CN107166074A - A kind of double push-pull valves of high vacuum - Google Patents
A kind of double push-pull valves of high vacuum Download PDFInfo
- Publication number
- CN107166074A CN107166074A CN201710420311.7A CN201710420311A CN107166074A CN 107166074 A CN107166074 A CN 107166074A CN 201710420311 A CN201710420311 A CN 201710420311A CN 107166074 A CN107166074 A CN 107166074A
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- China
- Prior art keywords
- valve
- high vacuum
- pilot valve
- hanger
- guide
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/06—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/312—Line blinds
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
Abstract
The invention discloses a kind of double push-pull valves of high vacuum, including：Main valve body, the valve body for realizing high vacuum control；Described main valve body is internally provided with the double valve plates of movable sealing connection；Executing agency, the mechanism for providing power；Described executing agency is arranged on main valve body；Transmission mechanism, the mechanism for transmitting executing agency's power；Described transmission mechanism is connected with executing agency and main valve body respectively；Pilot valve, for the valve abolished to main valve body inside condition of high vacuum degree；Described pilot valve is arranged on inside main valve body and is fixedly connected with valve plate, and is connected with transmission mechanism.The double push-pull valves of the high vacuum so that high vacuum push-pull valve from closed position when being opened, and pilot valve can be opened first, the pressure on balance valve plate both sides so that valve plate does not stress when opening, can avoid valve caused by being switched on because of the pressure of twice of lack of equilibrium valve plate from damaging；And the push-pull valve Stability Analysis of Structures is reliable, economic security, installation duty is small, realizes PLC controls.
Description
Technical field
The present invention relates to valve technology field, more particularly to a kind of double push-pull valves of high vacuum.
Background technology
The double push-pull valves of high vacuum, which have, stimulates the menstrual flow big, and medium is without hindrance, simple and stable structure, and vacuum sealing performance reliably waits special
Point, be widely used in vacuum coating, vacuum heat, vacuum welding, etc. in vacuum industry.It is provided with the double push-pull valves of high vacuum
Magnetic valve connects valve pocket, plays a part of first balance flap both sides pressure when opening, can reduce the power output needed for opening, drop
Low cost.But, when electromagnetism defective valve, if valve continues to move, flap both sides pressure does not reach balance, and motor is also
It is being rotated further, this is likely to result in the damage of valve clack sealing ring, meanwhile, the damage of motor is likely to result in, is eventually caused than larger
Economic loss.
Due to the propulsion of automatic industrial, motor is installed on the double push-pull valves of high vacuum, then mixes electromagnetic induction device, can
Realize that electromagnetic induction is spacing, and then controlled motor is operated, and realizes PLC controls.But, electromagnetic induction device induction force is to different
Metal, distance of reaction is that have very big difference, there is the risk of failure.Meanwhile, motor transmission is unstable, and transmission efficiency is low, if
Need to realize remote control, then need to take larger cost or large space installs other annexes, it is uneconomical.
Thus, it is necessary to technological improvement be carried out to such situation, to meet use requirement.
Chinese patent literature（The day for announcing：On August 21st, 2013, notification number：CN103256397A）Disclose a kind of two-way
Sealing plug-in board valve, including plate valve chest, valve opening and closing mechanism, push-pull valve valve and push-pull valve adpting flange, plate valve chest
Two parallel side bottoms are provided with the connecting hole matched with push-pull valve valve, valve opening and closing mechanism include two lift cylinders, two groups
Push-pull valve lifting seat and two groups of push-pull valve linkage torque arm, lift cylinder stretch out boom end and are fixedly connected with push-pull valve linkage torque arm,
Push-pull valve lifting seat is hinged with push-pull valve linkage torque arm, push-pull valve lifting seat end is fixed with push-pull valve valve, two push-pull valves
Valve is respectively just to the corresponding connecting hole in push-pull valve housing side bottom.Pipeline vacuumizes low pressure effect so that push-pull valve valve
Inhale tighter and tighter；It is normal pressure in pipeline, the push-pull valve valve of wherein side is forced to open so that positive pressure is in other side
Push-pull valve valve on so that the push-pull valve valve is inhaled tighter and tighter.
