WO2022160546A1 - Vertical oxidation furnace door swinging apparatus and vertical oxidation furnace - Google Patents

Vertical oxidation furnace door swinging apparatus and vertical oxidation furnace Download PDF

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Publication number
WO2022160546A1
WO2022160546A1 PCT/CN2021/098528 CN2021098528W WO2022160546A1 WO 2022160546 A1 WO2022160546 A1 WO 2022160546A1 CN 2021098528 W CN2021098528 W CN 2021098528W WO 2022160546 A1 WO2022160546 A1 WO 2022160546A1
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WO
WIPO (PCT)
Prior art keywords
furnace door
furnace
lifting
vertical oxidation
rotating
Prior art date
Application number
PCT/CN2021/098528
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French (fr)
Chinese (zh)
Inventor
曾裕民
邓斌
王学仕
Original Assignee
中国电子科技集团公司第四十八研究所
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Publication of WO2022160546A1 publication Critical patent/WO2022160546A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F27D1/1858—Doors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/005—Oxydation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
    • F27M2003/00—Type of treatment of the charge
    • F27M2003/16—Treatment involving a chemical reaction
    • F27M2003/167—Oxydation

Definitions

  • the invention relates to wafer processing equipment in the semiconductor industry, in particular to a swing furnace door device of a vertical oxidation furnace and a vertical oxidation furnace.
  • Oxidation diffusion equipment can be used for oxidation, diffusion and annealing processes in the manufacturing process of integrated circuits, and is one of the most important process equipment on the integrated circuit production line.
  • the traditional horizontal oxidation furnace is difficult to meet the technical requirements of control accuracy, temperature uniformity and automation for silicon wafers of 8 inches and above in the process, while the vertical oxidation furnace can solve these problems well.
  • the quartz boat will carry the silicon wafers out of the process furnace. Due to the large size and high process temperature, the process of loading and unloading the quartz boat is not conducive to the heat preservation of the furnace, and the heat dissipation in the furnace will also affect other parts in the cabinet, which is easy to cause damage.
  • the technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and to provide a swing door device of a vertical oxidation furnace which is convenient to use, is conducive to furnace heat preservation, and prevents heat dissipation in the furnace from affecting other components.
  • the present invention further provides a vertical oxidation furnace comprising the above-mentioned swing furnace door device.
  • the present invention adopts the following technical solutions:
  • a vertical oxidation furnace swinging furnace door device includes a furnace door assembly and a mounting seat, the mounting seat is provided with a lifting mechanism, the lifting mechanism is provided with a rotating mechanism, and the axis of the rotating mechanism is arranged vertically , a swing arm assembly is connected between the furnace door assembly and the rotating mechanism.
  • the lift mechanism includes a lift drive member, a lift guide member, and a lift base connected to the lift drive member, and the rotating mechanism is provided on the lift base; preferably, the The lifting base is equipped with an upper limit piece and a lower limit piece with adjustable positions.
  • the lift driving member is a lift cylinder
  • the piston rod of the lift cylinder is fixedly connected to the mounting seat
  • the cylinder body of the lift cylinder is fixedly connected to the lift base
  • the lift guide The component is a guide shaft arranged on the mounting seat
  • the lift base is provided with a linear bearing matched with the guide shaft.
  • the rotating mechanism includes a mounting shaft whose axis is vertically arranged, a rotating seat sleeved on the mounting shaft, and a rotating drive assembly connected with the rotating seat, the mounting shaft and the rotating drive
  • the assembly is arranged on the lifting mechanism, and the swing arm assembly is fixedly connected with the rotating base; preferably, an in-position detection switch is provided at the initial position and the final position of the rotating base.
  • thrust ball bearings are arranged between the two ends of the installation shaft and the rotating seat, and a deep groove ball bearing is arranged between the two thrust ball bearings.
  • the rotary drive assembly includes a rotary cylinder, the rotary seat is provided with a connecting plate, the cylinder body of the rotary cylinder is hinged with the lifting mechanism, and the piston rod of the rotary cylinder is hinged with the connecting plate .
  • the swing arm assembly includes a first connecting arm connected to the furnace door assembly, a second connecting arm connected to the rotating mechanism, a horizontally arranged maintenance shaft and a fastener, the first connecting arm The arm and the second connecting arm are hinged through the maintenance shaft and fixedly connected through the fastener.
  • the furnace door assembly includes a water-cooling flange, the water-cooling flange is connected with a water delivery hard pipe, and the water delivery hard pipe is connected with a water delivery hose.
  • the furnace door assembly includes a water-cooled flange, a quartz heat insulation plate located on the upper side of the water-cooled flange, and a furnace door base located on the lower side of the water-cooled flange, and the water-cooled flange is connected to the An elastic buffer member is arranged between the furnace door bases, and the furnace door base is connected with the swing arm assembly.
  • a vertical oxidation furnace includes a frame, and also includes the above-mentioned vertical oxidation furnace swing door device, and the mounting seat is arranged on the frame.
  • the vertical oxidation furnace swing door device disclosed in the present invention is provided with a lifting mechanism on the mounting seat, and the lifting mechanism is provided with a rotating mechanism whose axis is arranged vertically.
  • the rotating mechanism is connected to the furnace door assembly through the swing arm assembly.
  • the lifting mechanism can drive the rotating mechanism, the swing arm assembly and the furnace door assembly to lift as a whole.
  • the swing arm assembly can drive the furnace door assembly to swing in the horizontal plane.
  • the furnace door assembly swings to the side of the furnace mouth to avoid the quartz boat, which is convenient to use. Align the mouth and press the mouth of the furnace by upward movement to keep the furnace warm and prevent the heat dissipation of the furnace from affecting other components in the cabinet.
  • the vertical oxidation furnace disclosed in the present invention includes the above-mentioned swing furnace door device, and thus also has the above-mentioned advantages.
  • FIG. 1 is a schematic view of the three-dimensional structure of the present invention.
  • FIG. 2 is a schematic view of the bottom structure of the present invention.
  • FIG. 3 is a schematic three-dimensional structure diagram of the rotating mechanism and the lifting mechanism in the present invention.
  • FIG. 4 is a schematic view of the front structure of the rotating mechanism and the lifting mechanism in the present invention.
  • FIG. 5 is a schematic cross-sectional structural diagram of the rotating mechanism and the lifting mechanism in the present invention.
  • FIGS 1 to 5 show an embodiment of a vertical oxidation furnace swinging furnace door device of the present invention.
