WO2013154536A1

WO2013154536A1 - Interchamber adapter for cluster tool

Info

Publication number: WO2013154536A1
Application number: PCT/US2012/032879
Authority: WO
Inventors: Shinichi Kurita; Makoto Inagawa; Jeffrey A. Kho; Robin L. Tiner; Suhail Anwar
Original assignee: Applied Materials, Inc.
Priority date: 2012-04-10
Filing date: 2012-04-10
Publication date: 2013-10-17
Also published as: KR200482405Y1; CN204668281U; KR20150000231U

Abstract

A serial cluster tool system is provided. The system includes a first cluster tool having a first plurality of processing chambers and at least one first peripheral chamber, a second cluster tool having a second plurality of processing chambers and at least one second peripheral chamber, and an interchamber adapter device coupling the at least one first peripheral chamber to the at least one second peripheral chamber, the interchamber adapter device comprising a vacuum-proof flexible section coupled between sealing faces of the first chamber and the second chamber.

Description

INTERCHAMBER ADAPTER FOR CLUSTER TOOL

BACKGROUND OF THE INVENTION

Field of the Invention

[0001] Embodiments of the present invention generally relate to an adapter apparatus for coupling a first cluster tool to a second cluster tool.

Description of the Related Art

[0002] In the manufacture of semiconductor devices, such as thin film transistors (TFT's), liquid crystal displays (LCD's), flat panel displays, organic light emitting diodes (OLED's), or photovoltaic cells for solar cell arrays, many device fabrication processes are performed in one or more process chambers disposed on a common platform. The common platform, which is referred to as a cluster tool, includes a central transfer chamber, which includes a robotic apparatus that transfers substrates within the cluster tool. Modern fabrication facilities often contain numerous cluster tools, which may perform different processes on substrates. These cluster tools are often serially linked together to form an effectual assembly line within the fabrication facility. Further, many serially linked cluster tools may be operated in parallel to increase production.

[0003] When the cluster tools are assembled in a fabrication facility for serial coupling, the tools do not always align exactly, even with proper planning and layout. Further, the serial cluster tools may be spaced closely together such that one or more of the cluster tools would need to be moved in order to perform maintenance operations. What is needed is an adapter apparatus that may be utilized as an interchamber connector for cluster tools.

SUMMARY OF THE INVENTION

[0004] The present invention generally provides an adapter apparatus for coupling a cluster tool to another cluster tool. In one embodiment, a serial cluster tool system is provided. The system includes a first cluster tool having a first plurality of processing chambers and at least one first peripheral chamber, a second cluster tool having a second plurality of processing chambers and at least one second peripheral chamber, and an interchamber adapter device coupling the at least one first peripheral chamber to the at least one second peripheral chamber, the interchamber adapter device comprising a vacuum-proof flexible section coupled between sealing faces of the first chamber and the second chamber.

[0005] In another embodiment, a serial cluster tool system is provided. The system includes a first cluster tool having a first plurality of processing chambers and at least one first peripheral chamber, a second cluster tool having a second plurality of processing chambers and at least one second peripheral chamber coupled to the first peripheral chamber by an interchamber adapter device, wherein the second peripheral chamber is misaligned relative to the first peripheral chamber, the interchamber adapter device comprising a vacuum-proof flexible section coupled between sealing faces of the at least one first peripheral chamber and the at least one second peripheral chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

[0006] So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.

[0007] Figure 1A is a plan view of a serial cluster tool system according to embodiments described herein.

[0008] Figure 1 B is a schematic top plan view of a portion of the peripheral chambers of the serial cluster tool system of Figure 1A when the peripheral chambers may be misaligned.

[0009] Figure 2A is a side view of one embodiment of an interchamber adapter device that may be utilized on the serial cluster tool system of Figure 1A or with the peripheral chambers of Figure 1 B. [0010] Figure 2B is an isometric view of the interchamber adapter device of Figure 2A.

[0011] Figure 3 is an isometric side view of another embodiment of an interchamber adapter device that may be utilized with the peripheral chambers of Figure 1 B.

[0012] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements disclosed in one embodiment may be beneficially utilized on other embodiments without specific recitation.

