CN112501685B - Water-cooling screen centering assembly and centering method - Google Patents
Water-cooling screen centering assembly and centering method Download PDFInfo
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- CN112501685B CN112501685B CN202011473256.6A CN202011473256A CN112501685B CN 112501685 B CN112501685 B CN 112501685B CN 202011473256 A CN202011473256 A CN 202011473256A CN 112501685 B CN112501685 B CN 112501685B
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- water
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Abstract
The invention discloses a water-cooling screen centering assembly, which comprises a water-cooling screen, a thermal field assembly and a camera bracket, wherein the thermal field assembly is positioned at the periphery of the water-cooling screen; a pan-tilt camera is arranged on the camera bracket; the camera of the pan-tilt camera faces to a gap between the side edge of the bottom of the water-cooling screen and the thermal field assembly; can directly detect the space between water screen bottom lateral margin and the thermal field subassembly through cloud platform camera through the mode of making a video recording, if certain place space is not conform to the default, then can adjust fixing device fine setting water screen position through the hoist and mount until the space of any angle between water screen bottom lateral margin and the thermal field subassembly all meets the requirements. Therefore, the positioning of the water cooling screen in the final finished product can be improved, and the yield of the produced product is improved.
Description
Technical Field
The invention belongs to the technical field of silicon crystal material single crystal furnaces.
Background
In the field of semiconductor technology in the prior art, silicon wafers are required to be prepared by a Czochralski method using a silicon single crystal furnace. For example, chinese patent application publication No. 105177701a discloses a silicon single crystal furnace of the prior art. Wherein the crystal is prepared in a crucible which is arranged on a pulling shaft through a crucible tray. The periphery of the crucible is provided with a furnace body with a thermal field. A heat shield (namely a water shield) is arranged above the crucible. The heat shield is also located within the thermal field and needs to be accurately positioned within the thermal field and above the crucible. When the crystal column in the crucible is lifted upwards, the crystal column passes through the heat shield from bottom to top, and if the positioning of the heat shield has deviation, the crystal column is easy to collide with the heat shield to cause pollution or damage; directly causing product scrap. However, in actual operation, the heat shield is difficult to meet the positioning requirement due to the deviation of the centering device, and the centering device is lack of detection means, and is mostly adjusted in a manual experience mode, so that the positioning accuracy is limited.
Therefore, a new technical solution is needed to solve the above problems.
Disclosure of Invention
The purpose of the invention is as follows: the invention aims to provide a water-cooling screen centering assembly which can detect a gap between a water-cooling screen and a thermal field assembly so as to improve centering accuracy.
The invention also provides a centering method using the centering assembly.
The technical scheme is as follows: in order to achieve the purpose, the water-cooling screen centering assembly can adopt the following technical scheme:
a water-cooling screen centering assembly comprises a water-cooling screen, a thermal field assembly positioned on the periphery of the water-cooling screen, a tray positioned below the water-cooling screen, a centering disc arranged at the bottom of the water-cooling screen, a centering tool telescopic support arranged between the centering disc and the tray, a hoisting adjusting and fixing device arranged at the upper part of the water-cooling screen, and a camera support also arranged between the centering disc and the tray; a pan-tilt camera is arranged on the camera bracket; the camera of the pan-tilt camera faces to a gap between the side edge of the bottom of the water-cooling screen and the thermal field assembly; the centering disc, the camera support and the cradle head camera are driven to rotate by rotating the tray, and the cradle head camera shoots gaps between the side edges of the bottom of the water-cooling screen and the thermal field assembly at a plurality of angles.
Furthermore, water inlet pipes and water outlet pipes which are symmetrically arranged extend out of two sides of the upper part of the water-cooling screen respectively; the upper parts of the water inlet pipe and the water outlet pipe are both provided with a hoisting adjusting and fixing device.
