CN209974965U - Single crystal furnace water-cooling heat shield device capable of switching lifting modes - Google Patents
Single crystal furnace water-cooling heat shield device capable of switching lifting modes Download PDFInfo
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- CN209974965U CN209974965U CN201920201634.1U CN201920201634U CN209974965U CN 209974965 U CN209974965 U CN 209974965U CN 201920201634 U CN201920201634 U CN 201920201634U CN 209974965 U CN209974965 U CN 209974965U
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Abstract
The utility model belongs to monocrystalline silicon production facility field, concretely relates to changeable single crystal growing furnace water cooling heat shield device that promotes mode. Comprises a water-cooling heat shield; the water-cooling heat shield comprises an inner conical cylinder, an outer conical cylinder, a water inlet pipe and a water outlet pipe which are mutually sleeved; the top end is provided with a thermal field upper heat preservation cover; the lifting rod is hollow and sleeved outside the water inlet pipe and the water outlet pipe; the lifting mechanism is connected with the upper part of the lifting rod; the output shaft of the stepping motor is connected with the top end of the lifting rod, and the lifting block is arranged at the bottom end of the lifting rod through a connecting rod; the heat preservation cover on the thermal field is provided with a through hole, and the connecting rod is arranged in the through hole. The utility model discloses utilize the rotatory hoist mechanism of water-cooling heat shield device from area to switch the promotion mode, reach and to promote water-cooling heat shield device alone or promote the effect of heat preservation lid and draft tube on water-cooling heat shield device and the thermal field simultaneously to this temperature gradient in the control furnace chamber makes crystal pulling speed promote, reduces the energy consumption, also can add the material, greatly increased productivity many times under the prerequisite that does not increase the crucible size simultaneously.
Description
Technical Field
The utility model belongs to monocrystalline silicon production facility field, concretely relates to changeable single crystal growing furnace water cooling heat shield device that promotes mode.
Background
Nowadays, a single crystal furnace is widely applied to the field of preparation of photovoltaic grade and semiconductor grade single crystal silicon in the world. On the premise of not increasing the size of the crucible, the method for improving the crystal pulling efficiency, reducing the heat energy loss and increasing the productivity is to increase the water-cooling heat shield device.
The existing water cooling system is generally a straight-cylinder structure arranged on a flange of a furnace cover, and is limited by the field of view in a furnace chamber, so that the water cooling system is far away from the liquid level, and the effect of changing the temperature gradient in the furnace chamber without a water cooling heat shield is obvious. And the other method is directly fixed in the furnace chamber, but cannot be lifted, so that the quantity of the re-fed silicon materials is limited to a certain extent, and the current efficient production mode cannot be met.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome the not enough among the prior art, provide a changeable single crystal growing furnace water cooling heat shield device who promotes the mode.
In order to solve the technical problem, the utility model discloses a solution is:
the water-cooling heat shield device of the single crystal furnace with switchable lifting modes comprises a water-cooling heat shield, a heat shield lifting device and a rotary lifting mechanism;
the water-cooling heat shield comprises a cone-shaped cylinder structure, the cone-shaped cylinder structure is a double-layer structure consisting of an inner cone cylinder and an outer cone cylinder which are sleeved with each other, a water channel is arranged between the inner cone cylinder and the outer cone cylinder, and a water inlet and a water outlet of the water channel are respectively connected with a water inlet pipe and a water outlet pipe; the top end of the conical cylinder structure is provided with a thermal field upper heat insulation cover, the bottom of the conical cylinder structure is sleeved with an inner guide cylinder and an outer guide cylinder, and the top ends of the inner guide cylinder and the outer guide cylinder are fixedly connected with the thermal field upper heat insulation cover;
the heat shield lifting device comprises a lifting mechanism and a lifting rod; the lifting rod is hollow and sleeved outside the water inlet pipe and the water outlet pipe; the lifting mechanism is connected with the upper part of the lifting rod;
the rotary lifting mechanism comprises two sets of symmetrical structures, and both the symmetrical structures comprise a stepping motor and a lifting block, an output shaft of the stepping motor is connected with the top end of the lifting rod, and the lifting block is arranged at the bottom end of the lifting rod through a connecting rod; the heat preservation cover on the thermal field is provided with a through hole, and the connecting rod is arranged in the through hole.
As an improvement, a heat insulation material is filled between the inner guide cylinder and the outer guide cylinder.
As an improvement, the joints of the water inlet pipe and the water outlet pipe with other components are welded with reinforcing ribs.
As an improvement, the through hole on the heat preservation cover on the thermal field is in a strip shape or a cross shape, the shape of the cross section of the lifting block is the same as that of the through hole, and the size of the through hole is larger than that of the cross section of the lifting block.