Chinese patent literature（The day for announcing：On July 11st, 2012, notification number：CN102563112A）Disclose a kind of vacuum
The vacuum gate valve of room, including cylinder, valve body and core assembly, valve body are hollow cuboid case structure, a left side for valve body
Right two side is fixedly connected with the vacuum chamber positioned at its both sides respectively, and valve hole is had on the left and right sides wall of valve body,
Valve hole is communicated with the workpiece through-hole in the vacuum chamber of valve body both sides, and core assembly is located in the central space of valve body,
Cylinder end is connected through body top and with core assembly；Core assembly includes symmetrically arranged two portable plates, two work
Moveable hinge is set between dynamic plate and is connected by moveable hinge with cylinder end, the bottom of two portable plates is respectively equipped with guide wheel.This
Vacuum gate valve overcomes the big defect of traditional vacuum push-pull valve space-consuming, also can preferably be applied to large glass coating process
Vacuum film coating chamber.Meanwhile, its good sealing effect, valve core structure is also more consolidated, and is unlikely to deform, and processing and regular maintenance are all
It is more convenient.
Chinese patent literature（The day for announcing：On July 29th, 2015, notification number：CN204512485U）Disclose a kind of pneumatic
Vacuum gate valve, including vacuum gate valve, described vacuum gate valve include valve body, valve element reciprocating in valve body,
Sealing plate A, sealing plate B in valve element, it is characterised in that：Described Pneumatic vacuum push-pull valve also includes cylinder.
Above-mentioned technical proposal push-pull valve is poor there is also structural stability, valve body because annex failure it is fragile the problems such as.
The content of the invention
The purpose of the present invention is, to solve the above mentioned problem present in the double push-pull valves of existing high vacuum, and to provide a kind of knot
Structure is reliable and stable, economic security, it is to avoid occur because annex failure and caused by valve body damage, can economy must realize control
The double push-pull valves of high vacuum.
The technical scheme adopted by the invention for realizing the object of the invention is：A kind of double push-pull valves of high vacuum, including：
Main valve body, the valve body for realizing high vacuum control；Described main valve body is internally provided with the bivalve of movable sealing connection
Plate；
Executing agency, the mechanism for providing power；Described executing agency is arranged on main valve body；
Transmission mechanism, the mechanism for transmitting executing agency's power；Described transmission mechanism respectively with executing agency and main valve body
Connection；
Pilot valve, for the valve abolished to main valve body inside condition of high vacuum degree；Described pilot valve is arranged on inside main valve body
It is fixedly connected, and is connected with transmission mechanism with valve plate.
The double push-pull valves of the high vacuum, by setting a pilot valve inside main valve body, while will be held using a transmission mechanism
Row mechanism is linked together with pilot valve so that high vacuum push-pull valve from closed position when being opened, and pilot valve can be opened in advance,
The vacuum inside main valve body is abolished, to balance the pressure on valve plate both sides so that valve plate does not stress when opening, and can avoid because not putting down
Valve is damaged caused by the pressure on weighing apparatus valve plate both sides is switched on.It is defeated by executing agency when main valve body is closed
Go out certain power, drive transmission mechanism to open pilot valve, but be to maintain that valve plate is motionless, the pressure of valve plate both sides is because of pilot valve
Gang up and reach balance, now, valve plate both sides do not stress.Then, transmission mechanism continuation is acted, and lifts valve plate, and valve is opened.
When needing to close the main valve body in opening, certain power is exported by executing agency, drives valve plate down to move.When
When valve plate reaches limit point, valve plate is contacted with the sealing surface inside main valve body and compress sealing.Transmission mechanism continuation is acted, directly
Pilot valve and sealed to closing.Valve running stops, and valve is closed.The double push-pull valves of the high vacuum so that high vacuum push-pull valve exists
When being opened from closed position, pilot valve can be opened first, the pressure on balance valve plate both sides so that valve plate does not stress when opening, can
Valve caused by being switched on because of the pressure of twice of lack of equilibrium valve plate is avoided to damage；And the push-pull valve Stability Analysis of Structures is reliable, warp
Ji safety.
Preferably, described pilot valve includes pilot valve hanger, guide's valve support, torsionspring, pilot valve, valve element
Gland and guide's valve seat.The said structure of pilot valve both facilitate and also main valve body connection, while being also convenient for realizing pilot valve and master
Sequentially-operating between valve body valve plate.