Furthermore, the hoisting adjusting device comprises a shell, a top cover positioned at the upper end of the shell, a bottom cover positioned at the lower end of the shell and a corrugated pipe positioned in the shell; the bottom of the corrugated pipe is arranged on the bottom cover, and the bottom cover is provided with an opening communicated with the interior of the corrugated pipe; the water pipe penetrates through the top cover and the bottom cover from top to bottom and extends out of the opening of the bottom cover, the part of the water pipe in the shell penetrates through the corrugated pipe from top to bottom, and the upper part of the corrugated pipe is provided with a sealing element matched with the outer surface of the water pipe; the water pipe is a water inlet pipe or a water outlet pipe.
Furthermore, the holder camera has a wireless transmission function and transmits the image to the mobile terminal.
Has the advantages that: the centering assembly provided by the invention can directly detect the gap between the bottom side edge of the water-cooling screen and the thermal field assembly from the inside through a camera shooting mode through the pan-tilt camera, and can detect the dead angle-free gap between the bottom side edge of the water-cooling screen and the thermal field in a circle of 360 degrees through the rotation of the tray, if the gap at a certain position does not accord with a preset value, the position of the water-cooling screen can be finely adjusted through the hoisting adjusting and fixing device until the gap at any angle between the bottom side edge of the water-cooling screen and the thermal field assembly accords with the requirement. Therefore, the positioning of the water cooling screen in the final finished product can be improved, and the yield of the produced product is improved.
Furthermore, a water inlet pipe and a water outlet pipe which are symmetrically arranged extend out of two sides of the upper part of the water-cooling screen respectively, and the hoisting adjusting and fixing device is directly connected with the water inlet pipe and the water outlet pipe. Thereby the water inlet pipe and the water outlet pipe not only undertake the water inlet and outlet function, but also serve as the suspension component extending upwards, thereby achieving two purposes at one stroke.
Furthermore, a corrugated pipe is arranged in the hoisting adjusting device, and a sealing element is arranged between the corrugated pipe and the water pipe. When the water inlet pipe and the water outlet pipe have processing and installation errors, the water inlet pipe and the water outlet pipe are adjusted through the adjusting mechanism arranged in the hoisting adjusting device, the displacement and deflection generated during adjustment are compensated by using the flexibility of the corrugated pipe, and meanwhile, the vacuum in the corrugated pipe and the atmosphere outside the corrugated pipe can be blocked through the sealing piece between the corrugated pipe and the water pipe.
The invention also provides a technical scheme of a centering method using the water-cooling screen centering assembly, which comprises the following steps:
(1) embedding a telescopic bracket of a water-cooling screen centering tool into the positioning step of the tray;
(2) embedding the bottom of the water-cooled screen into a positioning step arranged on the centering disc;
(3) raising the tray to a predetermined position;
(4) a hoisting adjusting and fixing device is arranged on a water inlet pipe and a water outlet pipe of the water-cooling screen;
(5) the centering disc descends by the descending tray to be separated from the water-cooling screen, and the water-cooling screen is suspended in the thermal field assembly by the hoisting adjusting and fixing device;
(6) through the pivoted observation of cloud platform camera and the space between detection water-cooling screen bottom lateral margin and the thermal field subassembly, if certain gap is not conform to the default, then adjust fixing device fine setting water-cooling screen position through the hoist and mount and all meet the requirements until the space of any angle between water-cooling screen bottom lateral margin and the thermal field subassembly.
Drawings
FIG. 1 is a schematic view of the overall configuration of the water screen centering assembly of the present invention.
Fig. 2 is a partial enlarged view of a portion of the hoist adjustment fixture of fig. 1.
Detailed Description
Example one
Please refer to fig. 1 and fig. 2, which illustrate a water-cooling screen centering assembly in this embodiment, which includes a water-cooling screen 1, a thermal field assembly 2 located at the periphery of the water-cooling screen 1, a tray 3 located below the water-cooling screen 1, a centering disc 4 installed at the bottom of the water-cooling screen, a centering tool telescopic bracket 5 installed between the centering disc 4 and the tray 3, a hoisting adjusting and fixing device 6 installed at the upper portion of the water-cooling screen 1, and a camera bracket 7 also installed between the centering disc 4 and the tray 3. And a pan-tilt camera 8 is arranged on the camera support 7. A water inlet pipe 11 and a water outlet pipe 12 which are symmetrically arranged extend from two sides of the upper part of the water-cooling screen 1 respectively; the upper parts of the water inlet pipe 11 and the water outlet pipe 12 are both provided with a hoisting adjusting and fixing device 9.
