CN220903203U - Cover plate supporting device - Google Patents
Cover plate supporting device Download PDFInfo
- Publication number
- CN220903203U CN220903203U CN202322594011.4U CN202322594011U CN220903203U CN 220903203 U CN220903203 U CN 220903203U CN 202322594011 U CN202322594011 U CN 202322594011U CN 220903203 U CN220903203 U CN 220903203U
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- cover plate
- bearing
- supporting
- limiting
- supporting device
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- 238000000034 method Methods 0.000 abstract description 18
- 238000009434 installation Methods 0.000 description 6
- 238000000427 thin-film deposition Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application relates to a cover plate supporting device. The cover plate supporting device comprises a bearing part; the bearing part is provided with an operation space for installing and detaching the cover plate; a support part; the top end of the supporting part is connected with the geometric center of the bearing part and is used for providing supporting force in the direction of the vertical cover plate for the bearing part; the limiting part is arranged at one side of the bearing part far away from the supporting part; when the cover plate supporting device supports the cover plate, the bearing part is used for being attached to the surface of the cover plate, the supporting part is used for providing supporting force on the direction perpendicular to the cover plate for the bearing part, and the limiting part is propped against the edge of the cover plate. The cover plate supporting device can support the cover plate in the process of installing and detaching the cover plate, so that the cover plate is prevented from falling.
Description
Technical Field
The application relates to the technical field of semiconductor manufacturing equipment, in particular to a cover plate supporting device.
Background
The film deposition equipment is semiconductor manufacturing equipment for realizing film deposition on a wafer, and a reaction cavity, a cover plate and a sealing rubber ring are adopted to realize a vacuum environment, so that necessary conditions are provided for film deposition.
The weight of the cover plate in the thin film deposition apparatus is large, and an apparatus engineer needs to ensure that the cover plate does not fall down during the process of installing and detaching the cover plate. Thus, during the process of installing and removing the cover plate, the equipment engineer is required to remove the screw with one hand while lifting the cover plate with the other hand. The operation mode has great limitation on the action of equipment engineers, and seriously affects the efficiency of installation and disassembly.
Disclosure of utility model
Based on the above, the application provides the cover plate supporting device which can support the cover plate in the process of installing and detaching the cover plate so as to ensure that the cover plate does not fall off.
A cover plate supporting device comprising:
A carrying part; the bearing part is provided with an operation space for installing and detaching the cover plate;
A support part; the top end of the supporting part is connected to the geometric center of the bearing part and is used for providing supporting force to the bearing part in the direction vertical to the cover plate;
The limiting part is arranged at one side of the bearing part far away from the supporting part;
When the cover plate supporting device supports the cover plate, the bearing part is used for being attached to the surface of the cover plate, the supporting part is used for providing supporting force vertical to the bearing part in the direction of the cover plate, and the limiting part is propped against the edge of the cover plate.
In one embodiment, the limiting part is movably connected with the bearing part and has a first position and a second position relative to the bearing part;
When the limiting part is positioned at the first position, the top end of the limiting part is higher than the surface of the bearing part, facing to one side of the cover plate; when the limiting part is positioned at the second position, the top end of the limiting part is flush or approximately flush with the surface of one side of the bearing part, which faces the cover plate.
In one embodiment, the bearing part comprises a base plate and a plurality of bearing arms which are radially arranged with the base plate as a center; the fixed ends of the plurality of bearing arms are connected with the base plate, and the operation space is formed between the adjacent bearing arms;
The limiting parts comprise limiting parts which are arranged in one-to-one correspondence with the bearing arms; each limiting piece is correspondingly arranged at the free ends of the bearing arms.
In one embodiment, a connecting sliding rail is arranged on one side of each limiting piece, which faces to the corresponding bearing arm; the connecting sliding rail is sleeved on the periphery of the free end corresponding to the bearing arm.
In one embodiment, an included angle is formed between a side surface of each limiting piece facing the cover plate and a side surface of the corresponding bearing arm facing the cover plate; the included angle is less than or equal to 90 degrees.
