CN112097525A - Atmosphere tube furnace cooling device and cooling method - Google Patents
Atmosphere tube furnace cooling device and cooling method Download PDFInfo
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- CN112097525A CN112097525A CN202010938879.XA CN202010938879A CN112097525A CN 112097525 A CN112097525 A CN 112097525A CN 202010938879 A CN202010938879 A CN 202010938879A CN 112097525 A CN112097525 A CN 112097525A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/12—Casings; Linings; Walls; Roofs incorporating cooling arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B2005/062—Cooling elements
- F27B2005/064—Cooling elements disposed in the furnace, around the chamber, e.g. coils
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
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Abstract
A cooling device and a cooling method for a vacuum atmosphere tube furnace comprise a gas transmission device, a water cooling device, a vacuum sealing device, an interface device and a locking device; one end of the gas transmission device is fixedly and hermetically connected with the water cooling device; the water cooling device is hermetically connected with the vacuum sealing device in a full plane, and a water inlet port and a water outlet port of the water cooling device are respectively connected with corresponding ports of an external water source through large and small heads to form a vortex in a water path; the other end of the vacuum sealing device is hermetically connected with a port of the vacuum atmosphere tube furnace through an interface device; the locking device connects the water cooling device, the vacuum sealing device and the interface device with the port of the vacuum atmosphere tube furnace in a sealing way; the gas transmission device, the water cooling device, the vacuum sealing device and the interface device are concentrically connected with the vacuum atmosphere tube furnace. The problems of heat dissipation and vacuum tightness at two ends of a furnace tube in the process of sintering products of the existing atmosphere tube furnace are solved, and the method is widely applied to a cooling system of the vacuum atmosphere tube furnace.
Description
Technical Field
The present invention relates to the field of cooling devices, and more particularly, to the field of vacuum atmosphere cooling devices, and even more particularly, to a cooling device and a cooling method for a vacuum atmosphere tube furnace.
Background
When the electronic ceramic product is sintered and formed in the atmosphere tube furnace, nitrogen and hydrogen are required to be mixed according to a certain proportion, the mixture is humidified by the pure water tank and then is introduced into the high-temperature furnace tube to provide a sintering environment for the electronic ceramic product during sintering, in order to ensure the sealing property of the sintering atmosphere in the furnace tube, one end of each of two ends of the furnace tube is used for air inlet, the other end of the furnace tube is used for air exhaust, and water cooling sealing devices are respectively installed at two ends of the furnace tube to improve the cooling efficiency and save the gas consumption.
The traditional method is to adopt a water-cooling sleeve structure, the water-cooling sleeves are respectively sleeved on furnace mouths at two ends of an atmosphere tube furnace in a ring mode, the two ends of the atmosphere tube furnace are cooled, the water-cooling sleeves and the furnace tubes are in a line contact mode, the diameter of a pipeline of the atmosphere tube furnace is large, the cooling area of the water-cooling sleeves is seriously insufficient, the heat dissipation speed is slow, pipelines at two ends are seriously heated, the accelerated aging of a vacuum sealing system is caused, the vacuum sealing performance and the atmosphere stability of the atmosphere tube furnace are damaged, the purity of the atmosphere and the safety of a working environment are reduced, and therefore the sintering quality of electronic ceramic products is influenced. Therefore, the two ends of the pipeline are usually subjected to manual auxiliary cooling treatment, so that on one hand, the cost is increased, and importantly, the problem cannot be fundamentally solved.
The invention aims to provide an atmosphere tube furnace cooling device, which improves a pipeline cooling system, improves the cooling effect, ensures a vacuum environment, stabilizes an atmosphere environment, ensures the safety of a working environment, and ensures the batch property, the repeatability and the reliability of sintered products.
Disclosure of Invention
The purpose of the invention is: the problem of the heat dissipation at the furnace tube both ends of sintered product in-process of current atmosphere tubular furnace is solved, solve pipeline cooling and vacuum tightness problem promptly to guarantee vacuum environment, stabilize atmosphere environment, guarantee operational environment's security, ensure the wholesale nature, repeatability and the reliability of sintered product.