The camera of the pan-tilt camera 8 faces to a gap between the bottom side edge of the water-cooling screen 1 and the thermal field component 2; drive centering disc 4, camera support 7 and cloud platform camera 8 through rotating tray 3 and rotate, and cloud platform camera 8 shoots the space between water-cooling screen 1 bottom lateral margin and thermal field subassembly 2 of a plurality of angles. The pan/tilt/zoom camera 8 has a wireless transmission function, and transmits images to a mobile terminal (such as a mobile phone, a tablet personal computer, etc.) for observation.
The lifting adjusting device 9 comprises a housing 91, a top cover 92 positioned at the upper end of the housing 91, a bottom cover 93 positioned at the lower end of the housing 91, and a corrugated pipe 94 positioned in the housing 91. The bottom of the bellows 94 is mounted on a bottom cover 93, and the bottom cover 93 has an opening therein communicating with the inside of the bellows 94. The water pipe (inlet pipe 11 or outlet pipe 12) passes through the top cover 92 and the bottom cover 93 from top to bottom and extends from the opening of the bottom cover 93. The part of the water pipe in the housing 91 passes through the bellows 94 from top to bottom, and the upper part of the bellows 94 is provided with a sealing member 95 which is engaged with the outer surface of the water pipe. Still be equipped with the adjustment mechanism 96 that can adjust the water pipe in the hoist and mount adjusting device 9, this adjustment mechanism 96 can adopt among the prior art to rotate the height-adjusting to the water pipe through the screw thread (thereby one side water pipe height-adjusting can adjust the position in the heat field of a certain angle of fine setting water-cooling screen).
The centering method of the water-cooling screen centering assembly in the embodiment comprises the following steps:
(1) embedding a water-cooled screen 1 centering tool telescopic bracket 5 into a positioning step of a tray 3;
(2) embedding the bottom of the water-cooled screen 1 into a positioning step arranged on the centering disc 4;
(3) raising the tray 3 to a predetermined position;
(4) a hoisting adjusting and fixing device 9 is arranged on a water inlet pipe 11 and a water outlet pipe 12 of the water screen 1;
(5) the centering disc 4 descends by the descending tray 3 to be separated from the water-cooling screen 1, and the water-cooling screen 1 is suspended in the thermal field assembly 2 by the hoisting adjusting and fixing device 9.
(6) Through 8 pivoted observations of cloud platform camera and detect the space between 1 bottom lateral margin of water-cooling screen and the thermal field subassembly 2, if certain space is not conform to the default, then adjust fixing device 9 through the hoist and mount and finely tune 1 position of water-cooling screen until the space of any angle between 1 bottom lateral margin of water-cooling screen and the thermal field subassembly 2 all meets the requirements.
The invention embodies a number of methods and approaches to this solution and the foregoing is only a preferred embodiment of the invention. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be construed as the protection scope of the present invention. All the components not specified in the present embodiment can be realized by the prior art.
