CN215113940U - Vacuum atmosphere tubular furnace port cooling device - Google Patents
Vacuum atmosphere tubular furnace port cooling device Download PDFInfo
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- CN215113940U CN215113940U CN202120997698.4U CN202120997698U CN215113940U CN 215113940 U CN215113940 U CN 215113940U CN 202120997698 U CN202120997698 U CN 202120997698U CN 215113940 U CN215113940 U CN 215113940U
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Abstract
The utility model provides a vacuum atmosphere tube furnace port cooling device, including loose joint fixed orifices (1), locking screw hole (2), vacuum mating holes (3), copper pipe cooling space (4), cooling thread type water course (5), big end delivery port (6), water inlet screw hole (7), lock nut guiding hole (8), O type positioning sealing ring (9), cooling copper pipe (10), cooling water discrepancy interface (11), lock nut (12), vacuum joint (13), end cover (14), heat conduction water route (15), sealed dish (16), silica gel pad (17), O type sealing ring (18), loose joint fixed disk (19). The problems of heat dissipation and vacuum tightness at two ends of a furnace tube in the process of sintering products of the existing atmosphere tube furnace are solved, and the method is widely applied to a cooling system of the vacuum atmosphere tube furnace.
Description
Technical Field
The utility model belongs to the cooling device field particularly, belongs to vacuum atmosphere cooling device field, and further say, belongs to vacuum atmosphere tube furnace cooling device field.
Background
When the electronic ceramic product is sintered and molded in an atmosphere tube furnace, nitrogen and hydrogen are required to be mixed according to a certain proportion, a sintering environment is provided for the electronic ceramic product during sintering by introducing a high-temperature furnace tube with the temperature of more than 1500 ℃ after the electronic ceramic product is humidified by a pure water tank, in order to ensure the sealing property of the sintering atmosphere in the furnace tube, the air inlet end of the furnace tube is connected with the pure water humidifying tank, the air outlet end of the furnace tube is connected with a mechanical vacuum pump, and water cooling sleeve sealing devices are respectively installed at two ends of the furnace tube so as to improve the cooling efficiency and save the gas consumption.
The traditional method is that water cooling sleeves are respectively sleeved on furnace tubes at two ends (an air inlet end and an air outlet end) of an atmosphere tube furnace for cooling treatment, but the effective cooling area of the water cooling sleeves is insufficient due to the large diameter of the furnace tubes of the atmosphere tube furnace, so that the cooling efficiency is low, when the sintering temperature is more than 1500 ℃, pipelines at two ends generate heat seriously due to the slow heat dissipation speed, the vacuum tightness is damaged, the process quality of a sintered product is influenced, and in the production and operation, the pipelines need to be artificially cooled at any time.
Therefore, the utility model provides an atmosphere tube furnace port cooling device solves the pipeline cooling, provides stable atmosphere environment, stabilizes product quality, reduces the cost of labor, satisfies sintering product mass nature, the production demand of repeatability.
Disclosure of Invention
The utility model aims at: the problem of the heat dissipation at the furnace tube both ends of sintered product in-process of current atmosphere tubular furnace is solved, solve pipeline cooling and vacuum tightness problem promptly to stable atmosphere environment reduces the cost of labor, ensures the mass nature and the repeatability product quality of sintered product.
Therefore, the utility model provides a vacuum atmosphere tube furnace port cooling device, the whole sketch of cooling device is shown in figure 1, and cooling device structure sketch map is shown in figure 2. In fig. 2: an enlarged schematic view of the loose joint fixing disc is shown in fig. 3, an enlarged schematic view of the end cover is shown in fig. 4, and an enlarged schematic view of the heat conduction water path is shown in fig. 5.
The utility model provides a vacuum atmosphere tube furnace port cooling device, a vacuum atmosphere tube furnace port cooling device which characterized in that: the device comprises a loose joint fixing hole 1, a locking threaded hole 2, a vacuum matching hole 3, a copper pipe cooling area 4, a cooling thread type water channel 5, a reducer water outlet 6, a water inlet threaded hole 7, a locking nut guide hole 8, an O-shaped positioning sealing ring 9, a cooling copper pipe 10, a cooling water inlet and outlet interface 11, a locking nut 12, a vacuum joint 13, an end cover 14, a heat conduction water path 15, a sealing disc 16, a silica gel pad 17, an O-shaped sealing ring 18 and a loose joint fixing disc 19.
The air inlet end of the vacuum atmosphere tube furnace is hermetically connected with a gas humidifying device (such as a pure water humidifying tank) through the cooling device, and the air outlet end of the vacuum atmosphere tube furnace is hermetically connected with an air exhausting device (such as a mechanical vacuum pump) through the cooling device, so that the cooling efficiency is improved, and meanwhile, the gas consumption is saved.