Therefore, the invention provides a vacuum atmosphere tube furnace cooling device, the overall schematic diagram of the cooling device is shown in figure 1, the assembly structure schematic diagram of the cooling device is shown in figure 2, the enlarged schematic diagram of a cooling end cover is shown in figure 3, the enlarged schematic diagram of a heat conduction water path is shown in figure 4, the enlarged schematic diagram of a movable joint fixing disc is shown in figure 5, and the enlarged schematic diagram of a fixed cooling water jacket is shown in figure 6.
A vacuum atmosphere tube furnace cooling device comprises a gas transmission device, a water cooling device, a vacuum sealing device, an interface device and a locking device;
one end of the gas transmission device is fixedly and hermetically connected with the water cooling device, and the other end of the gas transmission device is used for gas inlet or gas outlet;
the water cooling device is hermetically connected with the vacuum sealing device in a full-plane manner, and a water inlet port and a water outlet port of the water cooling device are respectively connected with corresponding ports of an external water source through large and small heads to form a vortex in a water path;
the other end of the vacuum sealing device is hermetically connected with a port of the vacuum atmosphere tube furnace through the interface device;
the locking device connects the water cooling device, the vacuum sealing device and the interface device with the port of the vacuum atmosphere tube furnace in a sealing way;
the gas transmission device, the water cooling device, the vacuum sealing device and the interface device are concentrically connected with the vacuum atmosphere tube furnace.
The gas transfer device comprises a vacuum connection 1.
The water cooling device comprises: end cover 2, heat conduction water route 3, sealed dish 4, silica gel pad 5.
The end cover 2 is provided with: the sealing device comprises a sealing hole 201, a locking nut guide hole 202, a cooling water inlet and outlet interface 203, a water inlet threaded hole 204 and a cooling copper pipe 205. As shown in fig. 3.
The heat conduction water path 3 is provided with: copper pipe cooling zone 301, cooling screw thread type water course 302, reducer delivery port 303, delivery port cooperation screw hole 304, water inlet cooperation screw hole 305. As shown in fig. 4.
The vacuum sealing apparatus includes: o-shaped sealing ring 6, loose joint fixing disc 7 and sealing rubber ring 8.
The loose joint fixing disc 7 is provided with: locking threaded holes 701, vacuum matching holes 702 and loose joint fixing holes 703. As shown in fig. 5.
The interface device includes: and a cooling water jacket 10 and a vacuum corundum tube 11 are fixed.
The fixed cooling water jacket 10 is provided with a nut fixing threaded hole 1001. As shown in fig. 6.
The locking means comprise a locking nut 9.
The vacuum joint 1 provides a vacuum path and is matched with other equipment for use in a quick connection mode.
The end cover 2 is used for fixing and supporting the vacuum joint 1, the heat conducting water path 3, the sealing disc 4, the silica gel pad 5 and the O-shaped sealing ring 6, and is fixedly connected with the vacuum joint 1 in a welding mode.
The sealing hole 201 is matched with the O-shaped sealing ring 6, the loose joint fixing disc 7 and the fixed cooling water jacket 10 for use, so that the vacuum environment in the furnace pipe of the equipment is ensured.
The locking nut guide hole 202 is used in cooperation with the locking threaded hole 701, the locking nut 9, the silica gel pad 5 and the nut fixing threaded hole 1001.
The cooling water outlet port 203 is located on the side edge of the end cover 2, and is used in cooperation with the cooling water outlet port in the heat conducting water path 3.
The cooling water inlet port 204 is located on the side edge of the end cover 2, and is used in cooperation with the cooling water inlet port in the heat conducting water path 3.
The cooling copper tube 205 is located at the center of the end cap 2 for vacuum isolation from cooling water and also for heat exchange.
The copper pipe cooling area 301 is located at the central position of the heat conducting water path 3, is of a hollow circular structure, and forms a water vortex by the fact that the aperture of water is approximately equal to the outer diameter of the cooling copper pipe 205, so that water cooling and the cooling copper pipe 205 are enabled to perform sufficient heat exchange.
The cooling thread type water channel 302 is uniformly arranged along the inner circumferential direction of the heat conduction water channel 3, and is separated by a thread type metal thin plate, and the water channel moves according to a thread type rule, so that the cooling water and the thread type copper loop perform multi-stage heat exchange, and heat is completely taken out.