Compared with the prior art, the utility model has the technical effects that:
under the prerequisite that accessible heat shield hoisting device promoted water-cooling heat shield device, utilize the rotatory hoist mechanism switching lifting means of water-cooling heat shield device self-band to promote the mode, reach the effect that can promote water-cooling heat shield device alone or promote heat preservation lid and draft tube on water-cooling heat shield device and the thermal field simultaneously, with this temperature gradient in the control furnace chamber, make the pulling speed promote, reduce the energy consumption, also can add the material simultaneously many times under the prerequisite that does not increase the crucible size, greatly increased productivity.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of the middle water-cooling heat shield of the present invention.
Illustration of the drawings: 1-water cooling heat shield; 2-arranging a heat preservation cover on the thermal field; 3-inner draft tube; 4-an outer draft tube; 5-a heat shield lifting device; 6-conventional water cooling jacket; 7-rotating the lifting mechanism; 8-a crystal bar; 9-quartz crucible; 1-1-water inlet pipe; 1-2-inner cone; 1-3-outer cone; 1-4-water outlet pipe.
Detailed Description
The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.
As shown in fig. 1-2, a single crystal furnace water-cooling heat shield device capable of switching lifting modes comprises a water-cooling heat shield 1, a heat shield lifting device 5 and a rotary lifting mechanism 7.
The water-cooling heat shield 1 comprises a cone structure, the cone structure is a double-layer structure consisting of an inner cone 1-2 and an outer cone 1-3 which are sleeved with each other, a water channel is arranged between the inner cone 1-2 and the outer cone 1-3, and the water inlet and the water outlet of the water channel are respectively connected with a water inlet pipe 1-1 and a water outlet pipe 1-4. Reinforcing ribs are welded at the joints of the water inlet pipe 1-1, the water outlet pipe 1-4 and other components. Cooling water is introduced into the water inlet pipe 1-1 and the water outlet pipe 1-4, and in order to improve the temperature gradient in the furnace chamber, the purpose is achieved by using a large-diameter joint, pipe fittings, a flow pump arranged independently and low-temperature water inlet. The distance between the bottom of the water-cooling heat shield 1 and the liquid level is about 30-80 mm, and the distance directly influences the heating energy consumption and the cooling effect. The top end of the conical cylinder structure is provided with a thermal field upper heat insulation cover 2, the bottom of the conical cylinder structure is sleeved with an inner guide cylinder 3 and an outer guide cylinder 4, and the top ends of the inner guide cylinder 3 and the outer guide cylinder 4 are fixedly connected with the thermal field upper heat insulation cover 2. And a heat insulation material is filled between the inner guide cylinder 3 and the outer guide cylinder 4.
The heat shield lifting device 5 comprises a lifting mechanism and a lifting rod. The lifting rod is hollow and is sleeved outside the water inlet pipe 1-1 and the water outlet pipe 1-4. The lifting mechanism is connected with the upper part of the lifting rod.
The rotary lifting mechanism comprises two symmetrical structures, and comprises a stepping motor and a lifting block, wherein an output shaft of the stepping motor is connected with the top end of the lifting rod, and the lifting block is arranged at the bottom end of the lifting rod through a connecting rod. The thermal field upper heat preservation cover 2 is provided with a through hole, and the connecting rod is arranged in the through hole. The through hole on the thermal field upper heat preservation cover 2 is strip-shaped or cross-shaped, the cross section shape of the lifting block is the same as that of the through hole, and the size of the through hole is larger than that of the cross section of the lifting block. The lifting block at the end part of the lifting rod is rotated by a corresponding angle through the rotation of a stepping motor by a certain angle, so that the lifting block and the heat-preservation cover 2 on the thermal field are connected and disconnected.
The utility model discloses a theory of operation does: under the prerequisite that promotes water-cooling heat shield 1 device through heat shield hoisting device 5, utilize rotatory hoist mechanism 7 to switch the promotion mode, reach and to promote water-cooling heat shield 1 device alone or promote simultaneously on water-cooling heat shield 1 and the thermal field heat preservation lid 7 and draft tube 3, 4's effect, with this temperature gradient in the control furnace chamber, make the pulling speed promote, reduce the energy consumption, also can add the material simultaneously many times under the prerequisite that does not increase the crucible size, greatly increased productivity.
Finally, it is to be noted that the above-mentioned embodiments are only specific embodiments of the present invention. Obviously, the present invention is not limited to the above embodiments, and many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the invention should be considered as within the scope of the invention.
