CN106904408A - A kind of vacuum chamber conveyer - Google Patents
A kind of vacuum chamber conveyer Download PDFInfo
- Publication number
- CN106904408A CN106904408A CN201710098440.9A CN201710098440A CN106904408A CN 106904408 A CN106904408 A CN 106904408A CN 201710098440 A CN201710098440 A CN 201710098440A CN 106904408 A CN106904408 A CN 106904408A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- guide rail
- vacuum chamber
- prechamber
- top board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A kind of vacuum chamber conveyer, it includes being fixed on the guide rail of at least one of described prechamber first, with the first mounting seat of the first guide rail slidable connection, first mounting seat is provided with second guide rail vertical with first guide rail, the second guide rail slidable connection has the second sliding block, second sliding block is rotatably connected with pivoted arm, the pivoted arm is rotatably connected with the rotating shaft being fixed in the prechamber, and first mounting seat sets the tabular bracket that oriented vacuum function room direction extends.A kind of vacuum chamber conveyer provided by the present invention, compact conformation, good airproof performance can provide two adjacent vacuum chambers effectively sealing, and to the opening shape strong adaptability of vacuum chamber, and it is effectively reduced the size requirement to whole equipment.
Description
Technical field
It is more particularly to a kind of for transmitting thing between adjacent vacuum chamber the present invention relates to technical field of vacuum equipment
The device of product.
Background technology
Vacuum equipment all has that the pumpdown time is long, experiment and production efficiency than relatively low problem, some application necks
Domain involve the need for being passed through in vacuum function room hazardous gas, run into some gases cause raw materials technology spoilage problems, some
Working gas run into water in air can spoilage problems etc., need to coordinate vacuum function room to do a prechamber again for this,
So that sample is passed in and out from prechamber, and vacuum function room does not expose air, keeps good vacuum environment.So, in forevacuum
A valve, this valve are needed between room and vacuum function room can be opened and closed, and sample is being ensured effectively in prechamber during opening
On the premise of being transmitted between vacuum function room, connection space needs are as small as possible, to reduce gas diffusion, and ensure two cavitys
Size for connection is as small as possible, is conducive to vacuum cavity to design, and is unlikely to bring very much the invalid increase of vacuum chamber greatly because of connection space.
Additionally, when needing to be carried out between prechamber and vacuum function room article transmission, if using form of straight lines
Transmission, then the stroke of manipulator cannot be less than the sample center of prechamber to the sample placement location of vacuum function room
Distance, due to vacuum function room sample more be centrally disposed on position, add necessary between prechamber and vacuum function room
Vacuum lock with vacuum separation effect, this stroke will be long, is accomplished by being provided with one outside such prechamber directly
Line length bar, it is relatively more clumsy so as to cause equipment overall just long.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of vacuum chamber conveyer, to be carried before being reduced or avoided
The problem for arriving.
In order to solve the above technical problems, the present invention proposes a kind of vacuum chamber conveyer, it is arranged on prechamber
In, for carrying out article transmission to adjacent vacuum function room, it is provided between the prechamber and the vacuum function room
Vacuum lock, it includes being fixed on the guide rail of at least one of described prechamber first, with the first guide rail slidable connection
The first mounting seat, first mounting seat is provided with second guide rail vertical with first guide rail, and second guide rail can
Slidably connect the second sliding block, second sliding block is rotatably connected with pivoted arm, the pivoted arm be fixed on the prechamber
In rotating shaft be rotatably connected, first mounting seat sets the tabular bracket that oriented vacuum function room direction extends.
Preferably, the vacuum lock include a housing, the housing both sides be provided with for the prechamber and
The through hole of the vacuum function room connection, is provided with the lock body that can slide up and down in the housing, the lock body includes one piece of top
Plate, the top board both sides are symmetrically arranged with sealing plate, and the top board is provided with the ball of multiple protrusion top board surfaces, described
The sealing plate correspondence ball is provided with multiple cone-shaped grooves.
Preferably, it is provided with spring between two sealing plates.
Preferably, the lock body is provided with the guide bearing that can be rolled with the housing and be connected.
Preferably, the through hole and the sealing plate, the top board are rectangle.
Preferably, the side wall of the top board is evenly equipped with four pairs of balls, the side wall edge of the sealing plate along its length
Length direction is evenly equipped with four pairs of cone-shaped grooves.
Preferably, the sealing plate is provided with sealing ring.
A kind of vacuum chamber conveyer provided by the present invention, compact conformation, good airproof performance can be true to adjacent two
Plenum chamber provides effectively sealing, and to the opening shape strong adaptability of vacuum chamber, additionally, the tabular bracket can be very
Thin and long laminated structure, therefore article can be sent into by long narrow vacuum lock gap or take out vacuum function room, so
The size requirement to whole equipment can just be reduced.