The reducer water outlet 303 is connected with an outlet of the cooling thread type water channel 302, and the outlet flow is accelerated through the reducer water outlet 303, so that the internal water forms a vortex and the heat exchange is fully performed.
The water outlet matching threaded hole 304 on the side edge of the heat-conducting water path 3 is connected with the outlet of the cooling thread type water channel 302 and is matched with the water outlet threaded hole 203 in the end cover 2 for use.
The water inlet on the side of the heat-conducting waterway 3 is connected with the inlet of the cooling thread type water channel 302 by matching with the threaded hole for water inlet 204 in the end cover 2.
The sealing disc 4 is located between the heat conduction water path 3 and the silica gel pad 5 and used for sealing the water path.
The silica gel pad 5 is positioned between the sealing disc 4 and the loose joint fixing disc 7 and used for sealing a water path.
The o-ring 6, used in conjunction with the sealing hole 201, seals the vacuum.
The inner side of the edge of the loose joint fixing disc 7 is provided with the loose joint fixing hole 703 which is connected with the air inlet end or the air outlet end of the atmosphere tube furnace through a rotary buckle connecting device, so that the vacuum performance is ensured.
The locking threaded holes 701 are located on the inner side of the edge of the loose joint fixing disc 7 and are mutually inserted into the loose joint fixing holes 703, and the end cover 2, the loose joint fixing disc 7 and the fixed cooling water jacket 10 are connected through the locking nuts 9.
The vacuum fitting hole 702 is located at the center of the loose joint fixing hole 703, so that the cooling copper tube 205 and the cooling water perform sufficient heat exchange, and a vacuum environment in the vacuum atmosphere tube furnace is ensured.
The sealing rubber ring 8 is matched with the fixed cooling water jacket 10, the locking nut 9 and the loose joint fixing disc 7 for use, so that the vacuum sealing of the vacuum corundum tube 11 is ensured.
The locking nut 9 is used in cooperation with the fixed cooling water jacket 10, the loose joint fixing disc 7, the locking threaded hole 701, the end cover 2 and the locking nut guide hole 202 for locking, positioning and sealing.
And the fixed cooling water jacket 10 is hermetically connected with the loose joint fixed disc 7.
The vacuum corundum tube 11 provides a vacuum and high-temperature sintering environment for the atmosphere tube furnace.
The locking threaded holes 701 are uniformly distributed along the inner side of the edge of the loose joint fixing disc 7.
The working principle of the vacuum atmosphere tube furnace cooling device is as follows: through the concentric cooperation of copper pipe cooling zone 301 and cooling copper pipe 205, through the leading-in of external pressure cooling water through end cover 2, in the heat conduction water route 3, fully carry out the heat exchange with heat conduction water route 3. During the cooling, fully contact with heat conduction water route 3 fully in the cooling copper pipe 205 and guarantee multistage cooling, copper pipe cooling space 301 forms the vortex through water pressure under the effect of reducer delivery port 303, further strengthens the heat exchange to can realize high-efficient cooling effect.
Therefore, the invention provides a cooling method for cooling a vacuum atmosphere tube furnace, and the schematic diagram of the cooling process is shown in figure 7:
the cooling method comprises the following steps:
(1) cleaning and drying the tube orifice of the furnace tube of the vacuum atmosphere tube furnace;
(2) cleaning and drying the gas transmission device, the water cooling device, the vacuum sealing device, the interface device and the locking device;
(3) sealingly coupling the vacuum sealing device with the furnace tube using the interface device;
(4) the water cooling device, the furnace tube and the vacuum sealing device are connected in a sealing way by using the locking device;
(5) connecting the gas transmission device with an external gas channel;
(6) electrifying the vacuum atmosphere furnace for heating;
(7) vacuumizing and introducing nitrogen-hydrogen mixed gas;
(8) boiling cooling water;
(9) the water inlet end of the reducer forms a stable water flow;
(10) heat is transferred through the stepless heat exchange plane thread type water channel;
(11) adjusting water pressure and flow, forming a waterway vortex in the waterway at the front end of the reducer, and realizing full contact heat transfer between cooling water and the wall of the waterway;
(12) the cooling water with heat flows out through the reducer and the cooling water circulation system in an accelerating way.
