CN109423697A - A kind of stove gate device and low pressure diffusion furnace for low pressure diffusion furnace - Google Patents
A kind of stove gate device and low pressure diffusion furnace for low pressure diffusion furnace Download PDFInfo
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- CN109423697A CN109423697A CN201710740056.4A CN201710740056A CN109423697A CN 109423697 A CN109423697 A CN 109423697A CN 201710740056 A CN201710740056 A CN 201710740056A CN 109423697 A CN109423697 A CN 109423697A
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- low pressure
- diffusion furnace
- sealing
- reaction tube
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 65
- 238000007789 sealing Methods 0.000 claims abstract description 108
- 238000006243 chemical reaction Methods 0.000 claims abstract description 62
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 238000005520 cutting process Methods 0.000 claims abstract description 5
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 239000000110 cooling liquid Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 239000003708 ampul Substances 0.000 claims description 5
- 239000002826 coolant Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 description 17
- 230000006872 improvement Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- CUZMQPZYCDIHQL-VCTVXEGHSA-L calcium;(2s)-1-[(2s)-3-[(2r)-2-(cyclohexanecarbonylamino)propanoyl]sulfanyl-2-methylpropanoyl]pyrrolidine-2-carboxylate Chemical compound [Ca+2].N([C@H](C)C(=O)SC[C@@H](C)C(=O)N1[C@@H](CCC1)C([O-])=O)C(=O)C1CCCCC1.N([C@H](C)C(=O)SC[C@@H](C)C(=O)N1[C@@H](CCC1)C([O-])=O)C(=O)C1CCCCC1 CUZMQPZYCDIHQL-VCTVXEGHSA-L 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Sliding Valves (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The invention discloses a kind of stove gate devices for low pressure diffusion furnace, including sealing extension tube, external seal fire door, and in the reaction tube for completely cutting off low pressure diffusion furnace heat interior sealing fire door, the sealing extension tube is sheathed on the reaction tube periphery, it seals extension tube inner end and the reaction tube is tightly connected, sealing element is equipped between outer end and the external seal fire door, the external seal fire door is equipped with flexible connection mechanism configured with switch door drive mechanism between the interior sealing fire door and the external seal fire door.The present invention further discloses a kind of low pressure diffusion furnaces, including reaction tube, further include the above-mentioned stove gate device for low pressure diffusion furnace.The present invention has many advantages, such as that structure is reliable, good seal performance, long service life.
Description
Technical field
The present invention relates to semiconductor diffusion technique equipment more particularly to a kind of stove gate devices for low pressure diffusion furnace and low
Press diffusion furnace.
Background technique
In photovoltaic industry, diffusion furnace is mainly used under the high temperature conditions mixing solar battery sheet
It is miscellaneous, specifically under the conditions of electric heating, element phosphor, boron are diffused into silicon wafer, preparation forms the PN junction of solar battery.P
The quality of N knot has decisive impact the performance of solar battery.
The diffusion technique of diffusion furnace is completed in crystal reaction tube, and crystal reaction tube is equipped with fire door at fire door, and fire door drives
Motivation structure makes oven door opening and closing, detailed process are as follows: oven door opening before diffusion technique, feeding mechanism (feeding slurry) will be loaded with silicon
The quartz boat of piece is sent into quartz ampoule, and then feeding slurry exits, and fire door is closed；Then it is electrically heated, and from crystal reaction tube
Tail portion inputs diffusion technique gas, starts diffusion technique process.
According to the size of reaction overpressure, diffusion technique can be divided into normal pressure diffusion at present and low pressure spreads two classes, normal pressure
Working chamber internal pressure power keeps slight positive pressure state when diffusion, low to the sealing requirements of diffusion furnace working chamber, without reliable sealing
Structure, or even non-closed furnace tube structure can be directlyed adopt, technology is relatively simple.However, constantly shoaling with junction depth, normal pressure
The control of diffusion couple silicon wafer uniform doping is worse and worse, it is difficult to which the superficial face PN junction for preparing high quality is difficult to meet solar energy
The technical requirements that battery-efficient, low cost develop.With being constantly progressive for diffusion technique, researcher has found to reduce diffusion furnaceman
The uniformity of diffusion furnace tube interior air-flow can be improved by making intracavitary air pressure, and turbulent flow is avoided to generate, to improve the uniformity of diffusion；This
After the outer diffusion using low pressure, the absorption efficiency of chemicals is greatly improved in diffusion process, can substantially reduce in technical process and change
The dosage of product saves cost.Low pressure is diffused as crystal-silicon solar cell diffusion technique and sets completely new standard, is the following diffusion
The trend of technological development.
