CN109423697B - Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace - Google Patents
Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace Download PDFInfo
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- CN109423697B CN109423697B CN201710740056.4A CN201710740056A CN109423697B CN 109423697 B CN109423697 B CN 109423697B CN 201710740056 A CN201710740056 A CN 201710740056A CN 109423697 B CN109423697 B CN 109423697B
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 66
- 238000007789 sealing Methods 0.000 claims abstract description 185
- 238000006243 chemical reaction Methods 0.000 claims abstract description 67
- 230000007246 mechanism Effects 0.000 claims abstract description 26
- 239000010453 quartz Substances 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 239000000110 cooling liquid Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 7
- 230000000712 assembly Effects 0.000 claims description 5
- 238000000429 assembly Methods 0.000 claims description 5
- 230000017525 heat dissipation Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 229920000742 Cotton Polymers 0.000 claims description 3
- 230000001502 supplementing effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 13
- 230000006872 improvement Effects 0.000 description 8
- 230000009471 action Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000005855 radiation Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
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- 239000007769 metal material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The invention discloses a furnace door device for a low-pressure diffusion furnace, which comprises a sealing extension pipe, an outer sealing furnace door and an inner sealing furnace door for isolating heat in a reaction pipe of the low-pressure diffusion furnace, wherein the sealing extension pipe is sleeved on the periphery of the reaction pipe, the inner end of the sealing extension pipe is in sealing connection with the reaction pipe, a sealing element is arranged between the outer end of the sealing extension pipe and the outer sealing furnace door, the outer sealing furnace door is provided with a door opening and closing driving mechanism, and an elastic connecting mechanism is arranged between the inner sealing furnace door and the outer sealing furnace door. The invention further discloses a low-pressure diffusion furnace, which comprises a reaction tube and the furnace door device for the low-pressure diffusion furnace. The invention has the advantages of reliable structure, good sealing performance, long service life and the like.
Description
Technical Field
The invention relates to semiconductor diffusion process equipment, in particular to a furnace door device for a low-pressure diffusion furnace and the low-pressure diffusion furnace.
Background
In the solar photovoltaic industry, a diffusion furnace is mainly used for doping a solar cell piece at a high temperature, and particularly, under the condition of an electric heating condition, elements of phosphorus and boron are diffused into a silicon chip to prepare a PN junction of the solar cell. The quality of the PN junction has a decisive influence on the performance of the solar cell.
The diffusion process of the diffusion furnace is completed in a quartz reaction tube, the quartz reaction tube is provided with a furnace door at a furnace opening, a furnace door driving mechanism enables the furnace door to be opened and closed, and the specific flow is as follows: opening a furnace door before the diffusion process, feeding a quartz boat loaded with silicon wafers into a quartz tube by a feeding mechanism (slurry feeding), withdrawing the slurry feeding, and closing a furnace door; then, the electric heating is carried out, and diffusion process gas is input from the tail part of the quartz reaction tube to start the diffusion process.
According to the pressure in the reaction tube, the existing diffusion process can be divided into normal pressure diffusion and low pressure diffusion, the pressure in the working cavity keeps a micro-positive pressure state during normal pressure diffusion, the requirement on the sealing property of the working cavity of the diffusion furnace is low, a reliable sealing structure is not needed, even a non-closed furnace tube structure can be directly adopted, and the technology is simple. However, as the junction depth becomes shallow continuously, the control of the doping uniformity of the silicon wafer by the normal pressure diffusion becomes worse, the preparation of high-quality shallow surface PN junction is difficult, and the technical requirements of high efficiency and low cost development of the solar cell are difficult to meet. With the continuous progress of the diffusion technology, researchers find that the uniformity of airflow in the diffusion furnace pipe can be improved by reducing the air pressure in the working cavity of the diffusion furnace, and turbulence is avoided, so that the diffusion uniformity is improved; in addition, after low-pressure diffusion is adopted, the absorption efficiency of chemicals in the diffusion process is greatly improved, the consumption of chemicals in the technological process can be greatly reduced, and the cost is saved. The low-pressure diffusion sets a brand new standard for the diffusion process of the crystalline silicon solar cell, and is a trend of the future diffusion process development.
