CN204668281U - Serial clustering tool system - Google Patents
Serial clustering tool system Download PDFInfo
- Publication number
- CN204668281U CN204668281U CN201290001237.6U CN201290001237U CN204668281U CN 204668281 U CN204668281 U CN 204668281U CN 201290001237 U CN201290001237 U CN 201290001237U CN 204668281 U CN204668281 U CN 204668281U
- Authority
- CN
- China
- Prior art keywords
- peripheral chambers
- chamber
- cluster tool
- sealing surface
- adapter element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract description 71
- 238000007789 sealing Methods 0.000 claims abstract description 32
- 238000003466 welding Methods 0.000 claims description 9
- 239000004411 aluminium Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229920001973 fluoroelastomer Polymers 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Provide a kind of serial clustering tool system.Described system comprises: the first cluster tool, has more than first treatment chamber and at least one first peripheral chambers; Second cluster tool, has more than second treatment chamber and at least one second peripheral chambers; And adapter element between chamber, at least one first peripheral chambers described is attached at least one second peripheral chambers described by described adapter element, and between described chamber, adapter element comprises the vacuum-resistant compliant section between the sealing surface being bound up on described first chamber and described second chamber.
Description
background
Technical field
Execution mode of the present utility model relates generally to a kind of serial clustering tool system.
Description of Related Art
At such as thin-film transistor (TFT), liquid crystal display (LCD), flat-panel monitor, Organic Light Emitting Diode (OLED), or in production for the semiconductor element of the photovoltaic cell and so on of solar battery group, many component manufacturing process perform being arranged in one or more processing chamber on common platform.Described common platform is called as cluster tool and comprises central authorities' transmission chamber, and described central authorities transmit the robot device that chamber is included in transferring substrates in described cluster tool.Modern production equipment often comprises numerous cluster tools, and described cluster tool can perform different technique on substrate.These cluster tools are often serially connected, to form effective progressive assembly line in described production equipment.In addition, many cluster tools connected in series can parallel work-flow to improve output.
When described cluster tool is assemblied in the production equipment connect for serial, described instrument is not accurately aimed at always, is also even like this when having suitable planning and layout.In addition, the cluster tool of described serial can tight spacing together, with make in order to perform maintaining operation will need in mobile described cluster tool one or more.Need adapter apparatus, described adapter apparatus can be used as connector between the chamber for cluster tool.
utility model summary
Execution mode of the present utility model generally provides a kind of adapter apparatus for a cluster tool being attached to another cluster tool.In one embodiment, the cluster tool system of serial is provided.Described system comprises: the first cluster tool, has more than first treatment chamber and at least one first peripheral chambers; Second cluster tool, has more than second treatment chamber and at least one second peripheral chambers; And the adapter element between chamber, at least one first peripheral chambers described is attached at least one second peripheral chambers described by described adapter element, and the adapter element between described chamber comprises the vacuum-resistant compliant section between the sealing surface being bound up on described first chamber and described second chamber.
In another embodiment, the cluster tool system of serial is provided.Described system comprises: the first cluster tool, has more than first treatment chamber and at least one first peripheral chambers; Second cluster tool, have more than second treatment chamber and at least one second peripheral chambers, described second peripheral chambers is attached to described first peripheral chambers by the adapter element between chamber; Wherein said second peripheral chambers is relative to described first peripheral chambers misalignment, and the adapter element between described chamber comprises and is bound up on described vacuum-resistant compliant section between at least one first peripheral chambers and the sealing surface of at least one the second peripheral chambers described.
accompanying drawing is sketched
Therefore, can understand the mode of above-mentioned feature structure of the present utility model in detail, of the present utility model more specifically description the namely summarized above can be carried out with reference to execution mode, and some execution modes are illustrated in accompanying drawing.But, it should be noted that accompanying drawing only illustrates exemplary embodiment of the present utility model, and therefore should not be regarded as the restriction of the utility model scope, because the utility model allows the execution mode of other equivalences.
Figure 1A is the plane graph of the serial clustering tool system according to execution mode described herein.
Figure 1B be when the peripheral chambers of the serial clustering tool system of Figure 1A can be misalignment time, the schematic top plan view of a part for described peripheral chambers.
Fig. 2 A is the end view of an execution mode of adapter element between chamber, and between described chamber, adapter element can be used for the serial clustering tool system of Figure 1A or can use together with the peripheral chambers of Figure 1B.
Fig. 2 B be Fig. 2 A chamber between the isometric view of adapter element.
Fig. 3 is the isometric side view of another execution mode of adapter element between the chamber that can use together with the peripheral chambers of Figure 1B.