Brief description of the drawings
The following drawings is only intended to, in schematic illustration and explanation is done to the present invention, not delimit the scope of the invention.Wherein,
Fig. 1 is to be illustrated according to a kind of structural principle of vacuum chamber conveyer of a specific embodiment of the invention
Figure；
Fig. 2 is the partial cross principle schematic of the applied environment of the vacuum chamber conveyer of Fig. 1；
Fig. 3 is the dimensional decomposition structure principle schematic of the vacuum lock of Fig. 2.
Specific embodiment
In order to be more clearly understood to technical characteristic of the invention, purpose and effect, now control illustrates this hair
Bright specific embodiment.Wherein, identical part uses identical label.
Fig. 1 is to be shown according to a kind of stereochemical structure principle of vacuum chamber conveyer of a specific embodiment of the invention
It is intended to；Fig. 2 is the partial cross principle schematic of the applied environment of the vacuum chamber conveyer of Fig. 1；Referring to shown in Fig. 1-2,
The invention provides a kind of vacuum chamber conveyer, it is arranged in prechamber 101, for adjacent vacuum function room
102 carry out article transmission, and vacuum lock is provided between the prechamber 101 and the vacuum function room 102, and it includes fixing
In first guide rail of at least one of described prechamber 101 41, the first installation with the slidable connection of the first guide rail 41
Seat 42, first mounting seat 42 is provided with second guide rail 51 vertical with first guide rail 41, and second guide rail can be slided
Dynamic to be connected with the second sliding block 52, second sliding block 52 is rotatably connected with pivoted arm 53, the pivoted arm 53 be fixed on it is described pre-
Rotating shaft 54 in vacuum chamber 101 is rotatably connected, and first mounting seat 42 sets the oriented direction of vacuum function room 102 and prolongs
The tabular bracket 43 stretched.
It is shown in Figure 1, when first mounting seat 42 is located at the left side of first guide rail 41, the tabular bracket
In 43 length ranges for closing at first guide rail 41, therefore, between the prechamber 101 and the vacuum function room 102
Vacuum lock can effectively close.When needing to the vacuum function room 102 transmission print and other items, can first open described pre- true
Empty room 101, places items within the tabular bracket 43, is then shut off the prechamber 101, makes the prechamber
101 extract vacuum, and the vacuum lock can be opened afterwards, then drive pivoted arm 53 to rotate, meeting in the rotary course of the pivoted arm 53
Second sliding block 52 is driven to be moved along second guide rail 51, so as to drive first mounting seat 42 along first guide rail
41 movements, can thus cause that the tabular bracket 43 is moved to the vacuum function room 102, and most article feeding is described at last
Vacuum function room 102, then after article is in place, the pivoted arm 53 is reversely rotated can drive the tabular bracket 43 to return
To the prechamber 101, the vacuum lock closing isolation prechamber 101 and the vacuum function room can be used afterwards
102。
The length of the tabular bracket 43 so can ensure that the tabular bracket 43 less than the length of first guide rail 41
Will not interfere with the motion of the vacuum lock.
The settable support for having two, so being first mounting seat 42 provides stabilization of first guide rail 41.
Fig. 3 is the dimensional decomposition structure principle schematic of the vacuum lock of Fig. 2.Shown in Figure 3, the vacuum lock can be wrapped
Include a housing 1, the both sides of the housing 1 are provided with for being connected with the prechamber 101 and the vacuum function room 102
The lock body 2 that can slide up and down is provided with through hole 11, the housing 1, the lock body 2 includes one piece of top board 21, the top board 21
Both sides are symmetrically arranged with sealing plate 22, and the top board 21 is provided with the ball 211 on multiple protrusion surfaces of top board 21, described close
The correspondence of shrouding 22 ball 211 is provided with multiple cone-shaped grooves 221.
The housing 1 is fixedly connected with the prechamber 101 and the vacuum function room 102 respectively, and the through hole
11 connect with the transmission mouthful (not shown) of the prechamber 101 and the vacuum function room 102 respectively.
When the lower section of the inner chamber of the lock body 2 in the housing 1, the prechamber 101 and the vacuum function room
Connected between 102, so as to object transmission can be carried out.