Preferably, described guide's valve seat is fixed on valve plate, one end of described pilot valve leads to guide's valve seat
Sealing ring movable sealing connection is crossed, the other end of described pilot valve is fixedly connected with guide's valve support and by pilot valve
Support is driven and realizes switch motion, and described valve element gland is pressed in pilot valve.Said structure had both facilitated setting for pilot valve
Put, while also ensure that pilot valve is opened in advance before valve plate opening, to balance the pressure of valve plate both sides so that valve plate
Do not stressed when opening, it is ensured that the normal of valve is used.
Preferably, being provided with valve element mounting hole in described guide's valve support, described pilot valve is arranged on valve element
Inside mounting hole.Valve element mounting hole is set in guide's valve support, facilitates the installation of pilot valve to ensure that pilot valve can lead to
Crossing pilot valve support drives realization to open or close.
Preferably, described pilot valve hanger is fixed on valve plate, described guide's valve support is arranged on pilot valve extension
The inner side of frame, and the upper end of guide's valve support is connected by a upper end bearing pin with pilot valve hanger, and described torsionspring is set
Put in the inner side of pilot valve support and be set on the bearing pin of upper end, described torsionspring is pressed on pilot valve hanger and pilot valve
On support, the lower end of described torsionspring, which is supported, to be located in pilot valve.Pilot valve hanger and guide's valve support preferred structure are U
Type structure, such structure both facilitates being fixedly connected between valve plate, while being also convenient for realizing the suitable of pilot valve and valve plate
Sequence is opened, and when in the closed position, pilot valve hanger, guide's valve support and pilot valve are twisted spring compression in valve plate
On, while valve plate is also at original seal position, when needing to open valve, guide's valve support is under the drive of transmission mechanism gram
Take spring force and lift pilot valve, open pilot valve, and then open valve plate again, realize sequentially-operating, it is ensured that valve plate is being beaten
Both sides do not stress when opening.
Preferably, described pilot valve is connected by a guiding connection mechanism with transmission mechanism.Pilot valve is led by one
It is connected to bindiny mechanism with transmission mechanism, by guiding connection mechanism guide's valve events can be so played with the biography of guiding and power
The effect of passing.
Preferably, described guiding connection mechanism includes a contiguous block, drive link and guide pad, described guide pad is set
Put on transmission mechanism, described contiguous block is connected with pilot valve, the lower end of described drive link is threadedly coupled with contiguous block, institute
The upper end for the drive link stated is located on guide pad.Pilot valve is connected with transmission mechanism for convenience, sets one to be oriented to connection machine
Structure, is connected by contiguous block with pilot valve, is connected by guide pad with transmission mechanism, and such structure is to ensure in guide
Valve element has one section of buffer time before being opened after opening with valve plate, to ensure that vacuum can be abolished completely, meanwhile, it is capable to realize valve plate
First depart from sealing surface backward, then elevated such process again.Guide pad is to drive pilot valve in drive link to realize
Support is oriented to during acting.
Preferably, described transmission mechanism includes hanger, upper arm, ball-screw and ball screw, described hanger is consolidated
It is scheduled on inside main valve body, described upper arm is arranged on the inside of hanger and is connected to by a pre-tightening apparatus on hanger, hangs simultaneously
Arm is hinged with valve plate, and described ball screw is connected with pre-tightening apparatus, and the upper end of described ball-screw is connected with executing agency,
The lower end of described ball-screw is connected with ball screw, and described pre-tightening apparatus is slidably connected with hanger.Transmission mechanism
It is that, in order to realize being fixedly connected between pilot valve and main valve body, upper arm is that pilot valve is fixed and carried in order to realize to set hanger
Rise effect.Ball-screw and ball screw are that upper arm is improved in order to which the revolving force for realizing executing agency is converted to, with
Realize the sequentially-operating of pilot valve and valve plate.In order to realize that valve plate departs from sealing surface in advance in opening procedure, then realize and carry
The action risen, upper arm is hinged with valve plate.
Preferably, described pre-tightening apparatus includes preloading spring, preloading spring seat and connection cover for seat, described pretension bullet
Spring abutment is arranged on hanger, and described connecting seat is set in upper arm, described preloading spring be pressed on preloading spring seat and
Between connection cover for seat.Pre-tightening apparatus, which is set to said structure, to be for being tightly connected between whole push-pull valve and switchs dynamic
The organic coordination action of work.
