CN107965606B - Be used for pneumatic high vacuum gate valve of side drive formula and rotary drive connection structure - Google Patents
Be used for pneumatic high vacuum gate valve of side drive formula and rotary drive connection structure Download PDFInfo
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- CN107965606B CN107965606B CN201711208030.1A CN201711208030A CN107965606B CN 107965606 B CN107965606 B CN 107965606B CN 201711208030 A CN201711208030 A CN 201711208030A CN 107965606 B CN107965606 B CN 107965606B
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- dynamic seal
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- gate valve
- vacuum gate
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- 238000010168 coupling process Methods 0.000 claims abstract description 23
- 230000008878 coupling Effects 0.000 claims abstract description 20
- 238000005859 coupling reaction Methods 0.000 claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 230000003068 static effect Effects 0.000 claims abstract description 8
- 230000008093 supporting effect Effects 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 13
- 238000007789 sealing Methods 0.000 abstract description 12
- 239000011553 magnetic fluid Substances 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/003—Spindle sealings by fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
The invention discloses a side-driving pneumatic high-vacuum gate valve and rotary driving connecting structure, which comprises a rotary shaft, a dynamic seal retainer and a connecting body, wherein the rotary shaft is connected with the dynamic seal retainer; the rotating shaft penetrates through the dynamic seal retainer to be connected with the connecting body. The three functional parts can be realized by three parts respectively, or two or three functional parts can be combined into one part. The rotating shaft is used for transmitting the rotating motion of the rotating driving element to a transmission mechanism inside the high-vacuum gate valve box; the dynamic seal retainer is designed to provide space for dynamic seal design and provide pressing force for static seal; the coupling body is used for providing a support for the pneumatic element, and simultaneously isolating the rotating shaft and the dynamic seal from the external environment, so that the influence of the environment on the sealing effect and the service life is reduced. The connecting structure is suitable for various sealing forms such as rubber O-shaped rings, magnetic fluid and the like, and can ensure that the rotary pneumatic element is effectively applied to a side-driving high-vacuum gate valve.
Description
Technical Field
The invention relates to the field of vacuum machinery, in particular to a side-driving pneumatic high-vacuum gate valve and rotary driving connecting structure.
Background
In the vacuum valve, the electric driving cost is high, the manual driving is inconvenient to use, and the pneumatic driving is one of the most common driving modes. The driving element of the side-driving high-vacuum gate valve is arranged on the side face of the valve box, and the design utilizes rotary driving to replace linear driving, so that the installation space of a product can be reduced, and the space utilization rate is increased. And the pneumatic mode is adopted, the cost of the pneumatic element is low, and the use, maintenance and repair cost is low, so that the rotary pneumatic element (rotary cylinder) becomes the first choice of the side-drive high-vacuum gate valve.
The current rotary cylinder has the common tendency of consistent styles, standard and standardized styles, the cuboid shape, one surface of the cuboid is a disk which can rotate relative to a cylinder base body (cuboid), 4-8 threaded holes are formed in the disk and used for connecting other parts, and the other parts are driven to complete rotary motion through the rotation of the disk. However, the cylinder with such a structure cannot be directly applied to a side-drive high-vacuum gate valve: first, motion cannot be directly transferred to the inside of the valve box by rotating the disk; the cylinder is not provided with a design for mounting a dynamic seal structure and a static seal structure; the cylinder base body is only provided with a blind hole for fixing, and is not provided with any structure capable of being used for fixing with a high-vacuum gate valve box. The connection of the rotary driving elements needs to meet the following points by combining the external structure and the internal movement mechanism of the side-driving high-vacuum gate valve: secondly, a driving element is arranged on the outer side of the valve box of the gate valve, and the rotary motion needs to be transmitted to a valve core motion mechanism on the inner side of the valve box; the part for transmitting the rotary motion needs dynamic sealing;
thirdly, static sealing is needed between the driving element and the valve box;
fourth, the drive element base portion (non-rotating portion) also needs to be relatively fixed with respect to the valve housing.