  • the vertical oxidation furnace swinging furnace door device in this embodiment includes a furnace door assembly 1 and a mounting seat 2.
  • the mounting seat 2 There is a lifting mechanism 3 on it, a rotating mechanism 4 is arranged on the lifting mechanism 3, the axis of the rotating mechanism 4 is arranged vertically (that is, arranged in the up and down direction), and a swing arm is connected between the furnace door assembly 1 and the rotating mechanism 4 Component 5.
  • the furnace door assembly 1 preferably has a cylindrical structure so as to match the furnace mouth of the oxidation furnace; the mounting seat 2 preferably adopts a plate-like structure and is installed and fixed on the frame of the oxidation furnace without additional support.
  • the vertical oxidation furnace swinging furnace door device is provided with a lifting mechanism 3 on the mounting base 2, the lifting mechanism 3 is provided with a rotating mechanism 4 whose axis is arranged vertically, and the rotating mechanism 4 is connected to the furnace door assembly through a swing arm assembly 5.
  • the lifting mechanism 3 can drive the rotating mechanism 4, the swing arm assembly 5 and the furnace door assembly 1 to lift as a whole.
  • the rotating mechanism 4 rotates, the swing arm assembly 5 can drive the furnace door assembly 1 to swing in the horizontal plane.
  • the furnace door assembly 1 swings to the side of the furnace mouth to avoid the quartz boat, which is convenient to use. Align the mouth and press the mouth of the furnace by upward movement to keep the furnace warm and prevent the heat dissipation of the furnace from affecting other components in the cabinet.
  • the lift mechanism 3 includes a lift drive member 31 , a lift guide member 32 , and a lift base 33 connected to the lift drive member 31 , and the rotation mechanism 4 is provided on the lift base 33 .
  • the lifting base 33 and the rotating mechanism 4 are driven to lift as a whole by the lifting driving member 31, and the lifting guide 32 is used to provide guidance for the lifting movement, so that the movement is stable and smooth, and the movement accuracy is ensured.
  • the lifting base 33 is equipped with an upper limit piece 35 and a lower limit piece 36 that can be adjusted in position to prevent the furnace door assembly 1 from being over-compressed with the furnace mouth and causing damage;
  • the upper limit piece 35 and the lower limit piece 36 such as It can be a limit screw or the like, and the upper and lower limit positions of the lifting base 33 can be adjusted by fine-tuning the screwed depth, which has a simple structure and convenient adjustment.
  • the lift driving member 31 is a lift cylinder
  • the piston rod of the lift cylinder is fixedly connected to the mounting base 2
  • the cylinder body of the lift cylinder is fixedly connected to the lift base 33
  • the lift guide member 32 is a set
  • the guide shaft on the mounting base 2 and the lift base 33 are provided with a linear bearing 34 matched with the guide shaft.
  • the lifting base 33 and the rotating mechanism 4 are driven to lift as a whole by the expansion and contraction of the piston rod of the lifting cylinder.
  • the distance between the mounting seat 2 and the lifting base 33 can be reduced, and the overall structure is more compact; the cooperation of the guide shaft and the linear bearing 34 is beneficial to make the movement smooth and smooth, and ensure the precision of the lifting movement.
  • the lifting and lowering of the rotating mechanism 4 may also be realized in other manners.
  • the rotating mechanism 4 includes a mounting shaft 41 whose axis is vertically arranged, a rotating seat 42 sleeved on the mounting shaft 41 , and a rotary drive assembly 43 connected with the rotating seat 42 .
  • the mounting shaft 41 And the rotary drive assembly 43 is arranged on the lifting mechanism 3 (specifically, the lifting base 33 ), and the swing arm assembly 5 is fixedly connected with the rotating base 42 .
  • the rotary drive assembly 43 drives the rotary base 42 to rotate around the installation shaft 41, and drives the swing arm assembly 5 and the furnace door assembly 1 to rotate around the axis of the installation shaft 41, that is, the swing of the furnace door assembly 1 is realized, and the structure is simple, reliable.
  • both the initial position and the final position of the rotating seat 42 are equipped with in-position detection switches 47, such as micro switches, etc., to facilitate timely feedback of in-position signals of the furnace door assembly 1, so that the device can perform the next action.
  • in-position detection switches 47 such as micro switches, etc.
  • thrust ball bearings 44 are provided between both ends of the installation shaft 41 and the rotating seat 42 , and a deep groove ball bearing 45 is provided between the two thrust ball bearings 44 .
  • the rotating mechanism 4 not only needs to perform the upgrade movement as a whole, but also has relative rotation between the rotating seat 42 and the installation shaft 41, a combination of two thrust ball bearings 44 and a deep groove ball bearing 45 is used, and the thrust ball bearing 44 can be used to support the shaft.
  • the deep groove ball bearing 45 can be used to bear the radial force, and the structure is simple and reliable, which is beneficial to ensure the smooth operation of the device.
  • the inner ring of each bearing is in transition fit with the mounting shaft 41 , and the outer ring is in tight fit with the rotating seat 42 .
  • the rotary drive assembly 43 includes a rotary cylinder 431 , a connecting plate 46 is provided on the rotary base 42 , and the cylinder of the rotary cylinder 431 is hinged with the lifting mechanism 3 (specifically, hinged with the lifting base 33 ) ), the piston rod of the rotary cylinder 431 is hinged with the connecting plate 46 .
  • the connecting plate 46 is driven to move by the telescopic motion of the piston rod of the rotating cylinder 431, and the connecting plate 46 drives the rotating seat 42 to rotate around the installation shaft 41, thereby realizing the swinging of the swing arm assembly 5 and the furnace door assembly 1.
  • the structure is simple and reliable. .
  • the piston rod of the rotary cylinder 431 is connected to the connecting plate 46 through a fish-eye bearing, which is convenient to adjust the telescopic stroke of the rotary cylinder 431, and then adjust the swing angle of the furnace door assembly 1.
  • the rotary cylinder 431 can also be provided with a magnetic switch 432, etc. , the telescopic stroke of the rotary cylinder 431 is fed back in time to facilitate the device to perform the next action.
  • the swing arm assembly 5 includes a first connecting arm 51 connected with the furnace door assembly 1, a second connecting arm 52 connected with the rotating mechanism 4, a horizontally arranged maintenance shaft 53 and a fastener 54,
  • the first connecting arm 51 and the second connecting arm 52 are hingedly connected by a maintenance shaft 53 and fixedly connected by a fastener 54 .
