CN102851741A - Diffusion furnace and furnace door sealing device thereof - Google Patents

Diffusion furnace and furnace door sealing device thereof Download PDF

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Publication number
CN102851741A
CN102851741A CN2012100976202A CN201210097620A CN102851741A CN 102851741 A CN102851741 A CN 102851741A CN 2012100976202 A CN2012100976202 A CN 2012100976202A CN 201210097620 A CN201210097620 A CN 201210097620A CN 102851741 A CN102851741 A CN 102851741A
Authority
CN
China
Prior art keywords
fire door
furnace
closed unit
furnace door
revolving bar
Prior art date
Application number
CN2012100976202A
Other languages
Chinese (zh)
Inventor
王俊朝
李学文
刘兵吉
李军阳
Original Assignee
深圳市大族光伏科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市大族光伏科技股份有限公司 filed Critical 深圳市大族光伏科技股份有限公司
Priority to CN2012100976202A priority Critical patent/CN102851741A/en
Publication of CN102851741A publication Critical patent/CN102851741A/en

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Abstract

The invention discloses a diffusion furnace and a furnace door sealing device thereof. The furnace door sealing device comprises a furnace door movably connected with the port surface of a furnace pipe in a sealing manner, a support rotary rod, a movable joint for rotatably connecting the furnace door with one end of the support rotary rod, a switch mechanism connected with the middle end portion of the support rotary rod through a first driving rod for controlling the open and close of the furnace door, a horizontal movement mechanism connected with the other end portion of the support rotary rod through a second driving rod for ensuring the sealing of the furnace door, and a cylinder component connected with the horizontal movement mechanism for driving the horizontal movement mechanism to move in the horizontal direction. According to the invention, the leakage of the diffusion source can be prevented, thus the purposes of raising the sealing performance and saving the cost can be achieved; by the flexible connection between the furnace door and the furnace pipe, the damage caused by the hard collision between the furnace door and the furnace pipe is avoided; by individually controlling the furnace door sealing pressure, the collision between the furnace door and the furnace pipe is avoided; in addition, the installation requirement of the furnace door is reduced, thus the maintenance time of the furnace door sealing device is reduced.