Disclosure of Invention
The invention provides a rotary driving element coupling method based on the application requirement of a side-drive high-vacuum gate valve on a rotary driving element and by combining the structural characteristics of the high-vacuum gate valve and a standard rotary cylinder, and is used for solving the problem that the conventional rotary pneumatic element is not suitable for the side-drive pneumatic high-vacuum gate valve.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a connecting structure for a side-driving pneumatic high-vacuum gate valve and rotary driving comprises a rotary shaft, a dynamic seal retainer and a connecting body; the rotating shaft penetrates through the dynamic seal retainer to be connected with the connecting body. The rotating shaft, the dynamic seal retainer and the connecting body can be a plurality of independent parts and detachable components, or the same part or component has the functions of the three main parts, can realize the sealing connection of the pneumatic rotating element and the valve box of the side-drive high-vacuum gate valve, and transmits the rotating motion of the pneumatic element to the valve core mechanism in the valve box.
Preferably, the rotating shaft is provided with a pneumatic element connecting end and a transmission mechanism connecting end; the rotating shaft is connected with the pneumatic element through the pneumatic element connecting end and rotates with the rotating part of the pneumatic element at the same time; the rotating shaft is connected with a valve core transmission mechanism in the high vacuum gate valve through a transmission mechanism connecting end, and the connection mode is a detachable connection mode such as a thread or a pin.
Preferably, said pneumatic connection end is connected by means of a screw or the like fastening means to the rotating disc of the pneumatic element, so as to obtain the same angular speed of rotation thereof.
Preferably, the pneumatic connecting end is connected with a rotating disc of the pneumatic element through a gear or a chain or other motion transmission modes, and the rotation angular speed is enlarged or reduced by obtaining a rotation ratio.
Preferably, the dynamic seal retainer is internally provided with a hollow boss of the dynamic seal structure and a pressing surface which is used for fixing with the valve box and can provide pressing force for static seal on a flange of the valve box; the height of the hollow boss of the dynamic seal retainer depends on the required thickness of the dynamic seal structure.
Preferably, the coupling body comprises a cylinder connecting end, a valve box flange connecting end and a hollow section, and the hollow section connects the cylinder connecting end and the valve box flange connecting end; the cylinder connecting end is used for being matched and connected with a base body part, namely a non-rotating part, of the pneumatic rotating element; the valve box flange connecting end is used for being matched and connected with a side-drive high-vacuum gate valve box flange; the hollow section is fixedly connected with the valve box flange through the valve box flange connecting end, has a supporting effect on the pneumatic rotating element, and can envelop the dynamic seal retainer and the dynamic seal component inside the dynamic seal retainer.
Compared with the prior art, the invention has the following beneficial effects:
the rotating shaft is used for transmitting the rotating motion of the rotating driving element to a transmission mechanism inside the high-vacuum gate valve box; the dynamic seal retainer is designed to provide space for dynamic seal design and provide pressing force for static seal; the coupling body is used for providing a support for the pneumatic element, and simultaneously isolating the rotating shaft and the dynamic seal from the external environment, so that the influence of the environment on the sealing effect and the service life is reduced. The connection structure provided by the invention is suitable for various sealing forms such as rubber O-shaped rings, magnetic fluid and the like, and can enable the rotary pneumatic element to be effectively applied to a side-drive high-vacuum gate valve.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a coupling assembly view of a rotary cylinder and a side-drive high vacuum gate valve.
Fig. 2 is an exploded view of a rotary cylinder and side-drive high-vacuum gate valve coupling assembly of embodiment 1.
Fig. 3 is a schematic view of parts mounting of the rotary cylinder and the coupling device of embodiment 1.
FIG. 4 is a schematic view of a part of a rotating shaft in example 1.
FIG. 5 is a schematic diagram of parts stretched on both sides of a hollow boss of the dynamic seal holder in embodiment 1.
FIG. 6 is a schematic diagram of the parts stretched on one side of the hollow boss of the dynamic seal holder in example 1.
FIG. 7 is a schematic view of the details of the combination of example 1.
Fig. 8 is a schematic structural view of a rotary cylinder according to embodiment 2.
Fig. 9 is a schematic view of a side-drive high-vacuum gate valve coupling device in embodiment 2.
