CN201532119U - Automatic furnace door cover of diffusion furnace - Google Patents
Automatic furnace door cover of diffusion furnace Download PDFInfo
- Publication number
- CN201532119U CN201532119U CN2009202053031U CN200920205303U CN201532119U CN 201532119 U CN201532119 U CN 201532119U CN 2009202053031 U CN2009202053031 U CN 2009202053031U CN 200920205303 U CN200920205303 U CN 200920205303U CN 201532119 U CN201532119 U CN 201532119U
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- face plate
- stove face
- cylinder
- automatic
- furnace
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Abstract
The utility model discloses an automatic furnace door cover of a diffusion furnace, which is applied in diffusion furnaces of semiconductor doping technique and comprises a tubular hearth. A furnace door cabinet is connected to a furnace mouth end of the hearth, a circular furnace door cover matched with a furnace mouth is connected with inside of the furnace door cabinet via a moving device, and the moving device is formed by a furnace door cover planar deflection driving mechanism and a furnace door cover axial movement driving mechanism. The automatic furnace door cover is capable of realizing application of closed pipe and soft landing technique in diffusion furnaces, increasing temperature control precision, ensuring gas field distribution and reducing energy consumption.
Description
Technical field
The utility model relates to a kind of diffusion furnace, relates in particular to a kind of automatic stove face plate of diffusion furnace.
Background technology
Diffusion furnace is a kind of semiconductor manufacturing equipment, generally includes pipe shape burner hearth, and the stove internal cavity is boiler tube, opening part is a fire door.It is mainly used in doping process, and in crystal silicon solar energy battery was produced, diffusion furnace was unique implantation equipment, is in the manufacturing process generation of PN junction, the raising of conversion efficiency to be played conclusive key equipment especially.The requirement of diffusion technique is a temperature stabilization in the reaction tube, steady air current, but traditional diffusion furnace, owing to do not implement closed-tube technique, external environment condition can have influence on temperature and the atmosphere in the stove.So, in the use of equipment, exist some shortcomings, can have influence on the diffusion technique quality.There is following defective in prior art:
1, existing diffusion furnace, temperature instability in the stove is subjected to external action big.
2, existing diffusion furnace, gas field instability is subjected to external action big in the stove.
3, existing diffusion furnace, gas, source material consumption are big, and heating power is big, is unfavorable for energy-conservation, consumption reduction, has increased use cost.
Summary of the invention
In order to address the above problem, the utility model provides a kind of automatic stove face plate of diffusion furnace, uses the technology of stopped pipe, soft landing by being equipped with automatic stove face plate in diffusion furnace, promotes accuracy of temperature control, guarantees the gas field distribution, and reduce energy consumption.
For solving the problems of the technologies described above, the utility model adopts following technical scheme: a kind of automatic stove face plate of diffusion furnace comprises a pipe shape burner hearth; The fire door end of described burner hearth is connected with a fire door cabinet, is connected with a round kiln door closure that mates with fire door by mobile device in the fire door cabinet; Described mobile device is made up of stove face plate plane deflection driven mechanism and stove face plate axially-movable driving mechanism.
Described stove face plate plane deflection driven mechanism comprises a universal bearing that is connected the stove face plate circle centre position, universal bearing is connected with a bent plate end, the bent plate other end is by a rotating shaft and a shaft seat hinged securement, also be provided with the connecting axle with a rod hinge connection at bent plate middle part, the connecting rod other end links to each other with the moving cylinder that drives of deflection transhipment; The moving cylinder that drives of shaft seat end and deflection transhipment all is fixed on the base plate; Described stove face plate axially-movable driving mechanism comprises the circular line slideway auxiliary of pair of parallel, two line slideway auxiliaries are fixed on fire door cashier's office in a shop by two mounting seat of end, described base plate kink is on two line slideway auxiliaries, also be fixed with a straight line in the middle of two line slideway auxiliaries and drive cylinder, the telescopic shaft of cylinder connects base plate.
Described shaft seat is a strip flat board that is parallel to connecting rod.
The moving driving of described deflection transhipment cylinder is a straight line mobile model cylinder.When the linear drives cylinder stretches, with drive stove face plate plane deflection driven mechanism do be parallel to the burner hearth axle center to rectilinear motion.
