CN203744726U - Furnace door control mechanism - Google Patents
Furnace door control mechanism Download PDFInfo
- Publication number
- CN203744726U CN203744726U CN201320859115.7U CN201320859115U CN203744726U CN 203744726 U CN203744726 U CN 203744726U CN 201320859115 U CN201320859115 U CN 201320859115U CN 203744726 U CN203744726 U CN 203744726U
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- furnace door
- fire door
- control mechanism
- door control
- rotary cylinder
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- 230000007246 mechanism Effects 0.000 title claims abstract description 55
- 230000033001 locomotion Effects 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 10
- 230000003749 cleanliness Effects 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000008859 change Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model relates to the technical field of semiconductor vertical type heat processing devices, in particular to a furnace door control mechanism. A lifting air cylinder of the furnace door control mechanism is connected with a furnace door through a guide shaft, a rotary air cylinder is connected with the furnace door through an oscillating bar mechanism, and a limiting mechanism is used for limiting the lifting position and the rotating position of the furnace door. By means of the furnace door control mechanism, the lifting air cylinder controls the furnace door to lift, the rotary air cylinder controls the furnace door to rotate, the radial overturning force is borne by the guide shaft, the furnace door control mechanism is stable, accurate opening and closing of the furnace door are achieved through the arrangement of the limiting mechanism, the furnace door control mechanism has the advantages of being simple in structure, stable and reliable, the motion process of the furnace door can be accurately and conveniently controlled, cost is saved, the working efficiency is improved, and meanwhile the cleanliness of the microenvironment can be further improved.
Description
Technical field
The utility model relates to semiconductor vertical thermal-processing device technical field, relates in particular to a kind of furnace door control mechanism.
Background technology
In semiconductor vertical thermal-processing device, need to be by fire door by processing chamber and the isolation of microenvironment space, to play the effects such as isolation heat.The stove gate device of current semiconductor vertical thermal-processing device adopts stepper motor to drive more, utilizes two stepper motors and synchronous pulley and deceleration device to realize lifting and the rotation of fire door.In fire door elevating movement process, need line slideway to lead, and line slideway is arranged in guide supporting, in order to ensure the linearity of line slideway, need to be to guide supporting fine finishining, improved cost, guide supporting run-of-the-mill is higher simultaneously, causes the unstable of whole device.The elevating movement of fire door needs stepper motor by synchronous pulley and belt drives, may change due to assembling tightness, causes slip, affects the levels of precision of transmission.After long-time belt easily there is wearing and tearing and tension force deficiency, the phenomenon such as skid.Rotatablely moving of fire door needs stepper motor and decelerator together to control.The structure of whole device is compact not, and the institutes such as decelerator, guide supporting take up space larger, and complex structure, heavier, and whole motion control process is accurate not, execute-in-place inconvenience.And utilize stepper motor driving to there will be fire door to swing situation not in place.
Utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model is to solve traditional stove gate device complex structure, install unstable, operation inconvenience, motion control process is accurate not, the problem that cost is higher.
(2) technical scheme
In order to solve the problems of the technologies described above, the utility model provides a kind of furnace door control mechanism, comprise fire door, lift cylinder, rotary cylinder, the axis of guide and position-limit mechanism, described lift cylinder is connected with described fire door by the described axis of guide, described rotary cylinder is connected with described fire door by swing-bar mechanism, and described position-limit mechanism is used for the position of the lifting and the rotation that limit described fire door.
Wherein, described swing-bar mechanism comprises connector and turning arm, and described rotary cylinder is connected with described turning arm by described connector, and described turning arm is connected with described fire door.
Wherein, described position-limit mechanism comprises limited block, and described limited block is provided with adjustment screw, when described limited block is arranged on described fire door and declines on corresponding position and when rotation on corresponding position.
Wherein, on described lift cylinder and rotary cylinder, be all connected with flow speed control valve.
Wherein, on described lift cylinder and rotary cylinder, be all connected with pressure regulator valve.
Wherein, on described lift cylinder and rotary cylinder, be equipped with the buffer for slowing down impact.
Wherein, on described lift cylinder and rotary cylinder, be equipped with the triple valve for pressurize.
Wherein, the described axis of guide is the ball axis of guide.