Claims (3)
1. A water-cooling screen centering assembly is characterized by comprising a water-cooling screen, a thermal field assembly positioned on the periphery of the water-cooling screen, a tray positioned below the water-cooling screen, a centering disc arranged at the bottom of the water-cooling screen, a centering tool telescopic support arranged between the centering disc and the tray, a hoisting adjusting and fixing device arranged at the upper part of the water-cooling screen, and a camera support also arranged between the centering disc and the tray; a pan-tilt camera is arranged on the camera bracket;
the camera of the pan-tilt camera faces to a gap between the side edge of the bottom of the water-cooling screen and the thermal field assembly; the centering disc, the camera support and the tripod head camera are driven to rotate by rotating the tray, and the tripod head camera shoots gaps between the side edges of the bottom of the water-cooling screen and the thermal field assembly at multiple angles;
a water inlet pipe and a water outlet pipe which are symmetrically arranged extend out of two sides of the upper part of the water-cooling screen respectively; the upper parts of the water inlet pipe and the water outlet pipe are both provided with a hoisting adjusting and fixing device;
the lifting adjusting and fixing device comprises a shell, a top cover positioned at the upper end of the shell, a bottom cover positioned at the lower end of the shell and a corrugated pipe positioned in the shell; the bottom of the corrugated pipe is arranged on the bottom cover, and the bottom cover is provided with an opening communicated with the interior of the corrugated pipe; the water pipe penetrates through the top cover and the bottom cover from top to bottom and extends out of the opening of the bottom cover, the part of the water pipe in the shell penetrates through the corrugated pipe from top to bottom, and the upper part of the corrugated pipe is provided with a sealing element matched with the outer surface of the water pipe; the water pipe is a water inlet pipe and a water outlet pipe;
still be equipped with the adjustment mechanism of adjustment water pipe in the hoist and mount regulation fixing device, this adjustment mechanism rotates the height-adjusting to the water pipe through the screw thread.
2. The water screen centering assembly of claim 1, wherein: the holder camera has a wireless transmission function and transmits the image to the mobile terminal.
3. A centering method using the water screen centering assembly of claim 1 or 2, comprising the steps of:
(1) embedding a telescopic bracket of a water-cooling screen centering tool into the positioning step of the tray;
(2) embedding the bottom of the water-cooled screen into a positioning step arranged on the centering disc;
(3) raising the tray to a predetermined position;
(4) a hoisting adjusting and fixing device is arranged on a water inlet pipe and a water outlet pipe of the water-cooling screen;
(5) the centering disc descends by the descending tray to be separated from the water-cooling screen, and the water-cooling screen is suspended in the thermal field assembly by the hoisting adjusting and fixing device;
(6) through the pivoted observation of cloud platform camera and the space between detection water-cooling screen bottom lateral margin and the thermal field subassembly, adjust fixing device fine setting water-cooling screen position through the hoist and mount and all accord with the default requirement until the space of any angle between water-cooling screen bottom lateral margin and the thermal field subassembly.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011473256.6A CN112501685B (en) | 2020-12-15 | 2020-12-15 | Water-cooling screen centering assembly and centering method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011473256.6A CN112501685B (en) | 2020-12-15 | 2020-12-15 | Water-cooling screen centering assembly and centering method |
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| CN112501685A CN112501685A (en) | 2021-03-16 |
| CN112501685B true CN112501685B (en) | 2022-02-01 |
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| CN113818088B (en) * | 2021-08-05 | 2022-10-11 | 武汉光迅科技股份有限公司 | Automatic diffusion device in diffusion process and using method thereof |
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| JP5181178B2 (en) * | 2007-09-12 | 2013-04-10 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | Position measuring apparatus and position measuring method in semiconductor single crystal manufacturing apparatus |
| JP6465008B2 (en) * | 2015-12-07 | 2019-02-06 | 株式会社Sumco | Method for producing silicon single crystal |
| CN106637389A (en) * | 2016-12-07 | 2017-05-10 | 内蒙古中环光伏材料有限公司 | Technological method for automatically controlling industrialized diameter growth for czochralski crystal |
| CN207267903U (en) * | 2017-09-21 | 2018-04-24 | 浙江晶盛机电股份有限公司 | Single crystal growing furnace can lift water cooling heat shield arrangement |
| CN209619502U (en) * | 2019-01-23 | 2019-11-12 | 大连连城数控机器股份有限公司 | A kind of single crystal growing furnace is with can promote combined-type water cold heat exchanger |
| CN209974965U (en) * | 2019-02-15 | 2020-01-21 | 浙江晶盛机电股份有限公司 | Single crystal furnace water-cooling heat shield device capable of switching lifting modes |
| CN110274555A (en) * | 2019-07-24 | 2019-09-24 | 晶科能源有限公司 | A kind of concentricity detection tool and method |
| CN110592662A (en) * | 2019-09-25 | 2019-12-20 | 上海新昇半导体科技有限公司 | Thermal field measuring mechanism and correction method |
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