CN107166074B - A kind of double gate valves of high vacuum - Google Patents
A kind of double gate valves of high vacuum Download PDFInfo
- Publication number
- CN107166074B CN107166074B CN201710420311.7A CN201710420311A CN107166074B CN 107166074 B CN107166074 B CN 107166074B CN 201710420311 A CN201710420311 A CN 201710420311A CN 107166074 B CN107166074 B CN 107166074B
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- Prior art keywords
- valve
- hanger
- pilot valve
- high vacuum
- double
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/312—Line blinds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanically-Actuated Valves (AREA)
- Sliding Valves (AREA)
Abstract
The invention discloses a kind of double gate valves of high vacuum, comprising: main valve body, for realizing the valve body of high vacuum control；The main valve body is internally provided with the double valve plates of movable sealing connection；Executing agency, the mechanism being used to provide power；The executing agency is arranged on main valve body；Transmission mechanism, for transmitting the mechanism of executing agency's power；The transmission mechanism is connect with executing agency and main valve body respectively；Pilot valve, the valve for being abolished to main valve body inside condition of high vacuum degree；The pilot valve setting is fixedly connected inside main valve body with valve plate, and is sequentially connected with transmission mechanism.The double gate valves of the high vacuum balance the pressure on valve plate both sides so that high vacuum gate valve, when opening from closed position, pilot valve can be opened first, so that valve plate does not stress when opening, can avoid valve damage caused by being switched on because of twice of lack of equilibrium valve plate of pressure；And the gate valve stable structure is reliable, economic security, installation duty is small, realizes PLC control.
Description
Technical field
The present invention relates to valve technology field more particularly to a kind of double gate valves of high vacuum.
Background technique
The double gate valves of high vacuum have promoting menstruation big, and medium is without hindrance, simple and stable structure, and vacuum sealing performance reliably waits spies
Point, be widely used in vacuum coating, vacuum heat treatment, vacuum welding, etc. in vacuum industry.It is equipped on the double gate valves of high vacuum
Solenoid valve connects valve chamber, plays the role of first balancing flap both sides pressure when opening, and can reduce the power output needed for opening, drop
Low cost.But when electromagnetism defective valve, if valve continues to move, balance is not achieved in flap both sides pressure, and motor is also
It continuing to rotate, this may cause the damage of valve clack sealing ring, meanwhile, it may cause the damage of motor, eventually cause bigger
Economic loss.
Due to the propulsion of automatic industrial, motor is installed on the double gate valves of high vacuum, then mix electromagnetic induction device, it can
It realizes electromagnetic induction limit, and then controls motor running, realize PLC control.But electromagnetic induction device induction force is to different
Metal, distance of reaction are that have very big difference, and there are the risks of failure.Meanwhile motor drive is unstable, transmission efficiency is low, if
It needs to realize long-range control, then needs to take biggish cost or large space installs other attachmentes, it is uneconomical.
Thus, it is necessary to technological improvement be carried out to such situation, to meet requirement.
Chinese patent literature (day for announcing: on August 21st, 2013, notification number: CN103256397A) discloses a kind of two-way
Sealing plug-in board valve, including plate valve chest, valve opening and closing mechanism, gate valve valve and gate valve connecting flange, plate valve chest
Two parallel side bottoms are provided with the connecting hole to match with gate valve valve, and valve opening and closing mechanism includes two lifting cylinders, two groups
Gate valve lifting seat and two groups of gate valves linkage torque arm, lifting cylinder stretch out boom end and are fixedly connected with gate valve linkage torque arm,
It is hinged with gate valve lifting seat in gate valve linkage torque arm, gate valve lifting seat end is fixed with gate valve valve, two gate valves
Valve distinguishes the corresponding connecting hole in face gate valve housing side bottom.Pipeline vacuumizes low pressure effect, so that gate valve valve
The more inhale the more tight；It is normal pressure in pipeline, wherein the gate valve valve of side is forced to open, so that positive pressure is in other side
Gate valve valve on so that the gate valve valve the more is inhaled the more tight.