Reaction tube is negative pressure in low pressure diffusion process, proposes very high requirement to the sealing performance of fire door, if sealing
It is bad, there can be a series of problem: environment under low pressure required for decompression is spread can not be formed, be not able to satisfy the negative pressure item of technique
Part requirement；Under external atmospheric pressure effect, reaction tube outer gas, impurity etc. can enter in reaction tube, seriously affect PN junction
The quality of preparation, leads to scrap of the product；Corrosive gas in pipe can leak to outside fire door, so as to cause fire door outside equipment gold
Belong to substance to corrode.Traditional sealing fire door uses the Quartz furnace door with ring structure, and furnace tube temperature in diffusion process
Very high, sealing ring is easy to melt damage because temperature is excessively high, and service life is short, is also easy to cause very much seal failure, so,
How to realize the reliable sealing under low pressure diffusion technique hot environment, is one of the key technology of low pressure diffusion furnace.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide that a kind of structure is reliable, sealing performance
The good, stove gate device with long service life for low pressure diffusion furnace.
The present invention further provides a kind of low pressure diffusion furnaces comprising above-mentioned stove gate device.
In order to solve the above technical problems, the invention adopts the following technical scheme:
A kind of stove gate device for low pressure diffusion furnace, including sealing extension tube, external seal fire door, and expand for completely cutting off low pressure
The interior sealing fire door of heat in the reaction tube of furnace is dissipated, the sealing extension tube is sheathed on the reaction tube periphery, seals extension tube
Inner end and the reaction tube are tightly connected, and sealing element is equipped between outer end and the external seal fire door, and the external seal fire door is matched
It is equipped with switch door drive mechanism, flexible connection mechanism is equipped between the interior sealing fire door and the external seal fire door.
As a further improvement of the above technical scheme: the flexible connection mechanism includes that multiple groups are circumferentially evenly arranged
Elastic connecting component, elastic connecting component described in each group includes guide post, sliding sleeve, the first elastic component and locating part, the guiding
Column axially arranges that guide post one end is fixedly connected with the interior sealing fire door, and the other end is fixed with the locating part along reaction tube
Connection, the sliding sleeve and first elastic component are sheathed in the guide post, and the external seal fire door is fixed with the sliding sleeve
Connection.
As a further improvement of the above technical scheme: the switch door drive mechanism includes actuating arm, fire door support, ball
Spherical bearing, connecting shaft, the second elastic component and bearing block, the bearing block are set on the external seal fire door, the spherical bearing
It being installed in the bearing block, the one end of the connecting shaft is set in the spherical bearing, and the other end is connected with the fire door support,
Second elastic component is sheathed in the connecting shaft, the second elastic component both ends respectively with the bearing block and fire door support phase
It supports, the actuating arm is connected with the fire door support.
As a further improvement of the above technical scheme: the sealing extension tube, external seal fire door and the interior Sealing furnace
Pressure compensation chamber is formed between door, the pressure compensation chamber is configured with tonifying Qi component.
As a further improvement of the above technical scheme: the tonifying Qi component includes air inlet pipe, exhaust pipe, pressure control
Instrument and differential pressure pickup for detecting pressure difference between the reaction tube and the pressure compensation chamber are set in the air inlet pipe
Have flowmeter, the input terminal of the pressure controller is connected with the differential pressure pickup, the output end of pressure controller with it is described
Flowmeter is connected.
As a further improvement of the above technical scheme: the tonifying Qi component includes air inlet pipe, exhaust pipe and for examining
The differential pressure pickup of pressure difference between the reaction tube and the pressure compensation chamber is surveyed, the air inlet pipe is equipped with for adjusting air inlet
The manual modulation valve of amount.
As a further improvement of the above technical scheme: seal groove, the sealing element are equipped on the inside of the external seal fire door
In the seal groove, the external seal fire door is configured with active heat radiation structure, and the active heat radiation structure includes cooling wind
Machine and/or the logical coolant liquid in external seal fire door outside and cooling liquid bath corresponding with the seal groove, the cooling liquid bath.