In one embodiment, the length of each of the limiting members is greater than or equal to the thickness of the cover plate.
In one embodiment, the ratio of the radius of the base plate to the distance between the free end of each bearing arm and the center of the base plate is 1/3-1/2.
In one embodiment, the carrier comprises at least eight of the carrier arms.
In one embodiment, the plane of the bearing part is perpendicular to the supporting part.
In one embodiment, the cover plate supporting device further includes:
The lifting device is arranged at the bottom end of the supporting part and sleeved on the periphery of the supporting part; the lifting device is used for driving the supporting part to move in the vertical direction.
The cover plate supporting device provided by the application can/has at least the following advantages:
When the cover plate is supported by the cover plate supporting device provided by the application, the bearing part is attached to the surface of the cover plate; the top end of the supporting part is connected to the geometric center of the bearing part, provides supporting force in the direction vertical to the cover plate for the bearing part, and is applied to the cover plate through the bearing part, so that the cover plate is ensured not to fall off. Simultaneously, set up spacing portion and make spacing portion support with the edge of apron when apron strutting arrangement supports the apron and hold, can avoid the apron to remove in the horizontal direction at the in-process of installation and dismantlement apron, be favorable to avoiding the apron to produce wearing and tearing at the in-process of installation and dismantlement apron. The cover plate supporting device provided by the application can support the cover plate in the process of installing and dismantling the cover plate, so that the cover plate is not required to be supported by an equipment engineer without needing to use one hand, and the efficiency of installing and dismantling the cover plate is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.
FIG. 1 is a front view of a cover plate support device according to some embodiments of the present application;
Fig. 2 is a schematic perspective view of a bearing portion in a cover plate supporting device according to some embodiments of the present application;
FIG. 3 is a schematic perspective view of the cover plate supporting device shown in FIG. 2, wherein the bearing portion is attached to the cover plate;
Fig. 4 is a schematic perspective view of one of the carrying arms and the corresponding limiting member in the cover plate supporting device according to some embodiments of the present application;
Fig. 5 (a) is a front view of a cover plate supporting device according to some embodiments of the present application when a limiting member is located at a first position; fig. 5 (b) is a front view of a cover support device according to some embodiments of the present application, in which the stopper moves from the first position to the second position; fig. 5 (c) is a front view of a cover supporting device according to some embodiments of the present application when the limiting member is located at the second position;
fig. 6 is a partial front view of a cover plate supporting device according to some embodiments of the present application.
Reference numerals illustrate:
11. A carrying part; 111. a base plate; 112. a load-bearing arm; 113. a limiting piece; 113a, connecting the slide rail; 12. a support part; 13. a limit part; 14. a lifting device; 2. and a cover plate.
Detailed Description
In order that the application may be readily understood, a more complete description of the application will be rendered by reference to the appended drawings. Preferred embodiments of the present application are shown in the drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
It will be understood that when an element or layer is referred to as being "adjacent" or "connected" to another element or layer, it can be directly adjacent or connected to the other element or layer or intervening elements or layers may be present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, doping types and/or sections, these elements, components, regions, layers, doping types and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, doping type or section from another element, component, region, layer, doping type or section. Thus, a first element, component, region, layer, doping type or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present application; for example, a first location may be referred to as a second location, and similarly, a second location may be referred to as a first location; the first position and the second position are different positions.
It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use and operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, features described as "upper" would then be oriented "lower. Thus, the exemplary term "..upper" may include both upper and lower orientations. Furthermore, the device may also include an additional orientation (e.g., rotated 90 degrees or other orientations) and the spatial descriptors used herein interpreted accordingly.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. Also, as used herein, the term "and/or" includes any and all combinations of the associated listed items.
It should be noted that, the illustrations provided in the present embodiment are only schematic illustrations of the basic concept of the present application, and only the components related to the present application are shown in the illustrations, rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of each component in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.