Description

A kind of diffusion furnace and fire door closed unit thereof
Technical field
The present invention relates to the oven door sealing field, relate in particular to a kind of diffusion furnace and fire door closed unit thereof.
Background technology
The general employing contacted firmly when present tubular diffusion furnace door closed unit was airtight with boiler tube; Add that stopping property is not fine between upper furnace door and the boiler tube, drain-source forms metaphosphoric acid easily, causes the whole exhaust chest that is connected with boiler tube contaminated; In addition, tubular diffusion furnace door closed unit is closed when putting fire door, in order to reach better obturation effect, generally need the artificial structure of adjusting fire door, like this, also higher to the installation requirement of tubular diffusion furnace door closed unit, need simultaneously regularly to adjust fire door, and poor effect.
Summary of the invention
The technical problem to be solved in the present invention is, it is good and complicated defective is installed to have hard contact, an obturation effect for prior art, and a kind of have flexible contact, obturation effect is good and installation requirement is low diffusion furnace and fire door closed unit thereof are provided.
The technical solution adopted for the present invention to solve the technical problems is: construct a kind of fire door closed unit, it comprises:
With the movable airtight fire door that is connected of the port surface of boiler tube;
With the support revolving bar;
The turning joint that one end of described fire door and described support revolving bar is rotatably connected;
The medial end portions of described support revolving bar is connected with the on-off mechanism of the described stove door switch of control by the first driving stem;
The other end of described support revolving bar is connected with by the second driving stem and guarantees the airtight horicontal motion mechanism of described fire door; And
Described horicontal motion mechanism is connected with the cylinder assembly that drives its along continuous straight runs motion.
In fire door closed unit of the present invention, be provided be used to the regulating mechanism of regulating described fire door position between described turning joint and the described support revolving bar.
In fire door closed unit of the present invention, described the first driving stem is fixedly connected with by the first axle sleeve with the medial end portions of described support revolving bar.
In fire door closed unit of the present invention, described the second driving stem is fixedly connected with by the second axle sleeve with the other end of described support revolving bar.
In fire door closed unit of the present invention, described fire door is provided with a plurality of position transducers for detection of described fire door position.
In fire door closed unit of the present invention, described fire door vertically is fixed in described turning joint.
In fire door closed unit of the present invention, described turning joint is pillar stiffener.
In fire door closed unit of the present invention, described fire door is quartzy fire door.
In fire door closed unit of the present invention, described on-off mechanism also is used for locating described fire door position and cushions contacting between the port surface of described fire door and described boiler tube.
The present invention also constructs a kind of diffusion furnace, and described diffusion furnace comprises above-mentioned fire door closed unit.
Implement technical scheme of the present invention, have following beneficial effect: be connected movable airtight connection with boiler tube by fire door, can better prevent that diffuse source from leaking, thereby reach cost-effective purpose when improving airtight performance; Flexible contact between fire door and the boiler tube has avoided the hard collision between fire door and the boiler tube to cause damage parts; Control separately the airtight air pressure of fire door by on-off mechanism and horicontal motion mechanism, avoid fire door and boiler tube to collide; In addition, this technical scheme also can reduce the fire door installation requirement, thereby has reduced the maintenance time of fire door closed unit.
Description of drawings
The invention will be further described below in conjunction with drawings and Examples, in the accompanying drawing:
Fig. 1 is the front view of fire door closed unit of the present invention.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, is not intended to limit the present invention.
Should be noted that the diffusion furnace in the present embodiment comprises the fire door closed unit, boiler tube and the gas barrier that is connected and is used for the gas in the discharging boiler tube with this boiler tube do not repeat them here.
See also Fig. 1, Fig. 1 is the front view of fire door closed unit of the present invention, as shown in Figure 1, this fire door closed unit comprises: fire door 1, turning joint 2, regulating mechanism 3, support revolving bar 4, the first driving stem 5, on-off mechanism 6, the second driving stem 7, horicontal motion mechanism 8, cylinder assembly 9, the first axle sleeve 10, the second axle sleeve 11 and a plurality of position transducer (not shown).Lower mask body is introduced annexation and the effect of various piece:
Fire door 1 and movable airtight connection of the port surface of boiler tube (not shown) it should be noted that the port surface of fire door 1 and boiler tube has identical planeness, that is to say, the port surface of boiler tube can parallelly coincide during with fire door 1 airtight connection.In the present embodiment, described fire door 1 is quartzy fire door, and those skilled in the art should understand, quartz material has preferably insulation effect, thus should can bear high temperature by the quartz fire door, in other embodiment, also can adopt the stainless steel fire door, not repeat them here.
Turning joint 2 is rotatably connected fire door 1 by regulating mechanism 3 and an end of supporting revolving bar 4, in the present embodiment, fire door 1 vertically is fixed in turning joint 2, and such structure has certain degree of freedom, reach the purpose of flexible contact, and when fire door 1 was closed, fire door 1 at first partly contacted with boiler tube, then its driving by cylinder assembly 9 is slowly closed, until fully sealing can be avoided the direct collision of fire door 1 and boiler tube simultaneously, reach the purpose of security seal.
In other embodiment, described turning joint 1 is pillar stiffener, and those skilled in the art should understand, and repeats no more here.
Be provided with regulating mechanism 3 between described turning joint 1 and the described support revolving bar 4, this regulating mechanism 3 is used for regulating the position of fire door 1.Thereby make the center of the center that reaches fire door 1 and boiler tube roughly on same straight line.
The medial end portions of fixed link 4 is connected with on-off mechanism 6 by the first driving stem 5, and this on-off mechanism 6 is used for the opening and closing of control fire door 1; And be used for fire door 1 position, location and cushion contact oven between the port surface of fire door 1 and boiler tube, that is to say, realize independent trip switch mechanism 6 by one road air pressure.
The other end of supporting revolving bar 4 is connected with horicontal motion mechanism 8 by the second driving stem 7, and horicontal motion mechanism 8 is connected with the cylinder assembly 9 that drives its along continuous straight runs motion, and this horicontal motion mechanism 8 is used for guaranteeing the airtight of fire door 1; That is to say, by driving cylinder assembly 9 control fire doors 1 airtight needed pressure, to guarantee the airtight of fire door 1, realize that one road air pressure controls separately, in addition, but move steadily by driving the 9 movement toward economizing times of this cylinder assembly and guaranteeing, thereby avoid fire door 1 to collide the port surface of boiler tube.
In addition, the first driving stem 5 is fixedly connected with by the first axle sleeve 10 with the medial end portions that supports revolving bar 4; The second driving stem 7 is fixedly connected with by the second axle sleeve 11 with the other end of supporting revolving bar 4.
Fire door 1 is provided with a plurality of position transducers, and described position transducer is for detection of the position of fire door 1, to guarantee fire door 1 safety switch.
Compared to prior art, be connected movable airtight connection with boiler tube by fire door, can better prevent that diffuse source from leaking, thereby reach cost-effective purpose when improving airtight performance; Flexible contact between fire door and the boiler tube has avoided the hard collision between fire door and the boiler tube to cause damage parts; Control separately the airtight air pressure of fire door by on-off mechanism and horicontal motion mechanism, avoid fire door and boiler tube to collide; In addition, this technical scheme also can reduce the fire door installation requirement, thereby has reduced the maintenance time of fire door closed unit.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., all should be included within the claim scope of the present invention.