The reaction tube is under negative pressure in the low-pressure diffusion process, which puts high requirements on the sealing performance of the furnace door, and if the sealing is poor, a series of problems exist: the low-pressure environment required by decompression and diffusion cannot be formed, and the requirement of the negative pressure condition of the process cannot be met; under the action of external atmospheric pressure, gas, impurities and the like outside the reaction tube can enter the reaction tube, so that the quality of PN junction preparation is seriously influenced, and products are scrapped; corrosive gas in the tube leaks out of the door, causing corrosion of the metal contents of the equipment outside the door. The traditional sealing furnace door adopts a quartz furnace door with a sealing ring structure, the temperature of a furnace tube is very high in the diffusion process, the sealing ring is easily melted and damaged due to overhigh temperature, the service life is short, and the sealing failure is very easily caused, so that how to realize reliable sealing in a high-temperature environment of a low-pressure diffusion process is one of key technologies of a low-pressure diffusion furnace.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the prior art and provides the furnace door device for the low-pressure diffusion furnace, which has the advantages of reliable structure, good sealing performance and long service life.
The invention further provides a low-pressure diffusion furnace comprising the furnace door device.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides a furnace gate device for low pressure diffusion furnace, is including sealed extension pipe, external seal furnace gate to and be used for isolated low pressure diffusion furnace's the intraductal thermal interior seal furnace gate of reaction, sealed extension pipe box is located the reaction tube periphery, sealed extension intraductal end with reaction tube sealing connection, the outer end with be equipped with the sealing member between the external seal furnace gate, the external seal furnace gate disposes switch door actuating mechanism, the internal seal furnace gate with be equipped with elastic connection mechanism between the external seal furnace gate.
As a further improvement of the above technical solution: elastic connection mechanism includes the elastic connection subassembly that circumference evenly arranged, each group elastic connection subassembly includes guide post, sliding sleeve, first elastic component and locating part, the guide post is arranged along the reaction tube axial, guide post one end with interior seal furnace gate fixed connection, the other end with locating part fixed connection, the sliding sleeve with first elastic component cover is located on the guide post, the external seal furnace gate with sliding sleeve fixed connection.
As a further improvement of the above technical solution: the door opening and closing driving mechanism comprises a driving arm, a furnace door support, a spherical bearing, a connecting shaft, a second elastic piece and a bearing seat, wherein the bearing seat is arranged on the outer sealing furnace door, the spherical bearing is arranged in the bearing seat, one end of the connecting shaft is arranged in the spherical bearing, the other end of the connecting shaft is connected with the furnace door support, the second elastic piece is sleeved on the connecting shaft, two ends of the second elastic piece are respectively abutted against the bearing seat and the furnace door support, and the driving arm is connected with the furnace door support.
As a further improvement of the above technical solution: a pressure compensation cavity is formed among the sealing extension pipe, the outer sealing furnace door and the inner sealing furnace door, and an air supplementing assembly is configured in the pressure compensation cavity.
As a further improvement of the above technical solution: the air supply assembly comprises an air inlet pipe, an exhaust pipe, a pressure controller and a differential pressure sensor, wherein the differential pressure sensor is used for detecting the differential pressure between the reaction pipe and the pressure compensation cavity, a flowmeter is arranged on the air inlet pipe, the input end of the pressure controller is connected with the differential pressure sensor, and the output end of the pressure controller is connected with the flowmeter.
As a further improvement of the above technical solution: the air supply assembly comprises an air inlet pipe, an exhaust pipe and a pressure difference sensor used for detecting the pressure difference between the reaction pipe and the pressure compensation cavity, and a manual adjusting valve used for adjusting the air input is arranged on the air inlet pipe.