Claims (4)
1. A single crystal furnace water-cooling heat shield device capable of switching lifting modes is characterized by comprising a water-cooling heat shield, a heat shield lifting device and a rotary lifting mechanism;
the water-cooling heat shield comprises a cone-shaped cylinder structure, the cone-shaped cylinder structure is a double-layer structure consisting of an inner cone cylinder and an outer cone cylinder which are sleeved with each other, a water channel is arranged between the inner cone cylinder and the outer cone cylinder, and a water inlet and a water outlet of the water channel are respectively connected with a water inlet pipe and a water outlet pipe; the top end of the conical cylinder structure is provided with a thermal field upper heat insulation cover, the bottom of the conical cylinder structure is sleeved with an inner guide cylinder and an outer guide cylinder, and the top ends of the inner guide cylinder and the outer guide cylinder are fixedly connected with the thermal field upper heat insulation cover;
the heat shield lifting device comprises a lifting mechanism and a lifting rod; the lifting rod is hollow and sleeved outside the water inlet pipe and the water outlet pipe; the lifting mechanism is connected with the upper part of the lifting rod;
the rotary lifting mechanism comprises two sets of symmetrical structures, and both the symmetrical structures comprise a stepping motor and a lifting block, an output shaft of the stepping motor is connected with the top end of the lifting rod, and the lifting block is arranged at the bottom end of the lifting rod through a connecting rod; the thermal field upper heat insulation cover is provided with a through hole, and the connecting rod is arranged in the through hole.
2. The single crystal furnace water-cooling heat shield device with the switchable lifting mode as claimed in claim 1, wherein a heat insulating material is filled between the inner guide cylinder and the outer guide cylinder.
3. The single crystal furnace water-cooling heat shield device with the switchable lifting mode as claimed in claim 1, wherein reinforcing ribs are welded at the joints of the water inlet pipe and the water outlet pipe with other components.
4. The single crystal furnace water-cooling heat shield device with the switchable lifting mode as claimed in claim 1, wherein the through hole on the heat-insulating cover on the thermal field is in a strip shape or a cross shape, the cross section of the lifting block is the same as that of the through hole, and the size of the through hole is larger than that of the lifting block.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920201634.1U CN209974965U (en) | 2019-02-15 | 2019-02-15 | Single crystal furnace water-cooling heat shield device capable of switching lifting modes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201920201634.1U CN209974965U (en) | 2019-02-15 | 2019-02-15 | Single crystal furnace water-cooling heat shield device capable of switching lifting modes |
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| CN209974965U true CN209974965U (en) | 2020-01-21 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111647940A (en) * | 2020-08-04 | 2020-09-11 | 浙江晶科能源有限公司 | Monocrystalline silicon preparation method and device |
| CN112501685A (en) * | 2020-12-15 | 2021-03-16 | 南京晶能半导体科技有限公司 | Water cooling jacket centering assembly and centering method |
| CN113089079A (en) * | 2021-04-15 | 2021-07-09 | 曲靖阳光能源硅材料有限公司 | Heat shield guide cylinder of single crystal furnace |
| CN115305564A (en) * | 2022-08-01 | 2022-11-08 | 晶澳太阳能有限公司 | Single crystal furnace and monocrystalline silicon preparation method |
| US20230243061A1 (en) * | 2022-01-30 | 2023-08-03 | Zhejiang Jingsheng M & E Co., Ltd | Heat exchange device for single crystal furnace |
-
2019
- 2019-02-15 CN CN201920201634.1U patent/CN209974965U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111647940A (en) * | 2020-08-04 | 2020-09-11 | 浙江晶科能源有限公司 | Monocrystalline silicon preparation method and device |
| CN111647940B (en) * | 2020-08-04 | 2021-05-07 | 浙江晶科能源有限公司 | Monocrystalline silicon preparation method and device |
| EP3951023A1 (en) * | 2020-08-04 | 2022-02-09 | Zhejiang Jinko Solar Co., Ltd. | Method and apparatus for manufacturing monocrystalline silicon |
| US11708643B2 (en) | 2020-08-04 | 2023-07-25 | Shangrao Jinko Solar Technology Development Co., Ltd | Method and apparatus for manufacturing monocrystalline silicon |
| CN112501685A (en) * | 2020-12-15 | 2021-03-16 | 南京晶能半导体科技有限公司 | Water cooling jacket centering assembly and centering method |
| CN113089079A (en) * | 2021-04-15 | 2021-07-09 | 曲靖阳光能源硅材料有限公司 | Heat shield guide cylinder of single crystal furnace |
| US20230243061A1 (en) * | 2022-01-30 | 2023-08-03 | Zhejiang Jingsheng M & E Co., Ltd | Heat exchange device for single crystal furnace |
| CN115305564A (en) * | 2022-08-01 | 2022-11-08 | 晶澳太阳能有限公司 | Single crystal furnace and monocrystalline silicon preparation method |
| CN115305564B (en) * | 2022-08-01 | 2023-09-01 | 晶澳太阳能有限公司 | Single crystal furnace and single crystal silicon preparation method |
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