The cooling device of the vacuum atmosphere tube furnace is convenient to operate, process and assemble, durable and good in effect. The heat dissipation problem of the two ends of the furnace tube in the process of sintering products, namely the problem of pipeline cooling and vacuum tightness, of the existing atmosphere tube furnace can be effectively solved, and the labor cost is reduced. The air inlet end and the air outlet end are cooled in the sintering and forming process of the vacuum atmosphere tube furnace, the atmosphere environment is stabilized, deformation damage such as material expansion and material contraction caused by uneven temperature and large temperature gradient in the product sintering process is effectively prevented, the product process quality is stabilized, the consistency, the batch performance and the repeatability of sintered products are guaranteed, the product quality is improved, and the product cost is reduced.
Drawings
Fig. 1 is an overall schematic view of a cooling apparatus.
Fig. 2 is a schematic view of the cooling device assembly structure.
FIG. 3 is an enlarged schematic view of a cooling end cap.
Fig. 4 is an enlarged schematic view of the heat conducting water path.
FIG. 5 is an enlarged view of the loose joint fixation disk.
Fig. 6 is an enlarged schematic view of the fixed cooling water jacket.
FIG. 7 is a schematic view of the cooling process of the apparatus.
In the figure: the vacuum joint comprises a vacuum joint 1, an end cover 2, a sealing hole 201, a locking nut guide hole 202, a water outlet threaded hole 203, a water inlet threaded hole 204, a cooling copper pipe 205, a heat conduction water path 3, a copper pipe cooling area 301, a cooling thread type water channel 302, a reducer water outlet 303, a water outlet matching threaded hole 304, a water inlet matching threaded hole 305, a reducer water inlet 306, a sealing disc 4, a silica gel pad 5, an O-shaped sealing ring 6, a loose joint fixing disc 7, a locking threaded hole 701, a vacuum matching hole 702, a loose joint fixing hole 703, a sealing rubber ring 8, a locking nut 9, a fixed cooling water jacket 10, a nut fixing threaded hole 1001 and a vacuum corundum tube 11.
Detailed Description
As shown in fig. 2, the end cap 2 is used as an installation platform, and the end cap 2 and the vacuum joint 1 are subjected to sealing welding treatment; the end cover 2, the heat conduction water path 3, the sealing disc 4, the silica gel pad 5, the O-shaped sealing ring 6, the loose joint fixing disc 7, the sealing rubber ring 8 and the vacuum corundum tube 10 are in concentric fit, and are in balanced sealing locking connection through six locking nuts 9.
The number of the locking threaded holes 701 is 6.
The locking threaded hole 701 is a threaded hole of a fine tooth M4.
The threaded metal sheet is a threaded copper sheet.
The O-shaped sealing ring 6 is made of stainless steel.
The material of the heat conduction water path 3 is brass.
The material of the sealing disc 4 is brass.
The vacuum atmosphere tubular furnace cooling device effectively solves the heat dissipation problem of the two ends of the furnace tube of the existing atmosphere tubular furnace in the process of sintering products, namely the problems of pipeline cooling and vacuum tightness are solved, the atmosphere environment is stabilized, the labor cost is reduced, and the mass and the repetitive product quality of the sintered products are guaranteed.
In addition, according to the shape and size of the product, the invention provides a basic structural model of the cooling device of the vacuum atmosphere tube furnace, and in the specific implementation process, the structural model is not limited to the specific shape of the embodiment, and the structural model can be reasonably deformed according to the specific shape and size of each part, and all the structural models belong to the protection scope of the invention.
Claims (10)
1. A vacuum atmosphere tube furnace cooling device is characterized in that: the device comprises a gas transmission device, a water cooling device, a vacuum sealing device, an interface device and a locking device;
one end of the gas transmission device is fixedly and hermetically connected with the water cooling device, and the other end of the gas transmission device is used for gas inlet or gas outlet;
the water cooling device is hermetically connected with the vacuum sealing device in a full-plane manner, and a water outlet port of the water cooling device is connected with a port of an external water source through a reducer, so that the flow speed of water flow is accelerated, and a vortex is formed in a water path;
the other end of the vacuum sealing device is hermetically connected with a port of the vacuum atmosphere tube furnace through the interface device;
the locking device connects the water cooling device, the vacuum sealing device and the interface device with the port of the vacuum atmosphere tube furnace in a sealing way;
the gas transmission device, the water cooling device, the vacuum sealing device and the interface device are concentrically connected with the vacuum atmosphere tube furnace.