As a further improvement of the above technical solution: the outer sealing furnace gate inboard is equipped with the seal groove, the sealing member is located in the seal groove, the outer sealing furnace gate disposes initiative heat radiation structure, initiative heat radiation structure include cooling blower and/or locate the outer sealing furnace gate outside and with the cooling cistern that the seal groove corresponds, lead to the coolant liquid in the cooling cistern.
As a further improvement of the above technical solution: the sealing extension pipe is a quartz pipe, the outer sealing furnace door is a metal furnace door, and the inner sealing furnace door is a quartz furnace door.
As a further improvement of the above technical solution: the inner sealing furnace door comprises a cylinder body, an end plate is arranged at one end, close to the reaction tube, of the cylinder body, a partition plate is arranged in the cylinder body, and a heat insulation cavity is formed between the end plate and the partition plate.
A low pressure diffusion furnace comprises a reaction tube and the furnace door device for the low pressure diffusion furnace.
Compared with the prior art, the invention has the advantages that: the invention discloses a furnace door device for a low-pressure diffusion furnace, which is provided with an outer sealing furnace door and an inner sealing furnace door with poor heat conduction performance, wherein a sealing extension pipe is sleeved on the periphery of a reaction pipe, the inner end of the sealing extension pipe is in sealing connection with the reaction pipe, a sealing element is arranged between the outer end of the sealing extension pipe and the outer sealing furnace door, so that an inner and outer two-stage sealing structure is formed, the inner sealing furnace door and the outer sealing furnace door are flexibly connected through an elastic connecting mechanism, the inner sealing furnace door and the reaction pipe, the outer sealing furnace door and the sealing extension pipe can be tightly attached, the structure is reliable; the inner sealing furnace door realizes sealing of the reaction tube of the low-pressure diffusion furnace, reduces heat radiation in the reaction tube to the outside of the reaction tube, effectively reduces the temperature of the sealing piece, avoids sealing failure caused by high temperature, and prolongs the service life of the sealing piece.
The low-pressure diffusion furnace disclosed by the invention has the advantages because the furnace door device is included.
Drawings
Fig. 1 is a schematic structural view of an oven door apparatus for a low pressure diffusion oven according to the present invention.
Fig. 2 is an enlarged schematic view of the elastic connecting member according to the present invention.
Fig. 3 is an enlarged schematic view of the switching door assembly of the present invention.
FIG. 4 is a schematic structural diagram of a first embodiment of the gas compensation assembly of the present invention.
FIG. 5 is a schematic view of a second embodiment of the gas compensation assembly of the present invention.
FIG. 6 is a schematic view of the structure of the low pressure diffusion furnace of the present invention.
The reference numerals in the figures denote: 1. sealing the extension tube; 2. the outer sealing of the furnace door; 21. a sealing groove; 22. a cooling liquid tank; 3. a reaction tube; 31. heat preservation cotton; 4. an inner sealing oven door; 41. a barrel; 42. an end plate; 43. a partition plate; 44. a thermally insulating cavity; 5. a seal member; 6. a door opening and closing drive mechanism; 61. a drive arm; 62. a furnace door support; 63. a spherical bearing; 64. a connecting shaft; 65. a second elastic member; 66. a bearing seat; 7. an elastic connection mechanism; 71. a guide post; 72. a sliding sleeve; 73. a first elastic member; 74. a limiting member; 8. a pressure compensation chamber; 81. an air inlet pipe; 82. an exhaust pipe; 83. a pressure control instrument; 84. a differential pressure sensor; 85. a flow meter; 86. a pressure gauge; 87. the valve is adjusted manually.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples of the specification.
