The specific embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skills are obtained under the prerequisite of not paying creative work belongs to the scope that the utility model is protected.
The utility model embodiment provides a kind of auxiliary supportive device of support component easy for installation, with low cost and applied widely and the haulage equipment that is provided with the auxiliary supportive device of this support component.
As Fig. 2, Fig. 3 and shown in Figure 4, the auxiliary supportive device of the support component that the utility model embodiment is provided comprises holding components 1 and detachable as shown in Figure 2 fixed mechanism 2 as shown in Figure 4, wherein:
Detachable fixed mechanism 2 can be removably fixed in holding components 1 on the support component 3;
Support component 3 is provided with bearing surface 30 as shown in Figure 3, and holding components 1 is provided with the aerofoil 40 that parallels with bearing surface 30 away from a side of bearing surface 30, and the maximum extension of the area of aerofoil 40 and/or aerofoil 40 is greater than bearing surface 30.
Because in the auxiliary supportive device of support component provided by the utility model, detachable as shown in Figure 3 fixed mechanism 2 can be removably fixed in holding components 1 on the support component 3 (for example robot arm), and holding components 1 is provided with the aerofoil 40 that parallels with bearing surface 30 away from a side of bearing surface 30, simultaneously, the maximum extension of the area of aerofoil 40 and/or aerofoil 40 is greater than bearing surface 30, when detachable fixed mechanism 2 is removably fixed in holding components 1 on the support component 3, if the area of aerofoil 40 is greater than bearing surface 30, aerofoil 40 has been expanded bearing surface 30 and the area of waiting to remove material 8 (for example liquid crystal panel) contact surface as shown in Figure 2, if the maximum extension of aerofoil 40 is greater than bearing surface 30, bearing surface 30 with wait to remove material 8 (for example liquid crystal panel) and wait to remove the stress point of the bearing force that material 8 born when contacting and more disperse, so when waiting to remove material 8 and being pressed against on the aerofoil 40, waiting of being supported that face 40 supported remove the suffered pressure of material 8 each several parts with respect to supported 30 supported wait to remove for the suffered pressure of material 8 each several parts, waiting of being supported that face 40 supported removed the suffered pressure of material 8 each several parts can be littler, the stressed meeting of each several part of waiting to remove material 8 is more even, so use aerofoil 40 to support when waiting to remove material 8, no matter the each several part of waiting to remove material 8 is that its edge or the possibility of its central region fragmentation are all littler, this shows that the auxiliary supportive device of support component provided by the utility model can be realized the technique effect that the method for increase robot arm in the prior art can reach.
Compared with prior art, because holding components 1 is to be removably fixed on the support component 3, after holding components 1 is fixed on the support component 3, can be synchronized with the movement along with the motion of support component 3, so need not between the engine installation of holding components 1 and 3 motions of drive support component, Power train to be set again, so can save when using the auxiliary supportive device of support component provided by the utility model to transform haulage equipment cost and the required consumed time of assembling Power train that Power train increases is set in the prior art, and then solved the maintenance cost height of existing haulage equipment, technical matters more than maintenance process expends time in.
In addition, because the aerofoil 40 in the utility model on the holding components 1 can be expanded bearing surface 30 and the area of waiting to remove material 8 (for example liquid crystal panel) contact surface as shown in Figure 2, and then can also increase Different Weight, thickness wait to remove friction force between material 8 and the holding components 1, improve the stability of waiting to remove in material 8 handling processes, so can avoid waiting to remove material 8 skew takes place and takes place damaged with respect to bearing surface 30, especially for the conveying robot human arm of under vacuum environment, using (film-forming apparatus for example, the robot arm that uses in the vacuum environment in the dry etching equipment), use technical solutions of the utility model can more effectively avoid waiting to remove material 8 and skew takes place and damaged problem with respect to bearing surface 30.
As shown in Figure 4, holding components 1 is shaft-like, tabular or shaft-like and tabular combination in the present embodiment; And holding components 1 is made by intensity height, anti abrasive material, is preferably that density is low, wear-resistant, intensity is high, the material of electrostatic prevention, such as carbon fibre material etc.
Be the holding components 1 of shaft-like, tabular or shaft-like and tabular combined shaped can be under the situation that does not expend more material the more efficiently increase area of aerofoil 40 as shown in Figure 3.Use carbon fibre material etc. to have that density is low, wear-resistant, intensity is high, the material of antistatic properties, be suitable for and support that liquid crystal panel etc. is various waits to remove material 8, help to increase holding components 1 and support as shown in Figure 2 the kind of waiting to remove material 8, and then help enlarging the Applicable scope of the auxiliary supportive device of the utility model support component.
