CN105422884A - High ultra-vacuum special electric gate valve - Google Patents

High ultra-vacuum special electric gate valve Download PDF

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Publication number
CN105422884A
CN105422884A CN201610001983.XA CN201610001983A CN105422884A CN 105422884 A CN105422884 A CN 105422884A CN 201610001983 A CN201610001983 A CN 201610001983A CN 105422884 A CN105422884 A CN 105422884A
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China
Prior art keywords
sub
board
main board
valve
bolt
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Pending
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CN201610001983.XA
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Chinese (zh)
Inventor
刘庆国
鲜海峰
王翔
肖元陆
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Jiangsu Anpu Valve Machinery Co Ltd
Institute of Fluid Physics of CAEP
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Jiangsu Anpu Valve Machinery Co Ltd
Institute of Fluid Physics of CAEP
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Application filed by Jiangsu Anpu Valve Machinery Co Ltd, Institute of Fluid Physics of CAEP filed Critical Jiangsu Anpu Valve Machinery Co Ltd
Priority to CN201610001983.XA priority Critical patent/CN105422884A/en
Publication of CN105422884A publication Critical patent/CN105422884A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/36Valve members
    • F16K1/38Valve members of conical shape
    • F16K1/385Valve members of conical shape contacting in the closed position, over a substantial axial length, a seat surface having the same inclination
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/44Mechanical actuating means
    • F16K31/50Mechanical actuating means with screw-spindle or internally threaded actuating means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)

Abstract

本发明公开了一种高超真空特种电动插板阀,它涉及一种阀门。它包括阀体、副板、连接键、第一螺栓、主板、连接杆、阀盖、电动头、变速箱、传动键、套筒和传动轴,阀体中安装有副板和主板,主板上设有连接键和第一螺栓,副板上设有与连接键、第一螺栓相对应的导向槽,主板与副板相配合,主板上设有第一除尘圈和第一密封圈,副板上设有第二除尘圈和第二密封圈,主板与副板的中间接触面为楔面,主板与副板之间设置有压缩弹簧,主板上端通过连接杆与传动轴连接,传动轴与安装在变速箱的传动键传动连接,变速箱与电动头连接。本发明使用寿命长,密封效果优良,隔离真空效果好,实用性强,易于推广使用。

The invention discloses a high-ultra-vacuum special electric plug-in valve, which relates to a valve. It includes valve body, sub-plate, connecting key, first bolt, main board, connecting rod, valve cover, electric head, gearbox, transmission key, sleeve and transmission shaft. There are connection keys and first bolts, guide grooves corresponding to the connection keys and the first bolts are provided on the sub-board, the main board and the sub-board are matched, the first dust removal ring and the first sealing ring are provided on the main board, and the sub-board There is a second dust removal ring and a second sealing ring on the top. The middle contact surface between the main board and the sub-board is a wedge surface. A compression spring is arranged between the main board and the sub-board. The upper end of the main board is connected to the transmission shaft through a connecting rod. The transmission shaft and the installation The transmission key of the gearbox is connected with the transmission key, and the gearbox is connected with the electric head. The invention has long service life, excellent sealing effect, good vacuum isolation effect, strong practicability, and is easy to popularize and use.

Description

高超真空特种电动插板阀High ultra-vacuum special electric plug-in valve

技术领域 technical field

本发明涉及的是一种阀门,具体涉及高超真空特种电动插板阀。 The invention relates to a valve, in particular to a high-ultra-vacuum special electric plug-in valve.

