CN209619502U - A kind of single crystal growing furnace is with can promote combined-type water cold heat exchanger - Google Patents
A kind of single crystal growing furnace is with can promote combined-type water cold heat exchanger Download PDFInfo
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- CN209619502U CN209619502U CN201920120916.9U CN201920120916U CN209619502U CN 209619502 U CN209619502 U CN 209619502U CN 201920120916 U CN201920120916 U CN 201920120916U CN 209619502 U CN209619502 U CN 209619502U
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Abstract
The utility model discloses a kind of single crystal growing furnaces with can promote combined-type water cold heat exchanger, for the top of silica crucible in single crystal furnace body to be arranged in, including combined-type water cold heat exchanger can be promoted, the combined-type water cold heat exchanger that promoted includes inner cylinder, outer cylinder and hoisting mechanism, there is cooling water circulation channel in the inner cylinder, and there is the high efficient heat exchanging layer for increasing cooling water circulation channel heat exchange efficiency on the inner wall of the inner cylinder, weld two lift arms in the top of the inner cylinder, the top of the outer cylinder is hinged by hinge and the lift arm, the top of the lift arm is connect with the hoisting mechanism.A kind of single crystal growing furnace disclosed in the utility model is with can promote combined-type water cold heat exchanger than conventional water-cooled jacket closer to liquid level, increase the longitudinal temperature gradient of crystal, the setting of hoisting mechanism can be such that elevated combined-type water cold heat exchanger rises or falls, and meet the adjusting of relative liquid surface position during crystal pulling.
Description
Technical field
The utility model relates to silicon single crystal manufacturing apparatus field, specifically a kind of single crystal growing furnace is with can promote combined-type water
Cold heat exchanger.
Background technique
Currently, contemporary czochralski silicon monocrystal just develops towards high-purity, high integrality, high uniformity and major diameter direction, greatly
The growth new technology of diameter CZ silicon single crystal is also explored constantly, and new technology should have the advantage that, except improvement resistivity and oxygen
Outside the uniformity of cloth, it is intended in view of reducing this significant problem of cost.In large diameter silicon monocrystal growth, cost to be reduced will
The speed of growth is improved, crystalline rate determines the speed of growth, therefore the benign cycle that the temperature of crystalizing interface and latent heat distribute
With regard to most important.
Main brushed using protective gas absorbs latent heat with recirculated cooling water to remain solid during crystal pulling at present
The temperature at liquid interface, as the increase existing method of crystal diameter keeps distributing for latent heat more difficult, near solid liquid interface
Temperature and Heat transmission be subject to influence.
Utility model content
According to technical problem set forth above, and a kind of single crystal growing furnace is provided with combined-type water cold heat exchanger can be promoted.This reality
Technological means with novel use is as follows:
A kind of single crystal growing furnace is with that can promote combined-type water cold heat exchanger, for silica crucible in single crystal furnace body to be arranged in
Side, including combined-type water cold heat exchanger can be promoted, the combined-type water cold heat exchanger that promoted includes inner cylinder, is arranged described interior
The hoisting mechanism for cylinder external outer cylinder and being arranged on the bell of the single crystal growing furnace and the inner barrel and outer barrel being promoted or declined；
The inner barrel and outer barrel be in be inverted it is hollow round table-like；The axis weight of the axis of the inner cylinder and the outer cylinder
It closes；There is cooling water circulation channel in the inner cylinder, there is the increase cooling water circulation channel to change on the inner wall of the inner cylinder
The high efficient heat exchanging layer of the thermal efficiency；
Circulation has cooling water in the cooling water circulation channel；The outer cylinder includes insulating sections and shielded segment, described
Insulating sections are multilayered structure, and every layer is that thermal insulation material is made；The shielded segment is wrapped in outside the insulating sections,
And the shielded segment includes at least two layers, and every layer is that graphite or carbon carbon composite are made；
Two lift arms are welded on the top of the inner cylinder, and two lift arms uniformly divide around the axis of the inner cylinder
Cloth；
The top of the outer cylinder is hinged by hinge and the lift arm；
The bell of the single crystal growing furnace is provided with promotion through-hole corresponding to the lift arm, and the hoisting mechanism is arranged
In the promotion through hole, the top of the lift arm passes through the promotion through-hole and connect with the hoisting mechanism.
The extension that the top of the outer cylinder has the axis perpendicular to the outer cylinder and extends to the outer of the outer cylinder,
And the hinge is arranged on the extension；The bottom end of the outer cylinder has the axis perpendicular to the outer cylinder and to described outer
The bottom end that the axis of cylinder extends.
