft position of described transparent load plate (2-7).
4. wafer appearance checkout equipment according to claim 1 is characterized in that: under the described transparent load plate and directly over be respectively arranged with lower plane blow head (3-6) and last plane blow head (3-7).
5. wafer appearance checkout equipment according to claim 1 is characterized in that: be respectively arranged with light source (2-3) and following light source (2-4) on the corresponding position of described first to the 3rd detection camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201206668U CN201653918U (en) | 2010-03-01 | 2010-03-01 | Chip appearance detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201206668U CN201653918U (en) | 2010-03-01 | 2010-03-01 | Chip appearance detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201653918U true CN201653918U (en) | 2010-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201206668U Expired - Fee Related CN201653918U (en) | 2010-03-01 | 2010-03-01 | Chip appearance detection device |
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| Country | Link |
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| CN (1) | CN201653918U (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102500554A (en) * | 2011-10-12 | 2012-06-20 | 浙江大学台州研究院 | Fully-automatic visual inspection machine for wafer |
| CN103077422A (en) * | 2013-02-01 | 2013-05-01 | 浙江大学台州研究院 | Quartz wafer counting machine |
| CN103090795A (en) * | 2013-01-22 | 2013-05-08 | 铜陵晶越电子有限公司 | Visual detection device of sizes and defects of quartz wafers |
| CN104214607A (en) * | 2014-08-28 | 2014-12-17 | 江阴新基电子设备有限公司 | Multichannel multi-angle combined light source device in visual inspection system |
| TWI480514B (en) * | 2011-01-28 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | Image measuring apparatus |
| CN106353331A (en) * | 2016-10-28 | 2017-01-25 | 深圳市旭升视觉科技有限公司 | Wafer quality detection device |
| CN107020249A (en) * | 2017-04-19 | 2017-08-08 | 苏州日和科技有限公司 | Liquid crystal panel AOI equipment with automatic identification function |
| CN108287166A (en) * | 2018-03-27 | 2018-07-17 | 苏州奥兰迪尔自动化设备有限公司 | A kind of lithium battery pole slice surface defects detection image documentation equipment |
| CN109092709A (en) * | 2018-08-09 | 2018-12-28 | 珠海格力智能装备有限公司 | Screw detection method and device |
| CN110865085A (en) * | 2019-12-11 | 2020-03-06 | 珠海东锦石英科技有限公司 | Full-automatic quartz wafer appearance selecting machine |
| CN113433139A (en) * | 2021-06-24 | 2021-09-24 | 深圳市智动精密设备有限公司 | Equipment for detecting surface defects of semiconductor wafer |
-
2010
- 2010-03-01 CN CN2010201206668U patent/CN201653918U/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI480514B (en) * | 2011-01-28 | 2015-04-11 | Hon Hai Prec Ind Co Ltd | Image measuring apparatus |
| CN102500554A (en) * | 2011-10-12 | 2012-06-20 | 浙江大学台州研究院 | Fully-automatic visual inspection machine for wafer |
| CN103090795B (en) * | 2013-01-22 | 2015-12-23 | 铜陵晶越电子有限公司 | Quartz wafer size and defective vision pick-up unit |
| CN103090795A (en) * | 2013-01-22 | 2013-05-08 | 铜陵晶越电子有限公司 | Visual detection device of sizes and defects of quartz wafers |
| CN103077422A (en) * | 2013-02-01 | 2013-05-01 | 浙江大学台州研究院 | Quartz wafer counting machine |
| CN104214607B (en) * | 2014-08-28 | 2016-04-27 | 江阴新基电子设备有限公司 | Multichannel multi-angle combined light source device in vision detection system |
| CN104214607A (en) * | 2014-08-28 | 2014-12-17 | 江阴新基电子设备有限公司 | Multichannel multi-angle combined light source device in visual inspection system |
| CN106353331A (en) * | 2016-10-28 | 2017-01-25 | 深圳市旭升视觉科技有限公司 | Wafer quality detection device |
| CN107020249A (en) * | 2017-04-19 | 2017-08-08 | 苏州日和科技有限公司 | Liquid crystal panel AOI equipment with automatic identification function |
| CN108287166A (en) * | 2018-03-27 | 2018-07-17 | 苏州奥兰迪尔自动化设备有限公司 | A kind of lithium battery pole slice surface defects detection image documentation equipment |
| CN109092709A (en) * | 2018-08-09 | 2018-12-28 | 珠海格力智能装备有限公司 | Screw detection method and device |
| CN110865085A (en) * | 2019-12-11 | 2020-03-06 | 珠海东锦石英科技有限公司 | Full-automatic quartz wafer appearance selecting machine |
| CN113433139A (en) * | 2021-06-24 | 2021-09-24 | 深圳市智动精密设备有限公司 | Equipment for detecting surface defects of semiconductor wafer |
| CN113433139B (en) * | 2021-06-24 | 2022-11-18 | 深圳市智立方自动化设备股份有限公司 | Equipment for detecting surface defects of semiconductor wafer |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101124 Termination date: 20180301 |