Preferably, described connecting seat puts setting screw mounting seat, described ball screw is fixed on screw installation
Inside seat upper end, sliding sleeve is provided with described hanger, described screw mounting seat is slidably matched with sliding sleeve.
Preferably, executing agency is intelligent multi-rotary electric actuator, described executing agency includes electronics control
Molding block, electrical feedback module and mechanical position limitation mechanism.Executing agency is preferably intelligent multi-rotary electric actuator, can
It is prevented effectively from the connection of complexity, it is to avoid because of sensitiveness of the electromagnetic induction to material, saves valve installing space, it is convenient to realize
PLC is controlled.
The beneficial effects of the invention are as follows：The double push-pull valves of the high vacuum so that high vacuum push-pull valve is opened from closed position
When, pilot valve can be opened first, the pressure on balance valve plate both sides so that valve plate does not stress when opening, and can avoid because of lack of equilibrium valve
Valve is damaged caused by the pressure that twice of plate is switched on；And the push-pull valve Stability Analysis of Structures is reliable, economic security.It is intelligent many
Turn round for the setting of electric operator, relatively old-fashioned motor power-up magnetic-inductive device, it is to avoid complicated connection,
The sensitiveness to material because of electromagnetic induction is avoided, valve installing space is saved, conveniently realizes PLC controls.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the double push-pull valves of high vacuum of the present invention；
Fig. 2 is the enlarged drawing at A in Fig. 1；
Fig. 3 is B-B sectional views in Fig. 2；
In figure：1st, main valve body, 2, valve plate, 3, executing agency, 4, transmission mechanism, 5, pilot valve, 6, pilot valve hanger, 7, pilot valve
Support, 8, torsionspring, 9, pilot valve, 10, valve element gland, 11, guide's valve seat, 12, mounting hole, 13, sealing ring, 14, valve
Core mounting hole, 15, upper end bearing pin, 16, guiding connection mechanism, 17, contiguous block, 18, drive link, 19, guide pad, 20, lower end pin
Axle, 21, hanger, 22, upper arm, 23, ball-screw, 24, ball screw, 25, pre-tightening apparatus, 26, preloading spring, 27, pretension bullet
Spring abutment, 28, connection cover for seat, 29, screw mounting seat, 30, sliding sleeve.
Embodiment
Technical scheme is described in further detail below by specific embodiment and with reference to accompanying drawing.
Embodiment 1：
In the embodiment shown in Fig. 1, Fig. 2, Fig. 3, a kind of double push-pull valves of high vacuum, including：
Main valve body 1, the valve body for realizing high vacuum control；Main valve body 1 is internally provided with the double valve plates 2 of movable sealing connection；
Executing agency 3, the mechanism for providing power；Executing agency 3 is arranged on main valve body 1；
Transmission mechanism 4, the mechanism for transmitting the power transmission of executing agency 3；Transmission mechanism 4 respectively with executing agency 3 and main valve
Body 1 is connected；
Pilot valve 5, for the valve abolished to the inside condition of high vacuum degree of main valve body 1；Pilot valve 5 is arranged on the inside of main valve body 1 simultaneously
It is fixedly connected, and is connected with transmission mechanism 4 with valve plate 2.
Pilot valve 5 includes pilot valve hanger 6, guide's valve support 7, torsionspring 8, pilot valve 9, valve element gland 10 and elder generation
Guide valve seat 11.
Mounting hole 12 is provided with valve plate 7, guide's valve seat 11 is fixed on inside mounting hole 12, one end of pilot valve 9 with
Guide's valve seat 9 is connected by the movable sealing of a sealing ring 13, and the other end of pilot valve 9 is fixedly connected simultaneously with guide's valve support 7
Driven by guide's valve support 7 and realize switch motion, the pressure of valve element gland 10 is arranged in pilot valve 9.
Valve element mounting hole 14 is provided with guide's valve support 7, pilot valve 9 is arranged on inside valve element mounting hole 14.
The U-shaped slot structure of pilot valve hanger 6 is set, and pilot valve hanger 6 is fixed on valve plate 2, and guide's valve support 7 is U-shaped
Structure setting, guide's valve support 7 is arranged on the inner side of pilot valve hanger 6, and the upper end of guide's valve support 7 is sold by a upper end
Axle 15 is connected with pilot valve hanger 6, and torsionspring 8 is arranged on the inner side of guide's valve support 7 and is set on upper end bearing pin 15, is turned round
Turn spring 8 to be pressed on pilot valve hanger 6 and guide's valve support 7, the lower end of torsionspring 8, which is supported, to be located in pilot valve 9.