The telescopic shaft of described line slideway auxiliary and linear drives cylinder all with the axis parallel of burner hearth, connecting rod is vertical with the axle center of burner hearth.
The utility model cooperates stove face plate by be made of mobile device control stove face plate plane deflection driven mechanism and stove face plate axially-movable driving mechanism with fire door, use the diffusion furnace of correlation technique and device, can realize the stopped pipe diffusion, improve the gentle field distribution of temperature control environment in the stove; Use correlation technique and device, can pull off a soft landing, minimizing SiC starches the influence to gentle of temperature control, the diffusion that the impurity that minimizing SiC slurry is brought into causes, and the wash number that minimizing SiC starches has reduced energy consumption; And run into fortuitous events such as unexpected power failure, mobile device stops action, and fire door can damage product.
Description of drawings
Below in conjunction with drawings and Examples the utility model is described further:
Fig. 1 is the structural representation of the utility model mobile device and stove face plate;
Fig. 2 is that the utility model is at the structural representation that uses closed state;
Fig. 3 is that the utility model is at the structural representation that uses open mode
The specific embodiment
As the automatic stove face plate of Fig. 1, Fig. 2 and a kind of diffusion furnace shown in Figure 3, the diffusing stove full name of using this technology is " a tubular type high temperature dispersing furnace ", and its burner hearth is a round tube shape structure, and the stove internal cavity is boiler tube, opening part is a fire door.The utility model comprises the stove face plate 1 that is installed in the fire door cabinet 12, universal bearing 2, stove face plate plane deflection driven mechanism, the axially-movable driving mechanism of stove face plate and control software thereof.Stove face plate 1 is exactly a cover plate that is complementary with fire door, and this piece cover plate is contained in one and is with on the flexible universal bearing 2, and this universal bearing 2 is in the home position of stove face plate 1, its elastic characteristic can so that fire door can be not crooked and reliably cover fire door.The rotating shaft 6 that stove face plate plane deflection driven mechanism includes the bent plate 3 that links to each other with universal bearing 2, hinged securement bent plate lower end and shaft seat, the connecting axle 4 that links to each other with bent plate 3 middle parts and be hinged on connecting axle 4 on connecting rod 5, the moving cylinder 9 that drives of deflection transhipment that links to each other with connecting rod 5, the deflection transhipment is moving, and to drive cylinder 9 are straight line mobile model cylinders.The base plate 10 (the moving cylinder 9 that drives of shaft seat end and deflection transhipment all is fixed on the base plate 10) of sleeve mechanism is installed.When the moving driving of deflection transhipment cylinder 9 stretches, connecting rod 5 will spur bent plate 3 middle parts.The bottom of bent plate 3 is fixedly mounted on the shaft seat on the base plate, so the result of driving makes bent plate 3 rotate around the rotating shaft 6 of bent plate lower end.Thereby move along the camber line that with rotating shaft 6 is the center of circle with universal bearing 2 and cover plate the upper end that drives bent plate 3.When deflection transhipment is moving when driving cylinder 9 withdrawals, stove face plate 1 moves to the position that gets out of the way by position, the axle center of boiler tube (boiler tube and burner hearth 13 axis coinciding); When the moving driving of deflection transhipment cylinder 9 stretched out, stove face plate 1 was moved to the shaft core position of boiler tube by the position that gets out of the way.The axially-movable driving mechanism of stove face plate 1 mainly is made up of circular line slideway auxiliary 8, the linear drives cylinder 11 of mounting seat, pair of parallel.The circular line slideway auxiliary 8 and the boiler tube axis parallel of that pair of parallel; The telescopic displacement track of linear drives cylinder 11 also with the boiler tube axis parallel.The telescopic shaft of cylinder is mounted on the base plate 10 of stove face plate plane deflection driven mechanism, when linear drives cylinder 11 stretches, will do the axial rectilinear motion of boiler tube with the base plate 10 that stove face plate plane deflection driven mechanism is installed.Stove face plate 1 is starched the open position that allows that is in the next door in the process of sending quartz boat at SiC, put quartz boat at the SiC slurry and withdrawed from rear screw shaft, the moving cylinder 9 that drives of deflection transhipment stretches out, connecting rod 5 promotes bent plate 3 middle parts, thereby the upper end of drive bent plate 3 moves to the shaft core position of boiler tube along the camber line that with the rotating shaft is the center of circle together with universal bearing 2 and stove face plate 1.Linear drives cylinder 11 does to regain displacements then, does and boiler tube axle center moving horizontally in the same way with stove face plate plane deflection driven mechanism and stove face plate 1, thereby covers fire door.After diffusion technique finished, linear drives cylinder 11 did to stretch out displacement, did and boiler tube axle center moving horizontally in the same way with stove face plate plane deflection driven mechanism and stove face plate 1, thereby opened fire door.Deflection is transported the moving cylinder 9 that drives and is regained, connecting rod 5 pulling bent plates 3 middle parts, thus the upper end of drive bent plate 3 moves to the open position that allows on next door along the camber line that with rotating shaft 6 is the center of circle together with universal bearing 2 and stove face plate 1.The SiC slurry can enter boiler tube and get quartz boat.