Chinese patent literature (day for announcing: on July 11st, 2012, notification number: CN102563112A) discloses a kind of vacuum
The vacuum gate valve of room, including cylinder, valve body and core assembly, valve body are hollow cuboid case structure, a left side for valve body
Right two sidewalls are fixedly connected with the vacuum chamber for being located at its two sides respectively, have valve hole on the left and right sides wall of valve body,
Valve hole is communicated with the indoor workpiece through-hole of vacuum for being located at valve body two sides, and core assembly is set in the central space of valve body,
Cylinder end passes through body top and connect with core assembly；Core assembly includes symmetrically arranged two movable plates, two work
Moveable hinge is set between movable plate and is connect by moveable hinge with cylinder end, the bottom of two movable plates is respectively equipped with guide wheel.This
The defect that vacuum gate valve overcomes traditional vacuum gate valve occupied space big can also preferably be applied to large glass coating process
Vacuum film coating chamber.Meanwhile sealing effect is good, valve core structure is also more firm, is unlikely to deform, and processing and daily maintenance are all
It is more convenient.
Chinese patent literature (day for announcing: on July 29th, 2015, notification number: CN204512485U) discloses a kind of pneumatic
Vacuum gate valve, including vacuum gate valve, the vacuum gate valve include valve body, spool reciprocating in valve body,
Sealing plate A, sealing plate B in spool, it is characterised in that: the Pneumatic vacuum gate valve further includes cylinder.
The problems such as that there is also structural stabilities is poor for above-mentioned technical proposal gate valve, and valve body is easy to damage because of attachment failure.
Summary of the invention
The purpose of the present invention is to solve the above problem present in the double gate valves of existing high vacuum, and provide a kind of knot
Structure is reliable and stable, economic security, avoids the occurrence of and causes valve body to damage because of attachment failure, economical can must realize control
The double gate valves of high vacuum.
The technical scheme adopted by the invention for realizing the object of the invention is: a kind of double gate valves of high vacuum, comprising:
Main valve body, for realizing the valve body of high vacuum control；The main valve body is internally provided with movable sealing connection
Double valve plates；
Executing agency, the mechanism being used to provide power；The executing agency is arranged on main valve body；
Transmission mechanism, for transmitting the mechanism of executing agency's power；The transmission mechanism respectively with executing agency and master
Valve body connection；
Pilot valve, the valve for being abolished to main valve body inside condition of high vacuum degree；The pilot valve is arranged in main valve body
Inside is fixedly connected with double valve plates, and is sequentially connected with transmission mechanism.
The double gate valves of the high vacuum, will hold by the way that a pilot valve is arranged inside main valve body, while using a transmission mechanism
Row mechanism links together with pilot valve, so that high vacuum gate valve, when opening from closed position, pilot valve can be opened in advance,
Abolish the vacuum inside main valve body, to balance the pressure on double valve plates both sides so that double valve plates open when do not stress, can avoid because
Valve damage caused by the pressure on lack of equilibrium double valve plates both sides is switched on.When main valve body is in close state, pass through execution
Mechanism exports certain power, and transmission mechanism is driven to open pilot valve, but is to maintain that double valve plates are motionless, the pressure of double valve plates two sides
Reach balance because of ganging up for pilot valve, at this point, double valve plates two sides do not stress.Then, transmission mechanism continues to act, and lifts double
Valve plate, valve are opened.When needing to close main valve body in the open state, certain power is exported by executing agency, is driven
Double valve plates move down.When double valve plates reach limit point, makes double valve plates and the sealing face contact inside main valve body and compress close
Envelope.Transmission mechanism continues to act, until closing pilot valve and sealing.Valve running stops, and valve is closed.The double plates of the high vacuum
Valve balances the pressure on double valve plates both sides, makes so that high vacuum gate valve, when opening from closed position, pilot valve can be opened first
It obtains double valve plates not stressing when opening, can avoid valve damage caused by being switched on because of twice of lack of equilibrium double valve plates of pressure；
And the gate valve stable structure is reliable, economic security.
Preferably, the pilot valve includes pilot valve hanger, guide's valve support, torsionspring, pilot valve, spool
Gland and guide's valve seat.The above structure of pilot valve had both facilitated or the connection of main valve body, while also facilitating and realizing pilot valve and master
Sequentially-operating between valve body double valve plates.