The high efficient heat exchanging layer can be the metal oxide film layer of blackening process, or it is logical that other increase cooling water circulation
The technological means of road heat exchange efficiency.
The lift arm passes through and is arranged with bellows, and the top of the bellows and institute on the part for promoting through-hole
Hoisting mechanism is stated to be fixedly connected.Bellows can keep the lift arm vaccum in single crystal growing furnace during exercise.
The distance between liquid level in the lower surface of the bottom end and the single crystal furnace body is 20mm-200mm, can
Freely to be adjusted according to crystallization processes.
The hoisting mechanism includes two and is separately fixed at the mounting rack for promoting through hole, is separately fixed at two institutes
Two screw lifters of mounting rack bottom are stated, the screw lifter top is set and are connect with the screw lifter
Screw rod drives one of them described screw lifter movement and is horizontally set on the driving motor of the mounting rack bottom, setting
The hoisting nut matched on the screw rod with the screw rod；
It is connected between two screw lifters by driving snake；
The bottom of the bellows is fixedly connected with the mounting rack, and the top of the bellows and the hoisting nut are solid
Fixed connection.The top of the lift arm is fixedly connected with the hoisting nut.
The hinge includes the molybdenum pendant that bottom end is fixedly connected with the outer cylinder, and the top of the molybdenum pendant is fixed with switching
Lifting lug, by being rotatably connected to adjusting sunpender, the adjusting with the trunnion that matches of switching lifting lug on the switching lifting lug
The top of sunpender, which is fixed with, revokes axis, and the both ends for revoking axis and the bottom end of the lift arm are hinged.
The driving snake connects two screw lifters, realizes moving synchronously for two screw lifters；
The axial-rotation of the driving motor in the horizontal direction is converted to the axis of screw rod in the vertical direction by the screw lifter
So that hoisting nut is moved up and down by the axial-rotation on the vertical direction of screw rod to rotation, and then makes the lift arm or more
Movement, realizes the up and down motion of the inner cylinder and the outer cylinder, and the bellows is moved synchronously with lift arm at the same time, realizes
Sealing in single crystal growing furnace.
The utility model has the advantage that
1, elevated combined-type water cold heat exchanger disclosed in the utility model adds than conventional water-cooled jacket closer to liquid level
The longitudinal temperature gradient of big crystal.The heat that unit time water cooling heat exchanger is taken away in order to further increase is recycled in cooling water
High efficient heat exchanging layer is increased in vias inner walls, is increased its heat exchange efficiency and is improved the heat that the unit time is taken away.
2, the setting of hoisting mechanism can be such that elevated combined-type water cold heat exchanger rises or falls, and meet crystal pulling process
The adjusting of middle relative liquid surface position.
3, the design of outer cylinder can effectively block the heat transmitting between inner cylinder and silicon melt, and solid liquid interface is made to form one
Stablize suitable temperature, effectively reduces the energy consumption of the heater in single crystal growing furnace.
The utility model can be widely popularized in fields such as single crystal growing furnaces based on the above reasons.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is done simply to introduce, it should be apparent that, the accompanying drawings in the following description is
Some embodiments of the utility model, for those of ordinary skill in the art, in the premise of not making the creative labor property
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is that a kind of single crystal growing furnace is shown with that can promote combined-type water cold heat exchanger structure in specific embodiment of the present invention
It is intended to.
Fig. 2 is hinge arrangement schematic diagram in specific embodiment of the present invention.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, every other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to
The range of the utility model protection.
As Figure 1-Figure 2, a kind of single crystal growing furnace is with that can promote combined-type water cold heat exchanger, for being arranged in 1 furnace of single crystal growing furnace
The top of internal silica crucible 2, including combined-type water cold heat exchanger 3 can be promoted, it is described to promote the packet of combined-type water cold heat exchanger 3
It includes inner cylinder 31, the outer cylinder 32 being arranged in outside the inner cylinder 31 and is arranged on the bell of the single crystal growing furnace 1 and by the inner cylinder
31 and outer cylinder 32 promoted or decline hoisting mechanism 33；
The inner cylinder 31 and outer cylinder 32 are hollow round table-like in being inverted；The axis of the inner cylinder 31 and the outer cylinder 32
Axis is overlapped；There is cooling water circulation channel 311, circulation has cooling in the cooling water circulation channel 311 in the inner cylinder 31
Water, and there is the high efficient heat exchanging layer 312 for increasing cooling 311 heat exchange efficiency of water circulation channel on the inner wall of the inner cylinder 31；
The outer cylinder 32 includes insulating sections 321 and shielded segment 322, and the insulating sections 321 are multilayered structure, and every
Layer is that thermal insulation material is made；The shielded segment 322 is wrapped in outside the insulating sections 321, and the shielded segment
322 include at least two layers, and every layer is that graphite or carbon carbon composite are made；
Two lift arms 331 are welded on the top of the inner cylinder 31, and two lift arms 331 are around the inner cylinder 31
Axis is uniformly distributed；
The top of the outer cylinder 32 is hinged by hinge 4 and the lift arm 33；
The bell of the single crystal growing furnace 1, which is provided with corresponding to the lift arm 331, promotes through-hole 11, and the elevator
Structure 33 is arranged at the promotion through-hole 11, and the top of the lift arm 331 passes through the promotion through-hole 11 and the elevator
Structure 33 connects.