(3) beneficial effect
Technique scheme of the present utility model has following beneficial effect: the lift cylinder of furnace door control mechanism of the present utility model is connected with fire door by the axis of guide, rotary cylinder is connected with fire door by swing-bar mechanism, and position-limit mechanism is used for the position of the lifting and the rotation that limit fire door.Furnace door control mechanism of the present utility model is by the lifting of lift cylinder control fire door, by the rotation of rotary cylinder control fire door, bear by the axis of guide power of radially toppling, make mechanism more stable, by the setting of position-limit mechanism, fire door is realized accurately and opened and closed, it has simple in structure, reliable and stable feature, can accurately control the motion process of fire door easily, cost-saving, improve operating efficiency, can further optimize the cleanliness factor of microenvironment simultaneously.
Brief description of the drawings
Fig. 1 is the front view of the furnace door control mechanism of the utility model embodiment;
Fig. 2 is the fire door rotation schematic diagram of the utility model embodiment.
Wherein, 1: fire door; 2: lift cylinder; 3: rotary cylinder; 4: flow speed control valve; 5: the axis of guide.
Detailed description of the invention
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for illustrating the utility model, but can not be used for limiting scope of the present utility model.
In description of the present utility model, except as otherwise noted, the implication of " multiple " is two or more; Except as otherwise noted, the implication of " nick shaped " is the shape except cross section is concordant.Term " on ", orientation or the position relationship of the instruction such as D score, " left side ", " right side ", " interior ", " outward ", " front end ", " rear end ", " head ", " afterbody " be based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, construct and operation with specific orientation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second ", " the 3rd " etc. are only for describing object, and can not be interpreted as instruction or hint relative importance.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " is connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connects integratedly; Can be mechanical connection, can be also electrical connection; Can be to be directly connected, also can indirectly be connected by intermediary.For the ordinary skill in the art, can concrete condition understand the concrete meaning of above-mentioned term in the utility model.
As shown in Figure 1, the lift cylinder 2 that the furnace door control mechanism described in the present embodiment is provided with is connected with fire door 1 by the axis of guide 5, and rotary cylinder 3 is connected with fire door 1 by swing-bar mechanism, and position-limit mechanism is for limiting the position of lifting and rotation of fire door 1.The control mode of this furnace door control mechanism is simple, can drive fire door 1 to move along the axis of guide 5 by controlling lift cylinder 2, thereby realize the action of the lifting of fire door 1, controlling rotary cylinder 3 drives fire door 1 to rotate by swing-bar mechanism, swing-bar mechanism converts rectilinear motion to rotatablely move to, thereby realize the action of the rotation of fire door 1, complete the open and close of fire door 1.The particle that lift cylinder 2 and rotary cylinder 3 motions produce drives the particle producing few than general motor, can further optimize the cleanliness factor of microenvironment.
Swing-bar mechanism is provided with connector and turning arm, and rotary cylinder 3 is connected with turning arm by connector, and turning arm is connected with fire door 1, and the rectilinear motion of rotary cylinder 3 is converted into rotatablely moving of turning arm by connector, thereby drives fire door 1 to rotate.
Arranging of the axis of guide 5 can be born the power of radially toppling, in the present embodiment, lift cylinder 2 is connected with fire door 1 by two ball axis of guides 5, the lifting that two ball axis of guides 5 are fire door 1 play the guiding role, bear fire door 1 because of the radially tilting moment that swing-bar mechanism produces simultaneously, increased the safety and stability of this furnace door control mechanism.
On position-limit mechanism, be provided with limited block, limited block is provided with adjustment screw, and limited block is installed fire door 1 while declining on corresponding position and when rotation on corresponding position, makes furnace door control mechanism can not make fire door 1 produce motion phenomenon because of controlling reason.In the process of fire door 1 lifting, in the time that fire door 1 is encountered limited block, fire door 1 stop motion; In the process of rotating at fire door 1, in the time that turning arm is encountered limited block, fire door 1 stops the rotation.The position of limited block be can change by adjusting adjustment screw, thereby displacement and the spacing angle of the lifting of fire door 1 changed.