Preferably, guide's valve seat is fixed on double valve plates, one end of the pilot valve and guide's valve seat
It is connected by a sealing ring movable sealing, the other end of the pilot valve is fixedly connected with guide's valve support and passes through guide
Valve support, which drives, realizes switch motion, and the spool gland is pressed in pilot valve.Above structure both facilitates pilot valve
Setting, while can also guarantee that pilot valve is opened in advance before double valve plates are opened, and to balance the pressure of double valve plates two sides, is made
It obtains double valve plates not stressing when opening, guarantees the normal use of valve.
Preferably, being provided with spool mounting hole in guide's valve support, the pilot valve is arranged in spool
Inside mounting hole.Spool mounting hole is set in guide's valve support, facilitates the installation of pilot valve to guarantee that pilot valve can lead to
Crossing pilot valve bracket drives realization to open or close.
Preferably, the pilot valve hanger is fixed on double valve plates, guide's valve support is arranged in pilot valve
The inside of hanger, and the upper end of guide's valve support is connect by a upper end pin shaft with pilot valve hanger, the torsionspring
The inside of pilot valve bracket is set and is set on the pin shaft of upper end, the torsionspring is pressed on pilot valve hanger and guide
In valve support, the lower end of the torsionspring, which is supported, to be located in pilot valve.Pilot valve hanger and guide's valve support preferred structure
For U-shaped structure, such structure both facilitates being fixedly connected between double valve plates, while also facilitating and realizing pilot valve and bivalve
The sequence of plate is opened, and when in the closed position, pilot valve hanger, guide's valve support and pilot valve are twisted spring compression
On double valve plates, while double valve plates are also at original seal position, and when needing to open valve, guide's valve support is in transmission mechanism
Drive under overcome spring force to lift pilot valve, open pilot valve, and then open double valve plates again, realize sequentially-operating,
Guarantee that double valve plates do not stress two sides when opening.
Preferably, the pilot valve is connect by a guiding connection mechanism with transmission mechanism.Pilot valve is led by one
It is connect to bindiny mechanism with transmission mechanism, by guiding connection mechanism guide's valve events can be played with the biography of guiding and power in this way
The effect of passing.
Preferably, the guiding connection mechanism includes a link block, drive rod and guide pad, the guide pad is set
It sets on transmission mechanism, the link block is connect with pilot valve, and the lower end of the drive rod is threadedly coupled with link block, institute
The upper end for the drive rod stated is threaded through on guide pad.It is connect in order to facilitate pilot valve with transmission mechanism, one guiding connection machine of setting
Structure, is connect by link block with pilot valve, is connect by guide pad with transmission mechanism, and such structure is to guarantee in guide
Spool has one section of buffer time before opening after opening with double valve plates, to guarantee that vacuum can be abolished completely, meanwhile, it is capable to realize double
Valve plate is first detached from sealing surface backward, is then elevated such process again.Guide pad is to realize and drive first in drive rod
Pilot valve bracket is oriented to during acting.
Preferably, the transmission mechanism includes hanger, hanger, ball-screw and ball screw, the hanger is solid
It is scheduled on inside main valve body, the hanger is arranged on the inside of hanger and is connected on hanger by a pre-tightening apparatus, hangs simultaneously
Arm is hinged with double valve plates, and the ball screw is connect with pre-tightening apparatus, and the upper end of the ball-screw and executing agency connect
It connects, the lower end of the ball-screw is connect with ball screw, and the pre-tightening apparatus and hanger are slidably connected.Driver
Structure setting hanger be in order to realize being fixedly connected between pilot valve and main valve body, hanger be in order to realize it is fixed to pilot valve and
Castering action.Ball-screw and ball screw are to improve in order to which the rotary force for realizing executing agency is converted to hanger,
To realize the sequentially-operating of pilot valve and double valve plates.In order to realize double valve plates in opening procedure in advance with sealing surface be detached from, then
Realize the movement lifted, hanger is hinged with double valve plates.