  • the fastener 54 can be removed, and the first connecting arm 51 and the furnace door assembly 1 can be rotated and hung down around the maintenance axis 53 to avoid disassembly of the entire furnace door device, which is convenient for maintenance.
  • the swing arm assembly 5 of this structure does not affect the swing motion of the furnace door assembly 1 in the horizontal plane.
  • the furnace door assembly 1 includes a water cooling flange 11, which is convenient to take away the heat of the furnace door assembly 1 in time and reduce the temperature of the furnace door assembly 1.
  • the water cooling flange 11 is connected with a water pipe 12,
  • the water delivery hard pipe 12 is connected with a water delivery hose 13.
  • the furnace door assembly 1 further includes a quartz heat insulation plate 14 located on the upper side of the water cooling flange 11 and a furnace door base 15 located on the lower side of the water cooling flange 11.
  • the water cooling flange 11 and the furnace door An elastic buffer member 16 is arranged between the bases 15, and the furnace door base 15 is connected with the swing arm assembly 5 (specifically, connected with the first connecting arm 51).
  • the quartz heat insulation plate 14 is beneficial to prevent the furnace door assembly 1 from absorbing the heat dissipated in the furnace chamber too much, and can be kept at a lower temperature.
  • the furnace door base 15 is preferably a metal base, which is convenient to connect with the swing arm assembly 5. Specifically It can be made of aluminum, etc., and is light in weight and high in lightness; the elastic buffer 16 can be, for example, a coil spring or the like.
  • the vertical oxidation furnace of this embodiment includes a frame, and also includes the above-mentioned vertical oxidation furnace swing door device, and the mounting seat 2 is arranged on the frame.
  • the vertical oxidation furnace includes the above-mentioned swing furnace door device, so it also has the above-mentioned advantages.

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Abstract

Disclosed in the present invention is a vertical oxidation furnace door swinging apparatus, comprising a furnace door assembly (1) and a mounting seat (2). A lifting and lowering mechanism (3) is provided on the mounting seat (2); the lifting and lowering mechanism (3) is provided with a rotating mechanism (4); the axis of the rotating mechanism (4) is arranged in a vertical direction; and a swinging arm assembly (5) is connected between the furnace door assembly (1) and the rotating mechanism (4). Further disclosed in the present invention is a vertical oxidation furnace, comprising a rack and further comprising the foregoing vertical oxidation furnace door swinging apparatus. The mounting seat (2) is provided on the rack. The present invention has the advantages of being convenient to use, facilitating the heat insulation of a furnace hearth, preventing the heat dissipation of the furnace hearth from affecting other parts, and the like.

Description

一种立式氧化炉摆动炉门装置及立式氧化炉A vertical oxidation furnace swing furnace door device and vertical oxidation furnace
相关申请的交叉引用CROSS-REFERENCE TO RELATED APPLICATIONS
本申请以申请日为“2021-2-1”、申请号为“202110136008.0”、发明创造名称为“一种立式氧化炉摆动炉门装置及立式氧化炉”的中国专利申请为基础，并主张其优先权，该中国专利申请的全文在此引用至本申请中，以作为本申请的一部分。This application is based on the Chinese patent application with the application date of "2021-2-1", the application number of "202110136008.0" and the invention-creation title of "A vertical oxidation furnace swing door device and vertical oxidation furnace", and Priority is claimed, and the entire text of this Chinese patent application is hereby incorporated by reference into this application as a part of this application.
【技术领域】【Technical field】
本发明涉及半导体行业的晶圆处理设备，尤其涉及一种立式氧化炉摆动炉门装置及立式氧化炉。The invention relates to wafer processing equipment in the semiconductor industry, in particular to a swing furnace door device of a vertical oxidation furnace and a vertical oxidation furnace.
【背景技术】【Background technique】
信息产业的蓬勃发展极大的带动了集成电路行业的发展，氧化扩散设备可用于集成电路制造过程中的氧化、扩散和退火等工艺，是集成电路生产线上最重要的工艺设备之一。传统的卧式氧化炉对于8英寸及以上尺寸硅片，在工艺处理过程中难以满足控制精度、温度均匀性和自动化等方面的技术要求，而立式氧化炉可以很好地解决这些难题。对于立式氧化炉而言，当一批硅片做完工艺后，石英舟会携带硅片退出工艺炉膛，而石英舟的卸片和重新装片需要一定时间，且立式氧化炉的炉体尺寸大、工艺温度高，石英舟装卸片过程中不利于炉膛保温，炉膛内热量散发还会影响机柜内其他零部件，容易造成损坏。The vigorous development of the information industry has greatly driven the development of the integrated circuit industry. Oxidation diffusion equipment can be used for oxidation, diffusion and annealing processes in the manufacturing process of integrated circuits, and is one of the most important process equipment on the integrated circuit production line. The traditional horizontal oxidation furnace is difficult to meet the technical requirements of control accuracy, temperature uniformity and automation for silicon wafers of 8 inches and above in the process, while the vertical oxidation furnace can solve these problems well. For the vertical oxidation furnace, when a batch of silicon wafers is finished, the quartz boat will carry the silicon wafers out of the process furnace. Due to the large size and high process temperature, the process of loading and unloading the quartz boat is not conducive to the heat preservation of the furnace, and the heat dissipation in the furnace will also affect other parts in the cabinet, which is easy to cause damage.
【发明内容】[Content of the invention]
本发明要解决的技术问题是克服现有技术的不足，提供一种使用方便，有利于炉膛保温，防止炉膛热量散发影响其他零部件的立式氧化炉摆动炉门装置。The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art, and to provide a swing door device of a vertical oxidation furnace which is convenient to use, is conducive to furnace heat preservation, and prevents heat dissipation in the furnace from affecting other components.
本发明进一步提供一种包含上述摆动炉门装置的立式氧化炉。The present invention further provides a vertical oxidation furnace comprising the above-mentioned swing furnace door device.
为解决上述技术问题，本发明采用以下技术方案：In order to solve the above-mentioned technical problems, the present invention adopts the following technical solutions:
一种立式氧化炉摆动炉门装置，包括炉门组件以及安装座，所述安装座上设有升降机构，所述升降机构上设有旋转机构，所述旋转机构的轴心沿竖向布置，所述炉门组件与所述旋转机构之间连接有摆臂组件。A vertical oxidation furnace swinging furnace door device includes a furnace door assembly and a mounting seat, the mounting seat is provided with a lifting mechanism, the lifting mechanism is provided with a rotating mechanism, and the axis of the rotating mechanism is arranged vertically , a swing arm assembly is connected between the furnace door assembly and the rotating mechanism.
