CN205155194U - Vacuum valve of jumbo size bivalve door plant - Google Patents

Vacuum valve of jumbo size bivalve door plant Download PDF

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Publication number
CN205155194U
CN205155194U CN201520892739.8U CN201520892739U CN205155194U CN 205155194 U CN205155194 U CN 205155194U CN 201520892739 U CN201520892739 U CN 201520892739U CN 205155194 U CN205155194 U CN 205155194U
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valve
valve body
vacuum
lifting frame
roller
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李志荣
陆创程
罗志明
李志方
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Guangdong Huicheng Vacuum Technology Co.,Ltd.
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Dongguan Huicheng Vacuum Science & Technology Co Ltd
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Abstract

The utility model provides a vacuum valve of jumbo size bivalve door plant, including the valve body shell, the valve body apron, valve body flange, case drive arrangement and sealing device, the case includes valve board and spring board subassembly, the valve crane, draw gear and gyro wheel - chute device, case drive arrangement has the output pivot, it links to each other with the valve crane through draw gear in stretching into the valve body downwards to pass valve body apron, it is sealed that valve body apron was passed in the output pivot position passes through sealing device, the valve board includes a pair of valve board and bar -spring board with the spring board subassembly, the spring board links firmly on valve backboard face and the valve board is all stretched out at its both ends and on two valve boards corresponding two types of bomb and a satellite spring plank tip link firmly into one wholly separately, the valve crane is arranged in between the valve board crack and pop -up and link firmly the position between the spring board. The utility model discloses gyro wheel - chute combination replaces current big spin and chute cooperation, adapts to high vacuum seal, reduces the material wearing and tearing, and increase of service life reduces service equipment time and expense.

Description

A kind of vacuum valve of large scale bivalve door-plate
Technical field
The utility model relates to a kind of vacuum valve, particularly relates to a kind of vacuum valve of large scale bivalve door-plate.
Background technique
Continuous vacuum equipment has multiple vacuum chamber, because working vacuum degree difference need be equipped with double valve vacuum valve between adjacent vacuum room, to realize being communicated with or separating.Continous vacuum equipment many employings traditional vacuum push-pull valve, its volume is little, compact structure, but traditional vacuum push-pull valve is all generally single valve, and standardized product valve size is all less, and cost is also higher.Large-sized push-pull valve is all nonstandard product, and necessary specialized designs manufacture, cost is high.
Chinese patent discloses the patent of invention of such vacuum valve a, application number 201410494249.2, name is called " a kind of automatic seal door ", this patent adopts the design of left and right valve frame and left and right interlock valve plate, the elevator mechanism of lifting left and right valve plate is provided with between the valve plates of left and right, left and right valve plates has hinge to be connected with elevator mechanism respectively, during throttle down, elevator mechanism declines, left and right valve plate declines in company with elevator mechanism, valve plates and valve frame have a suitable distance to be not in contact with each other, valve plate lower end, left and right is all provided with roller, when valve plate is down at the bottom of valve soon, two rollers all can encounter the low inside and high outside inclined-plane tilted by side direction valve frame direction in two valves, valve continues to decline, the active force on inclined-plane pushes valve frame direction to valve, by in valve, top hinge opens, make valve entirety to valve frame by pasting, realize sealing.This patent utilization valve lower end ramp effect power throttle down, stressed for large scale valve closes is uneven, and valve lower end is by outward thrust, and middle and upper part is still by the inside pulling force of hinge, unsatisfactory for high vacuum seal.