Preferably, the pre-tightening apparatus includes preloading spring, preloading spring seat and connection cover for seat, the preload bullet
Spring abutment be arranged on hanger, the attachment base is set in hanger, the preloading spring be pressed on preloading spring seat and
It connects between cover for seat.It is for the sealed connection between entire gate valve and to switch dynamic that pre-tightening apparatus, which is set as above structure,
The organic coordination of work acts.
Preferably, the attachment base puts on setting screw mounting base, the ball screw is fixed on screw installation
Inside seat upper end, sliding sleeve is provided on the hanger, the screw mounting base is slidably matched with sliding sleeve.
Preferably, executing agency is intelligent multi-rotary electric actuator, the executing agency includes electronics control
Molding block, electrical feedback module and mechanical limiting mechanism.Executing agency is preferably intelligent multi-rotary electric actuator, can
Complicated connection is effectively avoided, the sensibility because of electromagnetic induction to material is avoided, valve installation space is saved, facilitates realization
PLC control.
The beneficial effects of the present invention are: the double gate valves of the high vacuum, so that high vacuum gate valve is opened from closed position
When, pilot valve can be opened first, and the pressure on double valve plates both sides is balanced, so that double valve plates do not stress when opening, can avoid because not putting down
Valve damage caused by the pressure that twice of double valve plates of weighing apparatus is switched on；And the gate valve stable structure is reliable, economic security.Intelligence
The setting of energy type multi-rotary electric actuator, relatively old-fashioned motor are powered on for magnetic-inductive device, avoid complicated line
Road connection, avoids the sensibility because of electromagnetic induction to material, saves valve installation space, facilitates and realizes PLC control.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the double gate valves of high vacuum of the present invention；
Fig. 2 is the enlarged drawing in Fig. 1 at A；
Fig. 3 is B-B cross-sectional view in Fig. 2；
In figure: 1, main valve body, 2, double valve plates, 3, executing agency, 4, transmission mechanism, 5, pilot valve, 6, pilot valve hanger, 7,
Guide's valve support, 8, torsionspring, 9, pilot valve, 10, spool gland, 11, guide's valve seat, 12, mounting hole, 13, sealing ring,
14, spool mounting hole, 15, upper end pin shaft, 16, guiding connection mechanism, 17, link block, 18, drive rod, 19, guide pad, 20, under
Hold pin shaft, 21, hanger, 22, hanger, 23, ball-screw, 24, ball screw, 25, pre-tightening apparatus, 26, preloading spring, 27, pre-
Tight spring base, 28, connection cover for seat, 29, screw mounting base, 30, sliding sleeve.
Specific embodiment
Technical solution of the present invention is described in further detail below by specific embodiment and in conjunction with attached drawing.
Embodiment 1:
In Fig. 1, Fig. 2, embodiment shown in Fig. 3, a kind of double gate valves of high vacuum, comprising:
Main valve body 1, for realizing the valve body of high vacuum control；Main valve body 1 is internally provided with the bivalve of movable sealing connection
Plate 2；
Executing agency 3, the mechanism being used to provide power；Executing agency 3 is arranged on main valve body 1；
Transmission mechanism 4, for transmitting the mechanism of 3 power of executing agency transmitting；Transmission mechanism 4 respectively with executing agency 3 and
Main valve body 1 connects；
Pilot valve 5, the valve for being abolished to 1 inside condition of high vacuum degree of main valve body；Pilot valve 5 is arranged in main valve body 1
Portion is simultaneously fixedly connected with double valve plates 2, and is sequentially connected with transmission mechanism 4.
Pilot valve 5 includes pilot valve hanger 6, guide's valve support 7, torsionspring 8, pilot valve 9, spool gland 10 and elder generation
Guide valve seat 11.
Mounting hole 12 is provided on double valve plates 2, guide's valve seat 11 is fixed on inside mounting hole 12, one end of pilot valve 9
It is connect with guide's valve seat 9 by 13 movable sealing of a sealing ring, the other end of pilot valve 9 is fixedly connected with guide's valve support 7
And driven by guide's valve support 7 and realize switch motion, the pressure of spool gland 10 is arranged in pilot valve 9.
Spool mounting hole 14 is provided in guide's valve support 7, pilot valve 9 is arranged inside spool mounting hole 14.