Pilot valve 5 is connected by a guiding connection mechanism 16 with transmission mechanism 4.Guiding connection mechanism 16 includes a contiguous block
17th, drive link 18 and guide pad 19, guide pad 19 are arranged on transmission mechanism 4, and contiguous block is connected with pilot valve, drive link 18
Lower end is threadedly coupled with contiguous block 17, and the upper end of drive link 18 is located on guide pad 19.Contiguous block 17 passes through a lower end bearing pin
20 are connected to side bottom of the guide's valve support 7 away from pilot valve 9.
Transmission mechanism 4 includes hanger 21, upper arm 22, ball-screw 23 and ball screw 24, and hanger 21 is fixed on main valve body 1
Inside, upper arm 22 is arranged on the inner side of hanger 21 and is connected to by a pre-tightening apparatus 25 on hanger 21, while upper arm 22 and valve
Plate 2 is hinged, and ball screw 24 is connected with pre-tightening apparatus 25, and the upper end of ball-screw 23 is connected with executing agency 3, ball-screw 23
Lower end be connected with ball screw 24, pre-tightening apparatus 25 is slidably connected with hanger 21.
Pre-tightening apparatus 25 includes preloading spring 26, preloading spring seat 27 and connection cover for seat 28, and preloading spring seat 27 is arranged on
On hanger 21, connection cover for seat 28 be arranged in upper arm 22, preloading spring 26 be pressed on preloading spring seat 27 and connection cover for seat 28 it
Between；Screw mounting seat 29 is provided with connection cover for seat 28, ball screw 24 is fixed on inside the upper end of screw mounting seat 29, hanger 21
On be provided with sliding sleeve 30, screw mounting seat 28 is slidably matched with sliding sleeve 30.
Executing agency 3 is intelligent multi-rotary electric actuator, and intelligent multi-rotary electric actuator includes electronics
Control module, electrical feedback module and mechanical position limitation mechanism.
The double push-pull valves of the high vacuum, ball screw 24 is fixed in upper arm 22, and upper arm 22 is arranged on the inner side of hanger 21,
Upper arm 22 is tightened on hanger 21 in advance with the centre position of hanger 21 by preloading spring 20.Pilot valve hanger 6 and guide's valve seat 11 are welded
It is connected on valve plate 2, guide's valve support 7 is connected on pilot valve hanger 6 by upper end bearing pin 15, meanwhile, upper end bearing pin 15 is passed through
Torsionspring 8, torsionspring 8 is fixed and is pressed on pilot valve hanger 6 and guide's valve support 7, the lower end of torsionspring 8 with
Pilot valve 9 is mutually compressed, and the end that wears of upper end bearing pin passes through opening finger setting and Anti-extrusion.Sealing ring 13 passes through valve element gland 10
Fixed in pilot valve 9, and fastened by soket head cap screw, then, pilot valve 9 passes through the valve element in guide's valve support 7
Mounting hole 14 is fixed, in the closed state, effect of the pilot valve 9 because of torsionspring 8, compresses guide's valve seat 11.
Contiguous block 17 is connected by lower end bearing pin 20 through contiguous block 17 with guide's valve support 7, and lower end bearing pin 20 wears end
Anti-extrusion is fixed with split pin.The lower end of drive link 18 is threadedly coupled with contiguous block 17, and the other end passes through spacing in upper arm 22
Hole and the guide pad 19 being arranged in spacing hole, and use hex nut Anti-extrusion.
The operation principle of the double push-pull valves of the high vacuum is as follows：When push-pull valve is in original closed mode, it is necessary to open plate
During valve, certain power is exported by executing agency 3, executing agency 3 drives ball-screw 23 to rotate, and ball-screw 23 is rotation
Power, is converted to the lifting force to ball screw 24, so as to lift upper arm 22.At motion initial stage of upper arm 22, upper arm 22 drives elder generation
The drive link 18 of pilot valve 5, lifts pilot valve 9, opens pilot valve 5, pretightning force the carrying with upper arm 22 of preloading spring 26
Rise and reduce, but be to maintain that valve plate 2 is motionless, the pressure of the both sides of valve plate 2 reaches balance because of ganging up for pilot valve 5, now, valve plate
2 both sides do not stress.Then, upper arm 22 is continued to lift up, now, due to valve plate 2 and the hinged effect of upper arm 22, valve plate 2
Move backward, the top of valve plate 2 first departs from sealing surface, then, the bottom of valve plate 2 departs from, upper arm 2 is contacted with hanger 21, the band of upper arm 22
Dynamic hanger 21 is lifted, and lifts valve plate 2, and valve is opened.