背景技术 Background technique

特种阀门在军工系统和设备以及高端科学研究装置上具有极为广泛的运用,部件虽小,但作用巨大,是制约我国军工装备制造及高端科学研究装置研制的关键部件;现有商业化技术的超高真空阀在实际使用过程中容易出现磨损,导致其使用寿命大大降低的问题,且阀体内部连接面之间的密封效果不好,容易出现泄漏问题,尤其是对于不清洁的管道介质,现有商业化技术的阀体无法保证高超真空度,影响其使用效果,基于此,设计和研制一种高超真空特种电动插板阀还是很有必要的。 Special valves are widely used in military systems and equipment as well as high-end scientific research devices. Although the components are small, they play a huge role. They are key components that restrict the manufacturing of military equipment and the development of high-end scientific research devices in my country; High-vacuum valves are prone to wear and tear during actual use, resulting in a greatly reduced service life, and the sealing effect between the internal connection surfaces of the valve body is not good, which is prone to leakage problems, especially for unclean pipeline media. The valve body with commercial technology cannot guarantee high ultra-vacuum degree, which affects its use effect. Based on this, it is still necessary to design and develop a high-ultra-vacuum special electric gate valve.

发明内容 Contents of the invention

针对现有技术上存在的不足,本发明目的是在于提供一种高超真空特种电动插板阀,结构设计合理,使用寿命长,密封效果优良,隔离真空效果好,实用性强,易于推广使用,特别是可应用于不清洁的管道介质,同时确保高超真空度的使用要求。 Aiming at the deficiencies in the prior art, the purpose of the present invention is to provide a high-ultra-vacuum special electric gate valve, which has a reasonable structural design, long service life, excellent sealing effect, good vacuum isolation effect, strong practicability, and is easy to popularize and use. In particular, it can be applied to unclean pipeline media, while ensuring the use requirements of high ultra-vacuum degree.

为了实现上述目的,本发明是通过如下的技术方案来实现:高超真空特种电动插板阀,包括阀体、副板、连接键、第一螺栓、主板、连接杆、阀盖、电动头、变速箱、传动键、套筒和传动轴,阀体中安装有副板和主板,主板上设有连接键和第一螺栓,副板上设有与连接键、第一螺栓相对应的导向槽,主板与副板相配合,主板上端通过连接杆与传动轴连接,传动轴与安装在变速箱的传动键传动连接,变速箱与电动头连接,变速箱固定在套筒上,传动轴设置在套筒内部,套筒与阀体之间通过阀盖固定连接。 In order to achieve the above object, the present invention is achieved through the following technical solutions: a high-ultra-vacuum special electric plug-in valve, including a valve body, an auxiliary plate, a connecting key, a first bolt, a main board, a connecting rod, a valve cover, an electric head, a variable speed Box, transmission key, sleeve and transmission shaft, sub-plate and main board are installed in the valve body, connecting key and first bolt are arranged on the main board, guide groove corresponding to connecting key and first bolt is provided on the sub-plate, The main board is matched with the auxiliary board. The upper end of the main board is connected with the drive shaft through the connecting rod. Inside the barrel, the sleeve and the valve body are fixedly connected through the valve cover.

作为优选,所述的主板与阀体之间设有第一除尘圈和第一密封圈,副板与阀体之间设有第二除尘圈和第二密封圈,主板与副板的中间接触面为楔面,更有利于密封;主板与副板之间设置有压缩弹簧,借助压缩弹簧的弹簧复位力,可有效减少密封面的磨损。 As a preference, a first dust removal ring and a first sealing ring are provided between the main board and the valve body, a second dust removal ring and a second sealing ring are provided between the sub-board and the valve body, and the middle contact between the main board and the sub-board The surface is a wedge surface, which is more conducive to sealing; a compression spring is arranged between the main plate and the sub-plate, and the spring return force of the compression spring can effectively reduce the wear of the sealing surface.

作为优选,所述的连接杆与阀盖之间密封设置有两组O型圈,阻止内外渗漏。 As a preference, two sets of O-rings are sealed between the connecting rod and the valve cover to prevent internal and external leakage.