The cooling device is hermetically connected with the port of the vacuum atmosphere tube furnace through the loose joint fixing disc 19. The inner side of the edge of the loose joint fixing disc 19 is provided with the loose joint fixing hole 1 which is connected with the gas inlet end or the gas outlet end of the atmosphere tube furnace through a rotary buckle connecting device. The structure is convenient to install and detach quickly, ensures vacuum performance, and is convenient for loading and unloading products and replacing the sintering pipe of the tube furnace.
The cooling device is hermetically connected with a gas humidifying device or an exhaust device through the vacuum joint 13, and the peripheral device is the gas humidifying device or the exhaust device. The vacuum connector 13 provides a vacuum path and is connected with the gas humidifying device or the exhaust device in a sealing manner by a clamp. The structure is convenient to rapidly assemble and disassemble, and ensures the vacuum performance.
The locking threaded holes 2 are arranged on the inner side of the edge of the loose joint fixing disc 19, are mutually inserted into the loose joint fixing holes 1, and are connected with the end cover 14 and the loose joint fixing disc 19 through locking nuts 12.
The vacuum matching hole 3 is positioned in the center of the loose joint fixing hole 1, so that the cooling copper pipe 10 and water can fully exchange heat, and simultaneously, the vacuum environment in the vacuum atmosphere tube furnace is ensured.
The copper pipe cooling area 4 is located in the center of the heat conducting water path 15 and is of a hollow circular structure, the diameter of the water is about the outer diameter of the cooling copper pipe 10, a water vortex is formed, and water cooling and the cooling copper pipe 10 are enabled to be in full heat exchange.
The cooling thread type water channel 5 is uniformly arranged along the circumferential direction in the heat conduction water channel 15, and is separated by a thread type metal thin plate, and the water channel moves according to a thread type rule, so that the cooling water and the thread type copper loop perform multi-stage heat exchange, and heat is completely taken out.
The reducer water outlet 6 is connected with the outlet of the cooling thread type water channel 5, and the outlet water flow is accelerated through the reducer water outlet 6, so that the internal water forms a vortex and the heat exchange is fully carried out.
The water inlet threaded hole 7 on the side edge of the heat conduction water path 15 is connected with an inlet of the cooling thread type water channel 5 and is matched with a water inlet threaded hole in the end cover 14 for use.
The locking nut guide hole 8 is matched with the locking threaded hole 2, the locking nut 12 and the silica gel pad 17 for use.
The O-shaped positioning sealing ring 9 is matched with the O-shaped sealing ring 18 and the loose joint fixing disc 19 for use, so that the vacuum environment in the furnace tube of the equipment is ensured.
The cooling copper tube 10 is located at the center of the end cap 14 for vacuum isolation from the cooling water and also for heat exchange.
The cooling water inlet and outlet port 11 is located on the side of the end cover 14, and is used in cooperation with the cooling water inlet and outlet port in the heat conducting water path 15.
The locking nut 12 is used in cooperation with the locking threaded hole 2 and the locking nut guide hole 8 for locking and positioning.
The end cover 14 is used for fixing and supporting the vacuum joint 13, the heat conducting water path 15, the sealing disc 16, the silica gel pad 17 and the O-shaped sealing ring 18, and is fixedly connected with the vacuum joint 13 in a welding mode.
The sealing disc 16 is located between the heat conduction water path 15 and the silica gel pad 17 and used for sealing the water path.
The silica gel pad 17 is positioned between the sealing disc 16 and the loose joint fixing disc 19 and is used for sealing a water path.
The O-ring 18, which is used in conjunction with the O-ring 9, seals the vacuum.
The working principle of the vacuum atmosphere tube furnace cooling device is as follows: through the concentric cooperation of copper pipe cooling zone 4 and cooling copper pipe 10, through leading-in through end cover 14 of external pressure cooling water, in the heat conduction water route 15, fully carry out the heat exchange with heat conduction water route 15. During the cooling, fully in the cooling copper pipe 10 with heat conduction water route 15 abundant contact guarantee multistage cooling, copper pipe cooling space 4 forms the vortex through water pressure under the effect of reducer delivery port 6, further strengthens the heat exchange to can realize high-efficient cooling effect.
The cooling device of the vacuum atmosphere tube furnace is convenient to operate, process and assemble, durable and good in effect. The heat dissipation problem of the two ends of the furnace tube in the process of sintering products, namely the problem of pipeline cooling and vacuum tightness, of the existing atmosphere tube furnace can be effectively solved, and the labor cost is reduced. The air inlet end and the air outlet end are cooled in the sintering and forming process of the vacuum atmosphere tube furnace, the atmosphere environment is stabilized, deformation damage such as material expansion and material contraction caused by uneven temperature and large temperature gradient in the product sintering process is effectively prevented, the product process quality is stabilized, the consistency, the batch performance and the repeatability of sintered products are guaranteed, the product quality is improved, and the product cost is reduced.