The setting of the U-shaped slot structure of pilot valve hanger 6, pilot valve hanger 6 are fixed on double valve plates 2, and guide's valve support 7 is in U
Type structure setting, the inside of pilot valve hanger 6 is arranged in guide's valve support 7, and the upper end of guide's valve support 7 passes through a upper end
Pin shaft 15 is connect with pilot valve hanger 6, and torsionspring 8 is arranged in the inside of pilot valve bracket 7 and is set on upper end pin shaft 15,
Torsionspring 8 is pressed on pilot valve hanger 6 and guide's valve support 7, and the lower end of torsionspring 8, which is supported, to be located in pilot valve 9.
Pilot valve 5 is connect by a guiding connection mechanism 16 with transmission mechanism 4.Guiding connection mechanism 16 includes a link block
17, drive rod 18 and guide pad 19, guide pad 19 are arranged on transmission mechanism 4, and link block is connect with pilot valve, drive rod 18
Lower end is threadedly coupled with link block 17, and the upper end of drive rod 18 is threaded through on guide pad 19.Link block 17 passes through a lower end pin shaft
20 are connected to side lower end of the guide's valve support 7 far from pilot valve 9.
Transmission mechanism 4 includes hanger 21, hanger 22, ball-screw 23 and ball screw 24, and hanger 21 is fixed on main valve body 1
Inside, the setting of hanger 22 are connected to hanger 21 in the inside of hanger 21 and by a pre-tightening apparatus 25, while hanger 22 and double
Valve plate 2 is hinged, and ball screw 24 is connect with pre-tightening apparatus 25, and the upper end of ball-screw 23 is connect with executing agency 3, ball-screw
23 lower end is connect with ball screw 24, and pre-tightening apparatus 25 and hanger 21 are slidably connected.
Pre-tightening apparatus 25 includes preloading spring 26, preloading spring seat 27 and connection cover for seat 28, and the setting of preloading spring seat 27 exists
On hanger 21, connection cover for seat 28 be arranged in hanger 22, preloading spring 26 be pressed on preloading spring seat 27 and connection cover for seat 28 it
Between；It is provided with screw mounting base 29 in connection cover for seat 28, ball screw 24 is fixed on inside 29 upper end of screw mounting base, hanger 21
On be provided with sliding sleeve 30, screw mounting base 28 is slidably matched with sliding sleeve 30.
Executing agency 3 is intelligent multi-rotary electric actuator, and intelligent multi-rotary electric actuator includes electronics
Control module, electrical feedback module and mechanical limiting mechanism.
The double gate valves of the high vacuum, ball screw 24 are fixed in hanger 22, and hanger 22 is arranged in 21 inside of hanger,
Hanger 22 and 21 middle position of hanger are tightened on hanger 21 in advance by preloading spring 20.Pilot valve hanger 6 and guide's valve seat 11 weld
It connecing on double valve plates 2, guide's valve support 7 is connected on pilot valve hanger 6 by upper end pin shaft 15, meanwhile, upper end pin shaft 15 is worn
Torsionspring 8 is crossed, torsionspring 8 is fixed and is pressed on pilot valve hanger 6 and guide's valve support 7, the lower end of torsionspring 8
It is pressed against each other with pilot valve 9, the end that wears of upper end pin shaft passes through opening finger setting and Anti-extrusion.Sealing ring 13 passes through spool gland
10 are fixed in pilot valve 9, and are fastened by soket head cap screw, and then, pilot valve 9 passes through the valve in guide's valve support 7
Core mounting hole 14 is fixed, in the closed state, effect of the pilot valve 9 because of torsionspring 8, compresses guide's valve seat 11.
Lower end pin shaft 20 passes through link block 17 and connect link block 17 with guide's valve support 7, and lower end pin shaft 20 wears end
Anti-extrusion is fixed with split pin.The lower end of drive rod 18 is threadedly coupled with link block 17, and the other end passes through the limit in hanger 22
Hole and the guide pad 19 being arranged in limit hole, and with hex nut Anti-extrusion.