Another kind of prior art is that the applicant is original, this technology continues to use the mentality of designing of traditional push-pull valve, single valve is modified into double valve, each valve plates back side is all connected a longer latch plate, both respectively have linking block by upper and lower end, be linked to be a rectangle frame, in frame, an elevator mechanism is inserted in activity, valve plates is all pressed close in elevator mechanism two sides, several finite length skewed slots have been dug at the valve plates back side from the top down, skewed slot from the top down from depth to shallow, on the position that elevator mechanism is corresponding with each skewed slot, a large ball is equipped with in activity, a small half ofly stretch into lifting frame, the skewed slot depths of a greater part of embedding valve plate, during throttle down, elevator mechanism declines, lifting frame upper end asks valve plates rectangle frame place to leave, the rest that valve plates rectangle frame loses lifting frame also synchronously declines together under deadweight, when valve plates drop to align with valve frame time, correct under valve plates rectangle frame be down at the bottom of valve motionless, now elevator mechanism still has dropping distance and continues to decline, embedding large ball thereon rolls downwards in the skewed slot of the valve plates back side, force to promote valve plates to move to valve frame direction, realize sealing, also cause the latch plate distortion on the valve plates back side to produce resilience pulling force simultaneously.During Open valve, promote elevator mechanism, the large ball being embedded in elevator mechanism rises from skewed slot and rolls the dark direction of down fold, relieve and thrust is forced to valve plates, pull valve plates to retreat by latch plate spring-back force, valve plates is pulled away from sealing surface, elevator mechanism continues up, hold in the palm the rising of valve plates rectangular frame, until open the vacuum passage of adjacent two vacuum chambers completely.This design promotes valve plates and closes stressed even up and down, is better than above-mentioned a kind of automatic seal door for high vacuum seal.But because large scale valve pressure reduction is greatly stressed, valve self is heavy, and ball and skewed slot are again point cantact, greatly stressed, both require harsh at Material selec-tion coupling, and practice finds that ball is easily worn, and is even layered stripping and ball Integral-crushing.
Above-mentioned two kinds of prior aries also have an identical deficiency, exactly after left and right valve is all closed, valve body and two adjacent vacuum chambers have all been isolated, if the activity duration is long, because valve space can pressure increases because of long-time tiny leakage, if now vacuum chamber will open valve connection under vacuum conditions, then very difficult, even may not open valve, its reason is that valve space does not consider the special design arranged of bleeding, and such manufacturing operation mode can be restricted.
Model utility content
The purpose of this utility model is to provide a kind of and is applicable to high vacuum seal, simple and compact for structure, easy to operate, low cost of manufacture, long service life and reduce the vacuum valve of the large scale bivalve door-plate of maintenance cost.
Above-mentioned purpose of the present utility model realizes by the following technical solutions: a kind of vacuum valve of large scale bivalve door-plate, comprise valve body and spool, it is characterized in that: described valve body comprises valve shell, be arranged on the valve body cover plate on valve shell, be arranged on a pair valve body adpting flange on both sides, valve shell bottom, be arranged on the device for driving valve body above valve body cover plate and seal arrangement, described valve shell and valve body cover plate form the space for holding spool, this space comprises the space allowing spool lifter motion Open valve upwards to stretch, described spool comprises valve plates and latch plate assembly, for valve lifting frame and the traction gear thereof of flat rigid frame, for the roller-chute arrangement of valve plates sealing with deblocking, the through hole of described valve body adpting flange is used for and vacuum equipment cabin, left and right sides bonding in vacuum as vacuum passage connecting port, described device for driving valve body has output revolving shaft, described output revolving shaft is stretched into downwards in valve body through valve body cover plate and is connected with valve lifting frame by traction gear, described output revolving shaft is sealed by described seal arrangement through the position of valve body cover plate, valve plates and latch plate assembly comprise the valve plates that is greater than vacuum passage connecting port for a pair and for driving the bar-spring plate of valve plates returning position, described valve plates vertically arrange and its outer side surface as the sealing surface for sealed vacuum channel connection mouth, on the back side that described latch plate is connected in valve plates and its two ends all stretch out valve plates and the end of two latch plates corresponding in two valve plates is connected in aggregates separately, this has crack between valve plates, described valve lifting frame is in described crack and the position that is connected between latch plate in pop-up, described roller-chute arrangement comprises the two roll wheel assemblies being opened in skewed slot that the valve plates back side shoals gradually from top to bottom and being arranged on valve lifting frame both sides, described pair of roll wheel assembly has the roller that can roll along skewed slot.
Working procedure of the present utility model is: device for driving valve body drives valve lifting frame to decline, valve plates synchronously declines with valve lifting frame by deadweight, when valve lifting frame declines, roller rolls to shallow from the depths of skewed slot, promote valve plates shifted forward, make valve plates be sealed on vacuum passage connecting port, realize sealing, force latch plate resiliently deformable to produce resilience pulling force simultaneously; When device for driving valve body drives valve lifting frame to rise, drag valve plates by lifting frame and drive rise, roller rolls to depths from oblique the shallow of grain, release is to valve plates forward thrust, latch plate resiliently deformable is while restore, and the pulling force of former resiliently deformable pulls back valve plates, until resiliently deformable is replied completely, valve plates also resets completely, depressurization.