In order to promote understanding, use similar elements symbol to be appointed as the common similar elements of all figure in the conceived case.Consider that disclosed element can be incorporated into other execution modes in one embodiment, no longer carries out specific details herein.
describe in detail
The execution mode of utility model relates generally to a kind of adapter apparatus for a cluster tool being attached to another cluster tool.Described adapter apparatus can be used as connector between chamber, the chamber on the first cluster tool to be attached to the chamber on the second cluster tool.The execution mode discussed herein can be put into practice in cluster tool, such as can from California, and the subsidiary of the Applied Materials of Santa Clara---AKT company of the U.S. buys
90K PECVD system.Will be appreciated that the execution mode discussed can practice in factor interface and other cluster tools and/or treatment system (comprising those cluster tools and/or treatment system of being sold by other manufacturers) herein.
Figure 1A is the plane graph of serial clustering tool system 100.Described serial clustering tool system 100 comprises the first cluster tool 105A and at least one second cluster tool 105B.Each in first cluster tool 105A and the second cluster tool 105B comprises multiple treatment chamber, is such as attached to the corresponding treatment chamber 110A-110J transmitting chamber 115A and 115B separately.Each in first cluster tool 105A and the second cluster tool 105B also comprises multiple peripheral chambers, peripheral chambers 120A and 120B on such as the first cluster tool 105A and peripheral chambers 120C and 120D on the second cluster tool 105B.Described peripheral chambers 120A-120D can be load lock chamber or tunnel chamber, described peripheral chambers 120A-120D is configured and is attached to another chamber (such as, transmit chamber or another peripheral chambers, vacuum/atmosphere interface element, or factor interface).
First cluster tool 105A and the second cluster tool 105B both can process multiple substrate simultaneously.Each in treatment chamber 110A-110J is through adjusting to receive and treatment substrate 125 (described substrate 125 is illustrated as in transmission chamber 115A).Each in treatment chamber 110A-110J can be configured the different process on substrate.Similarly, the first cluster tool 105A and the second cluster tool 105B can be configured the different process on multiple substrate.Such as, described first cluster tool 105A be used in described treatment chamber 110A-110F one or more on substrate patterning and one or more first material of deposition, and described second cluster tool 105B can be configured deposition or the coated technique of one or more the second material on substrate.In one embodiment, described serial clustering tool system 100 can be linear, so that described first cluster tool 105A and described second cluster tool 105B aims at X-direction neutral line substantially.
In order to can in serial clustering tool system 100 treatment substrate, described peripheral chambers 120B and 120C (also illustrating on peripheral chambers 120D and 120E) by chamber between an execution mode of adapter element 130 be attached to together.Between described chamber, adapter element 130 can be configured as flexible chamber interface, and described flexible chamber interfaces is to the far-end of each in described peripheral chambers 120B and 120C.In one embodiment, adapter element 130 between described chamber, and described peripheral chambers 120B and 120C is referred to as and runs through chamber 135.In an execution mode of described serial clustering tool system 100, each in described first cluster tool 105A and described second cluster tool 105B can comprise the axle A and axle B that generally extend in X-direction.Between described chamber, adapter element 130 provides the vacuum seal to each in described first cluster tool 105A and described second cluster tool 105B as described axle A and described axle B conllinear.Even if adapter element 130 is for described first cluster tool 105A and described second cluster tool 105B misalignment between described chamber, be yet to provide the vacuum seal to each in described first cluster tool 105A and described second cluster tool 105B.Misalignment can be defined as any situation except axle A is identical with axle B.In an example, misalignment can be defined as except between axle A and axle B in 180 degree of angles and axle A and axle B substantial parallel except any situation.Misalignment can also comprise described peripheral chambers 120B and 120C misalignment in X-Y plane and/or Y-Z plane.
Described first cluster tool 105A and described second cluster tool 105B misalignment often need the one or both in mobile described cluster tool, to correct described misalignment.Described correction cost considerable time and manpower, and add the chance of the cluster tool damaging positive reorientation.Have in the cluster tool of substrate (such as having the substrate of the planar surface area being greater than about 2 square metres) of high surface area in use, alignment correction is aggravated.These cluster tools are usually very heavy, have the weight of tens thousand of kilograms.The volume of these cluster tools makes these cluster tools be difficult to when not having useful tool to carry out great dismounting move.This situation adds time-consuming and manpower, and aligns the damage of the instrument be moved, and is the significant damage in production equipment.
