CN104596314A - Oven door control mechanism of heat treatment equipment - Google Patents
Oven door control mechanism of heat treatment equipment Download PDFInfo
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- CN104596314A CN104596314A CN201510010056.XA CN201510010056A CN104596314A CN 104596314 A CN104596314 A CN 104596314A CN 201510010056 A CN201510010056 A CN 201510010056A CN 104596314 A CN104596314 A CN 104596314A
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- equipment
- control mechanism
- heating processing
- fire door
- furnace door
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Abstract
The invention relates to an oven door control mechanism of heat treatment equipment, which belongs to the technical field of horizontal semiconductor heat treatment equipment. By arranging a power-driven device, a transmission device and a control unit, and utilizing the transmission function between a spline hub and a spline bearing, the function of driving the oven door to rotate and lift is realized. The oven door control mechanism provided by the invention flexibly controls the movement of the oven door, is convenient to operate and good in sealing performance, solves the problems of massive heat dissipation and heat radiation of the heat treatment equipment, and saves the cost, thus the technology efficiency of the horizontal semiconductor heat treatment equipment and the reliability of the mechanism are improved.
Description
Technical field
The invention belongs to the horizontal technical field of heat treatment equipment of semiconductor, relate to a kind of furnace door control mechanism of semiconductor heat treatment equipment, more specifically, relate to a kind of realize Equipment for Heating Processing fire door lifting and the controlling organization of rotary motion.
Background technology
The horizontal Equipment for Heating Processing of semiconductor can comprise such as horizontal oxidation furnace, diffusion furnace, Horizental annealer etc.Before the horizontal Equipment for Heating Processing of semiconductor starts to carry out technique, before namely quartz boat and silicon chip being sent into heated chamber, need to open fire door; After technique terminates, after namely quartz boat and silicon chip being shifted out heated chamber, need closed furnace door, to play the effects such as isolation heat.Because the horizontal Equipment for Heating Processing of semiconductor of silicon chip processing needs sealing preferably, especially show that fire door plays the effect of isolation heat in the horizontal Equipment for Heating Processing of semiconductor.
But the fire door of the horizontal Equipment for Heating Processing of semiconductor used now is mostly be structure as a whole with the pull bar of carrying quartz boat, and the end namely for the pull bar carrying silicon chip is provided with fire door, and wherein pull bar is fixedly connected with fire door.In technical process, quartz boat and silicon chip are sent into heated chamber, fire door and the horizontal Equipment for Heating Processing of semiconductor seal, and when not carrying out technical process, quartz boat and silicon chip are removed heated chamber, and fire door is had to open wide.So, under the state that fire door opens wide, cause Equipment for Heating Processing to be dispelled the heat in a large number, not only waste the energy, too increase the time of heating heat-treatment equipment during reprocessing, reduce operating efficiency.
In sum, there is poor sealing performance in the fire door mechanism in the horizontal Equipment for Heating Processing of existing semiconductor, uses that underaction, cost are higher, the defect of inefficiency, therefore, industry need badly provide a kind of favorable sealing property, flexible operation furnace door control mechanism to solve the problem.
Summary of the invention
The object of the invention is, for there is above-mentioned defect in prior art, to provide a kind of furnace door control mechanism of Equipment for Heating Processing, not only favorable sealing property, the motion of fire door can be controlled simultaneously flexibly, thus improve the process efficiency of the horizontal Equipment for Heating Processing of semiconductor.
For solving the problem, the invention provides a kind of furnace door control mechanism of Equipment for Heating Processing, also comprising Power Drive Unit, transmission device and control unit;
Described Power Drive Unit comprises flat-removing air cyclinder and rotary cylinder; Described flat-removing air cyclinder moves up and down for driving described transmission device, and described rotary cylinder rotates for driving described transmission device;
Described transmission device comprises the hub splines and spline bearing that cooperatively interact, described hub splines inwall is provided with internal spline, described spline bearing outer surface is provided with the spline segment adapted with internal spline, and the outboard end of described spline bearing is fixedly connected sequentially a support plate and the connecting portion for being fixedly connected with described fire door;
Described control unit can control the opening and closing of described flat-removing air cyclinder or rotary cylinder respectively;
Wherein, described flat-removing air cyclinder is connected with the medial extremity of described spline bearing and drives it to move reciprocatingly on the axial direction of described spline bearing, move up and down to drive described fire door, described rotary cylinder is connected with described hub splines by drive rod, and drive described hub splines to rotate in its radial direction, rotate to drive described fire door.
Preferably, the outboard end of described fire door is provided with metal ferrule, is provided with for reducing the holddown spring cushioned between described metal ferrule and described connecting portion.