Claims (10)

1. fire door closed unit is characterized in that it comprises:
With the movable airtight fire door that is connected of the port surface of boiler tube;
With the support revolving bar;
The turning joint that one end of described fire door and described support revolving bar is rotatably connected;
The medial end portions of described support revolving bar is connected with the on-off mechanism of the described stove door switch of control by the first driving stem;
The other end of described support revolving bar is connected with by the second driving stem and guarantees the airtight horicontal motion mechanism of described fire door; And
Described horicontal motion mechanism is connected with the cylinder assembly that drives its along continuous straight runs motion.
2. fire door closed unit according to claim 1 is characterized in that, is provided be used to the regulating mechanism of regulating described fire door position between described turning joint and the described support revolving bar.
3. fire door closed unit according to claim 2 is characterized in that, described the first driving stem is fixedly connected with by the first axle sleeve with the medial end portions of described support revolving bar.
4. fire door closed unit according to claim 3 is characterized in that, described the second driving stem is fixedly connected with by the second axle sleeve with the other end of described support revolving bar.
5. fire door closed unit according to claim 4 is characterized in that, described fire door is provided with a plurality of position transducers for detection of described fire door position.
6. fire door closed unit according to claim 5 is characterized in that, described fire door vertically is fixed in described turning joint.
7. fire door closed unit according to claim 6 is characterized in that, described turning joint is pillar stiffener.
8. fire door closed unit according to claim 6 is characterized in that, described fire door is quartzy fire door.
9. fire door closed unit according to claim 1 is characterized in that, described on-off mechanism also is used for locating described fire door position and cushions contacting between the port surface of described fire door and described boiler tube.
10. a diffusion furnace is characterized in that, described diffusion furnace comprises the claims 1 to 9 each described fire door closed unit.
CN2012100976202A 2012-04-05 2012-04-05 Diffusion furnace and furnace door sealing device thereof CN102851741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012100976202A CN102851741A (en) 2012-04-05 2012-04-05 Diffusion furnace and furnace door sealing device thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012100976202A CN102851741A (en) 2012-04-05 2012-04-05 Diffusion furnace and furnace door sealing device thereof

Publications (1)

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CN102851741A true CN102851741A (en) 2013-01-02

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103510159A (en) * 2013-10-25 2014-01-15 乐山新天源太阳能科技有限公司 Diffusion furnace for solar cell silicon chips
CN103556228A (en) * 2013-10-25 2014-02-05 乐山新天源太阳能科技有限公司 Silicon wafer diffusion furnace for solar cell
CN105908261A (en) * 2016-06-01 2016-08-31 温州隆润科技有限公司 Efficient diffusion furnace for silicon wafers
CN106048731A (en) * 2016-08-12 2016-10-26 深圳市捷佳伟创新能源装备股份有限公司 Low-pressure diffusion furnace door sealing device
CN106546101A (en) * 2016-10-27 2017-03-29 湖南红太阳光电科技有限公司 A kind of diffusion furnace stove gate device
CN109423697A (en) * 2017-08-25 2019-03-05 中国电子科技集团公司第四十八研究所 A kind of stove gate device and low pressure diffusion furnace for low pressure diffusion furnace

