CN214149141U - Fin detection device - Google Patents
Fin detection device Download PDFInfo
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- CN214149141U CN214149141U CN202023063095.1U CN202023063095U CN214149141U CN 214149141 U CN214149141 U CN 214149141U CN 202023063095 U CN202023063095 U CN 202023063095U CN 214149141 U CN214149141 U CN 214149141U
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- light source
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Abstract
The utility model discloses a fin detection device, which comprises a frame, a detection mechanism, a light source mechanism and a conveying mechanism for conveying a graphite boat, wherein the conveying mechanism, the light source mechanism and the detection mechanism are sequentially arranged on the frame from bottom to top; the light source mechanism comprises a light source and a mounting frame, the light source is arranged on the mounting frame, and the mounting frame is arranged on the rack. The utility model discloses form fixed light source with the top of light source snap-on at the graphite boat, saved the subassembly that blows that is used for the drive light source to carry out the removal on the traditional equipment and with the cooperation work of portable light source, simplified equipment structure greatly, stopped the light source moreover and hit the risk that graphite boat and boat held in the palm to unnecessary loss has been reduced.
Description
Technical Field
The utility model relates to a check out test set technical field especially relates to fin detection device.
Background
The warpage detection (detecting the warpage of the silicon wafer in the graphite boat, and facilitating the picking and placing of a manipulator) is an indispensable step in the silicon wafer production process. When detecting the graphite boat fin, the conventional equipment transfers the graphite boat through conveying mechanism, drives the light source through the light source cylinder and removes to the graphite boat below and shine it, then detects the graphite boat fin through detection mechanism to the completion is to the detection of graphite boat fin. However, the light source needs to be extended between the moving graphite boat and the boat support through a mechanism, and the light source has the risk of colliding with the graphite boat and the boat support in the process of extending the light source into the graphite boat and the boat support. And the whole equipment is relatively complex and the equipment cost is high.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a fin detection device, which comprises a frame, a detection mechanism, a light source mechanism and a conveying mechanism for conveying a graphite boat, wherein the conveying mechanism, the light source mechanism and the detection mechanism are sequentially arranged on the frame from bottom to top;
the light source mechanism comprises a light source and a mounting frame, the light source is arranged on the mounting frame, and the mounting frame is arranged on the rack.
Technical scheme more than adopting, detection mechanism includes camera and camera support, camera support slope set up in the frame, be equipped with the camera on the camera support.
Technical scheme more than adopting, the quantity of camera support is a plurality of, and a plurality of camera supports divide into two sets ofly, and two sets of camera supports set up to opposite direction slope.
According to the technical scheme, the detection mechanism further comprises a fixing frame, and the camera is connected with the rack through the fixing frame.
Technical scheme more than adopting, detection mechanism includes the bracing piece, the bracing piece is located in the frame, be equipped with the mount on the bracing piece.
Technical scheme more than adopting, conveying mechanism includes driving source, carriage and transmission belt, be provided with drive roll and driven voller on the carriage, the drive roll passes through transmission belt with the driven voller and is connected, the driving source with the drive roll drive is connected.
According to the technical scheme, the driving source is a motor.
Technical scheme more than adopting, conveying mechanism still includes the deflector, and the carriage both sides set up the deflector, be provided with the arc spigot surface on the deflector.
Compared with the prior art, the utility model discloses form fixed light source with the top of light source snap-on at the graphite boat, saved the subassembly that is used for driving the light source to carry out the removal on traditional equipment and with the subassembly of blowing that removes light source cooperation work, simplified equipment structure greatly, stopped the light source moreover and hit the risk that graphite boat and boat held in the palm to unnecessary loss has been reduced.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a partially enlarged schematic view of a portion a in fig. 1.
Fig. 3 is a partially enlarged schematic view of a portion B in fig. 1.
Fig. 4 is another schematic structural diagram of the present invention.
Fig. 5 is a partially enlarged schematic view of the upper C portion of fig. 4.
The reference numbers in the figures illustrate: 1. a frame; 2. a detection mechanism; 21. a camera; 22. a camera support; 23. a fixed mount; 24. a support bar; 3. a light source mechanism; 31. a light source; 32. a mounting frame; 4. a conveying mechanism; 41. a drive source; 42. a carriage; 43. a transfer belt; 44. a guide plate; 45. a drive roll; 46. a driven roller.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
Referring to fig. 1 to 5, an embodiment of the present invention provides a fin detection apparatus, including frame 1, detection mechanism 2, light source mechanism 3 and conveying mechanism 4 for transporting graphite boat, conveying mechanism 4, light source mechanism 3 and detection mechanism 2 have been set gradually from bottom to top on frame 1. That is, the light source mechanism 3 is disposed above the conveying mechanism 4, and the detection mechanism 2 is disposed above the conveying mechanism 4.