Fig. 10 is a schematic view of the coupling assembly of the rotary cylinder and the side-drive high-vacuum gate valve of embodiment 2.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1
In the present embodiment, the rotating shaft, the dynamic seal holder and the coupling body are respectively realized by three different parts, namely the rotating shaft 100, the dynamic seal holder 200 and the coupling body 300, which can hermetically connect the rotating cylinder 400 and the valve box 500 of the side-drive pneumatic high-vacuum gate valve, as shown in fig. 2. Fig. 3 shows the installation and connection mode of the cylinder and each part of the connection device.
As shown in fig. 4, a flange plate 101 is used at one end of the rotary shaft 100, and the flange plate 101 of the rotary shaft 100 is fixed to the rotary disc 401 by screws, with the flange plate 101 having a hole matching with the rotary disc 401 of the rotary cylinder 400 being provided in the plate 101. The other end of the rotating shaft 100 is a shaft with a certain length, and the length of the shaft is related to the required length of the dynamic seal assembly, the thickness of a flange 501 of the valve box and the thickness of a swing rod of a transmission mechanism in the valve box. The design form of the shaft end 102 is related to the connection and fixing mode of a transmission mechanism swing rod in the valve box. In this embodiment, a circular hole is formed on the transmission swing rod in the valve box, the shaft end 102 is designed as a circular shaft and has a radial through hole, and the through hole is used for being matched with the swing rod and then fixed through a screw.
The cylindrical shaft end 102 of the rotating shaft 100 generates a large shearing force to the screw or pin for fixing when rotating, and the shearing strength of the screw or pin needs to be considered in the design. Therefore, the shaft end 102 of the rotating shaft 100 connected with the swing link can also be designed to be square, and the hole on the transmission swing link matched with the shaft end needs to be a square through hole. The square shaft end also needs to be provided with a radial through hole, so that the rotating shaft and the transmission swing rod can be conveniently fixed by using a screw or a pin.
The dynamic seal in this embodiment is a rubber O-ring seal. When a rubber O-ring seal is used, the dynamic seal retainer 200 includes two parts: the structure for fixing the dynamic sealing ring, namely the hollow boss 201, and the pressing surface 202 connected with the flange of the valve box are shown in figure 5. The height of the hollow boss 201 is related to the wire diameter and the number of superposed layers of the rubber O-shaped ring required by dynamic sealing. The valve box flange pressing surface 202 is matched with the valve box flange 501 and is provided with a through hole for fixing; the hollow boss 201 is used for holding and fixing the dynamic sealing ring, is positioned in the center of the valve box flange pressing surface 202, and a hole is formed in a convex surface 211 of the boss 201 and can be matched with the shaft end 102 of the rotating shaft 100 to pass through.
The hollow boss of the dynamic seal holder 200 can be designed on one side of the valve box flange pressing surface 202, and as shown in fig. 6, the hollow boss 201' is stretched on one side of the pressing surface 202. In this structure, in order to compress the dynamic seal ring in the dynamic seal structure, the flange connection disc 101 of the rotating shaft 100 may contact with the compression surface 202 of the dynamic seal holder 200, and when the two rotate relatively, friction may be generated, but this design can make the whole coupling structure compact and reduce the protruding height of the side surface of the side-drive gate valve. In fig. 5, the hollow boss 201 is stretched toward both sides of the pressing surface 202, and an annular boss is provided between the pressing surface 202 and the flange plate 101 of the rotating shaft 100, as shown in fig. 2, when the dynamic seal holder 200 and the rotating shaft 100 rotate relatively, the contact area is small, and the friction is relatively reduced, so that the hollow boss 201 can be stretched on both sides, wherein the stretching height of the side contacting the rotating shaft 100 is as small as possible, so as to ensure that the pressing surface 202 does not directly contact the flange plate 101. The design can reduce friction, and simultaneously, the protruding height of the side surface of the side-drive type gate valve is minimized.