DETAILED DESCRIPTION

[0013] Embodiments of the invention generally relate to an adapter apparatus for coupling a cluster tool to another cluster tool. The adapter apparatus may be utilized as interchamber connector for coupling a chamber on a first cluster tool to a chamber on a second cluster tool. Embodiments discussed herein may be practiced in cluster tools, such as the AKT^® 90K PECVD system available from AKT America, a subsidiary of Applied Materials, Inc., Santa Clara, California. It is to be understood that the embodiments discussed herein may be practiced in factory interfaces, as well as other cluster tools and/or processing systems, including those sold by other manufacturers.

[0014] Figure 1A is a plan view of a serial cluster tool system 100. The serial cluster tool system 100 comprises a first cluster tool 105A and at least a second cluster tool 105B. Each of the first cluster tool 105A and the second cluster tool 105B include a plurality of processing chambers, such as processing chambers 1 10A-110J that are coupled to a respective transfer chamber 1 15A and 1 15B. Each of the first cluster tool 105A and the second cluster tool 105B also include peripheral chambers, such as peripheral chambers 120A and 120B on the first cluster tool 105A and peripheral chambers 120C and 120D on the second cluster tool 105B. The peripheral chambers 120A-120D may be load lock chambers or tunnel chambers that are configured to couple to another chamber, such as a transfer chamber or another peripheral chamber, a vacuum/atmospheric interface device, or a factory interface.

[0015] Both of the first cluster tool 105A and the second cluster tool 105B are capable of processing multiple substrates simultaneously. Each of the processing chambers 1 10A-110J are adapted to receive and process a substrate 125 (one is shown within transfer chamber 115A). Each of the processing chambers 110A- 1 10J may be configured for a different process on the substrate. Likewise, the first cluster tool 105A and the second cluster tool 105B may be configured for a different process on a plurality of substrates. For example, the first cluster tool 105A may be utilized for patterning and deposition of one or more first materials on substrates in one or more of the processing chambers 110A-1 10F while the second cluster tool 105B may be configured for a deposition or coating process of one or more second materials on substrates. In one embodiment, the serial cluster tool system 100 may be linear such that the first cluster tool 05A and the second cluster tool 05B are substantially linearly aligned in the X direction.

[0016] To enable processing of substrates in the serial cluster tool system 100, the peripheral chambers 120B and 120C (also shown on the peripheral chambers 120D and 120E) are coupled together by one embodiment of an interchamber adapter device 130. The interchamber adapter device 130 may be configured as a flexible chamber interface that couples to distal ends of each of the peripheral chambers 120B and 120C. In one embodiment, the interchamber adapter device 130, as well as the peripheral chambers 120B and 120C, are collectively referred to as a pass-through chamber 135. In one embodiment of the serial cluster tool system 00, each of the first cluster tool 105A and the second cluster tool 105B may include an axis A and an axis B running generally in the X direction. The interchamber adapter device 130 provides for vacuum sealing of each of the first cluster tool 105A and the second cluster tool 105B when the axes A and B are collinear. The interchamber adapter device 130 also provides for vacuum sealing of each of the first cluster tool 105A and the second cluster tool 105B even if the first cluster tool 105A and the second cluster tool 105B are misaligned. Misaligned may be defined as anything other than axis A and axis B being identical. In one example, misaligned may be defined as anything other than a 180 degree angle between axis A and axis B or axis A and axis B being substantially parallel. Misaligned may also include misalignment of the peripheral chambers 120B and 120C in the X-Y plane and/or the Y-Z plane.

[0017] The misalignment of the first cluster tool 105A and the second cluster tool 105B often requires one or both of the cluster tools to be moved in order to correct the misalignment. This correction takes considerable time and manpower, and increases the chance of damage to the cluster tool being repositioned. In cluster tools that utilize substrates having a large surface area, such as substrates having a plan surface area greater than about 2 square meters, the alignment correction is exacerbated. These cluster tools are typically heavy, having a weight in the tens of thousands of kilograms. The bulk of these cluster tools makes them difficult to move without significant disassembly of the tool. This increases the time and manpower, as well as damage to the tool being moved, and is a significant disruption in the fabrication facility.

[0018] The interchamber adapter device 130 provides a sealable interface between the first cluster tool 105A and the second cluster tool 105B and thereby forms the pass-through chamber 135 therebetween. The pass-through chamber 135 allows fluid communication between the first cluster tool 105A and the second cluster tool 105B thereby containing any negative pressure between the first cluster tool 105A and the second cluster tool 105B. This decreases pump-down time when transferring substrates between the transfer chamber 1 15A and the transfer chamber 1 15B. While not described for brevity, the peripheral chambers 120D and 120E may be configured similarly when the peripheral chamber 120E is coupled to a transfer chamber of another cluster tool (both not shown).