The working principle of the double gate valves of the high vacuum is as follows: when gate valve is in original closed state, needing to open plate
When valve, certain power is exported by executing agency 3, executing agency 3 drives ball-screw 23 to rotate, and ball-screw 23 is rotation
Power is converted to the lifting force to ball screw 24, to promote hanger 22.At the movement initial stage of hanger 22, hanger 22 drives elder generation
The drive rod 18 of pilot valve 5, lifts pilot valve 9, opens pilot valve 5, pretightning force the mentioning with hanger 22 of preloading spring 26
It rising and reduces, but be to maintain that double valve plates 2 are motionless, the pressure of 2 two sides of double valve plates reaches balance because of ganging up for pilot valve 5, at this point,
2 two sides of double valve plates do not stress.Then, hanger 22 continues to lift up, at this point, due to double valve plates 2 and the hinged work of hanger 22
With backward double valve plates 2 move, and 2 top of double valve plates is first detached from sealing surface, and then, 2 lower part of double valve plates is detached from, hanger 2 and hanger 21
Contact, hanger 22 drive hanger 21 to be promoted, and lift double valve plates 2, and valve is opened.
When gate valve is in the open state, when needing to close, certain power is exported by executing agency 3, drives ball wire
Thick stick 23 rotates, and rotary force is converted to the active force down to ball screw 24 by ball-screw 23, and hanger 21 drives double valve plates
2 move down.When double valve plates 2 reach limit point, the continuation of hanger 21 moves down, makes 2 lower part of double valve plates because of hinge arrangement
Effect and move outward, until with sealing face contact.At this point, the movement of hanger 21 has stopped, the power of ball-screw 23 starts
It is applied in hanger 22, hanger 22 moves down with respect to hanger 21, compresses preloading spring 26, makes 2 top of double valve plates also and seal
Face contact simultaneously compresses sealing.At the same time, because hanger 22 moves down, so that limit of the hanger 22 to the drive rod 18 of pilot valve 5
Position disappears, and torsionspring 8 makes pilot valve 9 toward moving on guide's valve seat 11, until closing pilot valve simultaneously because of the effect of precompression
Sealing.Valve running stops, and valve is closed.
Executing agency 3 selects intelligent multi-rotary electric actuator, is mounted on the upper of the double gate valve main valve bodies of high vacuum
Side drives ball-screw 23 to transmit power output, guarantees the opening and closing of valve as power source.Intelligent more revolution electricity
Dynamic executing agency has electronic control, electrical feedback and mechanical position limitation, can effectively realize PLC control.Increase on double valve plates 2
It, can be with the opening and closing of valve, autobalance and the pressure for closing double valve plates two sides, it can be achieved that double when opening after vacuum breaker pilot valve
Valve plate two sides pressure difference is zero, meanwhile, sealing ring and valve overall structure can be protected to stablize, avoided because of environmental factor and human factor
Caused by economic loss.
Claims (8)
1. a kind of double gate valves of high vacuum, characterized by comprising:
Main valve body (1), for realizing the valve body of high vacuum control；The main valve body (1) is internally provided with movable sealing connection
Double valve plates (2)；
Executing agency (3), the mechanism being used to provide power；The executing agency (3) is arranged on main valve body (1)；
Transmission mechanism (4), for transmitting the mechanism of executing agency (3) power；The transmission mechanism (4) respectively with executing agency
(3) it is connected with main valve body (1)；
Pilot valve (5), the valve for being abolished to the internal condition of high vacuum degree of main valve body (1)；The pilot valve (5) is arranged in master
It is fixedly connected inside valve body (1) with double valve plates (2), and is sequentially connected with transmission mechanism (4)；The pilot valve (5) passes through
One guiding connection mechanism (16) is connect with transmission mechanism (4)；The guiding connection mechanism (16) includes a link block (17), passes
Lever (18) and guide pad (19), the guide pad (19) are arranged on transmission mechanism (4), the link block (17) and elder generation
Pilot valve (5) connection, the lower end of the drive rod (18) are threadedly coupled with link block (17), the upper end of the drive rod (18)
It is threaded through on guide pad (19).
2. a kind of double gate valves of high vacuum according to claim 1, it is characterised in that: the pilot valve (5) includes first
Pilot valve hanger (6), guide's valve support (7), torsionspring (8), pilot valve (9), spool gland (10) and guide's valve seat (11).