作为优选,所述的阀盖分别通过第二螺栓、第三螺栓与阀体、套筒固定连接,阀盖与阀体之间还设置有密封垫,第二螺栓、第三螺栓上分别设有弹性垫圈、第一弹簧垫圈,套筒通过第四螺栓固定在变速箱上,第四螺栓上设有第二弹簧垫圈。 Preferably, the valve cover is fixedly connected to the valve body and the sleeve through the second bolt and the third bolt respectively, a sealing gasket is also provided between the valve cover and the valve body, and the second bolt and the third bolt are respectively provided with The elastic washer, the first spring washer, and the sleeve are fixed on the gearbox through the fourth bolt, and the second spring washer is arranged on the fourth bolt.

本发明的有益效果:(1)隔离真空效果好,对于不清洁的管道介质仍能保证高超真空度(泄漏率优于1×10-7Pa.m3/s,最高等级可达到10-9Pa.m3/s); Beneficial effects of the present invention: (1) The isolation vacuum effect is good, and a high ultra-vacuum degree can still be guaranteed for unclean pipeline media (leakage rate is better than 1×10 -7 Pa.m 3 /s, and the highest level can reach 10 -9 Pa.m 3 /s);

(2)密封效果好,密封面磨损少,使用寿命更长; (2) The sealing effect is good, the sealing surface wears less, and the service life is longer;

(3)运动平稳,无撞击、噪音小,保证使用效果。 (3) Smooth movement, no impact, low noise, ensuring the use effect.

附图说明 Description of drawings

下面结合附图和具体实施方式来详细说明本发明; The present invention is described in detail below in conjunction with accompanying drawing and specific embodiment;

图1为本发明的结构示意图; Fig. 1 is a structural representation of the present invention;

图2为本发明的侧视图。 Figure 2 is a side view of the present invention.

具体实施方式 detailed description

为使本发明实现的技术手段、创作特征、达成目的与功效易于明白了解,下面结合具体实施方式,进一步阐述本发明。 In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

参照图1-2,本具体实施方式采用以下技术方案:高超真空特种电动插板阀,包括阀体1、副板2、连接键5、第一螺栓6、主板7、连接杆9、阀盖14、电动头17、变速箱18、传动键21、套筒22和传动轴23,阀体1中安装有副板2和主板7,主板7与副板2相配合,主板7上端通过连接杆9与传动轴23连接,传动轴23与安装在变速箱18的传动键21传动连接,变速箱18与电动头17连接,变速箱18固定在套筒22上,传动轴23设置在套筒22内部,套筒22与阀体1之间通过阀盖14固定连接。 Referring to Figures 1-2, this specific implementation mode adopts the following technical solutions: a high-ultra-vacuum special electric plug-in valve, including a valve body 1, an auxiliary plate 2, a connecting key 5, a first bolt 6, a main plate 7, a connecting rod 9, and a valve cover 14. Electric head 17, gearbox 18, transmission key 21, sleeve 22 and transmission shaft 23, sub-board 2 and main board 7 are installed in valve body 1, main board 7 cooperates with sub-board 2, and the upper end of main board 7 passes through the connecting rod 9 is connected with the transmission shaft 23, the transmission shaft 23 is connected with the transmission key 21 installed in the gearbox 18, the gearbox 18 is connected with the electric head 17, the gearbox 18 is fixed on the sleeve 22, and the transmission shaft 23 is arranged on the sleeve 22 Inside, the sleeve 22 is fixedly connected to the valve body 1 through the valve cover 14 .

值得注意的是,所述的主板7与阀体1之间设有第一除尘圈3和第一密封圈4,副板2与阀体1之间设有第二除尘圈24和第二密封圈25,主板7与副板2之间设置有压缩弹簧8。 It is worth noting that the first dust removal ring 3 and the first sealing ring 4 are arranged between the main board 7 and the valve body 1, and the second dust removal ring 24 and the second sealing ring are arranged between the sub-board 2 and the valve body 1. Ring 25, a compression spring 8 is arranged between the main board 7 and the sub-board 2.