The weight of the cover plate in the thin film deposition apparatus is large, and an apparatus engineer needs to ensure that the cover plate does not fall down during the process of installing and detaching the cover plate. Thus, during the process of installing and removing the cover plate, the equipment engineer is required to remove the screw with one hand while lifting the cover plate with the other hand. The operation mode has great limitation on the action of equipment engineers, and seriously affects the efficiency of installation and disassembly.
In view of the defects in the prior art, the application provides the cover plate supporting device which can support the cover plate in the process of installing and detaching the cover plate so as to ensure that the cover plate does not fall off. The details of which will be elucidated in the following examples.
It should be noted that the cover plate according to the embodiment of the present application may include, but is not limited to, a cover plate in a thin film deposition apparatus. The following description will be made by taking the cover plate as an example of the cover plate at the bottom of the reaction chamber in the thin film deposition apparatus.
According to some embodiments, a cover plate support device is provided. Referring to fig. 1, the cover plate supporting device may specifically include a bearing portion 11, a supporting portion 12 and a limiting portion 13.
Wherein the carrying part 11 may be provided with an operation space for mounting and dismounting the cover plate; the top end of the supporting part 12 is connected to the geometric center of the bearing part 11 and is used for providing supporting force in the vertical cover plate direction for the bearing part 11; the limiting portion 13 is disposed on a side of the bearing portion 11 away from the supporting portion 12.
When the cover plate supporting device is used for supporting the cover plate, the bearing part 11 is used for being attached to the surface of the cover plate, the supporting part 12 is used for providing supporting force in the direction perpendicular to the cover plate for the bearing part 11, and the limiting part 13 is abutted against the edge of the cover plate.
When the cover plate supporting device provided by the embodiment is used for supporting the cover plate, the bearing part 11 is attached to the surface of the cover plate; the top end of the supporting part 12 is connected to the geometric center of the bearing part 11, provides a supporting force in the vertical cover plate direction to the bearing part 11, and is applied to the cover plate through the bearing part 11, thereby ensuring that the cover plate does not fall off. Simultaneously, set up spacing portion 13 and make spacing portion 13 support the edge of apron when apron strutting arrangement supports the apron and hold, can avoid the apron to remove in the horizontal direction at the in-process of installation and dismantlement apron to reduce friction, be favorable to avoiding the apron to produce wearing and tearing at the in-process of installation and dismantlement apron.
The cover plate supporting device provided by the embodiment can support the cover plate in the process of installing and detaching the cover plate, so that the cover plate is not required to be supported by equipment engineers by one hand, and the efficiency of installing and detaching the cover plate is improved. In some thin film deposition apparatus, the cover plate is heavy and typically requires at least two equipment engineers to be able to perform the mounting and dismounting operations. The cover plate supporting device provided by the embodiment does not need to be supported by an equipment engineer, so that the manpower waste can be avoided. For example, by adopting the above-described cover plate supporting device, only one equipment engineer is required to install and detach the cover plate.
It will be appreciated that in the cover plate supporting device provided in the above embodiment, the top end of the supporting portion 12 is connected to the geometric center of the carrying portion 11. Such arrangement is advantageous in maintaining the balance of the cover plate in the process of mounting and dismounting the cover plate, so that the cover plate can be stably attached to the bearing part 11, so that the equipment engineer can perform the operation of mounting and dismounting the cover plate.
As an example, the carrying part 11 is provided with an operation space for attaching and detaching the cover plate may be: the carrying part 11 is provided with an operation space at a position corresponding to the mounting and dismounting screw on the cover plate.
In some embodiments, the limiting portion 13 may be movably connected with the carrying portion 11, and has a first position and a second position relative to the carrying portion 11.
When the limiting part 13 is positioned at the first position, the top end of the limiting part 13 is higher than one side surface of the bearing part 11 facing the cover plate; when the limiting part 13 is at the second position, the top end of the limiting part 13 is flush or approximately flush with the surface of the side of the bearing part 11 facing the cover plate. The details of which will be described in more detail in the following examples.