Adapter element 130 between described chamber provides the salable interface between described first cluster tool 105A and described second cluster tool 105B, and is formed thus and run through chamber 135 between described first cluster tool 105A and described second cluster tool 105B.The described chamber 135 that runs through allows the fluid between described first cluster tool 105A and described second cluster tool 105B to be communicated with, thus containing any negative pressure between described first cluster tool 105A and described second cluster tool 105B.Which reduce when the pump time between described transmission chamber 115A and described transmission chamber 115B during transferring substrates.Although do not describe for simplicity, when described peripheral chambers 120E is attached to the transmission chamber of another cluster tool, described peripheral chambers 120D and 120E can configure (all not shown) similarly.
Figure 1B is when the misalignment of described first cluster tool 105A and described second cluster tool 105B (all not shown) possibility, the schematic top plan view of a part of peripheral chambers 120B and 120C of the serial clustering tool system 100 of Figure 1A.Each in described peripheral chambers 120B and 120C can be in fact the stiff rectangular chamber be made up of metal material (such as, aluminium, stainless steel, the alloy of both or the former combination).Each in described peripheral chambers 120B and 120C comprises sealing surface 140A and sealing surface 140B respectively.In conventional systems, described sealing surface 140A, 140B are by close to each other and be installed to together.But described peripheral chambers 120B and 120C can misalignment slightly in X-Y plane.In an example, the misalignment in described X-Y plane can be about 0.5 degree to about 3 degree or larger angle.Therefore, when described peripheral chambers 120B and 120C is adjacent to each other, the sealing surface 140A of described peripheral chambers 120B may not aim at the sealing surface 140B of described peripheral chambers 120C completely.In some instances, gap will be there is between described sealing surface 140A and described sealing surface 140B.Described gap will can cause other problems for vacuum leak source.Although not shown, described peripheral chambers 120B and 120C can in addition vertically and/or misalignment in Z-Y plane, and described misalignment can cause gap as above.In addition, when described sealing surface 140A and 140B is adjacent to each other, the maintenance of described first cluster tool 105A or described second cluster tool 105B may difficulty.Such as, if need to remove described peripheral chambers 120B for some reason, so needs are moved away from the one or both in described first cluster tool 105A and described second cluster tool 105B each other, thus remove described peripheral chambers 120B.The movement of the one or both in described cluster tool 105A and 105B can utilize manpower and the time of a great deal of, and increases the possibility of damage instrument.
According to execution mode described herein, the described sealing surface 140A of described peripheral chambers 120B and the described sealing surface 140B standoff distance D' of described peripheral chambers 120C.Described distance D' can be about 0.05 meter (m) to about 0.16m.Depend on any misalignment between axle A and axle B, between the described sealing surface 140A and the described sealing surface 140B of described peripheral chambers 120C of described peripheral chambers 120B, also can there is distance D " interval.Distance D " can be greater than described distance D'.Between described chamber, adapter element 130 (illustrating in figure ia) can be used for crossing over distance D' and D " and seal described peripheral chambers 120B and 120C.Between described chamber, adapter element 130 allows the misalignment of at least one angle [alpha] between described peripheral chambers 120B and 120C, provides the effective vacuum seal between described peripheral chambers 120B and 120C simultaneously.In addition, between described chamber, the removal of adapter element 130 allows to remove any one in described peripheral chambers 120B or 120C easily, and described distance D' and D " allows the one or both in described peripheral chambers 120B and 120C to move freely relative to another one.But for adapter element 130 between chamber as described herein, needs reorientate to aim at described sealing surface 140A and described sealing surface 140B by described first cluster tool 105A and described second cluster tool 105B.Between described chamber, adapter element 130 also can be used for measuring the misalignment between described sealing surface 140A and described sealing surface 140B in Z-Y plane and/or vertical misalignment.
Fig. 2 A is the end view of an execution mode of adapter element 130 between chamber, and between described chamber, adapter element 130 can use on the serial clustering tool system 100 of Figure 1A.Fig. 2 B be Fig. 2 A chamber between the isometric view of adapter element 130.Between described chamber, adapter element 130 comprises the compliant section 200 be arranged between rigid interface 210.Described compliant section 200 is generally vacuum-resistant, can operate adapter element 130 between described chamber under negative pressure, and can not leak.Described compliant section 200 can comprise multiple welding pleat 215, and described welding pleat 215 provides rigidity and allows described compliant section 200 disproportionately enlargement and contraction in described X-Y plane and/or described Y-Z plane.Described rigid interface 210 can comprise rigid cap 220, and described compliant section 200 is hermetically attached to rectangular flange 225 by described rigid cap 220.Between described chamber adapter element 130 available metal material manufacture, such as aluminium, stainless steel, titanium,
material,
material, the former combination and alloy, and polymeric material, such as
fluoroelastomer material.Described rectangular flange 225 can be made with similar material.Described rectangular flange 225 can comprise multiple opening 230, and described opening 230 receives securing member 235 described rectangular flange 225 to be attached to the installed surface 240 on the far-end of each being arranged on described peripheral chambers 120B and 120C.Described rectangular flange 225 can comprise sealing surface 245, and described sealing surface 245 is through adjusting to closely cooperate with the installed surface 240 on described both peripheral chambers 120B and 120C.Described sealing surface 245 can comprise the groove 250 be formed in described sealing surface 245.Described groove 250 can be sunk surface, and described sunk surface is through adjusting the part receiving seal (such as, O type ring (not shown)).