作为上述技术方案的进一步改进：所述升降机构包括升降驱动件、升降导向件、以及与升降驱动件相连的升降基座，所述旋转机构设于所述升降基座上；优选的，所述升降基座配设有位置可调的上限位件和下限位件。As a further improvement of the above technical solution: the lift mechanism includes a lift drive member, a lift guide member, and a lift base connected to the lift drive member, and the rotating mechanism is provided on the lift base; preferably, the The lifting base is equipped with an upper limit piece and a lower limit piece with adjustable positions.
作为上述技术方案的进一步改进：所述升降驱动件为升降气缸，所述升降气缸的活塞杆与所述安装座固定连接，升降气缸的缸体与所述升降基座固定连接，所述升降导向件为 设于安装座上的导向轴，所述升降基座上设有与所述导向轴配合的直线轴承。As a further improvement of the above technical solution: the lift driving member is a lift cylinder, the piston rod of the lift cylinder is fixedly connected to the mounting seat, the cylinder body of the lift cylinder is fixedly connected to the lift base, and the lift guide The component is a guide shaft arranged on the mounting seat, and the lift base is provided with a linear bearing matched with the guide shaft.
作为上述技术方案的进一步改进：所述旋转机构包括轴心沿竖向布置的安装轴、套设于安装轴上的旋转座、以及与旋转座相连的旋转驱动组件，所述安装轴和旋转驱动组件设于所述升降机构上，所述摆臂组件与所述旋转座固定连接；优选的，所述旋转座的初始位置和最终位置均配设有到位检测开关。As a further improvement of the above technical solution: the rotating mechanism includes a mounting shaft whose axis is vertically arranged, a rotating seat sleeved on the mounting shaft, and a rotating drive assembly connected with the rotating seat, the mounting shaft and the rotating drive The assembly is arranged on the lifting mechanism, and the swing arm assembly is fixedly connected with the rotating base; preferably, an in-position detection switch is provided at the initial position and the final position of the rotating base.
作为上述技术方案的进一步改进：所述安装轴两端与旋转座之间设有推力球轴承，两所述推力球轴承之间设有深沟球轴承。As a further improvement of the above technical solution, thrust ball bearings are arranged between the two ends of the installation shaft and the rotating seat, and a deep groove ball bearing is arranged between the two thrust ball bearings.
作为上述技术方案的进一步改进：所述旋转驱动组件包括旋转气缸，所述旋转座上设有连接板，所述旋转气缸的缸体与升降机构铰接，旋转气缸的活塞杆与所述连接板铰接。As a further improvement of the above technical solution: the rotary drive assembly includes a rotary cylinder, the rotary seat is provided with a connecting plate, the cylinder body of the rotary cylinder is hinged with the lifting mechanism, and the piston rod of the rotary cylinder is hinged with the connecting plate .
作为上述技术方案的进一步改进：所述摆臂组件包括与炉门组件相连的第一连接臂、与旋转机构相连的第二连接臂、水平布置的维修轴以及紧固件，所述第一连接臂与第二连接臂之间通过所述维修轴铰接、并通过所述紧固件固定连接。As a further improvement of the above technical solution: the swing arm assembly includes a first connecting arm connected to the furnace door assembly, a second connecting arm connected to the rotating mechanism, a horizontally arranged maintenance shaft and a fastener, the first connecting arm The arm and the second connecting arm are hinged through the maintenance shaft and fixedly connected through the fastener.
作为上述技术方案的进一步改进：所述炉门组件包括水冷法兰，所述水冷法兰连接有输水硬管，所述输水硬管连接有输水软管。As a further improvement of the above technical solution: the furnace door assembly includes a water-cooling flange, the water-cooling flange is connected with a water delivery hard pipe, and the water delivery hard pipe is connected with a water delivery hose.
作为上述技术方案的进一步改进：所述炉门组件包括水冷法兰、位于水冷法兰上侧的石英隔热板、以及位于水冷法兰下侧的炉门基座，所述水冷法兰与所述炉门基座之间设有弹性缓冲件，所述炉门基座与所述摆臂组件相连。As a further improvement of the above technical solution: the furnace door assembly includes a water-cooled flange, a quartz heat insulation plate located on the upper side of the water-cooled flange, and a furnace door base located on the lower side of the water-cooled flange, and the water-cooled flange is connected to the An elastic buffer member is arranged between the furnace door bases, and the furnace door base is connected with the swing arm assembly.
一种立式氧化炉，包括机架，还包括上述的立式氧化炉摆动炉门装置，所述安装座设于所述机架上。A vertical oxidation furnace includes a frame, and also includes the above-mentioned vertical oxidation furnace swing door device, and the mounting seat is arranged on the frame.
与现有技术相比，本发明的优点在于：本发明公开的立式氧化炉摆动炉门装置，于安装座上设有升降机构，升降机构上设有轴心沿竖向布置的旋转机构，旋转机构通过摆臂组件连接炉门组件，升降机构可以带动旋转机构、摆臂组件及炉门组件整体升降，旋转机构旋转时可以通过摆臂组件带动炉门组件在水平面内摆动，当硅片进入氧化炉内进行工艺生产时，炉门组件摆动至炉口侧边以避开石英舟，使用便利，而当石英舟带动硅片完全退出氧化炉的非工艺状态时，炉门组件摆动至与炉口对齐并通过向上运动压紧炉口，为炉膛保温，防止炉膛热量散发影响机柜内其他零部件。Compared with the prior art, the advantages of the present invention are: the vertical oxidation furnace swing door device disclosed in the present invention is provided with a lifting mechanism on the mounting seat, and the lifting mechanism is provided with a rotating mechanism whose axis is arranged vertically. The rotating mechanism is connected to the furnace door assembly through the swing arm assembly. The lifting mechanism can drive the rotating mechanism, the swing arm assembly and the furnace door assembly to lift as a whole. When the rotating mechanism rotates, the swing arm assembly can drive the furnace door assembly to swing in the horizontal plane. When the silicon wafer enters During the process production in the oxidation furnace, the furnace door assembly swings to the side of the furnace mouth to avoid the quartz boat, which is convenient to use. Align the mouth and press the mouth of the furnace by upward movement to keep the furnace warm and prevent the heat dissipation of the furnace from affecting other components in the cabinet.
本发明公开的立式氧化炉，包括上述的摆动炉门装置，因而同样具有上述优点。The vertical oxidation furnace disclosed in the present invention includes the above-mentioned swing furnace door device, and thus also has the above-mentioned advantages.