The utility model adopts roller-skewed slot combination to replace the large spin of prior art to coordinate with skewed slot, namely achieve uniform stressed and promote the mode that valve plates and valve frame close up, high vacuum seal can be adapted to, in turn increase rolling material lifting surface area, slow loose stress is concentrated, can fret wear be reduced, increase the service life, reduce service equipment time and expense.In addition, simple and compact for structure, easy to operate, the low cost of manufacture of the utility model.
Improve as one of the present utility model, valve shell is in above valve body adpting flange and sets up connection mouth of bleeding, described connection mouth of bleeding is connected with vacuum valve bleeds for vacuum pump, or is communicated with adjacent vacuum cabin and makes air pressure balance, or is communicated with air and inflates to valve body.The utility model is provided with external connection mouth of bleeding at valve body, can realize being connected with special extraction pump or by valve and the left side or the right vacuum chamber, multiple vacuum operation operation can be adapted to like this, can laborsaving Open valve, reduce equipment attrition, save maintenance cost.
As a kind of mode of execution of the present utility model, described device for driving valve body comprises motor and connected speed reducer, described seal arrangement comprises vacuum sealing components and bearing block assembly, described vacuum sealing components is sleeved in sealing seat by TC outside framework oil seal and forms, and the output revolving shaft of described speed reducer realizes vacuum dynamic seal through TC outside framework oil seal; Described bearing block assembly is sleeved in bearing support successively by thrust ball bearing, spacer ring and deep groove ball bearing and forms, described bearing support is the sleeve that side shoulder is worn in upper end, it is by its shoulder lower end surface, side and valve body cover plate for sealing, make its sleeve part enter in valve body through valve body cover plate, described output revolving shaft is fixed on bearing inner race and realizes thrust and roll rotational.
As a kind of mode of execution of the present utility model, described traction gear comprises ball screw nut and ball screw, described ball screw nut is packed on the upper end frame bar of valve lifting frame, ball screw nut screws in equipped ball screw, upper end and the output revolving shaft stretched in valve body of ball screw are connected.
Described in the utility model pair of roll wheel assembly comprises two roller base, roller bearing pin and roller, described pair of roller base is fixed on the frame bar of valve lifting frame, breach about two roller base is all installed with roller bearing pin, kink is on the roller bearing pin of left and right two respectively for two rollers, and two roller respectively front is pressed in the skewed slot on the valve plates back side.
As further improvement of the utility model, the vacuum valve of described large scale bivalve door-plate also comprises for preventing valve lifting frame from swinging and the lifting frame positioning device of swing.
As a kind of mode of execution of the present utility model, described lifting frame positioning device comprises the trundle device for locating at spool width direction and the big roller device for locating at spool thickness direction, described trundle device comprises trundle seat, trundle and trundle bearing pin, trundle seat is fixed on the side of valve lifting frame, trundle bearing pin crosses and is packed on trundle seat external part breach, trundle kink is on trundle bearing pin, trundle rolls against the valve body wall in its front, the tracks that this valve body wall swings as limiter valve lifting frame, described big roller device comprises big roller and big roller bearing pin, big roller bearing pin is fixed on the side of valve lifting frame, big roller kink is contained in big roller end part of pin shaft, and big roller rolls against both sides valve body wall, and this both sides valve body wall is as the tracks of restriction lifting frame swing.
Compared with prior art, the utility model has following significant effect:
(1) the utility model can realize the vacuum valve reliable sealing of large scale bivalve door-plate, is applicable to high vacuum seal.
(2) the utility model structure simple tight Minato, easy to operate, low cost of manufacture.
(3) the utility model adopts valve plates back side roller-skewed slot combination to realize sealing and depressurization with horizontal sliding valve plates, establish the reasonable stress of roller-incline configuration mechanism in valve plates lower end than prior art, the thrust point of the latter's valve plates is in the lower end of valve plates, and the middle and upper part of valve plates is also subject to hinge toward pull-back forces, stressed unreasonable, the utility model is stressed more balanced, closes tighter, overcomes the defect that prior art is unsuitable for high-vacuum applications.
(4) the utility model adopts roller--skewed slot combination replaces ball of the prior art-skewed slot combination horizontal sliding valve plates Mi Feng Fang Er, the lifting surface area, the material stress that increase rolling material are little, wearing and tearing less, the life-span is long, decreases service equipment time and expense.