When push-pull valve is in opening, it is necessary to which when closing, certain power is exported by executing agency 3, ball wire is driven
Thick stick 23 is rotated, and revolving force is converted to the active force down to ball screw 24 by ball-screw 23, and hanger 21 drives valve plate 2
Down move.When valve plate 2 reaches limit point, hanger 21 continues down to move, and makes the bottom of valve plate 2 because of the effect of hinge arrangement
Outside lateral movement, is contacted until with sealing surface.Now, hanger 21, which is moved, has stopped, and the power of ball-screw 23 starts to be applied to
In upper arm 22, upper arm 22 is down moved with respect to hanger 21, compresses preloading spring 26, the top of valve plate 2 is also contacted simultaneously with sealing surface
Compress sealing.At the same time, because upper arm 22 is down moved so that spacing disappearance of the upper arm 22 to the drive link 18 of pilot valve 5, turn round
Turn spring 8 because of the effect of precompression, make pilot valve 9 toward motion on guide's valve seat 11, until closing pilot valve and sealing.Valve
Running stops, and valve is closed.
Executing agency 3 selects intelligent multi-rotary electric actuator, installed in the upper of the double push-pull valve main valve bodies of high vacuum
Side, as power source, it drives the transmission power output of ball-screw 23, it is ensured that the opening and closing of valve.Intelligent many revolution electricity
Dynamic executing agency has Electronic Control, electrical feedback and mechanical position limitation, can effectively realize PLC controls.Increase on valve plate 2 broken
, can be with the keying of valve, autobalance and the pressure for closing valve plate both sides after vacuum pilot valve, valve plate two when can be achieved to open
Side pressure difference is zero, meanwhile, sealing ring and valve overall structure can be protected stable, it is to avoid caused by environmental factor and human factor
Economic loss.
Claims (10)
1. a kind of double push-pull valves of high vacuum, it is characterised in that including：
Main valve body（1）, the valve body for realizing high vacuum control；Described main valve body（2）It is internally provided with movable sealing connection
Double valve plates（2）；
Executing agency（3）, the mechanism for providing power；Described executing agency（3）It is arranged on main valve body（1）On；
Transmission mechanism（4）, for transmitting executing agency（3）The mechanism of power；Described transmission mechanism（4）Respectively with executing agency
（3）And main valve body（1）Connection；
Pilot valve（5）, for main valve body（1）The valve that internal condition of high vacuum degree is abolished；Described pilot valve（5）It is arranged on master
Valve body（1）Internal and valve plate（2）It is fixedly connected, and and transmission mechanism（4）Drive connection.
2. a kind of double push-pull valves of high vacuum according to claim 1, it is characterised in that：Described pilot valve（5）Including elder generation
Pilot valve hanger（6）, guide's valve support（7）, torsionspring（8）, pilot valve（9）, valve element gland（10）With guide's valve seat（11）.
3. a kind of double push-pull valves of high vacuum according to claim 2, it is characterised in that：Described guide's valve seat（11）It is fixed
In valve plate（2）On, described pilot valve（9）One end and guide's valve seat（11）Pass through a sealing ring（13）Movable sealing connects
Connect, described pilot valve（9）The other end and guide's valve support（7）It is fixedly connected and by guide's valve support（7）Drive real
Existing switch motion, described valve element gland（10）It is pressed on pilot valve（9）On.
4. a kind of double push-pull valves of high vacuum according to claim 2, it is characterised in that：Described pilot valve hanger（6）Gu
It is scheduled on valve plate（2）On, described guide's valve support（7）It is arranged on pilot valve hanger（6）Inner side, and guide's valve support（7）
Upper end pass through a upper end bearing pin（15）With pilot valve hanger（6）Connection, described torsionspring（8）It is arranged on guide's valve support
（7）Inner side and be set in upper end bearing pin（15）On, described torsionspring（8）It is pressed on pilot valve hanger（6）And pilot valve
Support（7）On, described torsionspring（8）Lower end support be located at pilot valve（9）On.