2. A vacuum atmosphere tube furnace cooling device as claimed in claim 1, wherein:
the gas transmission device comprises a vacuum joint (1);
the water cooling device comprises: the device comprises an end cover (2), a heat conduction water path (3), a sealing disc (4) and a silica gel pad (5);
the end cover (2) is provided with: the device comprises a sealing hole (201), a locking nut guide hole (202), a cooling water inlet and outlet interface (203), a water inlet threaded hole (204) and a cooling copper pipe (205);
the heat conduction water path (3) is provided with: a copper pipe cooling area (301), a cooling thread type water channel (302), a large and small head water outlet (303), a water outlet matching threaded hole (304) and a water inlet matching threaded hole (305);
the vacuum sealing apparatus includes: the O-shaped sealing ring (6), the loose joint fixing disc (7) and the sealing rubber ring (8);
the loose joint fixing disc (7) is provided with: a locking threaded hole (701), a vacuum matching hole (702) and a loose joint fixing hole (703);
the interface device includes: a cooling water jacket (10) and a vacuum corundum tube (11) are fixed;
a nut fixing threaded hole (1001) is formed in the fixing cooling water jacket (10);
the locking device comprises a locking nut (9);
the vacuum joint (1) provides a vacuum passage and is matched with other equipment for use in a quick connection mode;
the end cover (2) is used for fixing and supporting the vacuum joint (1), the heat conduction water path (3), the sealing disc (4), the silica gel pad (5) and the O-shaped sealing ring (6) and is fixedly connected with the vacuum joint (1) in a welding mode;
the sealing hole (201) is matched with the O-shaped sealing ring (6), the loose joint fixing disc (7) and the fixed cooling water jacket (10) for use, so that the vacuum environment in the furnace pipe of the equipment is ensured;
the locking nut guide hole (202) is matched with the locking threaded hole (701), the locking nut (9), the silica gel pad (5) and the nut fixing threaded hole (1001) for use;
the cooling water outlet port (203) is positioned on the side edge of the end cover (2) and is matched with the cooling water outlet port in the heat conduction water path (3) for use;
the cooling water inlet interface (204) is positioned on the side edge of the end cover (2) and is matched with the cooling water inlet interface in the heat conduction water path (3) for use;
the cooling copper pipe (205) is positioned in the center of the end cover (2) and is used for vacuum and cooling water isolation and heat exchange;
the copper pipe cooling area (301) is located in the center of the heat conduction water channel (3) and is of a hollow circular structure, and a water vortex is formed by the fact that the aperture of water is approximately equal to the outer diameter of the cooling copper pipe (205), so that water cooling and the cooling copper pipe (205) are enabled to be in full thermal communication;
the cooling threaded water channels (302) are uniformly arranged along the circumferential direction in the heat conduction water channel (3) and are separated by threaded metal sheets, and the water channel moves according to a threaded rule, so that the cooling water and the threaded copper loop perform multi-stage heat exchange, and all heat is taken out;
the reducer water outlet (303) is connected with an outlet of the cooling thread type water channel (302), and the outlet water flow is accelerated through the reducer water outlet (303), so that the internal water forms a vortex and the heat exchange is fully carried out;
the water outlet matching threaded hole (304) on the side edge of the heat conduction water path (3) is connected with an outlet of the cooling thread type water channel (302) and is matched with a water outlet threaded hole (203) in the end cover (2) for use;
the water inlet on the side edge of the heat-conducting water path (3) is matched with a threaded hole (305) to be connected with an inlet of the cooling thread type water channel (302) and is matched with a water inlet threaded hole (204) in the end cover (2) for use;
the sealing disc (4) is positioned between the heat conduction water path (3) and the silica gel pad (5) and is used for sealing the water path;