Drawings
Fig. 1 is an overall schematic view of a cooling apparatus.
Fig. 2 is a schematic structural view of the cooling device.
FIG. 3 is an enlarged view of the loose joint fixing disk.
Fig. 4 is an enlarged schematic view of the end cap.
Fig. 5 is an enlarged schematic view of the heat conducting water path.
In the figure: the movable joint type water cooling device comprises a movable joint fixing hole, a locking threaded hole, a vacuum matching hole, a copper pipe cooling area, a cooling threaded water channel, a large-small-head water outlet, a water inlet threaded hole, a locking nut guide hole, an O-shaped positioning sealing ring, a cooling copper pipe, a cooling water inlet and outlet interface, a locking nut, a vacuum joint, an end cover, a heat conducting water path, a sealing disc, a silica gel pad, an O-shaped sealing ring and a movable joint fixing disc, wherein the movable joint fixing hole is 1, the locking threaded hole is 2, the vacuum matching hole is 3, the copper pipe cooling area is 4, the cooling copper pipe is 10, the cooling water inlet and outlet interface is 11, the locking nut is 12, the vacuum joint is 13, the end cover is 14, the heat conducting water path is 15, the sealing disc is 16, the silica gel pad is 17, the O-shaped sealing ring is 18, and the movable joint fixing disc is 19.
Detailed Description
As shown in fig. 2, according to the technical solution of the present invention, the end cover 14 is used as an installation platform, first, the heat conducting water path 15 is concentrically matched with the silica gel pad 17, and the water threaded hole 7 is concentrically matched with the cooling water inlet/outlet port 11; secondly, the sealing disc 16 is installed, and the sealing disc 16 is concentrically matched with the cooling copper pipe 10 and is coincidently matched with the end cover 14; then the silica gel pad 17, the O-shaped sealing ring 18 and the movable joint fixing disc 19 are installed; the loose joint fixing disc 19 and the end cover 14 are connected and locked in a balanced mode through the locking nut 12 again; and finally, ensuring normal water sealing through external test water, and then welding and connecting the vacuum connector 13 and the end cover 14.
The locking threaded holes 2 are 6 fine-tooth M4 threaded holes and are uniformly distributed along the inner side of the edge of the loose joint fixing disc 19 to be in static balance matching connection, so that no leakage point of a cavity is ensured.
The threaded metal sheet is a threaded copper sheet.
The O-shaped sealing ring 18 is made of double-fluorine rubber (FFPM), and has the performances of medium corrosion resistance, acid resistance, alkali resistance, atmospheric aging resistance and the like.
The heat conducting water path 15 and the sealing disc 16 are machined from brass, and copper has good ductility and heat conducting property.
The vacuum atmosphere tubular furnace cooling device effectively solves the heat dissipation problem of the two ends of the furnace tube of the existing atmosphere tubular furnace in the process of sintering products, namely the problems of pipeline cooling and vacuum tightness are solved, the atmosphere environment is stabilized, the labor cost is reduced, and the mass and the repetitive product quality of the sintered products are guaranteed.
In addition, according to the shape and the size of product, the utility model provides a basic vacuum atmosphere tube furnace cooling device's model of structure, among the concrete implementation process, be not limited to the specific shape of this embodiment, can carry out reasonable deformation to each part according to the specific shape and the size of each part, all belong to the utility model discloses the scope of protecting.