As a further improvement of the above technical scheme: the sealing extension tube is quartz ampoule, and the external seal fire door is
Metal fire door, the interior sealing fire door are Quartz furnace door.
As a further improvement of the above technical scheme: the interior sealing fire door includes cylinder, and the cylinder is close to described
One end of reaction tube is equipped with end plate and in being equipped with partition in cylinder, forms heat-insulation chamber between the end plate and the partition.
A kind of low pressure diffusion furnace, including reaction tube further include the above-mentioned stove gate device for low pressure diffusion furnace.
Compared with the prior art, the advantages of the present invention are as follows: the stove gate device disclosed by the invention for low pressure diffusion furnace,
It is provided with the interior sealing fire door of external seal fire door and heating conduction difference, reaction tube periphery is arranged sealing extension tube, seals extension tube
Inner end and reaction tube are tightly connected, and sealing element is arranged between outer end and external seal fire door, so that inside and outside two-stage sealing structure is formed,
Between interior sealing fire door and external seal fire door pass through flexible connection mechanism realize flexible connection, it is ensured that interior sealing fire door with react
Pipe, external seal fire door and sealing extension tube fit closely, and structure is reliable, guarantees sealing effect；Interior sealing fire door is realized to low
The heat reduced in reaction tube while the reaction seal of tube of diffusion furnace is pressed to be radiated to outside reaction tube, so that the temperature of sealing element obtains
It to being effectively reduced, avoids leading to seal failure because of high temperature, extends its service life.
Low pressure diffusion furnace disclosed by the invention equally has the above advantages because containing above-mentioned stove gate device.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the present invention for the stove gate device of low pressure diffusion furnace.
Fig. 2 is the enlarged structure schematic diagram of the elastic connecting component in the present invention.
Fig. 3 is the enlarged structure schematic diagram of the switch door component in the present invention.
Fig. 4 is the structural schematic diagram of tonifying Qi component the first embodiment in the present invention.
Fig. 5 is the structural schematic diagram of second of embodiment of tonifying Qi component in the present invention.
Fig. 6 is the structural schematic diagram of low pressure diffusion furnace of the present invention.
Each label indicates in figure: 1, sealing extension tube；2, external seal fire door；21, seal groove；22, cooling liquid bath；3, it reacts
Pipe；31, heat-preservation cotton；4, interior sealing fire door；41, cylinder；42, end plate；43, partition；44, heat-insulation chamber；5, sealing element；6, switch gate
Driving mechanism；61, actuating arm；62, fire door support；63, spherical bearing；64, connecting shaft；65, the second elastic component；66, bearing block；
7, flexible connection mechanism；71, guide post；72, sliding sleeve；73, the first elastic component；74, locating part；8, pressure compensation chamber；81, air inlet
Pipe；82, exhaust pipe；83, pressure controller；84, differential pressure pickup；85, flowmeter；86, pressure gauge；87, manual modulation valve.
Specific embodiment
Below in conjunction with Figure of description and specific embodiment, invention is further described in detail.
Embodiment one
Fig. 1 to Fig. 5 shows a kind of embodiment of the present invention for the stove gate device of low pressure diffusion furnace, and being used for for the present embodiment is low
Press the stove gate device of diffusion furnace, including sealing extension tube 1, external seal fire door 2, and the reaction tube for completely cutting off low pressure diffusion furnace
The interior sealing fire door 4 of heat in 3, sealing extension tube 1 are sheathed on 3 periphery of reaction tube, and sealing 1 inner end of extension tube (is left in attached drawing
End) it is tightly connected with reaction tube 3, reality is pushed against particular by the heat-preservation cotton 31 of sealing 1 inner end of extension tube and 3 periphery of reaction tube
It is existing, it is equipped with sealing element 5 between sealing 1 outer end of extension tube (being right end in attached drawing) and external seal fire door 2, sealing element 5 can be by O-shaped
Sealing ring, sealant or sealing strip etc. realize function, and sealing element 5 is O-ring seal in the present embodiment, and external seal fire door 2 configures
There is switch door drive mechanism 6, switch door drive mechanism 6 can realize function, interior sealing fire door 4 and external seal fire door by cylinder etc.
Flexible connection mechanism 7 is equipped between 2.