the silica gel pad (5) is positioned between the sealing disc (4) and the movable joint fixing disc (7) and is used for sealing a water path;
the O-shaped sealing ring (6) is matched with the sealing hole (201) for use and is used for sealing vacuum;
the inner side of the edge of the loose joint fixing disc (7) is provided with the loose joint fixing hole (703) which is connected with the air inlet end or the air outlet end of the atmosphere tube furnace through a rotary buckle connecting device so as to ensure the vacuum performance;
the locking threaded holes (701) are positioned on the inner side of the edge of the loose joint fixing disc (7), are mutually inserted into the loose joint fixing holes (703), and are connected with the end cover (2), the loose joint fixing disc (7) and the fixed cooling water jacket (10) through the locking nuts (9);
the vacuum matching hole (702) is positioned in the center of the loose joint fixing hole (703), so that the cooling copper pipe (205) and cooling water can perform sufficient heat exchange, and the vacuum environment in the vacuum atmosphere tube furnace can be ensured;
the sealing rubber ring (8) is matched with the fixed cooling water jacket (10), the locking nut (9) and the loose joint fixing disc (7) for use, so that the vacuum sealing of the vacuum corundum tube (11) is ensured;
the locking nut (9) is matched with the fixed cooling water jacket (10), the loose joint fixing disc (7), the locking threaded hole (701), the end cover (2) and the locking nut guide hole (202) for use and is used for locking, positioning and sealing;
the fixed cooling water jacket (10) is hermetically connected with the loose joint fixed disc (7);
the vacuum corundum tube (11) provides a vacuum and high-temperature sintering environment for the atmosphere tube furnace.
3. A vacuum atmosphere tube furnace cooling device as claimed in claim 2, wherein: the number of the locking threaded holes (701) is several, and preferably 6.
4. A vacuum atmosphere tube furnace cooling device as claimed in claim 3, wherein: the locking threaded holes (701) are evenly distributed along the inner side of the edge of the loose joint fixing disc (7).
5. A vacuum atmosphere tube furnace cooling device as claimed in claim 2, wherein: the locking threaded hole (701) is a threaded hole of a fine tooth M4.
6. A vacuum atmosphere tube furnace cooling device as claimed in claim 2, wherein: the threaded metal sheet is a threaded copper sheet.
7. A vacuum atmosphere tube furnace cooling device as claimed in claim 2, wherein: the O-shaped sealing ring (6) is made of double-fluorine rubber FFPM.
8. A vacuum atmosphere tube furnace cooling device as claimed in claim 2, wherein: the heat conduction water path (3) is made of brass.
9. A vacuum atmosphere tube furnace cooling device as claimed in claim 2, wherein: the material of the sealing disc (4) is brass.
10. The cooling method of a vacuum atmosphere tube furnace cooling device according to claim 1, wherein: the cooling method comprises the following steps:
(1) cleaning and drying the tube orifice of the furnace tube of the vacuum atmosphere tube furnace;
(2) cleaning and drying the gas transmission device, the water cooling device, the vacuum sealing device, the interface device and the locking device;
(3) sealingly coupling the vacuum sealing device with the furnace tube using the interface device;
(4) the water cooling device, the furnace tube and the vacuum sealing device are connected in a sealing way by using the locking device;
(5) connecting the gas transmission device with an external gas channel;
(6) electrifying the vacuum atmosphere furnace for heating;
(7) vacuumizing and introducing nitrogen-hydrogen mixed gas;
(8) boiling cooling water;
(9) the water inlet end of the reducer forms a stable water flow;
(10) heat is transferred through the stepless heat exchange plane thread type water channel;
(11) adjusting water pressure and flow, forming a waterway vortex in the waterway at the front end of the reducer, and realizing full contact heat transfer between cooling water and the wall of the waterway;
(12) the cooling water with heat flows out through the reducer in an accelerated way.