此外,所述的连接杆9与阀盖14之间的密封通过两组O型圈13实现,阻止内外渗漏;所述阀盖14分别通过第二螺栓10、第三螺栓15与阀体1、套筒22固定连接,阀盖14与阀体1之间还设置有密封垫12,第二螺栓10、第三螺栓15上分别设有弹性垫圈11、第一弹簧垫圈16,套筒22通过第四螺栓19固定在变速箱18上,第四螺栓19上设有第二弹簧垫圈20。 In addition, the sealing between the connecting rod 9 and the valve cover 14 is realized by two sets of O-rings 13 to prevent internal and external leakage; , the sleeve 22 is fixedly connected, a gasket 12 is also provided between the valve cover 14 and the valve body 1, an elastic washer 11 and a first spring washer 16 are respectively provided on the second bolt 10 and the third bolt 15, and the sleeve 22 passes through The fourth bolt 19 is fixed on the gearbox 18 , and the second spring washer 20 is arranged on the fourth bolt 19 .

本具体实施方式电动头17和变速箱18组合使用,使传动轴23始终低速转动,带动连接杆9、主板7、副板2一起平稳上下直线运动,无撞击、噪音小,主板7上设有连接键5和第一螺栓6,副板2上设有与连接键5、第一螺栓6相对应的导向槽,满足关闭位置的滑动变化,开启时主板7可以带动副板2一起移动,主板7和副板2之间设置的压缩弹簧8,其弹簧复位力在阀门开启时使楔形位置变化,轴向尺寸变小,密封面脱开,开启力小,密封面磨损少,使用寿命长;主板7和副板2中间接触面是楔面,关闭时副板2下端到达阀体1限位面,楔形位置变化,轴向尺寸变大,密封面挤压力变大,更有利于密封;且主板7上设置的第一除尘圈3和副板2上设置的第二除尘圈24在开启和关闭阀门时先清洁密封面,即使对于不清洁的管道介质仍能保证高超真空度。 In this specific embodiment, the electric head 17 and the gearbox 18 are used in combination, so that the transmission shaft 23 is always rotated at a low speed, and the connecting rod 9, the main board 7, and the sub-board 2 are driven to move up and down in a straight line without impact and low noise. The connection key 5 and the first bolt 6, and the sub-board 2 are provided with guide grooves corresponding to the connection key 5 and the first bolt 6, which meet the sliding change of the closed position. When the main board 7 is opened, the main board 7 can drive the sub-board 2 to move together. The compression spring 8 set between 7 and the sub-plate 2, its spring return force changes the wedge-shaped position when the valve is opened, the axial dimension becomes smaller, the sealing surface is disengaged, the opening force is small, the sealing surface wears less, and the service life is long; The middle contact surface between the main plate 7 and the sub-plate 2 is a wedge surface. When the lower end of the sub-plate 2 reaches the limit surface of the valve body 1 when it is closed, the wedge-shaped position changes, the axial dimension becomes larger, and the extrusion force of the sealing surface becomes larger, which is more conducive to sealing; And the first dust removal ring 3 provided on the main board 7 and the second dust removal ring 24 provided on the sub-board 2 clean the sealing surface first when opening and closing the valve, even for unclean pipeline media, still can ensure high ultra-vacuum degree.

本具体实施方式结构紧凑,灵活性好,密封效果优异,隔离真空效果好,具有广阔的市场应用前景。 The specific embodiment has the advantages of compact structure, good flexibility, excellent sealing effect, good effect of isolating vacuum, and has broad market application prospects.

以上显示和描述了本发明的基本原理和主要特征和本发明的优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,如不同的通径尺寸、阀板材料、控制模式、工作模式(电动或手动)等,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。 The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above. Those skilled in the industry should understand that the present invention is not limited by the above-mentioned embodiments. What are described in the above-mentioned embodiments and the description only illustrate the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will also have Various changes and improvements, such as different diameter sizes, valve plate materials, control modes, working modes (electric or manual), etc., all fall within the scope of the claimed invention. The protection scope of the present invention is defined by the appended claims and their equivalents.