Illustratively, when the cover plate needs to be mounted and dismounted, the cover plate supporting device provided by the embodiment can be adopted, and the limiting part 13 is located at the first position, and the limiting part 13 can abut against the edge of the cover plate to prevent the cover plate from moving in the horizontal direction, so that friction is reduced, and abrasion of the cover plate in the process of mounting and dismounting the cover plate is avoided. When the cover plate needs to be removed, the limiting part 13 can be moved to the second position, so that the cover plate is taken out conveniently.
In some embodiments, as shown in fig. 1, the plane of the bearing portion 11 may be perpendicular to the supporting portion 12.
Referring to fig. 2, in some embodiments, the carrying portion 11 may include a base 111 and a plurality of carrying arms 112 radially arranged around the base 111. Wherein, the fixed ends of the plurality of bearing arms 112 are connected with the base plate 111, and an operation space is formed between the adjacent bearing arms 112.
In the cover plate supporting device provided in the above embodiment, the limiting portion 13 may include limiting members 113 disposed in one-to-one correspondence with the plurality of carrying arms 112. Each limiting member 113 is disposed at a free end of the plurality of carrying arms 112.
Referring to fig. 3, fig. 3 illustrates a case where the bearing portion 11 is attached to the surface of the cover 2 in the cover supporting device according to the above embodiment.
The number of the carrying arms 112 is not particularly limited in the embodiment of the present application. In some embodiments, the carrier 11 includes at least eight carrier arms 112; for example, the number of carrier arms 112 may be eight, nine, ten, twelve or sixteen, etc. The carrier 11 as shown in fig. 2 and 3 comprises eight carrier arms 112.
Referring to fig. 4, in the cover supporting device shown in fig. 4, the limiting member 113 may be movably connected to the corresponding carrying arm 112, and has a first position and a second position relative to the carrying arm 112.
In some embodiments, as shown in fig. 4, a side of each limiting member 113 facing the corresponding carrying arm 112 is provided with a connecting sliding rail 113a. The connecting sliding rail 113a is sleeved on the periphery of the free end of the corresponding bearing arm 112.
In the cover plate supporting device provided in the above embodiment, each limiting member 113 is movably connected with the corresponding carrying arm 112 through the connecting sliding rail 113a, so that the limiting member 113 can be prevented from sliding off in the moving process.
When the stopper 113 is in the first position relative to the corresponding carrying arm 112, as shown in fig. 5 (a), the top end of the stopper 113 is higher than the side surface of the corresponding carrying arm 112 facing the cover plate 2. The stopper 113 starts to move relative to the carrying arm 112, and the process of moving the stopper 113 from the first position to the second position is shown in fig. 5 (b). When the stopper 113 is in the second position relative to the corresponding carrier arm 112, as shown in fig. 5 (c), the tip of the stopper 113 is flush or substantially flush with the side surface of the carrier 11 facing the cover plate 2.
Illustratively, when the cover plate 2 needs to be mounted and dismounted, by adopting the cover plate supporting device provided by the embodiment, and making each limiting piece 113 be in the first position, each limiting piece 113 can abut against the edge of the cover plate 2 to prevent the cover plate 2 from moving in the horizontal direction, thereby reducing friction, and being beneficial to avoiding abrasion of the cover plate 2 in the process of mounting and dismounting the cover plate. When the cover plate 2 needs to be removed, the limiting member 113 may be moved to the second position so as to facilitate removal of the cover plate 2.
With continued reference to fig. 4, in some embodiments, an included angle α is formed between a side surface of each limiting member 113 facing the cover plate 2 and a side surface of the corresponding carrying arm 112 facing the cover plate 2.
As an example, the angle α formed between the side surface of each stopper 113 facing the cover plate 2 and the side surface of the corresponding carrying arm 112 facing the cover plate 2 may be less than or equal to 90 °; for example, the included angle α may be 45 °, 60 °, 75 °, 90 °, or the like.
As understood in conjunction with fig. 4, in some embodiments, the length L of each stop 113 is greater than or equal to the thickness of the cover plate 2.