When it is described lock body 2 under inner chamber from the promotion of drive device 3 (such as cylinder or hydraulic cylinder) to the housing 1 it is upper
When side is slided, the sealing plate 22 progressively blocks the through hole 11, when the inner chamber of top surface and the housing 1 of the sealing plate 22
Top surface contact when, the sealing plate 22 covers all the through hole 11, and now, the sealing plate 22 stops upward shifting
It is dynamic, and the top board 21 is continued to move up, the ball 211 is also continued to move up in the cone-shaped groove 221, by
Progressively reduce in the sectional dimension of the cone-shaped groove 221, therefore the ball 211 will promote the sealing plate 22 to institute
State through hole 11 to fit, that is to say, that the axial direction that the ball 211 can be by the sealing plate 22 in the through hole 11 is above pushed away
It is dynamic, so that the sealing plate 22 seals the through hole 11.
When needing two vacuum chambers to connect, pulling of the lock body 2 in drive device 3 (such as cylinder or hydraulic cylinder)
The lower section of the lower inner chamber to the housing 1 is slided, and the ball 211 return back to the circle under the drive of the top board 21 first
At the largest cross-sectional sized position of conical socket 221, afterwards, during downslide, the ball 211 passes through the top board 21
The cone-shaped groove 221 drives the sealing plate 22 to glide, so that the sealing plate 22 leaves covering for the through hole 11
Gai Wei, also can just cause to be connected between the through hole 11.
Vacuum chamber conveyer provided by the present invention is that the present invention passes through ball with the greatest improvement of prior art
Mechanical force controls displacement of the sealing plate 22 on the axial direction of the through hole 11, so as to ensure the sealing plate 22 pairs
The sealing effectiveness of the through hole 11, this also just overcomes existing turnover plate type vacuum chamber conveyer needs by different vacuum
The pressure difference of chamber ensures the defect of sealing effectiveness, additionally, do not require the shape of through hole 11, that is to say, that not pipe through-hole
11 is any shape, and the sealing plate 22 only needs to the shape of the correspondence through hole 11 to manufacture, and the size than through hole 11 is bigger,
Effectively covering can be ensured, this also overcomes the existing vacuum gate valve technological deficiency higher to geomery requirement.
In a preferred embodiment, be can be set between two sealing plates 22 has spring (not shown) to connect
Connect, so, during the lock slide downward of body 2, when the ball 211 return back to the maximum of the cone-shaped groove 221
When at sectional dimension position, two sealing plates 22 can leave the through hole 11 under spring drive, near the top board 21,
So as to moving down beneficial to the lock body 2.
In a further advantageous embodiment, the lock body 2 is provided with the guide bearing that can be rolled with the housing 1 and be connected
23, can so be beneficial to sliding up and down for the lock body 2.
In a further advantageous embodiment, the through hole 11 and the sealing plate 22, the top board 21 are rectangle, so
The article of large-size is can transmit between may be such that two vacuum chambers.In order that the pressure obtained suffered by the sealing plate 22 is uniform,
The side wall of the top board 21 can along its length be evenly equipped with four to (the totally eight) ball 211, corresponding, the sealing plate 22
Side wall be evenly equipped with four along its length to (the totally eight) cone-shaped groove 221.
In order to preferably ensure 22 pairs of sealing effectiveness of the through hole 11 of the sealing plate, the sealing plate 22 may be used also
It is further provided with sealing ring 222.
A kind of vacuum chamber conveyer provided by the present invention, compact conformation, good airproof performance can be true to adjacent two
Plenum chamber provides effectively sealing, and to the opening shape strong adaptability of vacuum chamber, additionally, the tabular bracket can be very
Thin and long laminated structure, therefore article can be sent into by long narrow vacuum lock gap or take out vacuum function room, so
The size requirement to whole equipment can just be reduced.
It will be appreciated by those skilled in the art that although the present invention is described according to the mode of multiple embodiments,
Be not each embodiment only comprising an independent technical scheme.For the sake of so narration is used for the purpose of understanding in specification,
Those skilled in the art should be understood specification as an entirety, and by technical scheme involved in each embodiment
Regard that can be mutually combined into the mode of different embodiments understands protection scope of the present invention as.
Schematical specific embodiment of the invention is the foregoing is only, the scope of the present invention is not limited to.It is any
Those skilled in the art, the equivalent variations made on the premise of design of the invention and principle is not departed from, modification and combination,
The scope of protection of the invention all should be belonged to.
Claims (7)
1. a kind of vacuum chamber conveyer, it is characterised in that it is arranged in prechamber, for adjacent vacuum function
Room carries out article transmission, and vacuum lock is provided between the prechamber and the vacuum function room, and it includes being fixed on described
The guide rail of at least one of prechamber first, the first mounting seat with the first guide rail slidable connection, first peace
Dress seat is provided with second guide rail vertical with first guide rail, and the second guide rail slidable connection has the second sliding block, described
Second sliding block is rotatably connected with pivoted arm, and the pivoted arm is rotatably connected with the rotating shaft being fixed in the prechamber, described
First mounting seat sets the tabular bracket that oriented vacuum function room direction extends.