(5) the utility model adds the connection mouth of bleeding of valve body, or vacuum pump can be connect bleed by technological requirement, or connect air inflation, or be communicated with vacuum chamber acquisition pressure balance etc., poor to reduce valve pressure at both sides, Open valve is more laborsaving, reduces equipment attrition, increase the service life, be adapted to operating type more flexibly.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is overall structure plan view of the present utility model;
Fig. 2 is overall structure side view of the present utility model;
Fig. 3 is D close-up schematic view in Fig. 2;
Fig. 4 is the utility model valve core structure stereogram;
Fig. 5 is the utility model valve core structure schematic diagram;
Fig. 6 is E close-up schematic view in Fig. 5;
Fig. 7 is along A-A line sectional drawing in Fig. 5;
Fig. 8 is F close-up schematic view in Fig. 7;
Fig. 9 is along B-B line sectional drawing in Fig. 5;
Figure 10 is G close-up schematic view in Fig. 9;
Figure 11 is H close-up schematic view in Fig. 9;
Figure 12 is along C-C line sectional drawing in Fig. 5;
Figure 13 is J close-up schematic view in Figure 12.
Embodiment
As shown in figs. 1-13, it is the vacuum valve of a kind of large scale bivalve of the utility model door-plate, comprise valve body and spool, valve body comprises valve shell and valve body cover plate, valve body adpting flange, device for driving valve body and seal arrangement, spool comprise valve plates and latch plate assembly, valve lifting frame and traction gear thereof, for prevent valve lifting frame from swinging lifting frame positioning device, seal the roller-chute arrangement with deblocking for valve plates.
Fig. 1 and 2 shows the valve shell 4 of valve body and the space of valve body cover plate 3 formation accommodation spool, and this space comprises the space allowing spool lifter motion Open valve upwards to stretch.Valve block lower half is equipped with two the valve body adpting flange 4-1 in left and right, the outer side surface of valve body adpting flange 4-1 is used for and the right and left vacuum equipment cabin bonding in vacuum, valve body adpting flange port becomes vacuum passage connecting port 4-2, the inner side surface of valve body adpting flange 4-1 becomes the seal valve doorframe of the valve plates 19 of spool, the drive unit of spool is equipped with above valve body cover plate 3, it comprises motor 2 and connected speed reducer 1, the output revolving shaft 1-1 of speed reducer first passes through bearing block assembly again by vacuum sealing components, enters in valve body through valve body cover plate 3.See Fig. 3, vacuum sealing components is sleeved in sealing seat 6 by TC outside framework oil seal 5 and forms, and output revolving shaft 1-1 realizes vacuum dynamic seal through TC outside framework oil seal 5.Bearing block assembly is sleeved on successively in bearing support 10 is formed by thrust ball bearing 7, spacer ring 8, deep groove ball bearing 9, bearing support 10 is for wearing the sleeve of side shoulder in upper end, by its shoulder lower end surface, side and valve body cover plate for sealing 3-1, its sleeve part is allowed to enter in valve body through valve body cover plate 3.Output revolving shaft 1-1 is fixed on bearing inner race and realizes thrust and roll rotational.Be provided with in the middle and upper part of valve body connection mouth 25 of bleeding, it can connect vacuum pump by vacuum valve and bleed, or is communicated with adjacent vacuum cabin and makes air pressure balance, or is communicated with air and inflates to valve body.