The present invention is used for the stove gate device of low pressure diffusion furnace, is provided with the interior sealing of external seal fire door 2 and heating conduction difference
Fire door 4,3 periphery of reaction tube be arranged sealing extension tube 1, sealing 1 inner end of extension tube and reaction tube 3 be tightly connected, outer end with it is outer close
Sealing element 5 is set between banking door 2, so that inside and outside two-stage sealing structure is formed, between interior sealing fire door 4 and external seal fire door 2
Pass through flexible connection mechanism 7 and realize flexible connection, it is ensured that the interior sealing fire door 4 and anti-under the action of switch door drive mechanism 6
Should pipe 3, external seal fire door 2 with sealing extension tube 1 fit closely, structure is reliable, can guarantee sealing effect；Interior sealing fire door
2 realize that reducing the heat in reaction tube 3 while sealing to the reaction tube 3 of low pressure diffusion furnace is radiated to outside reaction tube, so that close
The temperature of sealing 5 is effectively reduced, and avoids leading to seal failure because of high temperature, extends its service life.
When specific works, switch door drive mechanism 6 drives external seal fire door 2 and interior sealing fire door 4 to 3 nozzle side of reaction tube
To movement, it is interior sealing fire door 4 first with reaction tube 3(quartz ampoule) interior seal face be in contact, then, in switch gate driving machine
Under the action of structure 6, external seal fire door 2 continues to move to 3 nozzle direction of reaction tube, is placed in external seal fire door 2 and interior sealing fire door 4
Between flexible connection mechanism 7 compressed, interior sealing fire door 4 and the end face of reaction tube 3 are mutually adjacent to, for completely cutting off reaction tube 3
Heat, the heat reduced in reaction tube 3 are radiated outside reaction tube 3.Finally, the external seal in the case where switch door drive mechanism 6 acts on
Fire door 2 is adjacent to sealing 1 end face of extension tube, and the sealing of sealing 1 nozzle of extension tube is realized by O-ring seal.
As further preferred technical solution, in the present embodiment, flexible connection mechanism 7 includes multiple groups circumferentially uniform cloth
The elastic connecting component set, each group elastic connecting component include guide post 71, sliding sleeve 72, the first elastic component 73 and locating part 74,
Guide post 71 is fixedly connected along the axial arrangement of reaction tube 3,71 one end of guide post with interior sealing fire door 4, the other end and locating part 74
It is fixedly connected, sliding sleeve 72 and the first elastic component 73 are sheathed in guide post 71, and external seal fire door 2 is fixedly connected with sliding sleeve 72.Edge
It circumferentially is uniformly arranged multiple groups elastic connecting component, is conducive to overcome that may be present between external seal fire door 2 and interior sealing fire door 4
Deviation, guarantee can both play sealing function, promote the sealing performance of fire door.When specific works, in switch door drive mechanism 6
Under the action of, external seal fire door 2 is slided by sliding sleeve 72 along guide post 71, the first elastic component 73 is compressed in the two sliding process,
First elastic component 73 pushes interior sealing fire door 4 to move to 3 nozzle of reaction tube.Wherein, the first elastic component 73 is spring, and diameter is preferred
Greater than the diameter of sliding sleeve 72, sliding sleeve 72 uses T-type set, and 71 both ends of guide post are provided with external screw thread, correspondingly, locating part 74 is then
Using stop nut.
Further, in the present embodiment, switch door drive mechanism 6 includes actuating arm 61, fire door support 62, spherical bearing
63, connecting shaft 64, the second elastic component 65 and bearing block 66, bearing block 66 are set on external seal fire door 2, and spherical bearing 63 is installed on
In bearing block 66,64 one end of connecting shaft is set in spherical bearing 63, and the other end is connected with fire door support 62, the second 65 sets of elastic component
In connecting shaft 64,65 both ends of the second elastic component offset with bearing block 66 and fire door support 62 respectively, actuating arm 61 and fire door
Support 62 is connected.The switch door drive mechanism 6 can realize that interior sealing fire door 4 and external seal fire door 2 are certain with respect to fire door support 62
The elastics wing of amplitude is conducive to overcome interior sealing fire door 4, external seal fire door 2 and sealing extension tube 1,3 nozzle of reaction tube possible
Existing deflection realizes the whole adaptive adjustment of fire door, further promotes the sealing performance of fire door.Wherein, the second elastic component
65 use spring, and fire door support 62 is lock onto connecting shaft 64 by fastener, and inner end is set to 66 periphery of bearing block, make spherical axis
Hold 63, connecting shaft 64, the second elastic component 65 is in enclosed environment.