As shown in Figure 4, offer positioning groove 4 in the present embodiment on the holding components 1, support component 3 is embedded in the positioning groove 4 as shown in Figure 3, and support component 3 is embedded between part in the positioning groove 4 and the positioning groove 4 and is flush fit or bayonet fitting, is preferably flush fit.
Owing to offer positioning groove 4 on the holding components 1, when holding components 1 is assembled mutually with support component 3, only support component 3 need be plugged in the positioning groove 4, just holding components 1 and positioning groove 4 can be fitted together, number of assembling steps is simple, convenient, and formed flush fit or fastener matching structure can prevent effectively that holding components 1 from deviating from from the sidepiece of positioning groove 4 between support portion and the positioning groove 4.Use the flush fit structure under the prerequisite that does not change existing support component 3 shapes, to realize the reliable fit of positioning groove 4 and support component 3.
As Fig. 3 and shown in Figure 5, detachable fixed mechanism 2 comprises the support 20 and first fastening structure 21 in the present embodiment, and wherein: offer first knock hole 200 on the support 20, holding components 1 passes first knock hole 200;
First fastening structure 21 can be pressed against holding components 1 on the inwall of first knock hole 200, and/or first fastening structure 21 can apply the power of compressing to support component 3 along the direction that parallels with the axial direction of first knock hole 200.
When first fastening structure 21 is pressed against holding components 1 on the inwall of first knock hole 200, support 20 can be fixed together with holding components 1, first fastening structure 21 applies the power of compressing along the direction that parallels with the axial direction of first knock hole 200 to support component 3, the antagonistic force of the power that compresses that is applied can play positioning action to holding components 1, and then can be so that the connection structure between support component 3 and the holding components 1 is more firm.
As shown in Figure 3, present embodiment medium-height trestle 20 comprises first support body 201 and second support body 202, wherein: all offer first knock hole 200 on first support body 201 and second support body 202;
Be equipped with first fastening structure 21 between first support body 201 and second support body 202 and the support component 3;
The direction of the power that compresses that set 21 pairs of support components 3 of first fastening structure are applied between the power that compresses that set 21 pairs of support components 3 of first fastening structure are applied between first support body 201 and the support component 3 and second support body 202 and the support component 3 is opposite.
When the direction of the power that compresses that set 21 pairs of support components 3 of first fastening structure are applied between the power that compresses that set 21 pairs of support components 3 of first fastening structure are applied between first support body 201 and the support component 3 and second support body 202 and the support component 3 is opposite, support component 3 can be tightly by two first fastening structures 21 and first support body 201 under the effect of the power that compresses that two first fastening structures 21 are applied, second support body 202 clamps, simultaneously, because first support body 201 and second support body 202 are fixed on the holding components 1, so this design can more efficientlyly make the connection structure between support component 3 and the holding components 1 more firm.
As Fig. 3 and shown in Figure 5, first fastening structure 21 comprises at least one first rotation hole 210, the first in command 211, first tumbler 212 and first press part 213 in the present embodiment, wherein:
First rotation hole 210 is opened on the support 20;
The number of first tumbler 212 is identical with the number of first rotation hole 210, and each first tumbler 212 all passes one first rotation hole 210 and all with between the hole wall of first rotation hole 210 is threaded;
First tumbler 212 is in the axial line rotating process of its first rotation hole 210 that passes, and first tumbler 212 can move along the axial direction of first rotation hole 210;
Each first tumbler 212 a wherein end is connected mutually with the first in command 211, and wherein the other end passes first rotation hole 210 and is connected mutually with first press part 213;
First press part 213 presses on the part that is positioned at first knock hole 200 on the holding components 1 and/or presses on the support component 3.
Offer two first rotation holes 210 in the present embodiment on each support 20, and the axial line of two first rotation holes 210 is orthogonal, 212 bonded assemblys of first tumbler, first press part 213 that passes one of them first knock hole 200 presses on the holding components 1, and passing wherein, 212 bonded assemblys of first tumbler, first press part 213 of another first knock hole 200 presses on the support component 3.
Need in this structure holding components 1 is fixed in when maybe needing in first knock hole 200 support component 3 and support 20 fixed, axial line around first rotation hole 210 rotates the first in command 211 (conter clockwise or cw), the first in command 211 who rotates can drive first tumbler 212 and rotate, since each first tumbler 212 all pass one first rotation hole 210 and with the hole wall of first rotation hole 210 between be threaded, so first tumbler 212 that rotates around the axial line of first rotation hole 210 can drive first press part 213 that is connected with it towards near or away from the direction motion of holding components 1 or towards near or move away from the direction of support component 3; When first press part 213 towards near the motion of the direction of holding components 1 or support component 3 time, rotate the first in command 211 towards this direction (for example cw) always, first press part 213 finally can press on holding components 1 or the support component 3, thereby holding components 1 and support component 3 firmly are fixed together, otherwise, when needs with holding components 1 when support component 3 disassembles, (for example conter clockwise) rotates the first in command 211 and gets final product in the opposite direction.