Claims (6)

1.高超真空特种电动插板阀,其特征在于,包括阀体(1)、副板(2)、连接键(5)、第一螺栓(6)、主板(7)、连接杆(9)、阀盖(14)、电动头(17)、变速箱(18)、传动键(21)、套筒(22)和传动轴(23),阀体(1)中安装有副板(2)和主板(7),主板(7)上设有连接键(5)和第一螺栓(6),副板(2)上设有与连接键(5)、第一螺栓(6)相对应的导向槽,主板(7)与副板(2)相配合,主板(7)上端通过连接杆(9)与传动轴(23)连接,传动轴(23)与安装在变速箱(18)的传动键(21)传动连接,变速箱(18)与电动头(17)连接,电动头(17)和变速箱(18)组合使用,使传动轴(23)始终低速转动,带动连接杆(9)、主板(7)、副板(2)一起平稳上下直线运动,变速箱(18)固定在套筒(22)上,传动轴(23)设置在套筒(22)内部,套筒(22)与阀体(1)之间通过阀盖(14)固定连接。 1. High ultra-vacuum special electric plug-in valve, characterized in that it includes valve body (1), sub-plate (2), connecting key (5), first bolt (6), main board (7), connecting rod (9) , valve cover (14), electric head (17), gearbox (18), transmission key (21), sleeve (22) and transmission shaft (23), and the sub-plate (2) is installed in the valve body (1) And the main board (7), the main board (7) is provided with the connection key (5) and the first bolt (6), and the sub-board (2) is provided with the connection key (5), the first bolt (6) corresponding The guide groove, the main board (7) is matched with the sub-board (2), the upper end of the main board (7) is connected with the drive shaft (23) through the connecting rod (9), and the drive shaft (23) is connected with the drive shaft (23) installed in the gearbox (18) Key (21) transmission connection, gearbox (18) is connected with motor head (17), and motor head (17) and gearbox (18) are used in combination to make transmission shaft (23) rotate at low speed all the time, driving connecting rod (9) , the main board (7), and the sub-board (2) move up and down in a straight line smoothly, the gearbox (18) is fixed on the sleeve (22), the transmission shaft (23) is arranged inside the sleeve (22), and the sleeve (22) It is fixedly connected with the valve body (1) through a valve cover (14). 2.根据权利要求1所述的高超真空特种电动插板阀,其特征在于,所述的主板(7)与阀体(1)之间设有第一除尘圈(3)和第一密封圈(4),副板(2)与阀体(1)之间设有第二除尘圈(24)和第二密封圈(25),第一除尘圈(3)、第二除尘圈(24)在开启和关闭阀门时先清洁密封面,即使对于不清洁的管道介质仍能保证高超真空度。 2. The high-ultra-vacuum special electric plug-in valve according to claim 1, characterized in that, a first dust removal ring (3) and a first sealing ring are arranged between the main board (7) and the valve body (1) (4), the second dust removal ring (24) and the second sealing ring (25) are arranged between the sub-plate (2) and the valve body (1), the first dust removal ring (3), the second dust removal ring (24) Clean the sealing surface first when opening and closing the valve, even for unclean pipeline media, it can still guarantee high ultra-vacuum degree. 3.根据权利要求1所述的高超真空特种电动插板阀,其特征在于,所述的主板(7)与副板(2)的中间接触面为楔面,关闭时副板(2)下端到达阀体(1)限位面,楔形位置变化,轴向尺寸变大,密封面挤压力变大,更有利于密封。 3. The high-ultra-vacuum special electric plug-in valve according to claim 1, characterized in that, the middle contact surface between the main board (7) and the sub-board (2) is a wedge surface, and the lower end of the sub-board (2) is closed when it is closed. When it reaches the limit surface of the valve body (1), the wedge-shaped position changes, the axial dimension becomes larger, and the extrusion force of the sealing surface becomes larger, which is more conducive to sealing. 4.根据权利要求1所述的高超真空特种电动插板阀,其特征在于,所述的主板(7)与副板(2)之间设置有压缩弹簧(8),在阀门开启时,压缩弹簧(8)的弹簧复位力使楔形位置变化,轴向尺寸变小,密封面脱开,开启力小,密封面磨损少,使用寿命长。 4. The high ultra-vacuum special electric plug-in valve according to claim 1, characterized in that, a compression spring (8) is arranged between the main board (7) and the sub-board (2), and when the valve is opened, the compression spring (8) The spring return force of the spring (8) causes the wedge-shaped position to change, the axial dimension to become smaller, the sealing surface to disengage, the opening force to be small, the sealing surface to wear less, and the service life to be long. 5.根据权利要求1所述的高超真空特种电动插板阀,其特征在于,所述的连接杆(9)与阀盖(14)之间密封设置有两组O型圈(13),阻止内外渗漏。 5. The high-ultra-vacuum special electric gate valve according to claim 1, characterized in that two sets of O-rings (13) are sealed between the connecting rod (9) and the valve cover (14) to prevent Leakage inside and out. 6.根据权利要求1所述的高超真空特种电动插板阀,其特征在于,所述的阀盖(14)分别通过第二螺栓(10)、第三螺栓(15)与阀体(1)、套筒(22)固定连接,阀盖(14)与阀体(1)之间还设置有密封垫(12),第二螺栓(10)、第三螺栓(15)上分别设有弹性垫圈(11)、第一弹簧垫圈(16),套筒(22)通过第四螺栓(19)固定在变速箱(18)上,第四螺栓(19)上设有第二弹簧垫圈(20)。 6. The high-ultra-vacuum special electric gate valve according to claim 1, characterized in that, the valve cover (14) is connected to the valve body (1) through the second bolt (10), the third bolt (15) and the valve body (1) respectively. , the sleeve (22) is fixedly connected, a gasket (12) is also provided between the bonnet (14) and the valve body (1), and elastic washers are respectively provided on the second bolt (10) and the third bolt (15) (11), the first spring washer (16), the sleeve (22) is fixed on the gearbox (18) by the fourth bolt (19), and the second spring washer (20) is arranged on the fourth bolt (19).
CN201610001983.XA 2016-01-06 2016-01-06 High ultra-vacuum special electric gate valve Pending CN105422884A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107965606A (en) * 2017-11-27 2018-04-27 上海卫星装备研究所 One kind is used for side and drives formula pneumatic high vacuum gate valve and rotation driving connecting structure
CN110886900A (en) * 2019-11-29 2020-03-17 中国科学院化学研究所 A miniature plug valve device for high vacuum