Whole process is controlled automatically, and has defencive functions such as the position is chain, interlocking.With reference to Fig. 2, Fig. 3,1. when stove face plate was in closed condition, the rotating part of stove face plate had the trend that clockwise rotates under the effect of gravity, and as no external force effect, stove face plate can not rotate counterclockwise with rotating shaft 6.2. when stove face plate is in open mode, structural design guarantees that the center of gravity of the rotating part of stove face plate crossed peak, and under the effect of gravity, the rotating part of stove face plate has the trend that rotates counterclockwise, as not having the external force effect, stove face plate can not clockwise rotate with rotating shaft 6.3. the control of stove face plate is realized by PLC control pneumatic control valve, the design of electric control loop and the selection of pneumatic control valve are guaranteed when having a power failure, the rod chamber of all cylinders and the compressed air of rodless cavity are closed simultaneously, and promptly cylinder stops any action at once when having a power failure.More than 3 guarantee this patent equipment when running into fortuitous events such as unexpected power failure, stove face plate does not have any action.Even stove face plate in the running that opens or closes, runs into when having a power failure just, stove face plate also can stop action at once, rests on the position when having a power failure, and can not break other thing (silicon chip, quartz boat, SiC slurry etc.).
Claims (5)
1. the automatic stove face plate of a diffusion furnace, comprise a pipe shape burner hearth (13), it is characterized in that: the fire door end of described burner hearth (13) is connected with a fire door cabinet (12), is connected with a round kiln door closure (1) that mates with fire door by mobile device in the fire door cabinet (12); Described mobile device is made up of stove face plate plane deflection driven mechanism and stove face plate axially-movable driving mechanism.
2. the automatic stove face plate of diffusion furnace according to claim 1, it is characterized in that: described stove face plate plane deflection driven mechanism comprises a universal bearing (2) that is connected stove face plate (1) circle centre position, universal bearing (2) is connected with a bent plate (3) end, the bent plate other end is by a rotating shaft (6) and a shaft seat hinged securement, also be provided with the connecting axle (4) hinged with a connecting rod (5) at bent plate (3) middle part, connecting rod (5) other end links to each other with the moving cylinder (9) that drives of deflection transhipment; The moving cylinder (9) that drives of shaft seat end and deflection transhipment all is fixed on the base plate (10); Described stove face plate axially-movable driving mechanism comprises the circular line slideway auxiliary (8) of pair of parallel, two line slideway auxiliaries are fixed on the fire door cabinet (12) by two mounting seat (7) of end, described base plate (10) kink is on two line slideway auxiliaries (8), also be fixed with a straight line in the middle of two line slideway auxiliaries (8) and drive cylinder (11), the telescopic shaft of cylinder connects base plate (10).
3. the automatic stove face plate of diffusion furnace according to claim 2 is characterized in that: described shaft seat is for being parallel to a strip flat board of connecting rod (5).
4. the automatic stove face plate of diffusion furnace according to claim 2 is characterized in that: the moving cylinder (9) that drives of described deflection transhipment is straight line mobile model cylinder.