As shown in Figure 3, first press part 213 is made for flexible material in the present embodiment; And/or first press part 213 presses on holding components 1 and/or the part that presses on the support component 3 is installed with flexible material layer; And/or, being installed with flexible material layer on first knock hole, 200 inwalls, first fastening structure 21 can be pressed against holding components 1 on the flexible material layer.Flexible material layer is preferably and adopts the non-conductive flexible material to make.First press part 213 and flexible material layer that flexible material is made all have certain elasticity, can cushion carrying preferably and wait to remove the vibration that holding components 1 is produced in the process of material 8 (for example liquid crystal panel) as shown in Figure 2, and then realize that comparatively the pulsation-free carrying waits to remove material 8, avoid vibration and cause and wait to remove material 8 and damage.
Flexible material is preferably rubber or rubber band in the present embodiment, is preferably rubber.Rubber or rubber band all have good springiness, advantage that cost is low on the one hand, and then can cushion carrying preferably and wait to remove the vibration that holding components 1 is produced in the process of material 8 (for example liquid crystal panel), realize that comparatively the pulsation-free carrying waits to remove material 8; On the other hand, rubber or rubber band are insulating material, can also play the effect of electrostatic prevention.
As shown in Figure 3, the auxiliary supportive device of support component in the present embodiment also comprises at least one support module 5 as shown in Figure 6, and support module 5 comprises the fixed way 52 and second fastening structure 53, wherein:
Offer second knock hole 51 on the fixed way 52, holding components 1 passes second knock hole 51;
Second fastening structure 53 can be pressed against holding components 1 on the inwall of second knock hole 51.
Support module 5 can further increase holding components 1 and the area of contact of waiting to remove material 8 (for example liquid crystal panel) as shown in Figure 2, disperse holding components 1 to support when waiting to remove material 8, wait to remove the stress point of material 8 suffered bearing forces, and then it is stressed more even to guarantee to wait to remove material 8 each several parts.
In the present embodiment as shown in Figure 6 fixed way 52 be preferably carbon fibre material and make.Carbon fibre material has that density is low, intensity is high, the performance of electrostatic prevention, be suitable for supporting that liquid crystal panel etc. is various waits to remove material 8 as shown in Figure 2, helping increases the kind of waiting to remove material 8 that holding components 1 is supported, and then helps enlarging the Applicable scope of the auxiliary supportive device of the utility model support component.
Second fastening structure 53 in the present embodiment comprises at least one second rotation hole 530, the second in command 531, second tumbler 532 and second press part 533, wherein:
Second rotation hole 530 is opened on the fixed way 52;
The number of second tumbler 532 is identical with the number of second rotation hole 530, and each second tumbler 532 all passes one second rotation hole 530 and all with between the hole wall of second rotation hole 530 is threaded;
Second tumbler 532 is in the axial line rotating process of its second rotation hole 530 that passes, and second tumbler 532 can move along the axial direction of second rotation hole 530;
Each second tumbler 532 a wherein end is connected mutually with the second in command 531, and wherein the other end passes second rotation hole 530 and is connected mutually with second press part 533;
Second press part 533 presses on the part that is positioned at second knock hole 51 on the holding components 1.
With first fastening structure 21 in like manner, when needing in the present embodiment to be fixed in support module 5 on the holding components 1, axial line around second rotation hole 530 rotates the second in command 531 (conter clockwise or cw), the second in command 531 who rotates can drive second tumbler 532 and rotate, since each second tumbler 532 all pass one second rotation hole 530 and with the hole wall of second rotation hole 530 between be threaded, so second tumbler 532 that rotates around the axial line of second rotation hole 530 can drive second press part 533 that is connected with it towards near or move away from the direction of holding components 1;
When second press part 533 towards near the motion of the direction of holding components 1 time, rotate the second in command 531 towards this direction (for example cw) always, second press part 533 finally can press on the holding components 1, thereby support module 5 is fixed on the holding components 1, otherwise, when needs with support module 5 when holding components 1 disassembles, (for example conter clockwise) rotates the second in command 531 and gets final product in the opposite direction.
As shown in Figure 6, fixed way 52 also is provided with support pad structure 6 away from a side of bearing surface 30 in the present embodiment, wherein:
Support pad structure 6 comprises position-limiting cover 61, first pad 62 and second pad 63 that offers spacing hole 60;
Position-limiting cover 61 is fixedly arranged on the side of fixed way 52 away from bearing surface 30;
First pad 62 is positioned at position-limiting cover 61, and is pressed against on the fixed way 52;
The position of second pad 63 is between first pad 62 and position-limiting cover 61;
Second pad 63 is extended spacing hole 60 away from the part of support component 3, and has the gap between second pad 63 and the position-limiting cover 61;
The rigidity of first pad 62 is weaker than second pad 63.