Fig. 4,5,7,9 and 12 shows the valve lifting frame of spool and traction gear thereof and lifting frame positioning device, valve lifting frame 13 is flat rigid frames, be positioned at spool middle position, traction gear comprises ball screw nut 12 and ball screw 11, the upper end frame bar central authorities of valve lifting frame 13 are fixedly mounted with ball screw nut 12, it screws in equipped ball screw 11, ball screw 11 upper end with stretch into output revolving shaft 1-1 in valve body and be connected (see Fig. 3).The position that Fig. 6 shows the top lower end, both sides of valve lifting frame 13 is all equipped with two cover lifting frame positioning devices respectively, wherein a set of is trundle device for locating at spool width direction, it comprises trundle seat 14, trundle 15 and trundle bearing pin 16, trundle seat 14 is fixed in lifting frame 13 side frame edge, trundle bearing pin 16 crosses and is packed on trundle seat 14 external part breach, and trundle 15 kink is on trundle bearing pin 16.Trundle 15 rolls against the valve body wall in front, the tracks that above-mentioned valve body wall swings as limiter valve lifting frame.Another set of is big roller device for locating at spool thickness direction, and it comprises big roller 17 and big roller bearing pin 18.Big roller bearing pin 18 is fixed in lifting frame 13 side frame edge, and big roller 17 kink is contained in big roller end part of pin shaft, and big roller 17 rolls against both sides valve body wall, and both sides valve body wall is as the tracks of restriction lifting frame swing.Fig. 4,5,7,9 and 12 also show valve plates and latch plate assembly is made up of valve plates 19, latch plate 24 and latch plate fixed block 23, and the size of valve plates 19 is greater than vacuum passage mouth, and sealing surface is outside, and its surrounding is equipped with seal ring.See Fig. 4,5,7,9 ~ 12, latch plate 24 is strip plate, longer than the height of valve plates 19, and every block valve plates 19 back side is along fastening two latch plates 24 of short transverse, and its two ends are all stretched out outside valve plates 19.The valve plates 19 of two groups of back side consolidation two panels long strip latch plates 24 is assembled back-to-back symmetrically, stretching out the two ends of the two groups of relative latch plates 24 outside two valve plates 19, middle pad latch plate fixed block 23 is separated and is fixed together, and namely two fan valve plates is linked to be the entirety having hollow crack.Lifting frame 16 inserts in above-mentioned valve plates and latch plate assembly hollow crack, the latch plate fixed block 23 of latch plate 24 upper end in the holder of lifting frame 16 upper transverse frame, suitable valve plates and latch plate assembly hang on lifting frame 16, drag Component driver by it when lifting frame 16 promotes to rise, when lifting frame 16 declines, valve plates and latch plate assembly synchronously to decline with lifting frame 16 by conducting oneself with dignity.
Realize valve plates sealing and comprise the two roll wheel assembly on lifting frame and the skewed slot in valve plates with the roller-chute arrangement of deblocking, also comprise the resiliently deformable effect of latch plate.See Fig. 8 and Figure 13, two roll wheel assembly comprises two roller base 22, roller bearing pin 20 and roller 21, two roller base 22 is fixed on the frame bar of lifting frame 16, the breach of two roller base about 22 is all installed with roller bearing pin 20, two roller 21 difference kinks are on left and right two roller bearing pin 20, on the skewed slot 19-1 that two roller 21 back side that front is pressed on valve plates 19 is respectively recessed into, skewed slot 19-1 true dip direction is recessed into from depth to shallow from the top down.Along with lifting frame 16 is elevated, two roller 21 rolls along oblique poor 19-1 inclined-plane, thus actuating valve door-plate setback, when lifting frame 16 declines, two roller 21 rolls to shallow from oblique poor 19-1 depths, promotes valve plates 19 shifted forward, forces latch plate 24 resiliently deformable to produce resilience pulling force simultaneously; When lifting frame 16 is carried, two roller 21 rolls to depths from oblique poor 19-1 is shallow, release is to valve plates 19 forward thrust, latch plate 24 resiliently deformable is while restore, the pulling force of former resiliently deformable pulls back valve plates 19 on one side, until resiliently deformable is replied completely, valve plates 19 also resets completely, depressurization.When motor 2 reverse direction actuation ball screw 11 rotates backward, drives ball screw nut 12 to rise together with lifting frame 16 translation, lifting frame 16 asks valve plates to rise together with latch plate assembly, until valve plates 19 is higher than valve frame, make vacuum passage connecting port 4-2 completely unimpeded.
