CN220170006U

CN220170006U - Furnace tail sealing device and hot furnace

Info

Publication number: CN220170006U
Application number: CN202321481566.1U
Authority: CN
Inventors: 朱太荣; 肖阳; 易术; 林佳继
Original assignee: Laplace New Energy Technology Co ltd
Current assignee: Laplace New Energy Technology Co ltd
Priority date: 2023-06-12
Filing date: 2023-06-12
Publication date: 2023-12-12
Anticipated expiration: 2033-06-12

Abstract

The utility model discloses a furnace tail sealing device and a hot furnace, wherein the furnace tail sealing device is used for sealing the tail of a furnace body and comprises a flange mounting plate, a furnace tail flange and a tail cover, the flange mounting plate is sleeved at the tail of the furnace body, the furnace tail flange is mounted on the flange mounting plate, the tail cover is connected with the furnace tail flange and is used for sealing the tail of the furnace body, and an air pipe communicated with a furnace tube in the furnace body is arranged on the tail cover. The furnace tail sealing device has lower requirements on assembly methods, is low in installation difficulty and is convenient to install and detach.

Description

Furnace tail sealing device and hot furnace

Technical Field

The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a furnace tail sealing device and a hot furnace.

Background

The existing tail cover sealing device is composed of parts such as tail cover metal plates, aluminum silicate heat insulation layers and the like, and is widely applied to heat treatment equipment in the photovoltaic and semiconductor fields. As shown in fig. 1: the existing structure is that an aluminum silicate heat insulation layer 2 is nested on a tail cover metal plate 1, and then a formed tail cover sealing device is fixed on a thermal field through bolts, so that the effects of isolating a heat source and protecting the tail of heat treatment equipment are achieved. Because the furnace tube 4 and the tail cover sealing device are integrated on the thermal field 3, and the tail of the furnace tube 4 is provided with a plurality of branch tubes 41, the existing structure is difficult to process, certain requirements are met on the assembly method during installation, the difficulty is high, the quartz tube can be damaged during installation, and the production efficiency is low.

Disclosure of Invention

The first object of the utility model is to provide a furnace tail sealing device, which has lower requirements on assembly methods, has lower installation difficulty and is convenient to install and disassemble.

A second object of the present utility model is to propose a hot oven which is simple in terms of both assembly and disassembly process.

The utility model discloses a furnace tail sealing device, which is arranged at the tail part of a furnace body and comprises: the flange mounting plate is sleeved at the tail part of the furnace body; the furnace tail flange is arranged on the flange mounting plate; the tail cover is connected to the furnace tail flange and used for sealing the tail of the furnace body, and an air pipe communicated with the furnace tube in the furnace body is arranged on the tail cover.

In some embodiments, the tail seal further comprises a thermal shield, the thermal shield sleeve being sandwiched between the flange mounting plate and an end face of the furnace body.

In some embodiments, a seal is sandwiched between the furnace tail flange and the tail cap.

In some specific embodiments, a mating groove is formed in a side of the tail flange facing the tail cap, and a mating protrusion is formed in a side of the tail cap facing the tail flange, and the mating protrusion is used for pressing the sealing element into the mating groove.

In some embodiments, the tail cap has a plug protrusion, the air tube is threaded through the plug protrusion, and the plug protrusion is inserted into the furnace tube.

In some specific embodiments, the tail cover is further provided with a plugging groove surrounding the plugging protrusion, and one end of the furnace tube is plugged into the plugging groove.

In some embodiments, a first cooling flow passage is arranged on one side of the furnace tail flange facing the flange mounting plate, and cooling liquid flows in the first cooling flow passage.

In some embodiments, the tail cover defines a second cooling flow passage, and a liquid inlet pipe and a liquid outlet pipe which are communicated with the second cooling flow passage are arranged on the tail cover.

In some embodiments, the tail cover is provided with a first mounting hole, the furnace tail flange is provided with a second mounting hole corresponding to the first mounting hole, the flange mounting plate is provided with a third mounting hole corresponding to the second mounting hole, and the connecting piece passes through the first mounting hole, the second mounting hole and the third mounting hole to fixedly connect the tail cover, the furnace tail flange and the flange mounting plate.

The utility model also discloses a heating furnace, which comprises the furnace tail sealing device and a furnace body, wherein a furnace tube is arranged in the furnace body, and the furnace tail sealing device is used for sealing the tail of the furnace body and the tail of the furnace tube.