As further preferred technical solution, in the present embodiment, sealing extension tube 1, external seal fire door 2 and interior Sealing furnace
Pressure compensation chamber 8 is formed between door 4, pressure compensation chamber 8 is configured with tonifying Qi component.It can be by being filled with nitrogen in pressure compensation chamber 8
The nonreactive gas such as gas avoid pressure in pressure compensation chamber 8 can effectively anti-slightly larger than the pressure inside crystal reaction tube 3
Metallics should be avoided result in and corroded outside 3 internal corrosion content leaks reaction tube 3 of pipe.
In the present embodiment, tonifying Qi component includes air inlet pipe 81, exhaust pipe 82, pressure controller 83 and anti-for detecting
Should between pipe 3 and pressure compensation chamber 8 pressure difference differential pressure pickup 84, air inlet pipe 81 be equipped with flowmeter 85, pressure controller 83
Input terminal be connected with differential pressure pickup 84, the output end of pressure controller 83 is connected with flowmeter 85.Differential pressure pickup 84 is real
When detection reaction tube 3 in and pressure compensation chamber 8 in pressure difference, by pressure controller 83 and flowmeter 85 to pressure compensation chamber
8 carry out tonifying Qi operation, make high 30Mbar of pressure inside 8 pressure ratio reaction tube 3 of pressure compensation chamber or so, it can be achieved that automatic feedback
It adjusts, the occasion suitable for process gas flow real-time change in reaction tube 3.
In other embodiments, the occasion fixed for process gas flow, can also be used easy means shown in fig. 5,
I.e. tonifying Qi component includes air inlet pipe 81, exhaust pipe 82 and the pressure for detecting pressure difference between reaction tube 3 and pressure compensation chamber 8
Gap sensor 84, air inlet pipe 81 are equipped with the manual modulation valve 87 for adjusting air inflow.Operator observes differential pressure pickup
84 adjust 87 aperture of manual modulation valve, make high 30Mbar of pressure inside the pressure ratio reaction tube 3 of pressure compensation chamber 8 or so i.e.
It can.
As further preferred technical solution, seal groove 21 is equipped on the inside of external seal fire door 2, sealing element 5 is set to sealing
In slot 21, external seal fire door 2 is configured with active heat radiation structure, and in the present embodiment, active heat radiation structure includes being set to external seal furnace
2 outside of door and cooling liquid bath 22 corresponding with seal groove 21, cool down and lead to coolant liquid in liquid bath 22.Namely it is logical at 5 back side of sealing element
Enter coolant liquid (such as cooling water) and active cooling is carried out to sealing element 5, external seal fire door 2, reduces its temperature, guarantee sealing performance
And prolong the service life.In other embodiments, sealing element 5 can also be installed in sealing extension tube 1；Active heat radiation structure
Cooling blower can be used and carry out active cooling, or use air-cooled and liquid cooling simultaneously.
As further preferred technical solution, in the present embodiment, sealing extension tube 1 is quartz ampoule, and external seal fire door 2 is
Metal fire door, interior sealing fire door 4 are Quartz furnace door.Interior sealing fire door 4 and sealing extension tube 1 use quartz material, high temperature resistant, property
It can stablize, heat-conductive characteristic is poor, can reduce heat in reaction tube 3 and be radiated to outside, seals fire door 4 and sealing extension tube 1 inside
Under the action of, the high temperature resistance of external seal fire door 2 is required to reduce, thus metal material can be used, guaranteeing leakproofness
Convenient for machining, production while energy.
Further, in the present embodiment, interior sealing fire door 4 includes cylinder 41, and cylinder 41 is set close to one end of reaction tube 3
Have end plate 42 and in cylinder 41 be equipped with partition 43, between end plate 42 and partition 43 formed heat-insulation chamber 44.Using in the structure
Sealing fire door 4 can further decrease heat in reaction tube 3 and be radiated to outside, to further avoid sealing element 5 in high temperature action
Lower failure guarantees sealing performance, prolongs its service life.