5. the automatic stove face plate of diffusion furnace according to claim 2 is characterized in that: the telescopic shaft of described line slideway auxiliary (8) and linear drives cylinder (11) all with the axis parallel of burner hearth (13), connecting rod (5) is vertical with the axle center of burner hearth (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202053031U CN201532119U (en) | 2009-09-25 | 2009-09-25 | Automatic furnace door cover of diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202053031U CN201532119U (en) | 2009-09-25 | 2009-09-25 | Automatic furnace door cover of diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201532119U true CN201532119U (en) | 2010-07-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202053031U Expired - Lifetime CN201532119U (en) | 2009-09-25 | 2009-09-25 | Automatic furnace door cover of diffusion furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN201532119U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102767958A (en) * | 2012-07-16 | 2012-11-07 | 上海大学 | Automatic furnace door of diffusion furnace |
| CN102851741A (en) * | 2012-04-05 | 2013-01-02 | 深圳市大族光伏科技股份有限公司 | Diffusion furnace and furnace door sealing device thereof |
| CN105908261A (en) * | 2016-06-01 | 2016-08-31 | 温州隆润科技有限公司 | Efficient diffusion furnace for silicon wafers |
| CN106048731A (en) * | 2016-08-12 | 2016-10-26 | 深圳市捷佳伟创新能源装备股份有限公司 | Low-pressure diffusion furnace door sealing device |
| CN106546101A (en) * | 2016-10-27 | 2017-03-29 | 湖南红太阳光电科技有限公司 | A kind of diffusion furnace stove gate device |
| CN109423697A (en) * | 2017-08-25 | 2019-03-05 | 中国电子科技集团公司第四十八研究所 | A kind of stove gate device and low pressure diffusion furnace for low pressure diffusion furnace |
| CN112165998A (en) * | 2018-05-31 | 2021-01-01 | 亚进产业株式会社 | Multichamber type heater with door moving portion |
| WO2022160546A1 (en) * | 2021-02-01 | 2022-08-04 | 中国电子科技集团公司第四十八研究所 | Vertical oxidation furnace door swinging apparatus and vertical oxidation furnace |
-
2009
- 2009-09-25 CN CN2009202053031U patent/CN201532119U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851741A (en) * | 2012-04-05 | 2013-01-02 | 深圳市大族光伏科技股份有限公司 | Diffusion furnace and furnace door sealing device thereof |
| CN102767958A (en) * | 2012-07-16 | 2012-11-07 | 上海大学 | Automatic furnace door of diffusion furnace |
| CN102767958B (en) * | 2012-07-16 | 2014-12-03 | 上海大学 | Automatic furnace door of diffusion furnace |
| CN105908261A (en) * | 2016-06-01 | 2016-08-31 | 温州隆润科技有限公司 | Efficient diffusion furnace for silicon wafers |
| CN106048731A (en) * | 2016-08-12 | 2016-10-26 | 深圳市捷佳伟创新能源装备股份有限公司 | Low-pressure diffusion furnace door sealing device |
| CN106048731B (en) * | 2016-08-12 | 2019-02-19 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of low pressure diffusion furnace furnace door sealing device |
| CN106546101A (en) * | 2016-10-27 | 2017-03-29 | 湖南红太阳光电科技有限公司 | A kind of diffusion furnace stove gate device |
| CN109423697A (en) * | 2017-08-25 | 2019-03-05 | 中国电子科技集团公司第四十八研究所 | A kind of stove gate device and low pressure diffusion furnace for low pressure diffusion furnace |
| CN109423697B (en) * | 2017-08-25 | 2021-02-23 | 中国电子科技集团公司第四十八研究所 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
| CN112165998A (en) * | 2018-05-31 | 2021-01-01 | 亚进产业株式会社 | Multichamber type heater with door moving portion |
| WO2022160546A1 (en) * | 2021-02-01 | 2022-08-04 | 中国电子科技集团公司第四十八研究所 | Vertical oxidation furnace door swinging apparatus and vertical oxidation furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN S.C NEW ENERGY TECHNOLOGY CORPORATION Free format text: FORMER NAME: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPMENT CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 518000, Guangdong, Shenzhen province Baoan District manhole Street oyster four Lin slope pit Industrial Zone A4 and No. A6 workshop Patentee after: Shenzhen S. C New Energy Equipment Co., Ltd. Address before: 518103 A4 building, oyster four woods slope pit Industrial Zone, Baoan District, Guangdong, Shenzhen Patentee before: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20100721 |
|
| CX01 | Expiry of patent term |