In this embodiment, the coupling body 300 is realized by a single component, which can be divided into a cylinder connection end 301, a valve box flange connection end 302 and a hollow section 303, as shown in fig. 7. The main function of the present invention is to provide a stable support for the rotary cylinder 400, so that the base 402 (non-rotary part) and the valve housing 500 of the rotary cylinder 400 are relatively fixed, as shown in fig. 3, which is beneficial to the stability of the whole system; meanwhile, a space isolated from the external working environment is provided for the dynamic seal and the static seal related to the connecting device, and the influence of dust and particles in the environment on the service life of the dynamic seal is reduced. The design of the cylinder connecting end 301 matches with the size of the fixing threaded hole on the cylinder base body 402, and in this embodiment, the fixing mode here adopts screw connection of four square corners, as shown in fig. 3. The manifold flange connection 302 mates with the cylinder flange 501 of the manifold 500, as shown in fig. 2, by screws. The length of the hollow section 303 is related to parameters such as the thickness of the flange connection disc 101 of the rotating shaft 100, the stretching height of the hollow boss of the dynamic seal holder 200, the height of the rotating disc 401 on the rotating cylinder 400, and the like, and the size of the hollow section is adjusted according to the assembly requirement.
The above embodiments describe the use of this coupling method in the form of a dynamic seal using a rubber O-ring. The following example describes the use of a coupling method in the form of a magnetorheological fluid dynamic seal.
Example 2
The dynamic seal of the pneumatic element of the side-driving high-vacuum gate valve of the embodiment adopts magnetic fluid seal. According to the design method of the coupling structure described in the present invention, in the present embodiment, the design of the three main parts is achieved by two parts.
The rotating shaft 100 ' is a separate part, and the flange connection disc 101 ' is fixedly connected with the rotating disc 401 of the rotating cylinder 400 in a matching manner, and the shaft end 102 ' adopts a square shaft, as shown in fig. 8. The dynamic seal holder 200 and coupling body 300 of the present invention are realized by another independent part 300 ', and the part 300 ' can be divided into three parts, 301 ', 302' and 303 ', as shown in fig. 9. Wherein 301' is equivalent to the cylinder connecting end 301 of the coupling body 300; 302' functions as the valve housing flange connection end 302 of the coupling body 300 and the pressing surface 202 of the dynamic seal holder 200; 303' is designed by combining the hollow boss 201 of the dynamic seal holder 200 and the hollow section 303 of the coupling body 300 into a whole, which not only can play a role of fixing and maintaining the internal magnetic fluid seal and isolate the internal magnetic fluid seal from the external environment, but also can provide a fixed support for the rotary cylinder 400, so that the base body (non-rotary part) of the cylinder is fixed relative to the valve box.
The rotating shaft 100 'and the part 300' can rotate relatively, and after the flange connection disc 101 of the rotating shaft 100 'and the rotating disc 401 of the rotating cylinder 400 are connected and fixed, the rotating shaft 100' transmits the rotating motion to the valve core moving mechanism in the valve box, as shown in fig. 10. The inner part 303 ' of the part 300 ' is provided with magnetic fluid seal, the base body part of the rotary cylinder 400 and the valve box flange are fixed by 301 ' and 302', and the static seal ring on the valve box flange is pressed by 302', so that the rotary cylinder is connected with the high-vacuum gate valve box in a sealing manner.
In summary, the structure for connecting the side-drive pneumatic high-vacuum gate valve and the rotary driving element and the design method thereof described in the invention are effective design methods, the structure designed according to the method can establish complete sealing connection between the rotary pneumatic element and the high-vacuum gate valve, and effectively utilize the connection to transmit the rotary motion of the rotary pneumatic element to the valve core motion mechanism in the valve box, thereby meeting the design requirements of the side-drive pneumatic high-vacuum gate valve.
The above embodiments are provided to further explain the technical problems, technical solutions and advantages of the present invention in detail, it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A structure for connecting a side-driving pneumatic high-vacuum gate valve with a rotary drive is characterized by comprising a rotary shaft, a dynamic seal retainer and a connecting body;
the rotating shaft penetrates through the dynamic seal retainer, and the air cylinder and the valve box are respectively connected with two ends of the connecting body; the rotating shaft is provided with a pneumatic element connecting end and a transmission mechanism connecting end; the rotating shaft is connected with the pneumatic element through the pneumatic element connecting end and rotates with the rotating part of the pneumatic element at the same time; the rotating shaft is connected with a valve core transmission mechanism in the high vacuum gate valve through a transmission mechanism connecting end in a threaded or pin connection mode;
the dynamic seal retainer is internally provided with a hollow boss of a dynamic seal structure and a pressing surface which is used for fixing with the valve box and can provide pressing force for static seal on a flange of the valve box; the height of the hollow boss of the dynamic seal retainer depends on the required thickness of the dynamic seal structure.