Example one
Fig. 1 to 5 show an embodiment of the furnace door device for a low pressure diffusion furnace according to the present invention, the furnace door device for a low pressure diffusion furnace of the present embodiment includes a sealing extension tube 1, an outer sealing furnace door 2, and an inner sealing furnace door 4 for isolating heat in a reaction tube 3 of the low pressure diffusion furnace, the sealing extension tube 1 is sleeved on the periphery of the reaction tube 3, the inner end (left end in the drawing) of the sealing extension tube 1 is connected with the reaction tube 3 in a sealing manner, specifically, the inner end of the sealing extension tube 1 is tightly abutted to insulation cotton 31 on the periphery of the reaction tube 3, a sealing member 5 is arranged between the outer end (right end in the drawing) of the sealing extension tube 1 and the outer sealing furnace door 2, the sealing member 5 can be implemented by an O-type sealing ring, a sealing gum or a sealing strip, etc., in the present embodiment, the sealing member 5 is an O-type sealing ring, the outer sealing furnace door 2 is configured with a, an elastic connecting mechanism 7 is arranged between the inner sealing furnace door 4 and the outer sealing furnace door 2.
The furnace door device for the low-pressure diffusion furnace is provided with an outer sealing furnace door 2 and an inner sealing furnace door 4 with poor heat conduction performance, a sealing extension pipe 1 is sleeved on the periphery of a reaction pipe 3, the inner end of the sealing extension pipe 1 is hermetically connected with the reaction pipe 3, and a sealing piece 5 is arranged between the outer end of the sealing extension pipe and the outer sealing furnace door 2, so that an inner and outer two-stage sealing structure is formed, the inner sealing furnace door 4 is flexibly connected with the outer sealing furnace door 2 through an elastic connecting mechanism 7, the inner sealing furnace door 4 can be tightly attached to the reaction pipe 3 and the outer sealing furnace door 2 is tightly attached to the sealing extension pipe 1 under the action of a door opening and closing driving mechanism 6, the structure is reliable; the inner sealing furnace door 2 realizes sealing of the reaction tube 3 of the low-pressure diffusion furnace, reduces heat radiation in the reaction tube 3 to the outside of the reaction tube, effectively reduces the temperature of the sealing piece 5, avoids sealing failure caused by high temperature, and prolongs the service life of the furnace.
During specific work, the door opening and closing driving mechanism 6 drives the outer sealing furnace door 2 and the inner sealing furnace door 4 to move towards the direction of the pipe orifice of the reaction pipe 3, the inner sealing furnace door 4 firstly contacts with the inner sealing end face of the reaction pipe 3 (a quartz tube), then, under the action of the door opening and closing driving mechanism 6, the outer sealing furnace door 2 continues to move towards the direction of the pipe orifice of the reaction pipe 3, the elastic connecting mechanism 7 arranged between the outer sealing furnace door 2 and the inner sealing furnace door 4 is compressed, the inner sealing furnace door 4 is tightly attached to the end face of the reaction pipe 3 and used for isolating heat of the reaction pipe 3, and the heat in the reaction pipe 3 is reduced from radiating outside the reaction pipe 3. And finally, the outer sealing furnace door 2 is tightly attached to the end face of the sealing extension pipe 1 under the action of the door opening and closing driving mechanism 6, and the sealing of the pipe orifice of the sealing extension pipe 1 is realized through an O-shaped sealing ring.
As a further preferable technical solution, in this embodiment, the elastic connection mechanism 7 includes a plurality of sets of elastic connection assemblies uniformly arranged along the circumferential direction, each set of elastic connection assemblies includes a guide column 71, a sliding sleeve 72, a first elastic member 73, and a limiting member 74, the guide column 71 is arranged along the axial direction of the reaction tube 3, one end of the guide column 71 is fixedly connected with the inner sealing furnace door 4, the other end of the guide column 71 is fixedly connected with the limiting member 74, the sliding sleeve 72 and the first elastic member 73 are sleeved on the guide column 71, and the outer sealing furnace door 2 is fixedly connected with the sliding sleeve 72. The plurality of groups of elastic connecting assemblies are uniformly arranged along the circumferential direction, so that the possible deviation between the outer sealing furnace door 2 and the inner sealing furnace door 4 can be overcome, the sealing effect of the outer sealing furnace door and the inner sealing furnace door can be ensured, and the sealing performance of the furnace door can be improved. During specific work, under the action of the door opening and closing driving mechanism 6, the outer sealing furnace door 2 slides along the guide column 71 through the sliding sleeve 72, the first elastic piece 73 is compressed in the sliding process of the outer sealing furnace door and the sliding sleeve 72, and the first elastic piece 73 pushes the inner sealing furnace door 4 to move towards the orifice of the reaction tube 3. The first elastic element 73 is a spring, the diameter is preferably larger than that of the sliding sleeve 72, the sliding sleeve 72 is a T-shaped sleeve, the two ends of the guide post 71 are both provided with external threads, and correspondingly, the limiting element 74 is a limiting nut.