What the top of the outer cylinder 32 extended with the axis perpendicular to the outer cylinder 32 and to the outer of the outer cylinder 32
Extension 323, and the hinge 4 is arranged on the extension 323；The bottom end of the outer cylinder 32 has perpendicular to the outer cylinder
32 axis and the bottom end 324 extended to the axis of the outer cylinder 32.
The high efficient heat exchanging layer 312 can be the metal oxide film layer of blackening process, or other increase cooling water and follow
The technological means means of ring channel for heat exchange efficiency.
The lift arm 331 passes through and is fixed with bellows 5 on the part for promoting through-hole 11, and the bellows 5
Top is fixedly connected with the hoisting mechanism 33.Bellows 5 can keep the lift arm 331 during exercise in single crystal growing furnace 1
It is vaccum.
The distance between the lower surface of the bottom end 324 and the intracorporal liquid level of 1 furnace of single crystal growing furnace are 20mm-
200mm can freely be adjusted according to crystallization processes.
The hoisting mechanism 33 includes two mounting racks 332 being separately fixed at the promotion through-hole 11, fixes respectively
Two 332 bottoms of mounting rack two screw lifters 333, setting 333 top of screw lifter and with institute
The screw rod 334 of the connection of screw lifter 333 is stated, one of them described movement of screw lifter 333 is driven and is horizontally set on institute
It states the driving motor 335 of 332 bottom of mounting rack, the hoisting nut matched on the screw rod 334 with the screw rod 334 is set
336；
It is connected between two screw lifters 333 by driving snake 337；
The bottom of the bellows 5 is fixedly connected with the mounting rack 332, the top of the bellows 5 and the promotion
Nut 336 is fixedly connected.The top of the lift arm 331 is fixedly connected with the hoisting nut 336.
The hinge 4 includes the molybdenum pendant 41 that bottom end is fixedly connected with the outer cylinder 32, and the top of the molybdenum pendant 41 is solid
Surely there is a switching lifting lug 42, by being rotatably connected to tune with the trunnion 43 that matches of switching lifting lug 42 on the switching lifting lug 42
Sunpender 44 is saved, the top for adjusting sunpender 44, which is fixed with, revokes axis 45, the both ends for revoking axis 45 and the lift arm 331
Bottom end it is hinged.
The driving snake 337 connects two screw lifters 332, realizes two screw lifters 332
It moves synchronously；The axial-rotation of the driving motor 335 in the horizontal direction is converted to screw rod by the screw lifter 332
334 axial-rotation in the vertical direction makes about 336 hoisting nut by the axial-rotation on the vertical direction of screw rod 334
Movement, and then the lift arm 331 is made to move up and down, realize the up and down motion of the inner cylinder 31 and the outer cylinder 32.It is same with this
Shi Suoshu bellows 5 is moved synchronously with lift arm 331, realizes the sealing in single crystal growing furnace 1.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should
Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of
Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new
The range of each embodiment technical solution of type.
Claims (7)
1. a kind of single crystal growing furnace is with that can promote combined-type water cold heat exchanger, for silica crucible in single crystal furnace body to be arranged in
Side, which is characterized in that including that can promote combined-type water cold heat exchanger, it is described promoted combined-type water cold heat exchanger include inner cylinder,
Be arranged in the outer cylinder outside the inner cylinder and be arranged on the bell of the single crystal growing furnace and by the inner barrel and outer barrel promoted or under
The hoisting mechanism of drop；
The inner barrel and outer barrel be in be inverted it is hollow round table-like；The axis of the inner cylinder is overlapped with the axis of the outer cylinder；Institute
Stating in inner cylinder has cooling water circulation channel, and circulation has cooling water, and the inner wall of the inner cylinder in the cooling water circulation channel
The upper high efficient heat exchanging layer with the increase cooling water circulation channel heat exchange efficiency；
The outer cylinder includes insulating sections and shielded segment, and the insulating sections are multilayered structure, and every layer is thermal insulation material
It is made；The shielded segment is wrapped in outside the insulating sections, and the shielded segment includes at least two layers, and every layer is
Graphite or carbon carbon composite are made；
Two lift arms are welded on the top of the inner cylinder, and two lift arms are uniformly distributed around the axis of the inner cylinder；
The top of the outer cylinder is hinged by hinge and the lift arm；
The bell of the single crystal growing furnace is provided with promotion through-hole corresponding to the lift arm, and the hoisting mechanism is arranged in institute
It states and promotes through hole, the top of the lift arm passes through the promotion through-hole and connect with the hoisting mechanism.