On lift cylinder 2 and rotary cylinder 3, be equipped with flow speed control valve 4, pressure regulator valve and buffer.Flow speed control valve 4 and pressure regulator valve are used for controlling movement velocity and the pressure of lift cylinder 2 and rotary cylinder 3, realize the lifting of fire door 1 and the motion process of rotation is steadily slow, while reducing fire door 1 in-position and the impulsive force of limited block, ensure the stability that fire door 1 moves; Buffer can slow down the impact that lift cylinder 2 and rotary cylinder 3 are subject to.
By in the gas circuit of lift cylinder 2 and rotary cylinder 3, triple valve being set, can play pressure maintaining effect, in the time there is the situation of unexpected power-off, lift cylinder 2 and rotary cylinder 3 still can pressurizes, avoid fortuitous event to occur.
As shown in Figure 2, in the time that fire door 1 is opened from closure state, this furnace door control mechanism is first by controlling stretching out of lift cylinder 2, fire door 1 is declined along two ball axis of guides 5, too fast in order to prevent decrease speed, slow down the impact of lift cylinder 2 by buffer, in the time that fire door 1 drops to assigned address, because fire door 1 bumps against the limited block setting, fire door 1 stops declining; Then by controlling stretching out of rotary cylinder 3, drive connector that the rectilinear motion of rotary cylinder 3 is converted to rotatablely moving of turning arm, thereby drive fire door 1 slow circumvolve, too fast in order to prevent rotary speed, slow down the impact of rotary cylinder 3 by buffer, in the time that fire door 1 rotates to assigned address, because turning arm bumps against the limited block setting, turning arm drives fire door 1 to stop operating, and spacing angle can change by adjustment screw.
In the time that fire door 1 is closed from open mode, first by controlling the retraction of rotary cylinder 3, drive connector that the rectilinear motion of rotary cylinder 3 is converted to rotatablely moving of turning arm, thereby drive fire door 1 slow circumvolve, too fast in order to prevent rotary speed, slow down the impact of rotary cylinder 3 by buffer, in the time that fire door 1 rotates to the assigned address of corresponding fire door, because turning arm bumps against the limited block setting, turning arm drives fire door 1 to stop operating; Then by controlling the retraction of lift cylinder 2, make fire door 1 increase along two ball axis of guides 5, too fast in order to prevent the rate of climb, slow down the impact of lift cylinder 2 by buffer, in the time that lift cylinder 2 is retracted completely, the state of complete closure got back to fire door correspondence position and reaches by fire door 1, in the process of fire door 1 closure, lift cylinder 2 and rotary cylinder 3, by triple valve pressurize, withstand fire door, prevent accident.
In sum, the lift cylinder 2 of the furnace door control mechanism of the present embodiment is connected with fire door 1 by the axis of guide 5, and rotary cylinder 3 is connected with fire door 1 by swing-bar mechanism, and position-limit mechanism is used for the position of the lifting and the rotation that limit fire door 1.The furnace door control mechanism of the present embodiment is controlled the lifting of fire door 1 by lift cylinder 2, control the rotation of fire door 1 by rotary cylinder 3, bear by the axis of guide 5 power of radially toppling, make mechanism more stable, by the setting of position-limit mechanism, fire door 1 is realized accurately and opened and closed, it has simple in structure, reliable and stable feature, can accurately control the motion process of fire door 1 easily, cost-saving, improve operating efficiency, can further optimize the cleanliness factor of microenvironment simultaneously.
Embodiment of the present utility model provides for example with for the purpose of describing, and is not exhaustively or by the utility model to be limited to disclosed form.Many modifications and variations are apparent for the ordinary skill in the art.Selecting and describing embodiment is for better explanation principle of the present utility model and practical application, thereby and makes those of ordinary skill in the art can understand the utility model design to be suitable for the various embodiment with various amendments of special-purpose.
Claims (8)
1. a furnace door control mechanism, comprise fire door (1), it is characterized in that, also comprise lift cylinder (2), rotary cylinder (3), the axis of guide (5) and position-limit mechanism, described lift cylinder (2) is connected with described fire door (1) by the described axis of guide (5), described rotary cylinder (3) is connected with described fire door (1) by swing-bar mechanism, and described position-limit mechanism is used for limiting the lifting of described fire door (1) and the position of rotation.
2. furnace door control mechanism according to claim 1, is characterized in that, described swing-bar mechanism comprises connector and turning arm, and described rotary cylinder (3) is connected with described turning arm by described connector, and described turning arm is connected with described fire door (1).