Furthermore, in this embodiment, the door opening and closing driving mechanism 6 includes a driving arm 61, a door support 62, a spherical bearing 63, a connecting shaft 64, a second elastic member 65 and a bearing seat 66, the bearing seat 66 is disposed on the outer sealing door 2, the spherical bearing 63 is mounted in the bearing seat 66, one end of the connecting shaft 64 is disposed in the spherical bearing 63, the other end of the connecting shaft is connected to the door support 62, the second elastic member 65 is sleeved on the connecting shaft 64, two ends of the second elastic member 65 respectively abut against the bearing seat 66 and the door support 62, and the driving arm 61 is connected to the door support 62. The door opening and closing driving mechanism 6 can realize elastic swing of the inner sealing furnace door 4 and the outer sealing furnace door 2 relative to the furnace door support 62 in a certain range, is favorable for overcoming possible deflection of the inner sealing furnace door 4, the outer sealing furnace door 2, the sealing extension pipe 1 and the reaction pipe 3, realizes integral self-adaptive adjustment of the furnace door, and further improves the sealing performance of the furnace door. The second elastic element 65 is a spring, the oven door support 62 is locked on the connecting shaft 64 through a fastener, and the inner end of the oven door support is arranged on the periphery of the bearing seat 66, so that the spherical bearing 63, the connecting shaft 64 and the second elastic element 65 are in a closed environment.
As a further preferable technical solution, in this embodiment, a pressure compensation chamber 8 is formed between the sealing extension pipe 1, the outer sealing furnace door 2 and the inner sealing furnace door 4, and the pressure compensation chamber 8 is configured with an air supplement component. Non-reaction gas such as nitrogen can be filled into the pressure compensation cavity 8, so that the pressure in the pressure compensation cavity 8 is slightly larger than the pressure in the quartz reaction tube 3, the corrosive substances in the reaction tube 3 can be effectively prevented from leaking out of the reaction tube 3, and the metal substances are prevented from being corroded.
In this embodiment, the gas supply assembly includes an inlet pipe 81, an outlet pipe 82, a pressure controller 83, and a differential pressure sensor 84 for detecting a differential pressure between the reaction tube 3 and the pressure compensation chamber 8, the inlet pipe 81 is provided with a flow meter 85, an input end of the pressure controller 83 is connected to the differential pressure sensor 84, and an output end of the pressure controller 83 is connected to the flow meter 85. The differential pressure sensor 84 detects the differential pressure value in the reaction tube 3 and the pressure compensation cavity 8 in real time, and performs air supplement operation on the pressure compensation cavity 8 through the pressure controller 83 and the flowmeter 85, so that the pressure of the pressure compensation cavity 8 is higher than the pressure in the reaction tube 3 by about 30Mbar, automatic feedback adjustment can be realized, and the method is suitable for occasions where the process gas flow in the reaction tube 3 changes in real time.
In other embodiments, for the case of a fixed process gas flow, the simple method shown in fig. 5 may also be adopted, that is, the gas supply assembly includes a gas inlet pipe 81, a gas outlet pipe 82, and a differential pressure sensor 84 for detecting the differential pressure between the reaction tube 3 and the pressure compensation chamber 8, and the gas inlet pipe 81 is provided with a manual regulating valve 87 for regulating the gas inlet amount. The operator may observe the differential pressure sensor 84 to adjust the opening of the manual control valve 87 so that the pressure in the pressure compensation chamber 8 becomes higher than the pressure inside the reaction tube 3 by about 30 Mbar.
