CN219689844U - Vacuum pipeline of thin film equipment - Google Patents
Vacuum pipeline of thin film equipment Download PDFInfo
- Publication number
- CN219689844U CN219689844U CN202321401589.7U CN202321401589U CN219689844U CN 219689844 U CN219689844 U CN 219689844U CN 202321401589 U CN202321401589 U CN 202321401589U CN 219689844 U CN219689844 U CN 219689844U
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- China
- Prior art keywords
- vacuum
- pipeline
- valve
- hand valve
- equipment
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Links
- 239000010409 thin film Substances 0.000 title claims description 10
- 229910052734 helium Inorganic materials 0.000 claims abstract description 14
- 239000001307 helium Substances 0.000 claims abstract description 14
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000007789 sealing Methods 0.000 claims description 23
- 238000001514 detection method Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 238000005457 optimization Methods 0.000 abstract description 2
- 238000011161 development Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Details Of Valves (AREA)
Abstract
The utility model relates to the technical field of optimization and improvement of vacuum pipelines of semiconductor equipment, in particular to a vacuum pipeline of film equipment, wherein a vacuum hand valve is additionally arranged on the vacuum pipeline and is used for enabling a helium detector to be connected more simply and rapidly, so that the loading and unloading of the vacuum pipeline are reduced, the stability of the vacuum degree is ensured, the loss of a vacuum pump is reduced, and the service life of hardware of the equipment is prolonged; the vacuum hand valve separates the operating mechanism from the medium passage, ensures the purity of the working medium and the vacuum degree of the pipeline, is easy to disassemble and maintain quickly, is especially suitable for the medium with chemical corrosiveness or suspended particles, and has the working temperature range of about-50 to 175 ℃, thereby reducing the tedious step of helium leak detection and protecting the stability of the vacuum degree.
Description
Technical Field
The utility model relates to the technical field of optimization and improvement of vacuum pipelines of semiconductor equipment, in particular to a vacuum pipeline of film equipment.
Background
The vacuum semiconductor coating is obviously higher in various large semiconductor enterprises, particularly the development technology research method of large-scale integrated system circuits and the development work of magneto-electric conversion devices, light-emitting devices and the like are particularly obvious, so that the vacuum degree is extremely important for equipment, and the stability of the vacuum degree is required to be confirmed for the regular maintenance and consumable replacement of the equipment; the helium detection of the existing equipment is complicated in steps, labor is wasted, and the effect of high productivity required in the prior art cannot be met.
Disclosure of Invention
The utility model aims to provide a vacuum pipeline of a thin film device, so as to solve the problems in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a thin film equipment vacuum pipeline, includes vacuum cavity, equipment connecting pipe, vacuum pipeline, vacuum pump, first vacuum valve, second vacuum valve, seal assembly, vacuum hand valve and helium inspection instrument expansion interface, be connected with the equipment connecting pipe in the middle of the vacuum cavity bottom, vacuum cavity bottom one side is connected with the vacuum pipeline, vacuum pipeline side is connected with the vacuum hand valve, vacuum hand valve one end is provided with helium inspection instrument expansion interface (9), vacuum pipeline bottom is connected with the vacuum pump.
Preferably, the bottom of the surface of the equipment connecting pipe is connected with the inside of the vacuum pipeline through a second vacuum valve at one side close to the vacuum pump.
Preferably, a first vacuum valve is arranged on the top of the surface of the equipment connecting pipe.
Preferably, the vacuum hand valve is arranged between the first vacuum valve and the second vacuum valve, and the vacuum hand valve is in sealing connection with the vacuum pipeline through the sealing assembly.
Preferably, the sealing assembly comprises a sealing ring and a sealing buckle, wherein the sealing ring is respectively in sealing connection with the vacuum hand valve and the vacuum pipeline through the sealing buckle.
Compared with the prior art, the utility model has the beneficial effects that: according to the utility model, the vacuum hand valve is additionally arranged on the vacuum pipe, so that the helium detector is more simply and quickly connected, the loading and unloading of the vacuum pipe are reduced, the stability of the vacuum degree is more ensured, the loss of the vacuum pump is reduced, and the service life of hardware of equipment is prolonged; the vacuum hand valve separates the operating mechanism from the medium passage, ensures the purity of the working medium and the vacuum degree of the pipeline, is easy to disassemble and maintain quickly, is especially suitable for the medium with chemical corrosiveness or suspended particles, and has the working temperature range of about-50 to 175 ℃, thereby reducing the tedious step of helium leak detection and protecting the stability of the vacuum degree.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present utility model.