[0019] Figure 1 B is a schematic top plan view of a portion of the peripheral chambers 120B and 120C of the serial cluster tool system 100 of Figure 1A in the instance where the first cluster tool 105A and the second cluster tool 105B (both not shown) may be misaligned. Each of the peripheral chambers 120B and 120C may be a substantially rigid rectangular chamber made of a metallic material, such as aluminum, stainless steel, alloys thereof and combinations thereof. Each of the peripheral chambers 120B and 120C include a sealing face 140A and a sealing face 140B, respectively. In conventional systems, the sealing faces 140A, 140B would be brought into proximity with each other and fastened together. However, the peripheral chambers 120B and 120C may be slightly misaligned in the X-Y plane. In one example, the misalignment in the X-Y plane may be an angle a of about 0.5 degrees to about 3 degrees, or greater. Thus, when the peripheral chambers 120B and 120C are brought into proximity, the sealing face 140A of the peripheral chamber 120B may not sufficiently align with the sealing face 140B of the peripheral chamber 20C. In some instances, a gap would be present between the sealing face 140A and the sealing face 140B. The gap would be a source for vacuum leakage and may cause other problems. While not shown, the peripheral chambers 120B and 120C may additionally be misaligned vertically and/or in the Z- Y plane, which may cause a gap as described above. Additionally, when the sealing faces 140A and 140B are brought into proximity, servicing of the first cluster tool 105A or the second cluster tool 105B may be difficult. For example, if the peripheral chamber 120B needed to be removed for some reason, one or both of the first cluster tool 105A and the second cluster tool 105B would need to be moved away from the other in order to remove the peripheral chamber 120B. The movement of one or both of the cluster tools 105A and 105B may utilize considerable manpower and time, as well as increase the possibility of damage to the tool.

[0020] According to embodiments described herein, the sealing face 140A of the peripheral chamber 120B and the sealing face 140B of the peripheral chamber

120C are spaced apart by a distance D'. The distance D' may be about 0.05 meters (m) to about 0.16 m. Depending on any misalignment between axis A and axis B, a spacing of a distance D" may also be present between the sealing face

140A of the peripheral chamber 120B and the sealing face 140B of the peripheral chamber 120C. The distance D" may be greater than the distance D'. The interchamber adapter device 130 (shown in Figure 1A) may be utilized to span the distances D' and D" and seal the peripheral chambers 120B and 120C. The interchamber adapter device 130 allows for misalignment of at least angle a between the peripheral chambers 120B and 120C while providing an effective vacuum seal therebetween. Further, removal of the interchamber adapter device 130 allows easy removal of either of the peripheral chambers 120B or 120C and the distances D' and D" allows one or both of the peripheral chambers 120B and 120C to move about the other. But for the interchamber adapter device 130 as described herein, the first cluster tool 105A and the second cluster tool 105B would need to be repositioned to align the sealing face 140A and the sealing face 140B. The interchamber adapter device 130 may also be utilized to account for the misalignment in the Z-Y plane and/or vertical misalignment between the sealing face 140A and the sealing face 140B.

[0021] Figure 2A is a side view of one embodiment of an interchamber adapter device 130 that may be utilized on the serial cluster tool system 100 of Figure 1A. Figure 2B is an isometric view of the interchamber adapter device 130 of Figure 2A. The interchamber adapter device 130 comprises a flexible section 200 disposed between a rigid interface 210. The flexible section 200 is generally vacuum-proof to enable operation of the interchamber adapter device 130 in negative pressures without leakage. The flexible section 200 may comprise a plurality of welded pleats 215 that provides rigidity and allows the flexible section 200 to expand and contract disproportionately in the X-Y plane and/or the Y-Z plane. The rigid interface 210 may comprise a rigid cover 220 that is sealably couples the flexible section 200 to a rectangular flange 225. The interchamber adapter device 130 may be fabricated from metallic materials, such as aluminum, stainless steel, titanium, an INCONEL^® material, a HASTELLOY^® material, combinations thereof and alloys thereof, as well as polymeric materials, such as a VITON^® fluoroelastomeric material. The rectangular flange 225 may be fabricated from similar materials. The rectangular flange 225 may comprise a plurality of openings 230 that receive fasteners 235 to couple the rectangular flange 225 to a mounting face 240 disposed on distal ends of each of the peripheral chambers 120B and 120C. The rectangular flange 225 may include a sealing surface 245 adapted to mate with the mounting face 240 on both of the peripheral chambers 120B and 120C. The sealing surface 245 may include a groove 250 formed in the sealing surface 245. The groove 250 may be a recessed surface adapted to receive a portion of a sealing member, such as an o- ring (not shown).