As a further preferable technical solution, a sealing groove 21 is arranged on the inner side of the outer sealing furnace door 2, the sealing element 5 is arranged in the sealing groove 21, and the outer sealing furnace door 2 is configured with an active heat dissipation structure, in this embodiment, the active heat dissipation structure includes a cooling liquid tank 22 which is arranged on the outer side of the outer sealing furnace door 2 and corresponds to the sealing groove 21, and cooling liquid is introduced into the cooling liquid tank 22. Namely, the cooling liquid (such as cooling water) is introduced into the back surface of the sealing element 5 to actively cool the sealing element 5 and the outer sealing furnace door 2, so that the temperature is reduced, the sealing performance is ensured, and the service life is prolonged. In other embodiments, the sealing member 5 may be mounted on the seal extension pipe 1; the active heat dissipation structure can also adopt a cooling fan to actively cool, or adopt air cooling and liquid cooling at the same time.
In a further preferred embodiment, the sealing extension tube 1 is a quartz tube, the outer sealing furnace door 2 is a metal furnace door, and the inner sealing furnace door 4 is a quartz furnace door. The inner sealing furnace door 4 and the sealing extension pipe 1 are made of quartz materials, are high temperature resistant, stable in performance and poor in heat conduction performance, heat radiation in the reaction pipe 3 can be reduced to the outside, and under the action of the inner sealing furnace door 4 and the sealing extension pipe 1, the requirement on the high temperature resistance of the outer sealing furnace door 2 is reduced, so that the inner sealing furnace door 4 and the sealing extension pipe 1 can be made of metal materials, and the sealing performance is guaranteed, and meanwhile machining and manufacturing are facilitated.
Furthermore, in the present embodiment, the inner sealing oven door 4 includes a cylinder 41, an end plate 42 is disposed at one end of the cylinder 41 close to the reaction tube 3, a partition plate 43 is disposed in the cylinder 41, and an insulating cavity 44 is formed between the end plate 42 and the partition plate 43. The inner sealing furnace door 4 adopting the structure can further reduce the heat radiation in the reaction tube 3 to the outside, thereby further avoiding the sealing element 5 from losing efficacy under the action of high temperature, ensuring the sealing performance and prolonging the service life.
Example two
Fig. 6 shows an embodiment of the low-pressure diffusion furnace of the present invention, which includes the reaction tube 3 and the furnace door apparatus for the low-pressure diffusion furnace. The low-pressure diffusion furnace also has the advantages.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (8)
1. A furnace door device for a low-pressure diffusion furnace is characterized in that: comprises a sealing extension pipe (1), an external sealing furnace door (2) and an internal sealing furnace door (4) which is used for isolating heat in a reaction pipe (3) of a low-pressure diffusion furnace, wherein the reaction pipe (3) periphery is sleeved with the sealing extension pipe (1), the inner end of the sealing extension pipe (1) and heat insulation cotton (31) of the reaction pipe (3) periphery are tightly supported to realize sealing connection, a sealing member (5) is arranged between the outer end and the external sealing furnace door (2), the external sealing furnace door (2) is provided with a door opening and closing driving mechanism (6), an elastic connecting mechanism (7) is arranged between the internal sealing furnace door (4) and the external sealing furnace door (2), the elastic connecting mechanism (7) comprises a plurality of groups of elastic connecting assemblies which are uniformly arranged along the circumferential direction, and each group of elastic connecting assemblies comprises a guide column (71), a sliding sleeve (72), a first elastic member (73) and a limiting piece (74), the guide post (71) is axially arranged along the reaction tube (3), one end of the guide post (71) is fixedly connected with the inner sealing furnace door (4), the other end of the guide post is fixedly connected with the limiting part (74), the sliding sleeve (72) and the first elastic part (73) are sleeved on the guide post (71), the outer sealing furnace door (2) is fixedly connected with the sliding sleeve (72), the door opening and closing driving mechanism (6) comprises a driving arm (61), a furnace door support (62), a spherical bearing (63), a connecting shaft (64), a second elastic part (65) and a bearing seat (66), the bearing seat (66) is arranged on the outer sealing furnace door (2), the spherical bearing (63) is arranged in the bearing seat (66), one end of the connecting shaft (64) is arranged in the spherical bearing (63), and the other end of the connecting shaft is connected with the furnace door support (62), the second elastic piece (65) is sleeved on the connecting shaft (64), two ends of the second elastic piece (65) are respectively abutted against the bearing seat (66) and the furnace door support (62), and the driving arm (61) is connected with the furnace door support (62).