In some embodiments, the ratio of the radius of the base plate 111 to the distance between the free end of each carrying arm 112 and the center of the base plate 111 may be 1/3-1/2; for example, the ratio of the radius of the base plate 111 to the distance between the free end of each carrier arm 112 and the center of the base plate 111 may be 1/3, 2/5, 1/2, or the like.
In some embodiments, as shown in fig. 5, the deck support may also include a lifting device 14.
The lifting device 14 is disposed at the bottom end of the supporting portion 12, and is sleeved on the outer periphery of the supporting portion 12. The lifting device 14 may be used to move the support 12 in a vertical direction.
The form of the lifting device 14 is not particularly limited in the embodiment of the present application. As an example, the driving force of the lifting device 14 to move the support 12 in the vertical direction is aerodynamic; for example, the aerodynamic force may be provided by a cylinder.
The technical features of the above embodiments may be arbitrarily combined, and for brevity, all of the possible combinations of the technical features of the above embodiments are not described, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.
Claims (10)
1. A cover plate supporting device, comprising:
A carrying part; the bearing part is provided with an operation space for installing and detaching the cover plate;
A support part; the top end of the supporting part is connected to the geometric center of the bearing part and is used for providing supporting force to the bearing part in the direction vertical to the cover plate;
The limiting part is arranged at one side of the bearing part far away from the supporting part;
When the cover plate supporting device supports the cover plate, the bearing part is used for being attached to the surface of the cover plate, the supporting part is used for providing supporting force vertical to the bearing part in the direction of the cover plate, and the limiting part is propped against the edge of the cover plate.
2. The cover plate supporting device according to claim 1, wherein the limiting portion is movably connected with the bearing portion, and has a first position and a second position relative to the bearing portion;
When the limiting part is positioned at the first position, the top end of the limiting part is higher than the surface of the bearing part, facing to one side of the cover plate; when the limiting part is positioned at the second position, the top end of the limiting part is flush or approximately flush with the surface of one side of the bearing part, which faces the cover plate.
3. The deck support as defined in claim 2 wherein,
The bearing part comprises a base plate and a plurality of bearing arms which are radially arranged with the base plate as a center; the fixed ends of the plurality of bearing arms are connected with the base plate, and the operation space is formed between the adjacent bearing arms;
The limiting parts comprise limiting parts which are arranged in one-to-one correspondence with the bearing arms; each limiting piece is correspondingly arranged at the free ends of the bearing arms.
4. The cover plate supporting device according to claim 3, wherein a connecting sliding rail is arranged on one side of each limiting piece, which faces the corresponding bearing arm; the connecting sliding rail is sleeved on the periphery of the free end corresponding to the bearing arm.
5. The deck support of claim 4, wherein each of said stop members forms an angle between a side surface facing said deck and a side surface of a corresponding said load arm facing said deck; the included angle is less than or equal to 90 degrees.
6. A cover support device as claimed in claim 3, wherein the length of each of the stop members is greater than or equal to the thickness of the cover.
7. A cover plate supporting device according to claim 3, wherein the ratio of the radius of the base plate to the distance between the free end of each of the carrying arms and the center of the base plate is 1/3 to 1/2.
8. A cover support device as claimed in claim 3, wherein the carrier portion comprises at least eight of the carrier arms.
9. The cover plate supporting device according to claim 1, wherein the plane of the bearing portion is perpendicular to the supporting portion.
10. The cover plate supporting device according to claim 1, further comprising:
The lifting device is arranged at the bottom end of the supporting part and sleeved on the periphery of the supporting part; the lifting device is used for driving the supporting part to move in the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322594011.4U CN220903203U (en) | 2023-09-22 | 2023-09-22 | Cover plate supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322594011.4U CN220903203U (en) | 2023-09-22 | 2023-09-22 | Cover plate supporting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220903203U true CN220903203U (en) | 2024-05-07 |
Family
ID=90903381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322594011.4U Active CN220903203U (en) | 2023-09-22 | 2023-09-22 | Cover plate supporting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220903203U (en) |
-
2023
- 2023-09-22 CN CN202322594011.4U patent/CN220903203U/en active Active
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