[0022] Figure 3 is an isometric side view of another embodiment of an interchamber adapter device 300 that may be utilized with the peripheral chambers 120B and 120C of Figure 1 B. In this embodiment, the interchamber adapter device 300 comprises a polygonal housing 305 having a solid sidewall that is dimensioned to generally match the space between sealing faces 140A, 140B of the peripheral chambers 120B and 120C of Figure 1 B. The polygonal housing 305 also includes rectangular flanges 225 on opposing sides of the polygonal housing 305. The polygonal housing 305 may include one or more sidewall members made of aluminum, stainless steel, titanium, an INCONEL^® material, a HASTELLOY^® material, combinations thereof and alloys thereof, as well as polymeric materials, such as a VITON^® fluoroelastomeric material. The rectangular flanges 225 may be coupled to the polygonal housing 305 by a joining method that ensures vacuum integrity, such as welding.

[0023] Embodiments of the interchamber adapter devices 130 and 300 as described herein facilitate a decreased set up time for construction of a serial cluster tool system 100. The interchamber adapter devices 130 and 300 facilitate coupling of at least a first cluster tool 105A to a second cluster tool 105B when the cluster tools 105A and 105B are substantially aligned, or when the cluster tools 105A and 105B are not aligned relative to each other in one or more planes. The ease of coupling of the cluster tools 105A, 105B significantly decreases positioning and repositioning of one or both of the cluster tools 105A, 105B and also prevents damage. Thus, the decreased set up time provides higher throughput and lowers cost of ownership as manpower and potential damage is reduced. The interchamber adapter devices 130, 300 also provide for easier access to the cluster tool for service as the peripheral chambers are easily removed when the interchamber adapter devices 130 or 300 are removed.

[0024] While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

Claims:

1 . A serial cluster tool system, comprising:

a first cluster tool having a first plurality of processing chambers and at least one first peripheral chamber;

a second cluster tool having a second plurality of processing chambers and at least one second peripheral chamber; and

an interchamber adapter device coupling the at least one first peripheral chamber to the at least one second peripheral chamber, the interchamber adapter device comprising a vacuum-proof flexible section coupled between sealing faces of the first chamber and the second chamber.

2. The system of claim 1 , wherein the first cluster tool is misaligned relative to the second cluster tool.

3. The system of claim 2, wherein the flexible section comprises a plurality of welded pleats.

4. The system of claim 3, wherein each of the plurality of welded pleats comprise a metallic material, a polymeric material, or combinations thereof.

5. The system of claim 3, wherein at least two of the welded pleats are coupled to a rigid interface.

6. The system of claim 5, wherein the rigid interface comprises a rectangular flange.

7. The system of claim 6, wherein the rectangular flange comprises a sealing surface.

8. The system of claim 7, wherein the sealing surface includes a groove formed therein.

9. A serial cluster tool system, comprising:

a second cluster tool having a second plurality of processing chambers and at least one second peripheral chamber coupled to the first peripheral chamber by an interchamber adapter device, wherein the second peripheral chamber is misaligned relative to the first peripheral chamber, the interchamber adapter device comprising a vacuum-proof flexible section coupled between sealing faces of the at least one first peripheral chamber and the at least one second peripheral chamber.

10. The system of claim 9, wherein the flexible section comprises a plurality of welded pleats.

1 1. The system of claim 10, wherein each of the plurality of welded pleats comprise a metallic material, a polymeric material, or combinations thereof.

12. The system of claim 10, wherein at least two of the welded pleats are coupled to a rigid interface.

13. The system of claim 12, wherein the rigid interface comprises a rectangular flange.

14. The system of claim 13, wherein the rectangular flange comprises a sealing surface.

15. The system of claim 14, wherein the sealing surface includes a groove formed therein.