【附图说明】【Description of drawings】
图1是本发明的立体结构示意图。FIG. 1 is a schematic view of the three-dimensional structure of the present invention.
图2是本发明的仰视结构示意图。FIG. 2 is a schematic view of the bottom structure of the present invention.
图3是本发明中的旋转机构和升降机构的立体结构示意图。FIG. 3 is a schematic three-dimensional structure diagram of the rotating mechanism and the lifting mechanism in the present invention.
图4是本发明中的旋转机构和升降机构的主视结构示意图。FIG. 4 is a schematic view of the front structure of the rotating mechanism and the lifting mechanism in the present invention.
图5是本发明中的旋转机构和升降机构的剖视结构示意图。5 is a schematic cross-sectional structural diagram of the rotating mechanism and the lifting mechanism in the present invention.
图中各标号表示：1、炉门组件；11、水冷法兰；12、输水硬管；13、输水软管；14、石英隔热板；15、炉门基座；16、弹性缓冲件；2、安装座；3、升降机构；31、升降驱动件；32、升降导向件；33、升降基座；34、直线轴承；35、上限位件；36、下限位件；4、旋转机构；41、安装轴；42、旋转座；43、旋转驱动组件；431、旋转气缸；432、磁性开关；44、推力球轴承；45、深沟球轴承；46、连接板；47、到位检测开关；5、摆臂组件；51、第一连接臂；52、第二连接臂；53、维修轴；54、紧固件；6、盖板。The symbols in the figure indicate: 1. Furnace door assembly; 11. Water cooling flange; 12. Water delivery hard pipe; 13. Water delivery hose; 14. Quartz heat insulation board; 15. Furnace door base; Parts; 2. Mounting seat; 3. Lifting mechanism; 31. Lifting driving part; 32. Lifting guide; 33. Lifting base; 34. Linear bearing; 35. Upper limit piece; 36, Lower limit piece; 4. Rotation Mechanism; 41, installation shaft; 42, rotary seat; 43, rotary drive assembly; 431, rotary cylinder; 432, magnetic switch; 44, thrust ball bearing; 45, deep groove ball bearing; 46, connecting plate; 47, in-position detection switch; 5. swing arm assembly; 51, first connecting arm; 52, second connecting arm; 53, maintenance shaft; 54, fastener; 6, cover plate.
【具体实施方式】【Detailed ways】
以下结合说明书附图和具体实施例对本发明作进一步详细说明。The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
图1至图5示出了本发明立式氧化炉摆动炉门装置的一种实施例，本实施例的立式氧化炉摆动炉门装置，包括炉门组件1以及安装座2，安装座2上设有升降机构3，升降机构3上设有旋转机构4，旋转机构4的轴心沿竖向布置(也即沿上下方向布置)，炉门组件1与旋转机构4之间连接有摆臂组件5。其中，炉门组件1优选圆柱形结构，以便与氧化炉的炉口匹配；安装座2优选采用板状结构，并安装固定于氧化炉的机架上，无需额外设置支架。Figures 1 to 5 show an embodiment of a vertical oxidation furnace swinging furnace door device of the present invention. The vertical oxidation furnace swinging furnace door device in this embodiment includes a furnace door assembly 1 and a mounting seat 2. The mounting seat 2 There is a lifting mechanism 3 on it, a rotating mechanism 4 is arranged on the lifting mechanism 3, the axis of the rotating mechanism 4 is arranged vertically (that is, arranged in the up and down direction), and a swing arm is connected between the furnace door assembly 1 and the rotating mechanism 4 Component 5. The furnace door assembly 1 preferably has a cylindrical structure so as to match the furnace mouth of the oxidation furnace; the mounting seat 2 preferably adopts a plate-like structure and is installed and fixed on the frame of the oxidation furnace without additional support.
该立式氧化炉摆动炉门装置，于安装座2上设有升降机构3，升降机构3上设有轴心沿竖向布置的旋转机构4，旋转机构4通过摆臂组件5连接炉门组件1，升降机构3可以带动旋转机构4、摆臂组件5及炉门组件1整体升降，旋转机构4旋转时可以通过摆臂组件5带动炉门组件1在水平面内摆动，当硅片进入氧化炉内进行工艺生产时，炉门组件1摆动至炉口侧边以避开石英舟，使用便利，而当石英舟带动硅片完全退出氧化炉的非工艺状态时，炉门组件1摆动至与炉口对齐并通过向上运动压紧炉口，为炉膛保温，防止炉膛热量散发影响机柜内其他零部件。The vertical oxidation furnace swinging furnace door device is provided with a lifting mechanism 3 on the mounting base 2, the lifting mechanism 3 is provided with a rotating mechanism 4 whose axis is arranged vertically, and the rotating mechanism 4 is connected to the furnace door assembly through a swing arm assembly 5. 1. The lifting mechanism 3 can drive the rotating mechanism 4, the swing arm assembly 5 and the furnace door assembly 1 to lift as a whole. When the rotating mechanism 4 rotates, the swing arm assembly 5 can drive the furnace door assembly 1 to swing in the horizontal plane. When the silicon wafer enters the oxidation furnace When the process production is carried out in the furnace, the furnace door assembly 1 swings to the side of the furnace mouth to avoid the quartz boat, which is convenient to use. Align the mouth and press the mouth of the furnace by upward movement to keep the furnace warm and prevent the heat dissipation of the furnace from affecting other components in the cabinet.
进一步地，本实施例中，升降机构3包括升降驱动件31、升降导向件32、以及与升降驱动件31相连的升降基座33，旋转机构4设于升降基座33上。使用时，由升降驱动件31带动升降基座33、旋转机构4整体升降，利用升降导向件32为升降运动提供导向，使运动平稳、顺畅，保证运动精度。优选的，升降基座33配设有位置可调的上限位件35和下限位件36，防止炉门组件1与炉口过度压紧，造成损坏；上限位件35、下限位件36，例如可以是限位螺钉等，通过微调拧入的深度调节升降基座33的上下极限位置，结构简单、调节方便。Further, in this embodiment, the lift mechanism 3 includes a lift drive member 31 , a lift guide member 32 , and a lift base 33 connected to the lift drive member 31 , and the rotation mechanism 4 is provided on the lift base 33 . During use, the lifting base 33 and the rotating mechanism 4 are driven to lift as a whole by the lifting driving member 31, and the lifting guide 32 is used to provide guidance for the lifting movement, so that the movement is stable and smooth, and the movement accuracy is ensured. Preferably, the lifting base 33 is equipped with an upper limit piece 35 and a lower limit piece 36 that can be adjusted in position to prevent the furnace door assembly 1 from being over-compressed with the furnace mouth and causing damage; the upper limit piece 35 and the lower limit piece 36, such as It can be a limit screw or the like, and the upper and lower limit positions of the lifting base 33 can be adjusted by fine-tuning the screwed depth, which has a simple structure and convenient adjustment.