The furnace tail sealing device has the beneficial effects that: in the actual installation process, only the flange mounting plate is required to be sleeved at the tail part of the furnace body, then the furnace tail flange is mounted on the flange mounting plate, and finally the tail cover is mounted on the flange mounting plate.

The heat furnace has the beneficial effects that: the furnace tail sealing device is provided, so that the assembly and disassembly processes of the hot furnace are simpler.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic view of a prior art tail cap seal;

FIG. 2 is a schematic view of another orientation of the tail seal of an embodiment of the present utility model;

FIG. 3 is a cross-sectional view taken along line A-A in FIG. 2;

fig. 4 is a partial enlarged view of the structure shown in fig. 3.

Reference numerals:

in fig. 1:

1. sheet metal of tail cover; 2. an aluminum silicate insulating layer; 3. a thermal field; 4. a furnace tube; 41. a branch pipe;

fig. 2-4:

100. a flange mounting plate; 110. a third mounting hole; 200. a furnace tail flange; 210. a mating groove; 220. a first cooling flow passage; 230. a second mounting hole; 300. a tail cover; 310. an air pipe; 320. fitting the protrusion; 330. inserting the bulge; 340. a plug-in groove; 350. a second cooling flow path; 360. a first mounting hole; 400. a heat insulating member; 500. a seal; 600. a furnace body; 610. and (5) a furnace tube.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the tail seal according to the embodiment of the present utility model is described below with reference to fig. 2 to 4.

The utility model discloses a furnace tail sealing device, which is arranged on a furnace body 600, as shown in fig. 2-4, and comprises a flange mounting plate 100, a furnace tail flange 200 and a tail cover 300, wherein the flange mounting plate 100 is sleeved at the tail part of the furnace body 600, the furnace tail flange 200 is arranged on the flange mounting plate 100, the tail cover 300 is connected with the furnace tail flange 200 and is used for sealing the tail part of the furnace body 600, and an air pipe 310 communicated with a furnace tube 610 in the furnace body 600 is arranged on the tail cover 300. It can be appreciated that in the actual installation process, only the flange mounting plate 100 is required to be sleeved at the tail of the furnace body 600, then the furnace tail flange 200 is mounted on the flange mounting plate 100, and finally the tail cover 300 is mounted on the flange mounting plate 100, so that the installation operation of penetrating through the branch pipe is not required in the installation process of the furnace tail sealing device like the prior art, the requirement of the furnace tail sealing device on the assembly method is lower, the installation difficulty is lower, and the installation and the disassembly of the furnace tail sealing device are convenient.

It should be noted that, the tail of the furnace body 600 may be completely opened or closed, but a plurality of avoidance holes for avoiding the air pipe 310 are provided thereon.

In some embodiments, as shown in fig. 3-4, the tail seal further includes a thermal shield 400, the thermal shield 400 being sandwiched between the flange mounting plate 100 and an end face of the furnace body 600. It will be appreciated that the heat shield 400 is capable of blocking heat transfer from the furnace body 600 to the flange mounting plate 100 such that the temperature of the entire tail seal is relatively low during normal operation, thereby avoiding scalding personnel. In the embodiment of the present utility model, the material of the heat insulating member 400 may be selected according to actual needs, and the specific material of the heat insulating member 400 is not limited herein.

In some embodiments, as shown in FIG. 4, a seal 500 is sandwiched between the furnace tail flange 200 and the tail cap 300. It will be appreciated that the seal 500 between the tail flange 200 and the tail cap 300 ensures the connection tightness of the tail flange 200 and the tail cap 300, thereby ensuring the tightness of the entire tail seal against the tail of the furnace body 600. Meanwhile, the tail of the furnace body 600 is sealed through the furnace tail flange 200 and the tail cover 300 by extruding the sealing piece 500, and the whole furnace tail sealing device has only one sealing point, so that the investigation difficulty in air leakage is reduced. In the embodiment of the present utility model, the specific material and model of the sealing member 500 may be selected according to actual needs, and the specific material and model of the sealing member 500 are not limited herein.

In some specific embodiments, as shown in fig. 4, the side of the tail flange 200 facing the tail cap 300 is provided with a mating groove 210, and the side of the tail cap 300 facing the tail flange 200 is provided with a mating protrusion 320, and the mating protrusion 320 is used to press the seal 500 against the mating groove 210. It can be appreciated that, by connecting the mating protrusion 320 and the mating groove 210, on one hand, the connection stability of the tail flange 200 and the tail cap 300 can be improved, and on the other hand, the sealing member 500 is installed in the mating groove 210 and is tightly pressed by the mating protrusion 320, so that the connection tightness of the tail flange 200 and the tail cap 300 can be improved, and the tightness of the whole tail sealing device to the tail of the furnace body 600 can be further improved.