2. The oven door apparatus for a low pressure diffusion oven according to claim 1, wherein: a pressure compensation cavity (8) is formed among the sealing extension pipe (1), the outer sealing furnace door (2) and the inner sealing furnace door (4), and the pressure compensation cavity (8) is provided with an air supplementing assembly.
3. The oven door apparatus for a low pressure diffusion oven according to claim 2, wherein: the tonifying qi subassembly includes intake pipe (81), blast pipe (82), pressure control appearance (83) and is used for detecting reaction tube (3) with differential pressure sensor (84) of pressure difference between pressure compensation chamber (8), be equipped with flowmeter (85) on intake pipe (81), the input of pressure control appearance (83) with differential pressure sensor (84) link to each other, the output of pressure control appearance (83) with flowmeter (85) link to each other.
4. The oven door apparatus for a low pressure diffusion oven according to claim 2, wherein: the air supply assembly comprises an air inlet pipe (81), an exhaust pipe (82) and a differential pressure sensor (84) for detecting the pressure difference between the reaction pipe (3) and the pressure compensation cavity (8), and a manual regulating valve (87) for regulating the air inflow is arranged on the air inlet pipe (81).
5. The oven door apparatus for a low pressure diffusion oven according to claim 1, wherein: the inside of the outer sealing furnace door (2) is provided with a sealing groove (21), the sealing element (5) is arranged in the sealing groove (21), and the outer sealing furnace door (2)
An active heat dissipation structure is configured, the active heat dissipation structure comprises a cooling fan and/or a cooling liquid groove (22) which is arranged on the outer side of the outer sealing furnace door (2) and corresponds to the sealing groove (21), and cooling liquid is communicated into the cooling liquid groove (22).
6. The oven door apparatus for a low pressure diffusion oven according to claim 1, wherein: the sealing extension pipe (1) is a quartz pipe, the outer sealing furnace door (2) is a metal furnace door, and the inner sealing furnace door (4) is a quartz furnace door.
7. The oven door apparatus for a low pressure diffusion oven according to claim 6, wherein: the inner sealing furnace door (4) comprises a cylinder body (41), an end plate (42) is arranged at one end, close to the reaction tube (3), of the cylinder body (41), a partition plate (43) is arranged in the cylinder body (41), and a heat insulation cavity (44) is formed between the end plate (42) and the partition plate (43).
8. A low-pressure diffusion furnace comprising reaction tubes (3), characterized in that: further comprising the oven door apparatus for a low pressure diffusion oven of any one of claims 1 to 7.
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| CN201710740056.4A CN109423697B (en) | 2017-08-25 | 2017-08-25 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
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| CN201710740056.4A CN109423697B (en) | 2017-08-25 | 2017-08-25 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
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| CN109423697B true CN109423697B (en) | 2021-02-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110867399B (en) * | 2019-11-06 | 2023-11-10 | 徐州领测半导体科技有限公司 | Pressure control system suitable for negative pressure diffusion furnace |
| CN112542410A (en) * | 2020-12-22 | 2021-03-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Reaction furnace |
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| CN201532119U (en) * | 2009-09-25 | 2010-07-21 | 深圳市捷佳伟创微电子设备有限公司 | Automatic furnace door cover of diffusion furnace |
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| CN201532119U (en) * | 2009-09-25 | 2010-07-21 | 深圳市捷佳伟创微电子设备有限公司 | Automatic furnace door cover of diffusion furnace |
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