Fig. 3 is the isometric side view of another execution mode of adapter element 300 between the chamber that can use together with described peripheral chambers 120B and 120C of Figure 1B.In this embodiment, between described chamber, adapter element 300 comprises polygon shell 305, described polygon shell 305 has solid sidewall, and described solid sidewall usually mates the space between sealing surface 140A, 140B of peripheral chambers 120B and 120C of Figure 1B through sizing.Described polygon shell 305 is also included in the rectangular flange 225 on the opposite side of described polygon shell 305.Described polygon shell 305 can comprise one or more lateral wall piece, described lateral wall piece aluminium, stainless steel, titanium,
material,
material, the former combination and alloy, and polymeric material, such as
fluoroelastomer material is made.Described rectangular flange 225 is by guaranteeing that the joint method (such as welding) of vacuum integrity is attached to described polygon shell 305.
Between described chamber as described herein, the execution mode of adapter element 130 and 300 helps to reduce the set-up time for constructing serial clustering tool system 100.Between described chamber adapter element 130 and 300 help when described cluster tool 105A and 105B substantial alignment or when described cluster tool 105A and 105B in one or more plane relative to each other misalignment time at least one first cluster tool 105A is attached to the second cluster tool 105B.The summary of the connection of described cluster tool 105A, 105B reduces the location of the one or both in described cluster tool 105A, 105B and reorientation significantly and reduces to be damaged.Therefore, set-up time of described minimizing provides higher output and less has cost, because manpower and potential damage reduce.Between described chamber, adapter element 130,300 is also provided for accessing described cluster tool more easily for maintenance, because when removing between described chamber adapter element 130 or 300, can remove described peripheral chambers easily.
Although foregoing is for execution mode of the present utility model, but other and further execution mode of the present utility model can be designed when not departing from base region of the present utility model, and scope of the present utility model is determined by following claims.
Claims (15)
1. a serial clustering tool system, is characterized in that, comprising:
First cluster tool, has more than first treatment chamber and at least one first peripheral chambers;
Second cluster tool, has more than second treatment chamber and at least one second peripheral chambers; With
Adapter element between chamber, for at least one first peripheral chambers described being attached at least one second peripheral chambers described, between described chamber, adapter element comprises and is bound up on described vacuum-resistant compliant section between at least one first peripheral chambers and the sealing surface of at least one the second peripheral chambers described.
2. the system as claimed in claim 1, is characterized in that, described first cluster tool is relative to described second cluster tool misalignment.
3. system as claimed in claim 2, it is characterized in that, described compliant section comprises multiple welding pleat.
4. system as claimed in claim 3, is characterized in that, each in described multiple welding pleat comprise aluminium, stainless steel, titanium,
or the former combination.
5. system as claimed in claim 3, it is characterized in that, at least two in described welding pleat are attached to rigid interface.
6. system as claimed in claim 5, it is characterized in that, described rigid interface comprises rectangular flange.
7. system as claimed in claim 6, it is characterized in that, described rectangular flange comprises sealing surface.
8. system as claimed in claim 7, it is characterized in that, described sealing surface comprises the groove be formed in described sealing surface.
9. a serial clustering tool system, is characterized in that, comprising:
First cluster tool, has more than first treatment chamber and at least one first peripheral chambers;
Second cluster tool, there is more than second treatment chamber and at least one second peripheral chambers, described second peripheral chambers is attached to described first peripheral chambers by adapter element between chamber, wherein said second peripheral chambers is relative to described first peripheral chambers misalignment, and between described chamber, adapter element comprises and is bound up on described vacuum-resistant compliant section between at least one first peripheral chambers and the sealing surface of at least one the second peripheral chambers described.
10. system as claimed in claim 9, it is characterized in that, described compliant section comprises multiple welding pleat.
11. systems as claimed in claim 10, is characterized in that, each in described multiple welding pleat comprise aluminium, stainless steel, titanium,
or the former combination.