作为优选的技术方案，本实施例中，升降驱动件31为升降气缸，升降气缸的活塞杆 与安装座2固定连接，升降气缸的缸体与升降基座33固定连接，升降导向件32为设于安装座2上的导向轴，升降基座33上设有与导向轴配合的直线轴承34。使用时，通过升降气缸的活塞杆的伸缩，带动升降基座33、旋转机构4整体升降，升降气缸的缸体与升降基座33固定连接，相比于将缸体与安装座2固定连接，可以缩小安装座2与升降基座33之间的间距，整体结构更紧凑；导向轴与直线轴承34配合，有利于使运动平稳、顺畅，保证升降运动的精度。当然在其他实施例中，也可采用其他方式实现旋转机构4的升降。As a preferred technical solution, in this embodiment, the lift driving member 31 is a lift cylinder, the piston rod of the lift cylinder is fixedly connected to the mounting base 2 , the cylinder body of the lift cylinder is fixedly connected to the lift base 33 , and the lift guide member 32 is a set The guide shaft on the mounting base 2 and the lift base 33 are provided with a linear bearing 34 matched with the guide shaft. When in use, the lifting base 33 and the rotating mechanism 4 are driven to lift as a whole by the expansion and contraction of the piston rod of the lifting cylinder. The distance between the mounting seat 2 and the lifting base 33 can be reduced, and the overall structure is more compact; the cooperation of the guide shaft and the linear bearing 34 is beneficial to make the movement smooth and smooth, and ensure the precision of the lifting movement. Of course, in other embodiments, the lifting and lowering of the rotating mechanism 4 may also be realized in other manners.
进一步地，本实施例中，旋转机构4包括轴心沿竖向布置的安装轴41、套设于安装轴41上的旋转座42、以及与旋转座42相连的旋转驱动组件43，安装轴41和旋转驱动组件43设于升降机构3上(具体为升降基座33上)，摆臂组件5与旋转座42固定连接。使用时，旋转驱动组件43驱动旋转座42绕安装轴41旋转，并带动摆臂组件5、炉门组件1绕安装轴41的轴心转动，也即实现炉门组件1的摆动，结构简单、可靠。当然在其他实施例中，也可采用其他方式实现炉门组件1的摆动。优选的，旋转座42的初始位置和最终位置均配设有到位检测开关47，例如微动开关等，便于及时反馈炉门组件1的到位信号，以便装置进行下一步动作。Further, in this embodiment, the rotating mechanism 4 includes a mounting shaft 41 whose axis is vertically arranged, a rotating seat 42 sleeved on the mounting shaft 41 , and a rotary drive assembly 43 connected with the rotating seat 42 . The mounting shaft 41 And the rotary drive assembly 43 is arranged on the lifting mechanism 3 (specifically, the lifting base 33 ), and the swing arm assembly 5 is fixedly connected with the rotating base 42 . When in use, the rotary drive assembly 43 drives the rotary base 42 to rotate around the installation shaft 41, and drives the swing arm assembly 5 and the furnace door assembly 1 to rotate around the axis of the installation shaft 41, that is, the swing of the furnace door assembly 1 is realized, and the structure is simple, reliable. Of course, in other embodiments, the swing of the furnace door assembly 1 may also be implemented in other manners. Preferably, both the initial position and the final position of the rotating seat 42 are equipped with in-position detection switches 47, such as micro switches, etc., to facilitate timely feedback of in-position signals of the furnace door assembly 1, so that the device can perform the next action.
作为优选的技术方案，本实施例中，安装轴41两端与旋转座42之间设有推力球轴承44，两推力球轴承44之间设有深沟球轴承45。由于旋转机构4既要整体进行升级运动，同时旋转座42与安装轴41之间又具有相对转动，采用两推力球轴承44加上深沟球轴承45的组合，推力球轴承44可用于承受轴向的力，或者说竖向的力，深沟球轴承45可用于承担径向的力，结构简单、可靠，有利于保证装置顺畅地运行。其中各轴承的内圈与安装轴41过渡配合，外圈与旋转座42紧配合。As a preferred technical solution, in this embodiment, thrust ball bearings 44 are provided between both ends of the installation shaft 41 and the rotating seat 42 , and a deep groove ball bearing 45 is provided between the two thrust ball bearings 44 . Since the rotating mechanism 4 not only needs to perform the upgrade movement as a whole, but also has relative rotation between the rotating seat 42 and the installation shaft 41, a combination of two thrust ball bearings 44 and a deep groove ball bearing 45 is used, and the thrust ball bearing 44 can be used to support the shaft. The deep groove ball bearing 45 can be used to bear the radial force, and the structure is simple and reliable, which is beneficial to ensure the smooth operation of the device. The inner ring of each bearing is in transition fit with the mounting shaft 41 , and the outer ring is in tight fit with the rotating seat 42 .
作为优选的技术方案，本实施例中，旋转驱动组件43包括旋转气缸431，旋转座42上设有连接板46，旋转气缸431的缸体与升降机构3铰接(具体为与升降基座33铰接)，旋转气缸431的活塞杆与连接板46铰接。使用时，通过旋转气缸431的活塞杆的伸缩运动带动连接板46运动，连接板46带动旋转座42绕安装轴41旋转，进而实现摆臂组件5及炉门组件1的摆动，结构简单、可靠。优选的，旋转气缸431的活塞杆通过鱼眼轴承与连接板46相连，便于调整旋转气缸431的伸缩行程，进而调整炉门组件1的摆动角度，也可在旋转气缸431上设置磁性开关432等，及时反馈旋转气缸431的伸缩行程，便于装置进行下一步动作。As a preferred technical solution, in this embodiment, the rotary drive assembly 43 includes a rotary cylinder 431 , a connecting plate 46 is provided on the rotary base 42 , and the cylinder of the rotary cylinder 431 is hinged with the lifting mechanism 3 (specifically, hinged with the lifting base 33 ) ), the piston rod of the rotary cylinder 431 is hinged with the connecting plate 46 . When in use, the connecting plate 46 is driven to move by the telescopic motion of the piston rod of the rotating cylinder 431, and the connecting plate 46 drives the rotating seat 42 to rotate around the installation shaft 41, thereby realizing the swinging of the swing arm assembly 5 and the furnace door assembly 1. The structure is simple and reliable. . Preferably, the piston rod of the rotary cylinder 431 is connected to the connecting plate 46 through a fish-eye bearing, which is convenient to adjust the telescopic stroke of the rotary cylinder 431, and then adjust the swing angle of the furnace door assembly 1. The rotary cylinder 431 can also be provided with a magnetic switch 432, etc. , the telescopic stroke of the rotary cylinder 431 is fed back in time to facilitate the device to perform the next action.