In some embodiments, as shown in FIG. 4, tail cap 300 has a plug protrusion 330, gas tube 310 is threaded through plug protrusion 330, and plug protrusion 330 is inserted into furnace tube 610. It will be appreciated that insertion of the plug protrusion 330 into the furnace tube 610 can facilitate installation of the tail cap 300, and only by aligning the plug protrusion 330 with the tail of the furnace tube 610 and pushing it in during installation. The plugging protrusion 330 arranged on the air pipe 310 can ensure the communication between the air pipe 310 and the furnace pipe 610, thereby facilitating the air intake or the air exhaust of the furnace pipe 610.

In some specific embodiments, as shown in fig. 4, the tail cap 300 is further provided with a plugging groove 340 surrounding the plugging protrusion 330, and one end of the furnace tube 610 is plugged into the plugging groove 340. It can be appreciated that the plugging of one end of the furnace tube 610 into the plugging recess 340 can ensure the sealing of the tail cap 300 to the furnace tube 610, thereby avoiding the occurrence of air leakage in the hot furnace during the actual working process.

In some embodiments, as shown in fig. 4, a side of the furnace tail flange 200 facing the flange mounting plate 100 is provided with a first cooling flow passage 220, and a cooling liquid flows through the first cooling flow passage 220. It will be appreciated that in order to improve the sealing of the connection between the tail flange 200 and the tail cap 300, a seal 500 is typically provided between the tail flange 200 and the tail cap 300, and if the temperature of the tail flange 200 is too high, the service life of the seal 500 is reduced, and frequent replacement of the seal 500 is required during actual operation, thereby affecting normal production. In this embodiment, the side of the furnace tail flange 200 facing the flange mounting plate 100 is provided with the first cooling flow channel 220, and the cooling liquid in the first cooling flow channel 220 can realize cooling of the furnace tail flange 200, so that the phenomenon that the service life of the sealing element 500 is reduced due to overhigh temperature of the furnace tail flange 200 is avoided, the replacement period of the sealing element 500 is prolonged, and the productivity is improved.

In some embodiments, as shown in fig. 4, the tail cap 300 defines a second cooling flow channel 350, and a liquid inlet pipe and a liquid outlet pipe are disposed on the tail cap 300 and are in communication with the second cooling flow channel 350. It will be appreciated that in order to enhance the sealing of the connection between the tail flange 200 and the tail cap 300, a seal 500 is typically provided between the tail flange 200 and the tail cap 300, and if the temperature of the tail cap 300 is too high, the service life of the seal 500 is reduced, and frequent replacement of the seal 500 is required during actual operation, thereby affecting normal production. In this embodiment, the second cooling flow channel 350 is defined on the tail cover 300, and the cooling liquid in the second cooling flow channel 350 can cool the tail cover 300, so that the phenomenon that the service life of the sealing element 500 is reduced due to overhigh temperature of the tail cover 300 is avoided, the replacement period of the sealing element 500 is prolonged, and the productivity is improved.

In some embodiments, as shown in fig. 4, a first mounting hole 360 is formed in the tail cover 300, a second mounting hole 230 corresponding to the first mounting hole 360 is formed in the tail flange 200, a third mounting hole 110 corresponding to the second mounting hole 230 is formed in the flange mounting plate 100, and the connecting member fixedly connects the tail cover 300, the tail flange 200, and the flange mounting plate 100 through the first mounting hole 360, the second mounting hole 230, and the third mounting hole 110. It will be appreciated that the tail cap 300, the tail flange 200 and the flange mounting plate 100 are fixedly connected by the connecting members passing through the first mounting holes 360, the second mounting holes 230 and the third mounting holes 110, so that the installation and the removal of the tail seal device can be facilitated.