12. systems as claimed in claim 10, is characterized in that, at least two in described welding pleat are attached to rigid interface.
13. systems as claimed in claim 12, it is characterized in that, described rigid interface comprises rectangular flange.
14. systems as claimed in claim 13, it is characterized in that, described rectangular flange comprises sealing surface.
15. systems as claimed in claim 14, it is characterized in that, described sealing surface comprises the groove be formed in described sealing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520646343.5U CN205177792U (en) | 2012-04-10 | 2012-04-10 | Serial instrument system of trooping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2012/032879 WO2013154536A1 (en) | 2012-04-10 | 2012-04-10 | Interchamber adapter for cluster tool |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520646343.5U Division CN205177792U (en) | 2012-04-10 | 2012-04-10 | Serial instrument system of trooping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204668281U true CN204668281U (en) | 2015-09-23 |
Family
ID=49327962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201290001237.6U Expired - Lifetime CN204668281U (en) | 2012-04-10 | 2012-04-10 | Serial clustering tool system |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR200482405Y1 (en) |
| CN (1) | CN204668281U (en) |
| WO (1) | WO2013154536A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109791907A (en) * | 2016-10-27 | 2019-05-21 | 应用材料公司 | Flexible apparatus front-end module interface, environmental control equipment front-end module and assemble method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5259881A (en) * | 1991-05-17 | 1993-11-09 | Materials Research Corporation | Wafer processing cluster tool batch preheating and degassing apparatus |
| US6017820A (en) * | 1998-07-17 | 2000-01-25 | Cutek Research, Inc. | Integrated vacuum and plating cluster system |
| JP2002329763A (en) * | 2001-04-27 | 2002-11-15 | Yaskawa Electric Corp | Connecting structure between hermetic chambers |
| US20040035360A1 (en) * | 2002-05-17 | 2004-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus |
| KR20090017887A (en) * | 2007-08-16 | 2009-02-19 | 세메스 주식회사 | Apparatus of connecting process chamber used in manufacturing semiconductor device |
-
2012
- 2012-04-10 KR KR2020147000051U patent/KR200482405Y1/en active IP Right Grant
- 2012-04-10 WO PCT/US2012/032879 patent/WO2013154536A1/en active Application Filing
- 2012-04-10 CN CN201290001237.6U patent/CN204668281U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109791907A (en) * | 2016-10-27 | 2019-05-21 | 应用材料公司 | Flexible apparatus front-end module interface, environmental control equipment front-end module and assemble method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20150000231U (en) | 2015-01-16 |
| KR200482405Y1 (en) | 2017-01-19 |
| WO2013154536A1 (en) | 2013-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8590902B2 (en) | Seal member, depressurized chamber, depressurizing processing apparatus, seal mechanism of depressurized chamber, and method of manufacturing a depressurized chamber | |
| CN100576039C (en) | Make the bonder and the substrate that is used for making LCD of LCD | |
| CN105789220A (en) | Dual gate line array substrate, testing method, display panel and display device | |
| CN204668281U (en) | Serial clustering tool system | |
| KR20210001021U (en) | Non-scratching and durable substrate support pin | |
| CN205177792U (en) | Serial instrument system of trooping | |
| CN105745168A (en) | Peeling methods and apparatus | |
| CN101674893B (en) | Transfer chamber with vacuum extension for shutter disks | |
| CN112033363B (en) | Tower body inclination measuring method of tower crane | |
| CN103305410A (en) | Micro-injection system and coordinate error compensating and accurate repeat positioning method | |
| CN204537990U (en) | A kind of substrate detection apparatus | |
| CN204991676U (en) | Device and base plate vacuum chamber device for supporting substrate | |
| KR200491418Y1 (en) | Transfer chamber lid door actuators | |
| CN202259225U (en) | Mechanical arm for delivery of substrate | |
| CN104035245A (en) | Liquid crystal displaying panel | |
| US20030168175A1 (en) | Substrate alignment apparatus | |
| CN101591774B (en) | Chemical vapor deposition apparatus | |
| CN219689844U (en) | Vacuum pipeline of thin film equipment | |
| CN100416759C (en) | Processing chamber, flat display device production device, plasma treatment method using same | |
| CN213352211U (en) | Positioning jig for upper and lower cover assembling machine | |
| CN220903203U (en) | Cover plate supporting device | |
| CN215665515U (en) | Auger device for particulate matter conveying | |
| CN116805609B (en) | Multi-finger wafer carrying manipulator | |
| CN202610104U (en) | Height positioning gas pressure support device | |
| CN101225916B (en) | Overhead floor system and method for bearing work machine by constructing overhead floor system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20150923 |