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CN203363235U (en) * 2013-05-10 2013-12-25 严云北 Padding-free gate valve
CN203963075U (en) * 2014-07-31 2014-11-26 湖北泰和石化设备有限公司 A kind of complex spring connects Wedge type double gate board gate valve
CN205298607U (en) * 2016-01-06 2016-06-08 江苏安普阀门机械有限公司 Electronic push -pull valve of high ultravacuum special type

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Publication number Priority date Publication date Assignee Title
CN201126045Y (en) * 2007-12-17 2008-10-01 天津市华泰森淼生物工程技术有限公司 Ultra-high pressure stop valve for fluid mixture material having particles
CN102563112A (en) * 2011-12-31 2012-07-11 肇庆市腾胜真空技术工程有限公司 Vacuum gate valve for vacuum chambers
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CN203963075U (en) * 2014-07-31 2014-11-26 湖北泰和石化设备有限公司 A kind of complex spring connects Wedge type double gate board gate valve
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Publication number Priority date Publication date Assignee Title
CN107965606A (en) * 2017-11-27 2018-04-27 上海卫星装备研究所 One kind is used for side and drives formula pneumatic high vacuum gate valve and rotation driving connecting structure
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CN110886900A (en) * 2019-11-29 2020-03-17 中国科学院化学研究所 A miniature plug valve device for high vacuum

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Application publication date: 20160323