Preferably, be provided with sealing device between described fire door and described Equipment for Heating Processing, described sealing device comprises O RunddichtringO and sealing ring compressing tablet; Described sealing ring compressing tablet contacts with described Equipment for Heating Processing, and described O RunddichtringO contacts with described fire door.
Preferably, described furnace door control mechanism also comprises position-limit mechanism, and described position-limit mechanism is for the position of the lifting and rotation that limit described fire door.
Preferably, described position-limit mechanism comprises limited block, and described limited block is provided with adjustment screw, and described limited block is arranged on position corresponding on position corresponding when described fire door declines and when rotating.
Preferably, described lift cylinder and described rotary cylinder are all connected with flow speed control valve or/and pressure regulator valve.
Preferably, described fire door is Quartz furnace door, and the centre of described Quartz furnace door is provided with the interlayer for filling heat-preservation cotton.
Preferably, described furnace door control mechanism also comprises: with the fixed installation base be connected with bottom described Power Drive Unit for being secured to by described Power Drive Unit on external equipment.
Preferably, described fixed installation base is also provided with the radiator fan for dispelling the heat.
Preferably, described hub splines is fixed on described fixed installation base by axle sleeve bearing.
As can be seen from technique scheme, the present invention, by arranging Power Drive Unit and transmission device, utilizes the gearing between hub splines and spline bearing, realizes driving fire door to rotate the function with lifting.Furnace door control mechanism provided by the invention, can control the action of fire door flexibly, easy to operate, good seal performance, avoid Equipment for Heating Processing to dispel the heat in a large number and thermal-radiating problem, saved cost, and then improve the process efficiency of the horizontal Equipment for Heating Processing of semiconductor and the reliability of mechanism.
Accompanying drawing explanation
By reference to the accompanying drawings, and by reference to detailed description below, will more easily there is more complete understanding to the present invention and more easily understand its adjoint advantage and feature, wherein:
Fig. 1 is the structural representation of the furnace door control mechanism of a kind of Equipment for Heating Processing of the embodiment of the present invention.
[in figure Reference numeral]:
10, flat-removing air cyclinder; 20, rotary cylinder; 30, hub splines; 40, spline bearing; 41, spline segment; 50, support plate; 60, fire door; 70, connecting portion; 80, drive rod; 90, metal ferrule; 100, holddown spring; 110, base is fixedly mounted; 120, radiator fan; 130, axle sleeve bearing.
Detailed description of the invention
For making content of the present invention clearly understandable, below in conjunction with Figure of description, content of the present invention is described further.Certain the present invention is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection scope of the present invention.Secondly, the present invention's detailed statement that utilized schematic diagram to carry out, when describing example of the present invention in detail, for convenience of explanation, schematic diagram, should in this, as limitation of the invention not according to general ratio partial enlargement.
It should be noted that, in following embodiment, utilize the schematic diagram of Fig. 1 to carry out detailed statement to the furnace door control mechanism by a kind of Equipment for Heating Processing of the present invention.Describe in detail embodiments of the present invention time, for convenience of explanation, each schematic diagram not according to general scale and carried out partial enlargement and omit process, therefore, should avoid in this, as limitation of the invention.
The horizontal Equipment for Heating Processing of semiconductor can comprise such as horizontal oxidation furnace, diffusion furnace, Horizental annealer etc.Before the horizontal Equipment for Heating Processing of semiconductor starts to carry out technique, before namely quartz boat and silicon chip being sent into heated chamber, need to open fire door; After technique terminates, after namely quartz boat and silicon chip being shifted out heated chamber, need closed furnace door, to play the effects such as isolation heat.
Start below to introduce the specific embodiment of the present invention.
Refer to Fig. 1, Fig. 1 is the structural representation of the furnace door control mechanism of a kind of Equipment for Heating Processing of the embodiment of the present invention.As shown in Figure 1, the invention provides a kind of furnace door control mechanism of Equipment for Heating Processing, comprise fire door 60, also comprise Power Drive Unit, transmission device and control unit.The present invention, by arranging Power Drive Unit, transmission device and control unit, realizes driving fire door to rotate the function with lifting.
Concrete, in the present embodiment, Power Drive Unit comprises flat-removing air cyclinder 10 and rotary cylinder 20; Flat-removing air cyclinder 10 moves up and down for drive transmission, and rotary cylinder 20 rotates for drive transmission.