Examples:

as shown in fig. 2 to 4, the furnace tail sealing device of the present utility model comprises a flange mounting plate 100, a furnace tail flange 200, a tail cover 300, a heat insulating member 400 and a sealing member 500, wherein the flange mounting plate 100 is sleeved at the tail of a furnace body 600, a first mounting hole 360 is formed in the tail cover 300, a second mounting hole 230 corresponding to the first mounting hole 360 is formed in the furnace tail flange 200, a third mounting hole 110 corresponding to the second mounting hole 230 is formed in the flange mounting plate 100, and the connecting member passes through the first mounting hole 360, the second mounting hole 230 and the third mounting hole 110 to fixedly connect the tail cover 300, the furnace tail flange 200 and the flange mounting plate 100. The tail cap 300 is provided with an air pipe 310 which is communicated with a furnace tube 610 in the furnace body 600. The heat insulator 400 is interposed between the flange mounting plate 100 and the end surface of the furnace body 600. The side of the tail flange 200 facing the tail cap 300 is provided with a fitting recess 210, and the side of the tail cap 300 facing the tail flange 200 is provided with a fitting protrusion 320, and the fitting protrusion 320 is used for pressing the sealing member 500 against the fitting recess 210. The tail cap 300 has a plugging protrusion 330, the air pipe 310 is inserted into the plugging protrusion 330, and the plugging protrusion 330 is inserted into the furnace tube 610. The furnace tail flange 200 is provided with a first cooling flow passage 220 on one side facing the flange mounting plate 100, and cooling liquid flows through the first cooling flow passage 220. The second cooling flow passage 350 is defined on the tail cover 300, and a liquid inlet pipe and a liquid outlet pipe which are communicated with the second cooling flow passage 350 are arranged on the tail cover 300.

The utility model also discloses a heat furnace, which comprises the furnace tail sealing device and a furnace body 600, wherein the furnace body 600 is internally provided with a furnace tube 610, and the furnace tail sealing device is used for sealing the tail of the furnace body 600 and the tail of the furnace tube 610.

The furnace provided by the utility model has the advantages that the furnace tail sealing device is arranged, so that the assembly and disassembly processes of the furnace are simpler.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims

1. A tail sealing device for sealing a tail of a furnace body (600), the tail sealing device comprising:

the flange mounting plate (100) is sleeved at the tail part of the furnace body (600);

a furnace tail flange (200), the furnace tail flange (200) being mounted to the flange mounting plate (100);

the tail cover (300), tail cover (300) connect in tail flange (200) just is used for sealing the afterbody of furnace body (600), be equipped with on tail cover (300) with trachea (310) of boiler tube (610) intercommunication in furnace body (600).

2. The tail seal of claim 1, further comprising a thermal shield (400), the thermal shield (400) being sandwiched between the flange mounting plate (100) and an end face of the furnace body (600).

3. The tail seal of claim 1, wherein a seal (500) is sandwiched between the tail flange (200) and the tail cap (300).

4. A furnace tail sealing device according to claim 3, characterized in that a side of the furnace tail flange (200) facing the tail cap (300) is provided with a mating groove (210), a side of the tail cap (300) facing the furnace tail flange (200) is provided with a mating protrusion (320), and the mating protrusion (320) is used for pressing the sealing element (500) against the mating groove (210).

5. The furnace tail sealing device according to any of claims 1-4, wherein the tail cap (300) has a plug protrusion (330), the gas pipe (310) is threaded through the plug protrusion (330), and the plug protrusion (330) is inserted into the furnace tube (610).

6. The furnace tail sealing device according to claim 5, wherein the tail cap (300) is further provided with a plugging groove (340) surrounding the plugging protrusion (330), and one end of the furnace tube (610) is plugged into the plugging groove (340).

7. The furnace tail sealing device according to any of claims 1-4, characterized in that a side of the furnace tail flange (200) facing the flange mounting plate (100) is provided with a first cooling flow channel (220), wherein a cooling liquid is led into the first cooling flow channel (220).

8. The furnace tail sealing device according to any of claims 1-4, wherein a second cooling flow channel (350) is defined on the tail cover (300), and a liquid inlet pipe and a liquid outlet pipe which are communicated with the second cooling flow channel (350) are arranged on the tail cover (300).

9. The furnace tail sealing device according to any one of claims 1-4, wherein a first mounting hole (360) is formed in the tail cover (300), a second mounting hole (230) corresponding to the first mounting hole (360) is formed in the furnace tail flange (200), a third mounting hole (110) corresponding to the second mounting hole (230) is formed in the flange mounting plate (100), and a connecting piece penetrates through the first mounting hole (360), the second mounting hole (230) and the third mounting hole (110) to fixedly connect the tail cover (300), the furnace tail flange (200) and the flange mounting plate (100).

10. A thermal furnace, characterized by comprising a furnace tail sealing device and a furnace body (600) according to any one of claims 1-9, wherein a furnace tube (610) is arranged in the furnace body (600), and the furnace tail sealing device is used for sealing the tail of the furnace body (600) and the tail of the furnace tube (610).