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JPH056882A (en) * 1991-06-27 1993-01-14 Toyo A Tec Kk Method and apparatus for peeling - cleaning slice base of wafer, and processing conveyor for wafer
JPH09232242A (en) * 1996-02-27 1997-09-05 Miyazaki Oki Electric Co Ltd Flexible shutter for quartz tube of diffusion furnace
CN201016565Y (en) * 2007-01-10 2008-02-06 中国电子科技集团公司第四十八研究所 High temperature furnace gate automatic closure construction device for preparing PN junction
CN201440038U (en) * 2009-06-30 2010-04-21 北京七星华创电子股份有限公司 Diffusion furnace door sealing structure
CN201532119U (en) * 2009-09-25 2010-07-21 深圳市捷佳伟创微电子设备有限公司 Automatic furnace door cover of diffusion furnace
CN201723527U (en) * 2010-05-18 2011-01-26 无锡尚德太阳能电力有限公司 Air cylinder emergency-stop control system and oxidation furnace door control system with the same
CN201909539U (en) * 2010-12-24 2011-07-27 株洲众欣科技发展有限责任公司 Furnace door structure of diffusion furnace
CN202002460U (en) * 2010-10-28 2011-10-05 中国石油集团渤海钻探工程有限公司 Workroom door for anti-explosion hot air drying case
US20110249960A1 (en) * 2011-01-28 2011-10-13 Poole Ventura, Inc. Heat Source Door For A Thermal Diffusion Chamber

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056882A (en) * 1991-06-27 1993-01-14 Toyo A Tec Kk Method and apparatus for peeling - cleaning slice base of wafer, and processing conveyor for wafer
JPH09232242A (en) * 1996-02-27 1997-09-05 Miyazaki Oki Electric Co Ltd Flexible shutter for quartz tube of diffusion furnace
CN201016565Y (en) * 2007-01-10 2008-02-06 中国电子科技集团公司第四十八研究所 High temperature furnace gate automatic closure construction device for preparing PN junction
CN201440038U (en) * 2009-06-30 2010-04-21 北京七星华创电子股份有限公司 Diffusion furnace door sealing structure
CN201532119U (en) * 2009-09-25 2010-07-21 深圳市捷佳伟创微电子设备有限公司 Automatic furnace door cover of diffusion furnace
CN201723527U (en) * 2010-05-18 2011-01-26 无锡尚德太阳能电力有限公司 Air cylinder emergency-stop control system and oxidation furnace door control system with the same
CN202002460U (en) * 2010-10-28 2011-10-05 中国石油集团渤海钻探工程有限公司 Workroom door for anti-explosion hot air drying case
CN201909539U (en) * 2010-12-24 2011-07-27 株洲众欣科技发展有限责任公司 Furnace door structure of diffusion furnace
US20110249960A1 (en) * 2011-01-28 2011-10-13 Poole Ventura, Inc. Heat Source Door For A Thermal Diffusion Chamber

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103510159A (en) * 2013-10-25 2014-01-15 乐山新天源太阳能科技有限公司 Diffusion furnace for solar cell silicon chips
CN103556228A (en) * 2013-10-25 2014-02-05 乐山新天源太阳能科技有限公司 Silicon wafer diffusion furnace for solar cell
CN103556228B (en) * 2013-10-25 2016-01-06 乐山新天源太阳能科技有限公司 Solar energy battery adopted silicon chip diffusion furnace
CN103510159B (en) * 2013-10-25 2016-02-10 乐山新天源太阳能科技有限公司 Solar energy battery adopted silicon chip diffusion furnace
CN105908261A (en) * 2016-06-01 2016-08-31 温州隆润科技有限公司 Efficient diffusion furnace for silicon wafers
CN106048731A (en) * 2016-08-12 2016-10-26 深圳市捷佳伟创新能源装备股份有限公司 Low-pressure diffusion furnace door sealing device
CN106048731B (en) * 2016-08-12 2019-02-19 深圳市捷佳伟创新能源装备股份有限公司 A kind of low pressure diffusion furnace furnace door sealing device
CN106546101A (en) * 2016-10-27 2017-03-29 湖南红太阳光电科技有限公司 A kind of diffusion furnace stove gate device
CN109423697A (en) * 2017-08-25 2019-03-05 中国电子科技集团公司第四十八研究所 A kind of stove gate device and low pressure diffusion furnace for low pressure diffusion furnace
CN109423697B (en) * 2017-08-25 2021-02-23 中国电子科技集团公司第四十八研究所 Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace

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