Transmission device comprises hub splines 30 and spline bearing 40, and hub splines 30 inwall is provided with internal spline, and spline bearing 40 outer surface is provided with the spline segment 41 matched with internal spline.One end of spline bearing 40 is flexibly connected on the axial direction of spline bearing 40 with flat-removing air cyclinder 10, and the other end of spline bearing 40 is fixedly connected with a support plate 50, and the outboard end of support plate 50 has the connecting portion 70 for being fixedly connected with fire door 60; Hub splines 30 is flexibly connected with rotary cylinder 20 by drive rod 80.Controlled the lifting of fire door 60 by flat-removing air cyclinder 10, controlled the rotation of fire door 60 by rotary cylinder 20, carry on a shoulder pole radial direction and to topple power, make mechanism more stable by spline bearing 40, structure is simple, reliable and stable.In addition, control unit can control the opening and closing of flat-removing air cyclinder 10 or rotary cylinder 20 respectively.
The present invention to be connected with the medial extremity of spline bearing 40 by flat-removing air cyclinder 10 and to drive it to move reciprocatingly on the axial direction of spline bearing 40, move up and down to drive fire door 60, rotary cylinder 20 is connected with hub splines 30 by drive rod 80, and drive hub splines 30 to rotate in its radial direction, rotate to drive fire door 60.
In order to play the effect of buffering in the moment of closing fire door 60; the outboard end of fire door 60 is provided with metal ferrule 90; be provided with for reducing the holddown spring 100 cushioned between described metal ferrule 90 and described connecting portion 70; the existing cushioning effect of holddown spring 100; possess sealing function simultaneously, not only protect Quartz furnace door but also protect the process duct in Equipment for Heating Processing.
In addition, be provided with sealing device between fire door 60 and described Equipment for Heating Processing, described sealing device comprises O RunddichtringO and sealing ring compressing tablet; Described sealing ring compressing tablet contacts with described Equipment for Heating Processing, and described O RunddichtringO contacts with described fire door 60.Sealing device effectively can improve sealing effectiveness, and Equipment for Heating Processing is hedged off from the outer world, and achieves in process duct and strictly seals with the external world, prevent a large amount of heat radiation, simultaneously economize energy.Meanwhile, described fire door 60 is preferably Quartz furnace door, and the centre of described Quartz furnace door is provided with the interlayer for filling heat-preservation cotton, ensure that the effect of Quartz furnace door insulation.
In order to make fire door 60 realize accurate opening and closing, furnace door control mechanism also comprises position-limit mechanism, and position-limit mechanism is for limiting the described lifting of fire door 60 and the position of rotation; Position-limit mechanism comprises limited block, and limited block is provided with adjustment screw, and limited block is arranged on position corresponding on position corresponding when fire door 60 declines and when rotating.The motion process of fire door accurately can be controlled easily by arranging position-limit mechanism, cost-saving, improve operating efficiency.
In the present embodiment, furnace door control mechanism also comprises: with the fixed installation base 110 be connected with bottom Power Drive Unit for being secured to by Power Drive Unit on external equipment; Fixed installation base 110 is also provided with the radiator fan 120 for dispelling the heat; Hub splines 30 by axle sleeve bearing 130 be fixed on fixed installation base on 110.
The present invention can also increase triple valve in the gas circuit of two cylinders, makes cylinder can realize automatic cut-off protection and holds.Even if there is unexpected powering-off state, cylinder is pressurize still, withstands fire door, avoids something unexpected happened.
Fire door, in motion process, can also utilize flow speed control valve or/and pressure regulator valve makes the stable movement, slowly of cylinder, and fire door rotates and is also able to steadily, slowly, like this, fire door can be steadily arrived spacing, reduces to impact.
In sum, the present invention, by arranging Power Drive Unit and transmission device, utilizes the gearing between hub splines and spline bearing, realizes driving fire door to rotate the function with lifting.Furnace door control mechanism provided by the invention, can control the action of fire door flexibly, easy to operate, good seal performance, avoid Equipment for Heating Processing to dispel the heat in a large number and thermal-radiating problem, saved cost, and then improve the process efficiency of the horizontal Equipment for Heating Processing of semiconductor and the reliability of mechanism.
In addition, it should be noted that, unless stated otherwise or point out, otherwise the term " first " in description, " second ", " the 3rd " etc. describe only for distinguishing each assembly, element, step etc. in description, instead of for representing logical relation between each assembly, element, step or ordinal relation etc.