进一步地，本实施例中，摆臂组件5包括与炉门组件1相连的第一连接臂51、与旋转机构4相连的第二连接臂52、水平布置的维修轴53以及紧固件54，第一连接臂51与第二连接臂52之间通过维修轴53铰接、并通过紧固件54固定连接。当需换洗炉膛内的石 英工艺管时，可将紧固件54拆除，而使第一连接臂51和炉门组件1绕维修轴53旋转、垂下，避免拆卸整套炉门装置，方便维护，同时该结构的摆臂组件5不影响与炉门组件1在水平面内的摆动运动。Further, in this embodiment, the swing arm assembly 5 includes a first connecting arm 51 connected with the furnace door assembly 1, a second connecting arm 52 connected with the rotating mechanism 4, a horizontally arranged maintenance shaft 53 and a fastener 54, The first connecting arm 51 and the second connecting arm 52 are hingedly connected by a maintenance shaft 53 and fixedly connected by a fastener 54 . When the quartz process tube in the furnace needs to be replaced and cleaned, the fastener 54 can be removed, and the first connecting arm 51 and the furnace door assembly 1 can be rotated and hung down around the maintenance axis 53 to avoid disassembly of the entire furnace door device, which is convenient for maintenance. The swing arm assembly 5 of this structure does not affect the swing motion of the furnace door assembly 1 in the horizontal plane.
更进一步地，本实施例中，炉门组件1包括水冷法兰11，便于及时带走炉门组件1的热量，降低炉门组件1的温度，水冷法兰11连接有输水硬管12，输水硬管12连接有输水软管13，当第一连接臂51、炉门组件1绕维修轴53旋转、垂下时，不会导致管路折断，结构简单、可靠。Further, in this embodiment, the furnace door assembly 1 includes a water cooling flange 11, which is convenient to take away the heat of the furnace door assembly 1 in time and reduce the temperature of the furnace door assembly 1. The water cooling flange 11 is connected with a water pipe 12, The water delivery hard pipe 12 is connected with a water delivery hose 13. When the first connecting arm 51 and the furnace door assembly 1 rotate and hang down around the maintenance shaft 53, the pipeline will not be broken, and the structure is simple and reliable.
进一步地，本实施例中，炉门组件1还包括位于水冷法兰11上侧的石英隔热板14、以及位于水冷法兰11下侧的炉门基座15，水冷法兰11与炉门基座15之间设有弹性缓冲件16，炉门基座15与摆臂组件5相连(具体为与第一连接臂51相连)。石英隔热板14有利于避免炉门组件1过多地吸收炉膛内散发的热量，可以保持在较低的温度，炉门基座15优选采用金属基座，方便与摆臂组件5连接，具体可以是铝等，质轻、轻度高；弹性缓冲件16例如可以是螺旋弹簧等。Further, in this embodiment, the furnace door assembly 1 further includes a quartz heat insulation plate 14 located on the upper side of the water cooling flange 11 and a furnace door base 15 located on the lower side of the water cooling flange 11. The water cooling flange 11 and the furnace door An elastic buffer member 16 is arranged between the bases 15, and the furnace door base 15 is connected with the swing arm assembly 5 (specifically, connected with the first connecting arm 51). The quartz heat insulation plate 14 is beneficial to prevent the furnace door assembly 1 from absorbing the heat dissipated in the furnace chamber too much, and can be kept at a lower temperature. The furnace door base 15 is preferably a metal base, which is convenient to connect with the swing arm assembly 5. Specifically It can be made of aluminum, etc., and is light in weight and high in lightness; the elastic buffer 16 can be, for example, a coil spring or the like.
本实施例的立式氧化炉，包括机架，还包括上述的立式氧化炉摆动炉门装置，安装座2设于机架上。The vertical oxidation furnace of this embodiment includes a frame, and also includes the above-mentioned vertical oxidation furnace swing door device, and the mounting seat 2 is arranged on the frame.
该立式氧化炉，包括上述的摆动炉门装置，因而同样具有上述优点。The vertical oxidation furnace includes the above-mentioned swing furnace door device, so it also has the above-mentioned advantages.
虽然本发明已以较佳实施例揭露如上，然而并非用以限定本发明。任何熟悉本领域的技术人员，在不脱离本发明技术方案范围的情况下，都可利用上述揭示的技术内容对本发明技术方案做出许多可能的变动和修饰，或修改为等同变化的等效实施例。因此，凡是未脱离本发明技术方案的内容，依据本发明技术实质对以上实施例所做的任何简单修改、等同变化及修饰，均应落在本发明技术方案保护的范围内。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art, without departing from the scope of the technical solution of the present invention, can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above, or modify it into an equivalent implementation of equivalent changes. example. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention should fall within the protection scope of the technical solutions of the present invention.

Claims (10)

  1. 一种立式氧化炉摆动炉门装置，其特征在于：包括炉门组件(1)以及安装座(2)，所述安装座(2)上设有升降机构(3)，所述升降机构(3)上设有旋转机构(4)，所述旋转机构(4)的轴心沿竖向布置，所述炉门组件(1)与所述旋转机构(4)之间连接有摆臂组件(5)。A swing furnace door device for a vertical oxidation furnace, characterized in that it comprises a furnace door assembly (1) and a mounting seat (2), the mounting seat (2) is provided with a lifting mechanism (3), and the lifting mechanism ( 3) There is a rotating mechanism (4), the axis of the rotating mechanism (4) is arranged vertically, and a swing arm assembly ( 5).