In the figure: 1. a vacuum chamber; 2. an equipment connecting pipe; 3. a vacuum pipeline; 4. a vacuum pump; 5. a first vacuum valve; 6. a second vacuum valve; 7. a seal assembly; 8. a vacuum hand valve; 9. helium detector extension interface.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the azimuth or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present utility model.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Referring to fig. 1, the present utility model provides a technical solution: the utility model provides a thin film equipment vacuum pipeline, including vacuum cavity 1, equipment connecting pipe 2, vacuum pipeline 3, vacuum pump 4, first vacuum valve 5, second vacuum valve 6, seal assembly 7, vacuum hand valve 8 and helium check gauge expansion joint 9, be connected with equipment connecting pipe 2 in the middle of the vacuum cavity 1 bottom, vacuum cavity 1 bottom one side is connected with vacuum pipeline 3, vacuum pipeline 3 side is connected with vacuum hand valve 8, vacuum hand valve 8 one end is provided with helium check gauge expansion joint 9, vacuum pipeline 3 bottom is connected with vacuum pump 4.
Further, the bottom of the surface of the equipment connecting pipe 2, which is close to one side of the vacuum pump 4, is connected with the inside of the vacuum pipeline 3 through a second vacuum valve 6.
Further, a first vacuum valve 5 is installed at the top of the surface of the equipment connecting pipe 2.
Further, a vacuum hand valve 8 is provided between the first vacuum valve 5 and the second vacuum valve 6, and the vacuum hand valve 8 is hermetically connected with the vacuum line 3 through a sealing assembly 7.
Further, the sealing assembly 7 comprises a sealing ring and a sealing buckle, wherein the sealing ring is respectively in sealing connection with the vacuum hand valve 8 and the vacuum pipeline 3 through the sealing buckle.
Working principle:
according to the utility model, the vacuum hand valve 8 is additionally arranged on the vacuum pipeline 3, and is used for enabling the helium detector to be connected more simply and rapidly, so that the loading and unloading of the vacuum pipeline 3 are reduced, the stability of the vacuum degree is ensured, the loss of the vacuum pump 4 is reduced, and the service life of hardware of equipment is prolonged; the vacuum hand valve 8 separates the operating mechanism from the medium passage, ensures the purity of the working medium and the vacuum degree of the pipeline, is easy to disassemble and maintain quickly by adopting the vacuum hand valve 8, is especially suitable for the medium with chemical corrosiveness or suspended particles, and has the working temperature range of about-50 to 175 ℃, thereby reducing the tedious step of helium leak detection and protecting the stability of the vacuum degree.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the utility model as defined by the appended claims and their equivalents.
Claims (5)
1. The utility model provides a thin film equipment vacuum pipeline, includes vacuum cavity (1), equipment connecting pipe (2), vacuum pipeline (3), vacuum pump (4), first vacuum valve (5), second vacuum valve (6), seal assembly (7), vacuum hand valve (8) and helium examine appearance expansion joint (9), its characterized in that: the device comprises a vacuum cavity (1), and is characterized in that an equipment connecting pipe (2) is connected in the middle of the bottom of the vacuum cavity (1), a vacuum pipeline (3) is connected to one side of the bottom of the vacuum cavity (1), a vacuum hand valve (8) is connected to the side face of the vacuum pipeline (3), a helium detector expansion interface (9) is arranged at one end of the vacuum hand valve (8), and a vacuum pump (4) is connected to the bottom end of the vacuum pipeline (3).
2. A thin film apparatus vacuum line as claimed in claim 1, wherein: the bottom of the surface of the equipment connecting pipe (2) is connected with the inside of the vacuum pipeline (3) through a second vacuum valve (6) at one side close to the vacuum pump (4).
3. A thin film apparatus vacuum line as claimed in claim 1, wherein: the top of the surface of the equipment connecting pipe (2) is provided with a first vacuum valve (5).
4. A thin film apparatus vacuum line according to any one of claims 1-3, wherein: the vacuum hand valve (8) is arranged between the first vacuum valve (5) and the second vacuum valve (6), and the vacuum hand valve (8) is in sealing connection with the vacuum pipeline (3) through the sealing component (7).
5. A thin film apparatus vacuum line as claimed in claim 1, wherein: the sealing assembly (7) comprises a sealing ring and a sealing buckle, wherein the sealing ring is respectively in sealing connection with the vacuum hand valve (8) and the vacuum pipeline (3) through the sealing buckle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321401589.7U CN219689844U (en) | 2023-06-02 | 2023-06-02 | Vacuum pipeline of thin film equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321401589.7U CN219689844U (en) | 2023-06-02 | 2023-06-02 | Vacuum pipeline of thin film equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219689844U true CN219689844U (en) | 2023-09-15 |
Family
ID=87944170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321401589.7U Active CN219689844U (en) | 2023-06-02 | 2023-06-02 | Vacuum pipeline of thin film equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219689844U (en) |
-
2023
- 2023-06-02 CN CN202321401589.7U patent/CN219689844U/en active Active
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