Be understandable that, although the present invention with preferred embodiment disclose as above, but above-described embodiment and be not used to limit the present invention.For any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the technology contents of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (10)
1. a furnace door control mechanism for Equipment for Heating Processing, comprises fire door, it is characterized in that, also comprises Power Drive Unit, transmission device and control unit;
Described Power Drive Unit comprises flat-removing air cyclinder and rotary cylinder; Described flat-removing air cyclinder moves up and down for driving described transmission device, and described rotary cylinder rotates for driving described transmission device;
Described transmission device comprises the hub splines and spline bearing that cooperatively interact, described hub splines inwall is provided with internal spline, described spline bearing outer surface is provided with the spline segment adapted with internal spline, and the outboard end of described spline bearing is fixedly connected sequentially a support plate and the connecting portion for being fixedly connected with described fire door;
Described control unit can control the opening and closing of described flat-removing air cyclinder or rotary cylinder respectively;
Wherein, described flat-removing air cyclinder is connected with the medial extremity of described spline bearing and drives it to move reciprocatingly on the axial direction of described spline bearing, move up and down to drive described fire door, described rotary cylinder is connected with described hub splines by drive rod, and drive described hub splines to rotate in its radial direction, rotate to drive described fire door.
2. the furnace door control mechanism of Equipment for Heating Processing according to claim 1, is characterized in that, the outboard end of described fire door is provided with metal ferrule, is provided with for reducing the holddown spring cushioned between described metal ferrule and described connecting portion.
3. the furnace door control mechanism of Equipment for Heating Processing according to claim 1, is characterized in that, is provided with sealing device between described fire door and described Equipment for Heating Processing, and described sealing device comprises O RunddichtringO and sealing ring compressing tablet; Wherein, described sealing ring compressing tablet contacts with described Equipment for Heating Processing, and described O RunddichtringO contacts with described fire door.
4. the furnace door control mechanism of Equipment for Heating Processing according to claim 1, is characterized in that, described furnace door control mechanism also comprises position-limit mechanism, and described position-limit mechanism is for the position of the lifting and rotation that limit described fire door.
5. the furnace door control mechanism of Equipment for Heating Processing according to claim 4, it is characterized in that, described position-limit mechanism comprises limited block, and described limited block is provided with adjustment screw, and described limited block is arranged on position corresponding on position corresponding when described fire door declines and when rotating.
6. the furnace door control mechanism of Equipment for Heating Processing according to claim 1, is characterized in that, described lift cylinder and described rotary cylinder are all connected with flow speed control valve or/and pressure regulator valve.
7. the furnace door control mechanism of Equipment for Heating Processing according to claim 1, is characterized in that, described fire door is Quartz furnace door, and the centre of described Quartz furnace door is provided with the interlayer for filling heat-preservation cotton.
8. the furnace door control mechanism of Equipment for Heating Processing according to claim 1, it is characterized in that, described furnace door control mechanism also comprises: with the fixed installation base be connected with bottom described Power Drive Unit for being secured to by described Power Drive Unit on external equipment.
9. the furnace door control mechanism of Equipment for Heating Processing according to claim 8, is characterized in that, described fixed installation base is also provided with the radiator fan for dispelling the heat.
10. the furnace door control mechanism of Equipment for Heating Processing according to claim 8, is characterized in that, described hub splines is fixed on described fixed installation base by axle sleeve bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510010056.XA CN104596314A (en) | 2015-01-08 | 2015-01-08 | Oven door control mechanism of heat treatment equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510010056.XA CN104596314A (en) | 2015-01-08 | 2015-01-08 | Oven door control mechanism of heat treatment equipment |
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| CN104596314A true CN104596314A (en) | 2015-05-06 |
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| CN201510010056.XA Pending CN104596314A (en) | 2015-01-08 | 2015-01-08 | Oven door control mechanism of heat treatment equipment |
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Cited By (5)
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| CN108240767A (en) * | 2016-12-26 | 2018-07-03 | 北京北方华创微电子装备有限公司 | A kind of diffusion furnace oven door sealing structure |
| CN108544286A (en) * | 2018-05-07 | 2018-09-18 | 安庆世昌自动化设备有限公司 | A kind of boxlike bar processing automatic reversing apparatus |
| CN109506471A (en) * | 2018-11-30 | 2019-03-22 | 浙江智造热成型科技有限公司 | The fire door control device of heating furnace |
| CN111608521A (en) * | 2019-02-22 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Cover opening device for chamber and semiconductor processing equipment |
| CN112542410A (en) * | 2020-12-22 | 2021-03-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Reaction furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108240767A (en) * | 2016-12-26 | 2018-07-03 | 北京北方华创微电子装备有限公司 | A kind of diffusion furnace oven door sealing structure |
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| CN109506471A (en) * | 2018-11-30 | 2019-03-22 | 浙江智造热成型科技有限公司 | The fire door control device of heating furnace |
| CN111608521A (en) * | 2019-02-22 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Cover opening device for chamber and semiconductor processing equipment |
| CN112542410A (en) * | 2020-12-22 | 2021-03-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Reaction furnace |
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