  2. 根据权利要求1所述的立式氧化炉摆动炉门装置，其特征在于：所述升降机构(3)包括升降驱动件(31)、升降导向件(32)、以及与升降驱动件(31)相连的升降基座(33)，所述旋转机构(4)设于所述升降基座(33)上；优选的，所述升降基座(33)配设有位置可调的上限位件(35)和下限位件(36)。The swinging furnace door device of a vertical oxidation furnace according to claim 1, wherein the lifting mechanism (3) comprises a lifting driving member (31), a lifting guiding member (32), and a lifting driving member (31) Connected lifting bases (33), the rotating mechanism (4) is arranged on the lifting bases (33); preferably, the lifting bases (33) are provided with upper limit pieces ( 35) and the lower limit piece (36).
  3. 根据权利要求2所述的立式氧化炉摆动炉门装置，其特征在于：所述升降驱动件(31)为升降气缸，所述升降气缸的活塞杆与所述安装座(2)固定连接，升降气缸的缸体与所述升降基座(33)固定连接，所述升降导向件(32)为设于安装座(2)上的导向轴，所述升降基座(33)上设有与所述导向轴配合的直线轴承(34)。The swing furnace door device of a vertical oxidation furnace according to claim 2, characterized in that: the lift driving member (31) is a lift cylinder, and the piston rod of the lift cylinder is fixedly connected to the mounting seat (2), The cylinder body of the lifting cylinder is fixedly connected with the lifting base (33), the lifting guide (32) is a guide shaft arranged on the mounting seat (2), and the lifting base (33) is provided with The guide shaft is matched with a linear bearing (34).
  4. 根据权利要求1所述的立式氧化炉摆动炉门装置，其特征在于：所述旋转机构(4)包括轴心沿竖向布置的安装轴(41)、套设于安装轴(41)上的旋转座(42)、以及与旋转座(42)相连的旋转驱动组件(43)，所述安装轴(41)和旋转驱动组件(43)设于所述升降机构(3)上，所述摆臂组件(5)与所述旋转座(42)固定连接；优选的，所述旋转座(42)的初始位置和最终位置均配设有到位检测开关(47)。The swinging furnace door device of a vertical oxidation furnace according to claim 1, characterized in that: the rotating mechanism (4) comprises an installation shaft (41) whose axis is arranged vertically, and is sleeved on the installation shaft (41). The rotating seat (42) of the device, and the rotating drive assembly (43) connected with the rotating base (42), the installation shaft (41) and the rotating drive assembly (43) are arranged on the lifting mechanism (3), the The swing arm assembly (5) is fixedly connected with the rotating seat (42); preferably, an in-position detection switch (47) is provided at the initial position and the final position of the rotating seat (42).
  5. 根据权利要求4所述的立式氧化炉摆动炉门装置，其特征在于：所述安装轴(41)两端与旋转座(42)之间设有推力球轴承(44)，两所述推力球轴承(44)之间设有深沟球轴承(45)。The swinging furnace door device of a vertical oxidation furnace according to claim 4, characterized in that: thrust ball bearings (44) are provided between the two ends of the installation shaft (41) and the rotating seat (42), and the two thrust Deep groove ball bearings (45) are arranged between the ball bearings (44).
  6. 根据权利要求4所述的立式氧化炉摆动炉门装置，其特征在于：所述旋转驱动组件(43)包括旋转气缸(431)，所述旋转座(42)上设有连接板(46)，所述旋转气缸(431)的缸体与升降机构(3)铰接，旋转气缸(431)的活塞杆与所述连接板(46)铰接。The swing furnace door device of a vertical oxidation furnace according to claim 4, wherein the rotary drive assembly (43) comprises a rotary cylinder (431), and the rotary seat (42) is provided with a connecting plate (46) , the cylinder body of the rotating cylinder (431) is hinged with the lifting mechanism (3), and the piston rod of the rotating cylinder (431) is hinged with the connecting plate (46).
  7. 根据权利要求1至6中任一项所述的立式氧化炉摆动炉门装置，其特征在于：所述摆臂组件(5)包括与炉门组件(1)相连的第一连接臂(51)、与旋转机构(4)相连的第二连接臂(52)、水平布置的维修轴(53)以及紧固件(54)，所述第一连接臂(51)与第二连接臂(52)之间通过所述维修轴(53)铰接、并通过所述紧固件(54)固定连接。The swinging furnace door device for a vertical oxidation furnace according to any one of claims 1 to 6, wherein the swing arm assembly (5) comprises a first connecting arm (51) connected to the furnace door assembly (1). ), a second connecting arm (52) connected with the rotating mechanism (4), a horizontally arranged maintenance shaft (53) and a fastener (54), the first connecting arm (51) and the second connecting arm (52) ) are hinged by the maintenance shaft (53) and fixedly connected by the fastener (54).
  8. 根据权利要求7所述的立式氧化炉摆动炉门装置，其特征在于：所述炉门组件(1)包括水冷法兰(11)，所述水冷法兰(11)连接有输水硬管(12)，所述输水硬管(12)连 接有输水软管(13)。The swing furnace door device of a vertical oxidation furnace according to claim 7, characterized in that: the furnace door assembly (1) comprises a water-cooling flange (11), and the water-cooling flange (11) is connected with a water-conveying hard pipe (12), the hard water delivery pipe (12) is connected with a water delivery hose (13).
  9. 根据权利要求1至6中任一项所述的立式氧化炉摆动炉门装置，其特征在于：所述炉门组件(1)包括水冷法兰(11)、位于水冷法兰(11)上侧的石英隔热板(14)、以及位于水冷法兰(11)下侧的炉门基座(15)，所述水冷法兰(11)与所述炉门基座(15)之间设有弹性缓冲件(16)，所述炉门基座(15)与所述摆臂组件(5)相连。The swinging furnace door device for a vertical oxidation furnace according to any one of claims 1 to 6, wherein the furnace door assembly (1) comprises a water-cooled flange (11), which is located on the water-cooled flange (11). The quartz heat insulation plate (14) on the side, and the furnace door base (15) located on the lower side of the water cooling flange (11), a furnace door base (15) is provided between the water cooling flange (11) and the furnace door base (15). An elastic buffer member (16) is provided, and the furnace door base (15) is connected with the swing arm assembly (5).
  10. 一种立式氧化炉，包括机架，其特征在于：还包括权利要求1至9中任一项所述的立式氧化炉摆动炉门装置，所述安装座(2)设于所述机架上。A vertical oxidation furnace, comprising a frame, and characterized in that it further comprises the vertical oxidation furnace swing door device according to any one of claims 1 to 9, wherein the mounting seat (2) is arranged on the machine on the shelf.
PCT/CN2021/098528 2021-02-01 2021-06-07 Vertical oxidation furnace door swinging apparatus and vertical oxidation furnace WO2022160546A1 (en)

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