3. furnace door control mechanism according to claim 1, it is characterized in that, described position-limit mechanism comprises limited block, and described limited block is provided with adjustment screw, when described limited block is arranged on described fire door (1) and declines on corresponding position and when rotation on corresponding position.
4. furnace door control mechanism according to claim 1, is characterized in that, on described lift cylinder (2) and rotary cylinder (3), is all connected with flow speed control valve (4).
5. furnace door control mechanism according to claim 4, is characterized in that, on described lift cylinder (2) and rotary cylinder (3), is all connected with pressure regulator valve.
6. furnace door control mechanism according to claim 5, is characterized in that, on described lift cylinder (2) and rotary cylinder (3), is equipped with the buffer for slowing down impact.
7. furnace door control mechanism according to claim 6, is characterized in that, on described lift cylinder (2) and rotary cylinder (3), is equipped with the triple valve for pressurize.
8. furnace door control mechanism according to claim 1, is characterized in that, the described axis of guide (5) is the ball axis of guide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320859115.7U CN203744726U (en) | 2013-12-24 | 2013-12-24 | Furnace door control mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320859115.7U CN203744726U (en) | 2013-12-24 | 2013-12-24 | Furnace door control mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203744726U true CN203744726U (en) | 2014-07-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320859115.7U Expired - Lifetime CN203744726U (en) | 2013-12-24 | 2013-12-24 | Furnace door control mechanism |
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| Country | Link |
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| CN (1) | CN203744726U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596314A (en) * | 2015-01-08 | 2015-05-06 | 北京七星华创电子股份有限公司 | Oven door control mechanism of heat treatment equipment |
| CN106586561A (en) * | 2016-12-22 | 2017-04-26 | 蓝思科技（长沙）有限公司 | Rotary material taking device |
| CN111637738A (en) * | 2020-06-05 | 2020-09-08 | 北京北方华创微电子装备有限公司 | Furnace door control device for vertical furnace and vertical furnace |
| CN112941334A (en) * | 2021-01-08 | 2021-06-11 | 西安聚能装备技术有限公司 | Melting station safety device for vacuum consumable arc furnace |
| CN112944914A (en) * | 2021-02-01 | 2021-06-11 | 中国电子科技集团公司第四十八研究所 | Vertical oxidation furnace swing furnace door device and vertical oxidation furnace |
| CN114061316A (en) * | 2021-11-15 | 2022-02-18 | 北京北方华创微电子装备有限公司 | Vertical heat treatment equipment |
-
2013
- 2013-12-24 CN CN201320859115.7U patent/CN203744726U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596314A (en) * | 2015-01-08 | 2015-05-06 | 北京七星华创电子股份有限公司 | Oven door control mechanism of heat treatment equipment |
| CN106586561A (en) * | 2016-12-22 | 2017-04-26 | 蓝思科技（长沙）有限公司 | Rotary material taking device |
| CN106586561B (en) * | 2016-12-22 | 2024-03-19 | 蓝思科技（长沙）有限公司 | Rotary material taking device |
| CN111637738A (en) * | 2020-06-05 | 2020-09-08 | 北京北方华创微电子装备有限公司 | Furnace door control device for vertical furnace and vertical furnace |
| CN112941334A (en) * | 2021-01-08 | 2021-06-11 | 西安聚能装备技术有限公司 | Melting station safety device for vacuum consumable arc furnace |
| CN112944914A (en) * | 2021-02-01 | 2021-06-11 | 中国电子科技集团公司第四十八研究所 | Vertical oxidation furnace swing furnace door device and vertical oxidation furnace |
| WO2022160546A1 (en) * | 2021-02-01 | 2022-08-04 | 中国电子科技集团公司第四十八研究所 | Vertical oxidation furnace door swinging apparatus and vertical oxidation furnace |
| CN114061316A (en) * | 2021-11-15 | 2022-02-18 | 北京北方华创微电子装备有限公司 | Vertical heat treatment equipment |
| CN114061316B (en) * | 2021-11-15 | 2024-03-26 | 北京北方华创微电子装备有限公司 | Vertical heat treatment equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180328 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140730 |
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| CX01 | Expiry of patent term |