Claims (10)
1. The utility model provides a vacuum atmosphere tube furnace port cooling device which characterized in that: the device comprises a loose joint fixing hole (1), a locking threaded hole (2), a vacuum matching hole (3), a copper pipe cooling area (4), a cooling thread type water channel (5), a reducer water outlet (6), a water inlet threaded hole (7), a locking nut guide hole (8), an O-shaped positioning sealing ring (9), a cooling copper pipe (10), a cooling water inlet and outlet interface (11), a locking nut (12), a vacuum joint (13), an end cover (14), a heat conducting water path (15), a sealing disc (16), a silica gel pad (17), an O-shaped sealing ring (18) and a loose joint fixing disc (19);
the air inlet end of the vacuum atmosphere tube furnace is hermetically connected with the gas humidifying device through the cooling device, and the air outlet end of the vacuum atmosphere tube furnace is hermetically connected with the air exhausting device through the cooling device;
the cooling device is hermetically connected with the port of the vacuum atmosphere tube furnace through the loose joint fixing disc (19); the inner side of the edge of the loose joint fixing disc (19) is provided with the loose joint fixing hole (1) which is connected with the gas inlet end or the gas outlet end of the atmosphere tube furnace through a rotary buckle connecting device;
the cooling device is hermetically connected with a gas humidifying device or an exhaust device through the vacuum joint (13); the vacuum joint (13) is used for providing a vacuum passage and is connected with the gas humidifying device or the exhaust device in a sealing way by adopting a clamp fastening way;
the locking threaded holes (2) are positioned on the inner side of the edge of the loose joint fixing disc (19) and are mutually inserted into the loose joint fixing holes (1), and the end cover (14) and the loose joint fixing disc (19) are connected through the locking nuts (12);
the vacuum matching hole (3) is positioned in the center of the loose joint fixing hole (1), so that the cooling copper pipe (10) and water can fully exchange heat, and the vacuum environment in the vacuum atmosphere tube furnace is ensured;
the copper pipe cooling area (4) is positioned in the center of the heat conduction water path (15) and is of a hollow circular structure, and the aperture of water is about the outer diameter of the cooling copper pipe (10) to form a water vortex so as to ensure that water cooling and the cooling copper pipe (10) are in full thermal communication;
the cooling threaded water channels (5) are uniformly arranged along the circumferential direction in the heat conduction water channel (15), and are separated by threaded metal sheets, and the water channel moves according to a threaded rule, so that the cooling water and the threaded copper loop perform multi-stage heat exchange, and all heat is taken out;
the reducer water outlet (6) is connected with an outlet of the cooling thread type water channel (5), and the outlet water flow is accelerated through the reducer water outlet (6), so that the internal water forms a vortex and fully performs heat exchange;
the water inlet threaded hole (7) on the side edge of the heat conduction water path (15) is connected with an inlet of the cooling thread type water channel (5) and is matched with a water inlet threaded hole in the end cover (14) for use;
the locking nut guide hole (8) is matched with the locking threaded hole (2), the locking nut (12) and the silica gel pad (17) for use;
the O-shaped positioning sealing ring (9) is matched with the O-shaped sealing ring (18) and the loose joint fixing disc (19) for use, so that the vacuum environment in the furnace pipe of the equipment is ensured;
the cooling copper pipe (10) is positioned in the center of the end cover (14) and is used for vacuum and cooling water isolation and heat exchange;
the cooling water inlet and outlet interface (11) is positioned on the side edge of the end cover (14) and is matched with the cooling water inlet and outlet interface in the heat conduction water path (15) for use;
the locking nut (12) is matched with the locking threaded hole (2) and the locking nut guide hole (8) for use and is used for locking and positioning;
the end cover (14) is used for fixing and supporting the vacuum joint (13), the heat conduction water path (15), the sealing disc (16), the silica gel pad (17) and the O-shaped sealing ring (18), and is fixedly connected with the vacuum joint (13) in a welding mode;
the sealing disc (16) is positioned between the heat conduction water path (15) and the silica gel pad (17) and is used for sealing the water path;
the silica gel pad (17) is positioned between the sealing disc (16) and the loose joint fixing disc (19) and is used for sealing a water path;
the O-shaped sealing ring (18) is matched with the O-shaped positioning sealing ring (9) for use and is used for sealing vacuum.
2. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the gas humidifying device is a pure water humidifying tank.
3. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the exhaust device is a mechanical vacuum pump.
4. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the number of the locking threaded holes (2) is multiple.
5. The vacuum atmosphere tube furnace port cooling device according to claim 4, wherein: the locking threaded holes (2) are evenly distributed along the inner side of the edge of the loose joint fixed disc (19).
6. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the locking threaded hole (2) is a threaded hole of a fine tooth M4.
7. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the threaded metal sheet is a threaded copper sheet.
8. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the O-shaped sealing ring (18) is made of double-fluorine rubber.
9. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the heat conduction water path (15) is made of brass.
10. The vacuum atmosphere tube furnace port cooling device according to claim 1, wherein: the material of the sealing disc (16) is brass.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021952346 | 2020-09-09 | ||
| CN2020219523469 | 2020-09-09 |
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| Publication Number | Publication Date |
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| CN215113940U true CN215113940U (en) | 2021-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120997698.4U Active CN215113940U (en) | 2020-09-09 | 2021-05-11 | Vacuum atmosphere tubular furnace port cooling device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097525A (en) * | 2020-09-09 | 2020-12-18 | 中国振华集团云科电子有限公司 | Atmosphere tube furnace cooling device and cooling method |
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2021
- 2021-05-11 CN CN202120997698.4U patent/CN215113940U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097525A (en) * | 2020-09-09 | 2020-12-18 | 中国振华集团云科电子有限公司 | Atmosphere tube furnace cooling device and cooling method |
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