2. vacuum chamber conveyer according to claim 1, it is characterised in that the vacuum lock includes a housing,
The housing both sides are provided with the through hole for being connected with the prechamber and the vacuum function room, the housing and set
Can slide up and down lock body, and the lock body includes one piece of top board, and the top board both sides are symmetrically arranged with sealing plate, the top board
The ball of multiple protrusion top board surfaces is provided with, the sealing plate correspondence ball is provided with multiple cone-shaped grooves.
3. vacuum chamber conveyer according to claim 2, it is characterised in that be provided between two sealing plates
Spring.
4. vacuum chamber conveyer according to claim 2, it is characterised in that the lock body is provided with and the housing
The guide bearing of connection can be rolled.
5. vacuum chamber conveyer according to claim 2, it is characterised in that the through hole and the sealing plate, institute
State top board and be rectangle.
6. vacuum chamber conveyer according to claim 5, it is characterised in that the side wall of the top board is along its length
Four pairs of balls are evenly equipped with, the side wall of the sealing plate is evenly equipped with four pairs of cone-shaped grooves along its length.
7. according to the vacuum chamber conveyer that one of claim 1-6 is described, it is characterised in that the sealing plate is provided with close
Seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710098440.9A CN106904408A (en) | 2017-02-23 | 2017-02-23 | A kind of vacuum chamber conveyer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710098440.9A CN106904408A (en) | 2017-02-23 | 2017-02-23 | A kind of vacuum chamber conveyer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106904408A true CN106904408A (en) | 2017-06-30 |
Family
ID=59208560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710098440.9A Pending CN106904408A (en) | 2017-02-23 | 2017-02-23 | A kind of vacuum chamber conveyer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106904408A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56117913A (en) * | 1980-02-19 | 1981-09-16 | Sanyo Electric Co Ltd | Part sequential feeder |
| CN1555332A (en) * | 2001-08-10 | 2004-12-15 | CPSɫ���豸�ɷݹ�˾ | Method for controlling the operation of a transport system for containers, operating device and transport system thus controlled |
| CN203382204U (en) * | 2013-07-29 | 2014-01-08 | 福建培新机械制造实业有限公司 | Horizontal moving and pushing device |
| CN203569237U (en) * | 2013-09-29 | 2014-04-30 | 青岛赛瑞达电子科技有限公司 | Double-station CVD (chemical vapor deposition) furnace |
| CN204004486U (en) * | 2014-08-01 | 2014-12-10 | 川北真空科技(北京)有限公司 | Push-pull valve |
| CN204473735U (en) * | 2015-03-12 | 2015-07-15 | 中国石油大学(华东) | A kind of periodically two-way conveyer |
| CN205155194U (en) * | 2015-11-09 | 2016-04-13 | 东莞市汇成真空科技有限公司 | Vacuum valve of jumbo size bivalve door plant |
| CN106409739A (en) * | 2016-09-29 | 2017-02-15 | 中国电子科技集团公司第四十八研究所 | Wafer vacuum automatic transfer system and transfer method |
-
2017
- 2017-02-23 CN CN201710098440.9A patent/CN106904408A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56117913A (en) * | 1980-02-19 | 1981-09-16 | Sanyo Electric Co Ltd | Part sequential feeder |
| CN1555332A (en) * | 2001-08-10 | 2004-12-15 | CPSɫ���豸�ɷݹ�˾ | Method for controlling the operation of a transport system for containers, operating device and transport system thus controlled |
| CN203382204U (en) * | 2013-07-29 | 2014-01-08 | 福建培新机械制造实业有限公司 | Horizontal moving and pushing device |
| CN203569237U (en) * | 2013-09-29 | 2014-04-30 | 青岛赛瑞达电子科技有限公司 | Double-station CVD (chemical vapor deposition) furnace |
| CN204004486U (en) * | 2014-08-01 | 2014-12-10 | 川北真空科技(北京)有限公司 | Push-pull valve |
| CN204473735U (en) * | 2015-03-12 | 2015-07-15 | 中国石油大学(华东) | A kind of periodically two-way conveyer |
| CN205155194U (en) * | 2015-11-09 | 2016-04-13 | 东莞市汇成真空科技有限公司 | Vacuum valve of jumbo size bivalve door plant |
| CN106409739A (en) * | 2016-09-29 | 2017-02-15 | 中国电子科技集团公司第四十八研究所 | Wafer vacuum automatic transfer system and transfer method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170630 |