In the present embodiment, the vacuum valve effective sealing area 800mm × 650mm of large scale bivalve door-plate.Working procedure is as follows: valve is in opening state, and namely left and right valve plates rises to valve body top with spool, two adjacent vacuum chamber.Carrying out throttle down operation program is: actuating motor, slow down through speed reducer, drive output revolving shaft rotates, output revolving shaft enters in valve body by the vacuum dynamic seal on valve body cover plate and bearing pack, output revolving shaft drives the ball screw be attached thereto to rotate, the ball screw nut being fixed on the lifting frame upper ledge bar center of spool matches with it, the ball screw of ball screw nut and rotation interacts, ball screw nut is made to decline along screw mandrel translation, namely the translation of valve lifting frame is driven to decline, lifting frame both sides width direction establishes four trundle positioning devices up and down altogether, four trundles are along valve body wall non-orbiting scroll, restriction lifting frame width direction swings, spool thickness of two sides direction also four big roller positioning devices up and down in addition, four big rollers are along valve body wall non-orbiting scroll, restriction lifting frame thickness direction swings, thus ensure that lifting frame steadily declines.Originally the valve plates of lifting frame was hung over--latch plate assembly latch plate fixed block by the upper ledge lever bracket of lifting frame thus hold up whole assembly, when lifting frame declines, valve plates-latch plate assembly loses rest, and valve plates-latch plate assembly synchronously declines in company with lifting frame because of deadweight.Designed latch plate is all longer than the height of valve plates and lifting frame, reserve except fixedly connected position except allowing the two ends of relative two pieces of latch plates, the more important thing is and allow valve plates-latch plate assembly in company with when declining, the latch plate lower end of being longer than valve plates first arrives body base, leading stop valve door-plate-latch plate assembly declines, now valve plates just in time aligns the valve frame that need seal, designed lifting frame also has one section of dropping distance, the skewed slot that the roller that promotion valve plates now on lifting frame realizes two rotary roller of sealing is all sitting at valve plates is recessed into depths, ball screw rotates and drives lifting frame to continue steadily to decline, it is shallow that two roller is rolled to skewed slot by skewed slot depths, formed the thrust of valve plates to valve frame direction, valve plates surrounding seal ring and valve frame sealing surface is allowed to fit, realize vacuum seal.Cause the latch plate resiliently deformable that is connected in the valve plates back side simultaneously and produce resilience pulling force, for lower step depressurization is prepared.More than complete the operation of closing valve plate.
Its inverse operation is exactly the operation of opening valve.First check two vacuum chambers with the degree of vacuum of valve body, under the condition that technique allows, to allow in valve body degree of vacuum as far as possible close to the degree of vacuum of vacuum chamber, method is the connection mouth of bleeding utilized on valve body, connect vacuum pump bleed or with vacuum chamber etc., reduce pressure reduction as far as possible, and then depressurization poppet valve door-plate, not only laborsaving but also reduce equipment damage.Depressurization opens the programmed sequence of operations of valve plates: started motor reversal, slow down through speed reducer, output revolving shaft is allowed to rotate backward, by vacuum dynamic seal and bearing pack, output revolving shaft drives ball screw reversion, by matching, ball screw nut interacts, ball screw is rotated backward and becomes ball screw nut and rise together with lifting frame translation, when just starting, lifting frame upper ledge bar also has a segment distance from being parked in the upper end latch plate fixed block of the link two-phase at the bottom of valve body to latch plate, valve plates can not to be driven when lifting frame just rises to follow rising, now be fixed on the roller of the two rotary roller on lifting frame-saw bar, depths is recessed into from the recessed shallow skewed slot upward that rolls from the skewed slot at the valve plates back side, quite release the thrust pushing valve frame direction to that pair of rollers valve plates applies, valve is by the latch plate resilience pulling force effect of former own resiliently deformable, valve plates is pulled rearward, relieve sealing load, and withdraw valve opening doorframe.Lifting frame continues to rise subsequently, its upper ledge bar touches upper end latch plate fixed block, then hold in the palm whole valve plates-latch plate assembly rising, the trundle of lifting frame both sides width direction four trundle positioning devices is along valve body wall non-orbiting scroll, restriction lifting frame width direction swings, the big roller of thickness direction four big roller positioning devices is along valve body wall non-orbiting scroll in addition, and restriction lifting frame thickness direction swings, thus ensures that lifting frame steadily rises.Valve plates rises to above valve body, until allow vacuum passage mouth open completely.
Mode of execution of the present utility model is not limited thereto; according to foregoing of the present utility model; according to ordinary technical knowledge and the customary means of related domain; do not departing under the utility model above-mentioned basic fundamental thought prerequisite; the utility model can also make the amendment of other various ways, replacement or change, all drops within the utility model rights protection scope.