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| CN202010938879.XA CN112097525B (en) | 2020-09-09 | 2020-09-09 | Cooling device and cooling method for vacuum atmosphere tube furnace |
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| CN202010938879.XA CN112097525B (en) | 2020-09-09 | 2020-09-09 | Cooling device and cooling method for vacuum atmosphere tube furnace |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055569A (en) * | 1998-08-17 | 2000-02-25 | Daido Steel Co Ltd | Heat treatment furnace |
| CN1924499A (en) * | 2005-08-30 | 2007-03-07 | 李树华 | Furnace end cover for high temperature sinter resistance furnace with protective atmosphere |
| CN101144689A (en) * | 2006-09-12 | 2008-03-19 | 洛阳市西格马仪器制造有限公司 | Vacuum atmosphere tube type resistance furnace |
| CN104567372A (en) * | 2014-12-25 | 2015-04-29 | 江苏德佐电子科技有限公司 | Furnace wall structure of vacuum welding furnace and welding furnace applying furnace wall structure |
| CN106643182A (en) * | 2015-10-28 | 2017-05-10 | 沈阳沈真真空技术有限责任公司 | High-temperature vacuum furnace water-cooling electrode |
| CN207877262U (en) * | 2018-01-30 | 2018-09-18 | 青岛三联石墨制品有限公司 | A kind of graphite heater furnace convenient for furnace wall cooling |
| KR101919379B1 (en) * | 2018-07-11 | 2019-02-08 | 한형기 | Division type Tapered Ring of Electrode for Electric Furnace |
| CN208816674U (en) * | 2018-10-23 | 2019-05-03 | 湖南艾科威智能装备有限公司 | A kind of sealing device suitable for vacuum reacting furnace pipe |
| CN208929193U (en) * | 2018-10-24 | 2019-06-04 | 合智熔炼装备（上海）有限公司 | A kind of efficiently cooling aqueous cold plate of directional solidification furnace |
| CN208968290U (en) * | 2018-10-29 | 2019-06-11 | 景德镇众凯科技有限公司 | A kind of circulating water cooling device for vaccum sensitive stove |
| CN210860192U (en) * | 2019-11-08 | 2020-06-26 | 核工业理化工程研究院 | Water-cooling flange with embedded circulating water channel |
| CN215113940U (en) * | 2020-09-09 | 2021-12-10 | 中国振华集团云科电子有限公司 | Vacuum atmosphere tubular furnace port cooling device |
-
2020
- 2020-09-09 CN CN202010938879.XA patent/CN112097525B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000055569A (en) * | 1998-08-17 | 2000-02-25 | Daido Steel Co Ltd | Heat treatment furnace |
| CN1924499A (en) * | 2005-08-30 | 2007-03-07 | 李树华 | Furnace end cover for high temperature sinter resistance furnace with protective atmosphere |
| CN101144689A (en) * | 2006-09-12 | 2008-03-19 | 洛阳市西格马仪器制造有限公司 | Vacuum atmosphere tube type resistance furnace |
| CN104567372A (en) * | 2014-12-25 | 2015-04-29 | 江苏德佐电子科技有限公司 | Furnace wall structure of vacuum welding furnace and welding furnace applying furnace wall structure |
| CN106643182A (en) * | 2015-10-28 | 2017-05-10 | 沈阳沈真真空技术有限责任公司 | High-temperature vacuum furnace water-cooling electrode |
| CN207877262U (en) * | 2018-01-30 | 2018-09-18 | 青岛三联石墨制品有限公司 | A kind of graphite heater furnace convenient for furnace wall cooling |
| KR101919379B1 (en) * | 2018-07-11 | 2019-02-08 | 한형기 | Division type Tapered Ring of Electrode for Electric Furnace |
| CN208816674U (en) * | 2018-10-23 | 2019-05-03 | 湖南艾科威智能装备有限公司 | A kind of sealing device suitable for vacuum reacting furnace pipe |
| CN208929193U (en) * | 2018-10-24 | 2019-06-04 | 合智熔炼装备（上海）有限公司 | A kind of efficiently cooling aqueous cold plate of directional solidification furnace |
| CN208968290U (en) * | 2018-10-29 | 2019-06-11 | 景德镇众凯科技有限公司 | A kind of circulating water cooling device for vaccum sensitive stove |
| CN210860192U (en) * | 2019-11-08 | 2020-06-26 | 核工业理化工程研究院 | Water-cooling flange with embedded circulating water channel |
| CN215113940U (en) * | 2020-09-09 | 2021-12-10 | 中国振华集团云科电子有限公司 | Vacuum atmosphere tubular furnace port cooling device |
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