3. a kind of double gate valves of high vacuum according to claim 2, it is characterised in that: guide's valve seat (11) is fixed
On double valve plates (2), one end and guide's valve seat (11) of the pilot valve (9) are connected by a sealing ring (13) movable sealing
It connects, the other end of the pilot valve (9) is fixedly connected with guide's valve support (7) and is driven by guide's valve support (7) real
Existing switch motion, the spool gland (10) are pressed on pilot valve (9).
4. a kind of double gate valves of high vacuum according to claim 2, it is characterised in that: the pilot valve hanger (6) is solid
It is scheduled on double valve plates (2), guide's valve support (7) is arranged in the inside of pilot valve hanger (6), and guide's valve support
(7) upper end is connect by a upper end pin shaft (15) with pilot valve hanger (6), and the torsionspring (8) is arranged in pilot valve
The inside of bracket (7) is simultaneously set on upper end pin shaft (15), and the torsionspring (8) is pressed on pilot valve hanger (6) and elder generation
On pilot valve bracket (7), the lower end of the torsionspring (8), which is supported, to be located on pilot valve (9).
5. a kind of double gate valves of high vacuum according to claim 1, it is characterised in that: the transmission mechanism (4) includes
Hanger (21), hanger (22), ball-screw (23) and ball screw (24), the hanger (21) are fixed in main valve body (1)
Portion, the hanger (22) setting are connected on hanger (21) on the inside of hanger (21) and through a pre-tightening apparatus (25), together
When hanger (22) and double valve plates (2) hingedly, the ball screw (24) is connect with pre-tightening apparatus (25), the ball-screw
(23) upper end is connect with executing agency (3), and the lower end of the ball-screw (23) is connect with ball screw (24), described
Pre-tightening apparatus (25) and hanger (21) are slidably connected.
6. a kind of double gate valves of high vacuum according to claim 5, it is characterised in that: the pre-tightening apparatus (25) includes
Preloading spring (26), preloading spring seat (27) and connection cover for seat (28), the preloading spring seat (27) are arranged in hanger (21)
On, the connection cover for seat (28) is arranged on hanger (22), and the preloading spring (26) is pressed on preloading spring seat (27)
Between connection cover for seat (28).
7. a kind of double gate valves of high vacuum according to claim 6, it is characterised in that: set in the connection cover for seat (28)
It is equipped with screw mounting base (29), the ball screw (24) is fixed on inside screw mounting base (29) upper end, the hanger
(21) it is provided on sliding sleeve (30), the screw mounting base (29) is slidably matched with sliding sleeve (30).
8. according to claim 1 to a kind of double gate valves of high vacuum described in 7 any one, it is characterised in that: executing agency (3)
For intelligent multi-rotary electric actuator, the executing agency (3) includes electronic control module, electrical feedback module and machine
Tool position-limit mechanism.
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| CN201710420311.7A CN107166074B (en) | 2017-06-06 | 2017-06-06 | A kind of double gate valves of high vacuum |
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| CN201710420311.7A CN107166074B (en) | 2017-06-06 | 2017-06-06 | A kind of double gate valves of high vacuum |
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| CN107166074B true CN107166074B (en) | 2019-03-29 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107575641B (en) * | 2017-10-10 | 2023-12-29 | 深圳市大成精密设备股份有限公司 | Pilot-operated vacuum valve |
| CN107655322A (en) * | 2017-10-10 | 2018-02-02 | 深圳市大成精密设备有限公司 | A kind of isolated continuous tunnel vacuum drying oven |
| CN108006244A (en) * | 2017-12-29 | 2018-05-08 | 福建龙净脱硫脱硝工程有限公司 | A kind of gate valve |
| CN111828663A (en) * | 2020-08-05 | 2020-10-27 | 合肥中科离子医学技术装备有限公司 | Vacuum gate valve capable of being started in high differential pressure mode |
| CN115435102B (en) * | 2022-11-07 | 2023-01-24 | 中国空气动力研究与发展中心超高速空气动力研究所 | Control system and control method for double-sided sealing vacuum plugboard valve |
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| CN107166074A (en) | 2017-09-15 |
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