Claims (7)

1. the vacuum valve of a large scale bivalve door-plate, comprise valve body and spool, it is characterized in that: described valve body comprises valve shell, be arranged on the valve body cover plate on valve shell, be arranged on a pair valve body adpting flange on both sides, valve shell bottom, be arranged on the device for driving valve body above valve body cover plate and seal arrangement, described valve shell and valve body cover plate form the space for holding spool, this space comprises the space allowing spool lifter motion Open valve upwards to stretch, described spool comprises valve plates and latch plate assembly, for valve lifting frame and the traction gear thereof of flat rigid frame, for the roller-chute arrangement of valve plates sealing with deblocking, the through hole of described valve body adpting flange is used for and vacuum equipment cabin, left and right sides bonding in vacuum as vacuum passage connecting port, described device for driving valve body has output revolving shaft, described output revolving shaft is stretched into downwards in valve body through valve body cover plate and is connected with valve lifting frame by traction gear, described output revolving shaft is sealed by described seal arrangement through the position of valve body cover plate, valve plates and latch plate assembly comprise the valve plates that is greater than vacuum passage connecting port for a pair and for driving the bar-spring plate of valve plates returning position, described valve plates vertically arrange and its outer side surface as the sealing surface for sealed vacuum channel connection mouth, on the back side that described latch plate is connected in valve plates and its two ends all stretch out valve plates and the end of two latch plates corresponding in two valve plates is connected in aggregates separately, this has crack between valve plates, described valve lifting frame is in described crack and the position that is connected between latch plate in pop-up, described roller-chute arrangement comprises the two roll wheel assemblies being opened in skewed slot that the valve plates back side shoals gradually from top to bottom and being arranged on valve lifting frame both sides, described pair of roll wheel assembly has the roller that can roll along skewed slot.
2. the vacuum valve of large scale bivalve door-plate according to claim 1, it is characterized in that: be in above valve body adpting flange and set up connection mouth of bleeding on valve shell, described connection mouth of bleeding is connected with vacuum valve bleeds for vacuum pump, or be communicated with adjacent vacuum cabin and make air pressure balance, or connection air is inflated to valve body.
3. the vacuum valve of large scale bivalve door-plate according to claim 1 and 2, it is characterized in that: described device for driving valve body comprises motor and connected speed reducer, described seal arrangement comprises vacuum sealing components and bearing block assembly, described vacuum sealing components is sleeved in sealing seat by TC outside framework oil seal and forms, and the output revolving shaft of described speed reducer realizes vacuum dynamic seal through TC outside framework oil seal; Described bearing block assembly is sleeved in bearing support successively by thrust ball bearing, spacer ring and deep groove ball bearing and forms, described bearing support is the sleeve that side shoulder is worn in upper end, it is by its shoulder lower end surface, side and valve body cover plate for sealing, make its sleeve part enter in valve body through valve body cover plate, described output revolving shaft is fixed on bearing inner race and realizes thrust and roll rotational.
4. the vacuum valve of large scale bivalve door-plate according to claim 3, it is characterized in that: described traction gear comprises ball screw nut and ball screw, described ball screw nut is packed on the upper end frame bar of valve lifting frame, ball screw nut screws in equipped ball screw, upper end and the output revolving shaft stretched in valve body of ball screw are connected.
5. the vacuum valve of large scale bivalve door-plate according to claim 4, it is characterized in that: described pair of roll wheel assembly comprises two roller base, roller bearing pin and roller, described pair of roller base is fixed on the frame bar of valve lifting frame, breach about two roller base is all installed with roller bearing pin, kink is on the roller bearing pin of left and right two respectively for two rollers, and two roller respectively front is pressed in the skewed slot on the valve plates back side.
6. the vacuum valve of large scale bivalve door-plate according to claim 5, is characterized in that: the vacuum valve of described large scale bivalve door-plate also comprises for preventing valve lifting frame from swinging and the lifting frame positioning device of swing.
7. the vacuum valve of large scale bivalve door-plate according to claim 6, it is characterized in that: described lifting frame positioning device comprises the trundle device for locating at spool width direction and the big roller device for locating at spool thickness direction, described trundle device comprises trundle seat, trundle and trundle bearing pin, trundle seat is fixed on the side of valve lifting frame, trundle bearing pin crosses and is packed on trundle seat external part breach, trundle kink is on trundle bearing pin, trundle rolls against the valve body wall in its front, the tracks that this valve body wall swings as limiter valve lifting frame, described big roller device comprises big roller and big roller bearing pin, big roller bearing pin is fixed on the side of valve lifting frame, big roller kink is contained in big roller end part of pin shaft, and big roller rolls against both sides valve body wall, and this both sides valve body wall is as the tracks of restriction lifting frame swing.