The boat support carrying the graphite boat is transferred through the conveying mechanism 4, the light source 31 above the graphite boat irradiates the boat support, and the graphite boat warping sheet is detected through the detection mechanism 2, so that the detection operation of the graphite boat warping sheet is completed. Specifically, light source mechanism 3 includes light source 31 and mounting bracket 32, is equipped with light source 31 on the mounting bracket 32, and frame 1 is located to mounting bracket 32 to make light source 31 form fixed light source 31 in frame 1, compare in prior art, the utility model discloses with light source 31 snap-on form fixed light source 31 in the top of graphite boat, saved the subassembly that blows that is used for driving light source 31 to carry out the removal on the conventional equipment and with the cooperation of mobile light source 31, simplified equipment structure greatly, stopped light source 31 moreover and hit the risk that graphite boat and boat held in the palm, thereby reduced the unnecessary loss.
The detection mechanism 2 comprises a camera 21 and a camera support 22, the camera support 22 is obliquely arranged on the frame 1, the camera 21 is arranged on the camera support 22, and the number of the camera supports 22 is several. Preferably, the utility model discloses the quantity of camera 21 is 4, and 4 cameras 21 divide into two sets ofly, and there are 2 cameras 21 in every group promptly, and two sets of camera supports 22 set up to opposite direction slope to make 4 cameras 21 slope to set up, thereby can increase camera 21's shooting range. Therefore, the height of the frame 1 can be adjusted to be a little lower, and equipment debugging is facilitated.
In order to guarantee the fixed stability of camera 21, the utility model discloses detection mechanism 2 includes mount 23 and bracing piece 24, and on frame 1 was located to bracing piece 24, be equipped with mount 23 on the bracing piece 24, frame 1 was connected through mount 23 to camera 21.
The conveying mechanism 4 comprises a driving source 41, a conveying frame 42, a conveying belt 43 and guide plates 44, wherein a driving roller 45 and a driven roller 46 are arranged on the conveying frame 42, the driving roller 45 is connected with the driven roller 46 through the conveying belt 43, the driving source 41 is in driving connection with the driving roller 45, the guide plates 44 are arranged on two sides of the conveying frame 42, and arc-shaped guide surfaces are arranged on the guide plates 44. Preferably, the driving source 41 is a motor, and the motor drives the driven roller 46 to rotate through the driving roller 45, so as to convey the graphite boat by the conveying belt 43.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (8)
1. The utility model provides a fin detection device which characterized in that: the graphite boat detection device comprises a rack, a detection mechanism, a light source mechanism and a conveying mechanism for conveying a graphite boat, wherein the conveying mechanism, the light source mechanism and the detection mechanism are sequentially arranged on the rack from bottom to top;
the light source mechanism comprises a light source and a mounting frame, the light source is arranged on the mounting frame, and the mounting frame is arranged on the rack.
2. The warpage detection apparatus of claim 1, wherein: the detection mechanism comprises a camera and a camera support, the camera support is obliquely arranged on the rack, and the camera is arranged on the camera support.
3. The warpage detection apparatus of claim 2, wherein: the number of camera supports is a plurality of, and a plurality of camera supports divide into two sets ofly, and two sets of camera supports set up to opposite direction slope.
4. The warpage detection apparatus of claim 2, wherein: the detection mechanism further comprises a fixing frame, and the camera is connected with the rack through the fixing frame.
5. The warpage detection apparatus of claim 4, wherein: the detection mechanism comprises a supporting rod, the supporting rod is arranged on the rack, and a fixing frame is arranged on the supporting rod.
6. The warpage detection apparatus of claim 1, wherein: conveying mechanism includes driving source, carriage and transmission belt, be provided with drive roll and driven voller on the carriage, the drive roll passes through transmission belt with the driven voller and is connected, the driving source with the drive roll drive is connected.
7. The warpage detection apparatus of claim 6, wherein: the driving source is a motor.
8. The warpage detection apparatus of claim 1, wherein: the conveying mechanism further comprises guide plates, the guide plates are arranged on two sides of the conveying frame, and arc-shaped guide surfaces are arranged on the guide plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023063095.1U CN214149141U (en) | 2020-12-17 | 2020-12-17 | Fin detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023063095.1U CN214149141U (en) | 2020-12-17 | 2020-12-17 | Fin detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214149141U true CN214149141U (en) | 2021-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023063095.1U Active CN214149141U (en) | 2020-12-17 | 2020-12-17 | Fin detection device |
Country Status (1)
| Country | Link |
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| CN (1) | CN214149141U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114136967A (en) * | 2021-11-24 | 2022-03-04 | 湖南红太阳光电科技有限公司 | Online graphite boat warping detection device and detection method |
-
2020
- 2020-12-17 CN CN202023063095.1U patent/CN214149141U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114136967A (en) * | 2021-11-24 | 2022-03-04 | 湖南红太阳光电科技有限公司 | Online graphite boat warping detection device and detection method |
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