2. The coupling structure for the side-drive pneumatic high-vacuum gate valve and the rotary drive as set forth in claim 1, wherein the pneumatic element connecting end is connected with the rotary disk of the pneumatic element by fastening means so as to obtain the same rotational angular velocity thereof.
3. The structure for coupling the side-driving pneumatic high vacuum gate valve with the rotary drive as claimed in claim 1, wherein the pneumatic element connecting end is connected with the rotary disk of the pneumatic element through a gear or a chain, and the rotation angular velocity is enlarged or reduced by obtaining a rotation ratio.
4. The structure for connecting the side-driving pneumatic high-vacuum gate valve with the rotary drive as claimed in claim 1, wherein: the coupling body comprises an air cylinder connecting end, a valve box flange connecting end and a hollow section, and the hollow section connects the air cylinder connecting end with the valve box flange connecting end; the cylinder connecting end is used for being matched and connected with a base body part, namely a non-rotating part, of the pneumatic rotating element; the valve box flange connecting end is used for being matched and connected with a side-drive high-vacuum gate valve box flange; the hollow section is fixedly connected with the valve box flange through the valve box flange connecting end, has a supporting effect on the pneumatic rotating element, and can envelop the dynamic seal retainer and the dynamic seal component inside the dynamic seal retainer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711208030.1A CN107965606B (en) | 2017-11-27 | 2017-11-27 | Be used for pneumatic high vacuum gate valve of side drive formula and rotary drive connection structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711208030.1A CN107965606B (en) | 2017-11-27 | 2017-11-27 | Be used for pneumatic high vacuum gate valve of side drive formula and rotary drive connection structure |
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| Publication Number | Publication Date |
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| CN107965606A CN107965606A (en) | 2018-04-27 |
| CN107965606B true CN107965606B (en) | 2020-11-10 |
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| CN201711208030.1A Active CN107965606B (en) | 2017-11-27 | 2017-11-27 | Be used for pneumatic high vacuum gate valve of side drive formula and rotary drive connection structure |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116639501B (en) * | 2023-07-27 | 2023-10-20 | 张家港市艾尔环保工程有限公司 | Forced discharging device for flue gas purification and forced discharging method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201688007U (en) * | 2010-05-26 | 2010-12-29 | 北京泰科诺科技有限公司 | Adjustable vacuum limiting valve |
| CN105422884A (en) * | 2016-01-06 | 2016-03-23 | 江苏安普阀门机械有限公司 | High ultra-vacuum special electric gate valve |
| CN205155194U (en) * | 2015-11-09 | 2016-04-13 | 东莞市汇成真空科技有限公司 | A vacuum valve with large size double valve plate |
| CN106949253A (en) * | 2017-04-27 | 2017-07-14 | 沈阳真空技术研究所 | Inflate piston seal vacuum gate valve |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201305831D0 (en) * | 2013-03-29 | 2013-05-15 | Richard J Pond Ltd | Electrically operable rotary actuator assembly |
| CN206206593U (en) * | 2016-10-25 | 2017-05-31 | 上海力为流体设备有限公司 | Combined mechanical sealing device and side-feeding mixer |
-
2017
- 2017-11-27 CN CN201711208030.1A patent/CN107965606B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201688007U (en) * | 2010-05-26 | 2010-12-29 | 北京泰科诺科技有限公司 | Adjustable vacuum limiting valve |
| CN205155194U (en) * | 2015-11-09 | 2016-04-13 | 东莞市汇成真空科技有限公司 | A vacuum valve with large size double valve plate |
| CN105422884A (en) * | 2016-01-06 | 2016-03-23 | 江苏安普阀门机械有限公司 | High ultra-vacuum special electric gate valve |
| CN106949253A (en) * | 2017-04-27 | 2017-07-14 | 沈阳真空技术研究所 | Inflate piston seal vacuum gate valve |
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| CN107965606A (en) | 2018-04-27 |
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