CN201520892739.8U 2015-11-09 2015-11-09 Vacuum valve of jumbo size bivalve door plant Active CN205155194U (en)

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106763841A (en) * 2017-03-02 2017-05-31 北京创世威纳科技有限公司 A kind of vacuum lock
CN106904408A (en) * 2017-02-23 2017-06-30 北京创世威纳科技有限公司 A kind of vacuum chamber conveyer
CN107166074A (en) * 2017-06-06 2017-09-15 浙江永盛科技股份有限公司 A kind of double push-pull valves of high vacuum
CN107218402A (en) * 2017-06-24 2017-09-29 大连康维科技有限公司 Push-pull valve and its encapsulating method
CN107965606A (en) * 2017-11-27 2018-04-27 上海卫星装备研究所 One kind is used for side and drives formula pneumatic high vacuum gate valve and rotation driving connecting structure
CN108160681A (en) * 2018-01-09 2018-06-15 浙江华力环境科技有限公司 Energy-saving corrodible refuse treatment plant
CN108662180A (en) * 2018-05-29 2018-10-16 湖北工业大学 A kind of environmental protection baffle board door of flue
CN110637196A (en) * 2018-04-25 2019-12-31 长春凯希环保有限责任公司 Heat accumulation combustion oxidation device
CN110925448A (en) * 2019-12-03 2020-03-27 武汉科瑞达真空科技有限公司 Gate valve
CN111237493A (en) * 2020-03-09 2020-06-05 厦门大学 Effectively reduce slide valve of wearing and tearing
CN114542736A (en) * 2022-01-22 2022-05-27 方正阀门集团股份有限公司 Large-caliber double-sealing vacuum gate valve
CN114992371A (en) * 2022-05-30 2022-09-02 散裂中子源科学中心 Vacuum isolation valve suitable for large cavity
WO2022193417A1 (en) * 2021-03-18 2022-09-22 大连康维科技有限公司 Valve
RU2824954C1 (en) * 2021-03-18 2024-08-16 ДАЛЯНЬ КОНСЕРВЕЙШН САЕНС энд ТЕКНОЛОДЖИ КО., ЛТД. Valve

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106904408A (en) * 2017-02-23 2017-06-30 北京创世威纳科技有限公司 A kind of vacuum chamber conveyer
CN106763841A (en) * 2017-03-02 2017-05-31 北京创世威纳科技有限公司 A kind of vacuum lock
CN107166074B (en) * 2017-06-06 2019-03-29 浙江永盛科技股份有限公司 A kind of double gate valves of high vacuum
CN107166074A (en) * 2017-06-06 2017-09-15 浙江永盛科技股份有限公司 A kind of double push-pull valves of high vacuum
CN107218402A (en) * 2017-06-24 2017-09-29 大连康维科技有限公司 Push-pull valve and its encapsulating method
CN107965606A (en) * 2017-11-27 2018-04-27 上海卫星装备研究所 One kind is used for side and drives formula pneumatic high vacuum gate valve and rotation driving connecting structure
CN107965606B (en) * 2017-11-27 2020-11-10 上海卫星装备研究所 Be used for pneumatic high vacuum gate valve of side drive formula and rotary drive connection structure
CN108160681A (en) * 2018-01-09 2018-06-15 浙江华力环境科技有限公司 Energy-saving corrodible refuse treatment plant
CN110637196A (en) * 2018-04-25 2019-12-31 长春凯希环保有限责任公司 Heat accumulation combustion oxidation device
CN110637196B (en) * 2018-04-25 2021-09-03 长春凯希环保有限责任公司 Heat accumulation combustion oxidation device
CN108662180A (en) * 2018-05-29 2018-10-16 湖北工业大学 A kind of environmental protection baffle board door of flue
CN108662180B (en) * 2018-05-29 2019-03-22 湖北工业大学 A kind of environmental protection baffle board door of flue
CN110925448A (en) * 2019-12-03 2020-03-27 武汉科瑞达真空科技有限公司 Gate valve
CN111237493A (en) * 2020-03-09 2020-06-05 厦门大学 Effectively reduce slide valve of wearing and tearing
WO2022193417A1 (en) * 2021-03-18 2022-09-22 大连康维科技有限公司 Valve
JP7486868B2 (en) 2021-03-18 2024-05-20 大▲連▼康▲維▼科技有限公司 valve
RU2824954C1 (en) * 2021-03-18 2024-08-16 ДАЛЯНЬ КОНСЕРВЕЙШН САЕНС энд ТЕКНОЛОДЖИ КО., ЛТД. Valve
CN114542736A (en) * 2022-01-22 2022-05-27 方正阀门集团股份有限公司 Large-caliber double-sealing vacuum gate valve
CN114992371A (en) * 2022-05-30 2022-09-02 散裂中子源科学中心 Vacuum isolation valve suitable for large cavity

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Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000

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