2. a kind of single crystal growing furnace according to claim 1 is with can promote combined-type water cold heat exchanger, it is characterised in that:
The extension that the top of the outer cylinder has the axis perpendicular to the outer cylinder and extends to the outer of the outer cylinder, and institute
Hinge is stated to be arranged on the extension；The bottom end of the outer cylinder has the axis perpendicular to the outer cylinder and to the outer cylinder
The bottom end that axis extends.
3. a kind of single crystal growing furnace according to claim 1 is with can promote combined-type water cold heat exchanger, it is characterised in that: the height
Imitate the metal oxide film layer that heat exchange layer is blackening process.
4. a kind of single crystal growing furnace according to claim 1 is with can promote combined-type water cold heat exchanger, it is characterised in that: described to mention
It rises arm and is arranged with bellows on the part for promoting through-hole, and the top of the bellows is fixed with the hoisting mechanism
Connection.
5. a kind of single crystal growing furnace according to claim 2 is with can promote combined-type water cold heat exchanger, it is characterised in that: the bottom
The distance between liquid level in the lower surface of end and the single crystal furnace body is 20mm-200mm.
6. a kind of single crystal growing furnace according to claim 4 is with can promote combined-type water cold heat exchanger, it is characterised in that: described to mention
Liter mechanism includes two and is separately fixed at the mounting rack for promoting through hole, is separately fixed at two mounting rack bottoms
Two screw lifters, the screw rod that the screw lifter top is arranged in and connect with the screw lifter, driving are wherein
One screw lifter movement and be horizontally set on the driving motor of the mounting rack bottom, be arranged on the screw rod with
The hoisting nut that the screw rod matches；
It is connected between two screw lifters by driving snake；
The bottom of the bellows is fixedly connected with the mounting rack, the top of the bellows and the fixed company of the hoisting nut
It connects；
The top of the lift arm and the fixed company of the hoisting nut.
7. a kind of single crystal growing furnace according to claim 4 is with can promote combined-type water cold heat exchanger, it is characterised in that: the hinge
Chain includes the molybdenum pendant that bottom end is fixedly connected with the outer cylinder, and the top of the molybdenum pendant is fixed with switching lifting lug, the switching
Adjusting sunpender is rotatably connected to by the trunnion matched with the switching lifting lug on lifting lug, the top for adjusting sunpender is fixed
Axis is revoked, the both ends for revoking axis and the bottom end of the lift arm are hinged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920120916.9U CN209619502U (en) | 2019-01-23 | 2019-01-23 | A kind of single crystal growing furnace is with can promote combined-type water cold heat exchanger |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920120916.9U CN209619502U (en) | 2019-01-23 | 2019-01-23 | A kind of single crystal growing furnace is with can promote combined-type water cold heat exchanger |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111876824A (en) * | 2020-07-23 | 2020-11-03 | 上海汉虹精密机械有限公司 | Upper heat conduction system of main chamber of single crystal furnace and control method thereof |
| CN112501685A (en) * | 2020-12-15 | 2021-03-16 | 南京晶能半导体科技有限公司 | Water cooling jacket centering assembly and centering method |
| US20230243061A1 (en) * | 2022-01-30 | 2023-08-03 | Zhejiang Jingsheng M & E Co., Ltd | Heat exchange device for single crystal furnace |
-
2019
- 2019-01-23 CN CN201920120916.9U patent/CN209619502U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111876824A (en) * | 2020-07-23 | 2020-11-03 | 上海汉虹精密机械有限公司 | Upper heat conduction system of main chamber of single crystal furnace and control method thereof |
| CN112501685A (en) * | 2020-12-15 | 2021-03-16 | 南京晶能半导体科技有限公司 | Water cooling jacket centering assembly and centering method |
| US20230243061A1 (en) * | 2022-01-30 | 2023-08-03 | Zhejiang Jingsheng M & E Co., Ltd | Heat exchange device for single crystal furnace |
| WO2023142103A1 (en) * | 2022-01-30 | 2023-08-03 | 浙江晶盛机电股份有限公司 | Heat exchange device for single crystal furnace |
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