5. a kind of double push-pull valves of high vacuum according to claim 1, it is characterised in that：Described pilot valve（5）Pass through one
Guiding connection mechanism（16）With transmission mechanism（4）Connection.
6. a kind of double push-pull valves of high vacuum according to claim 5, it is characterised in that：Described guiding connection mechanism（16）
Including a contiguous block（17）, drive link（18）And guide pad（19）, described guide pad（19）It is arranged on transmission mechanism（4）On,
Described contiguous block（17）With pilot valve（5）Connection, described drive link（18）Lower end and contiguous block（17）Threaded connection, institute
The drive link stated（18）Upper end be located in guide pad（19）On.
7. a kind of double push-pull valves of high vacuum according to claim 1, it is characterised in that：Described transmission mechanism（4）Including
Hanger（21）, upper arm（22）, ball-screw（23）And ball screw（24）, described hanger（21）It is fixed on main valve body（1）It is interior
Portion, described upper arm（22）It is arranged on hanger（21）Inner side and pass through a pre-tightening apparatus（25）It is connected to hanger（21）On, together
When upper arm（22）With valve plate（2）It is hinged, described ball screw（24）With pre-tightening apparatus（25）Connection, described ball-screw
（23）Upper end and executing agency（3）Connection, described ball-screw（23）Lower end and ball screw（24）Connection, it is described
Pre-tightening apparatus（25）With hanger（21）Sliding connection.
8. a kind of double push-pull valves of high vacuum according to claim 7, it is characterised in that：Described pre-tightening apparatus（25）Including
Preloading spring（26）, preloading spring seat（27）With connection cover for seat（28）, described preloading spring seat（27）It is arranged on hanger（21）
On, described connection cover for seat（28）It is arranged on upper arm（21）On, described preloading spring（26）It is pressed on preloading spring seat（27）
With connection cover for seat（28）Between.
9. a kind of double push-pull valves of high vacuum according to claim 8, it is characterised in that：Described connection cover for seat（28）On set
It is equipped with screw mounting seat（29）, described ball screw（24）It is fixed on screw mounting seat（29）Inside upper end, described hanger
（21）On be provided with sliding sleeve（30）, described screw mounting seat（29）With sliding sleeve（30）It is slidably matched.
10. the double push-pull valves of a kind of high vacuum according to claim 1 to 9 any one, it is characterised in that：Executing agency
（3）For intelligent multi-rotary electric actuator, described executing agency（3）Including electronic control module, electrical feedback module
With mechanical position limitation mechanism.
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| CN201710420311.7A CN107166074B (en) | 2017-06-06 | 2017-06-06 | A kind of double gate valves of high vacuum |
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| CN201710420311.7A CN107166074B (en) | 2017-06-06 | 2017-06-06 | A kind of double gate valves of high vacuum |
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| CN107166074B CN107166074B (en) | 2019-03-29 |
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| CN107575641A (en) * | 2017-10-10 | 2018-01-12 | 深圳市大成精密设备有限公司 | A kind of pilot-operated type vacuum valve |
| CN107655322A (en) * | 2017-10-10 | 2018-02-02 | 深圳市大成精密设备有限公司 | A kind of isolated continuous tunnel vacuum drying oven |
| CN108006244A (en) * | 2017-12-29 | 2018-05-08 | 福建龙净脱硫脱硝工程有限公司 | A kind of gate valve |
| CN111828663A (en) * | 2020-08-05 | 2020-10-27 | 合肥中科离子医学技术装备有限公司 | Vacuum gate valve capable of being started in high differential pressure mode |
| CN115435102A (en) * | 2022-11-07 | 2022-12-06 | 中国空气动力研究与发展中心超高速空气动力研究所 | Control system and control method for double-sided sealing vacuum plugboard valve |
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| CN115435102A (en) * | 2022-11-07 | 2022-12-06 | 中国空气动力研究与发展中心超高速空气动力研究所 | Control system and control method for double-sided sealing vacuum plugboard valve |
| CN115435102B (en) * | 2022-11-07 | 2023-01-24 | 中国空气动力研究与发展中心超高速空气动力研究所 | Control system and control method for double-sided sealing vacuum plugboard valve |
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| CN107166074B (en) | 2019-03-29 |
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