Support pad structure 6 can play buffering and wait as shown in Figure 2 to remove between material 8 (for example liquid crystal panel) and the support module 5 and compress the effect of power, so avoid waiting to remove material 8 in handling process because vibrations etc. are former thereby damage.Because the rigidity of first pad 62 is weaker than second pad 63, the weak more common intensity of material of rigidity is also poor more, so the effect that second pad 63 can play protection first pad 62 is set.When having the gap between second pad 63 and the position-limiting cover 61, there are certain activity space in first pad 62 and second pad 63 in position-limiting cover 61, first pad 62 and second pad 63 can be rotated in position-limiting cover 61, can increase the cushion effect that first pad 62 and second pad 63 can bear like this, and then avoid the second stronger pad 63 of rigidity to scratch and wait to remove material 8.
First pad 62 and second pad 63 adopt insulating materials to make in the present embodiment, are preferably one or both the combination wherein of mica, polytetrafluoroethylene.First pad 62 and second pad 63 that insulating material is made have the function of electrostatic prevention.Mica, polytetrafluoroethylene are the good and toughness of with low cost, insulating power material preferably, suitablely are applied to make first pad 62 and second pad 63.Certainly, other need use the place of insulating material also can use one or both the combination wherein of mica, polytetrafluoroethylene in the present embodiment.
As shown in Figure 6, position-limiting cover 61 uses screw 64 or bolt on fixed way 52 in the present embodiment.Fixed way 52 also is provided with locating plate 65 away from a side of bearing surface 30, and position-limiting cover 61 and locating plate 65 use screw 64 or bolt on fixed way 52, and first pad 62 and second pad 63 press on the locating plate 65.
Operating personal dismounting or replacing position-limiting cover 61 in this structure, when first pad 62 and second pad 63, back out after screw 64 or the bolt, can directly monoblock be had position-limiting cover 61, the locating plate 65 of first pad 62 and second pad 63 is together taken away, then, again under free situation with position-limiting cover 61, first pad 62 and second pad 63 disassemble from locating plate 65 respectively, this shows, being provided with of locating plate 65 can the handled easily personnel be dismantled support pad structure 6, helps to improve the efficient of the installation or removal of support pad structure 6.
As shown in Figure 7, as the preferred implementation of present embodiment, also offer mounting groove 66 on the side of fixed way 52 away from bearing surface 30 in the present embodiment, position-limiting cover 61 is fixedly arranged on the bottom surface or sidewall of mounting groove 66;
First pad 62 is between the bottom surface of position-limiting cover 61 and mounting groove 66;
The position of second pad 63 is between first pad 62 and position-limiting cover 61;
Second pad 63 is extended spacing hole 60 away from the part of support component 3, and has the gap between the sidewall of second pad 63 and position-limiting cover 61, mounting groove 66.
66 pairs of position-limiting covers of mounting groove 61, first pad 62 and second pad 63 can play spacing preferably and protective effect.
In the present embodiment as shown in Figure 3 support component 3 be preferably the robot arm that is used to support liquid crystal panel.The robot arm that is used to support liquid crystal panel is column usually, the suitable auxiliary supportive device that is applied to support component provided by the utility model is expanded the area of its upper support face 30, and then reduces the probability that liquid crystal panel is damaged in the liquid crystal panel handling process.
Certainly, support component 3 also can be support component or the device on other haulage equipments of the similar robot arm that is used to support liquid crystal panel in the present embodiment.
The haulage equipment that the utility model embodiment is provided comprises the auxiliary supportive device of the support component that robot arm and above-mentioned the utility model embodiment are provided, and is robot arm as Fig. 2 or support component shown in Figure 33.
Because the utility model embodiment haulage equipment has identical technical characterictic with the auxiliary supportive device of the support component that above-mentioned the utility model embodiment is provided, so also can produce identical technique effect, solves identical technical matters.
In the present embodiment as shown in Figure 2 the carrying of this haulage equipment wait that removing material 8 is preferably liquid crystal panel, also be provided with the pad 7 that flexible material is made as shown in Figure 3 on the aerofoil 40, wait to remove material 8 and be pressed against on the pad 7.
Liquid crystal panel damages because of vibration easily, so suitable application haulage equipment provided by the utility model is carried operation.Pad 7 is provided with to cushion and treated by aerofoil 40 to remove bearing force that material 8 applied and carrying to wait to remove in the process of material 8 to conduct to the vibratory force of waiting to remove on the material 8 by aerofoil 40 as shown in Figure 3.Certainly, if when pad 7 is not set, waits to remove material 8 and also can directly be pressed against as shown in Figure 3 on the aerofoil 40.
The above; it only is the specific embodiment of the present utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claim.