Embodiment two
Fig. 6 shows a kind of embodiment of low pressure diffusion furnace of the present invention, the low pressure diffusion furnace of the present embodiment, including reaction tube 3, also
Including the above-mentioned stove gate device for low pressure diffusion furnace.The low pressure diffusion furnace equally has the above advantages.
Although the present invention has been disclosed as a preferred embodiment, however, it is not intended to limit the invention.It is any to be familiar with ability
The technical staff in domain, without deviating from the scope of the technical scheme of the present invention, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible changes and modifications or equivalent example modified to equivalent change.Therefore, all
Without departing from the content of technical solution of the present invention, according to the present invention technical spirit any simple modification made to the above embodiment,
Equivalent variations and modification, all shall fall within the protection scope of the technical scheme of the invention.
Claims (10)
1. a kind of stove gate device for low pressure diffusion furnace, it is characterised in that: including sealing extension tube (1), external seal fire door
(2), the interior sealing fire door (4) of reaction tube (3) interior heat and for completely cutting off low pressure diffusion furnace, the sealing extension tube (1)
It is sheathed on the reaction tube (3) periphery, sealing extension tube (1) inner end and the reaction tube (3) are tightly connected, outer end and described outer
It seals and is equipped with sealing element (5) between fire door (2), the external seal fire door (2) is described interior configured with switch door drive mechanism (6)
It seals and is equipped with flexible connection mechanism (7) between fire door (4) and the external seal fire door (2).
2. the stove gate device according to claim 1 for low pressure diffusion furnace, it is characterised in that: the flexible connection mechanism
It (7) include elastic connecting component that multiple groups are circumferentially evenly arranged, elastic connecting component described in each group includes guide post (71), sliding
(72), the first elastic component (73) and locating part (74) are covered, the guide post (71) is axially arranged along reaction tube (3), guide post
(71) one end is fixedly connected with the interior sealing fire door (4), and the other end is fixedly connected with the locating part (74), the sliding sleeve
(72) it is sheathed on the guide post (71) with first elastic component (73), the external seal fire door (2) and the sliding sleeve
(72) it is fixedly connected.
3. the stove gate device according to claim 2 for low pressure diffusion furnace, it is characterised in that: the switch gate driving machine
Structure (6) includes actuating arm (61), fire door support (62), spherical bearing (63), connecting shaft (64), the second elastic component (65) and bearing
Seat (66), the bearing block (66) are set on the external seal fire door (2), and the spherical bearing (63) is installed on the bearing block
(66) in, described connecting shaft (64) one end is set in the spherical bearing (63), and the other end is connected with the fire door support (62),
Second elastic component (65) is sheathed on the connecting shaft (64), the second elastic component (65) both ends respectively with the bearing block
(66) it offsets with fire door support (62), the actuating arm (61) is connected with the fire door support (62).
4. the stove gate device according to any one of claim 1 to 3 for low pressure diffusion furnace, it is characterised in that: described
Pressure compensation chamber (8) are formed between sealing extension tube (1), external seal fire door (2) and the interior sealing fire door (4), the pressure
Compensated cavity (8) is configured with tonifying Qi component.
5. the stove gate device according to claim 4 for low pressure diffusion furnace, it is characterised in that: the tonifying Qi component includes
Air inlet pipe (81), exhaust pipe (82), pressure controller (83) and for detecting the reaction tube (3) and the pressure compensation
The differential pressure pickup (84) of pressure difference between chamber (8), the air inlet pipe (81) are equipped with flowmeter (85), the pressure controller
(83) input terminal is connected with the differential pressure pickup (84), output end and the flowmeter (85) phase of pressure controller (83)
Even.
6. the stove gate device according to claim 4 for low pressure diffusion furnace, it is characterised in that: the tonifying Qi component includes
Air inlet pipe (81), exhaust pipe (82) and for detecting pressure difference between the reaction tube (3) and the pressure compensation chamber (8)
Differential pressure pickup (84), the air inlet pipe (81) are equipped with the manual modulation valve (87) for adjusting air inflow.
7. the stove gate device according to any one of claim 1 to 3 for low pressure diffusion furnace, it is characterised in that: described
Seal groove (21) are equipped on the inside of external seal fire door (2), the sealing element (5) is set in the seal groove (21), the external seal
Fire door (2) is configured with active heat radiation structure, and the active heat radiation structure includes cooling blower and/or is set to external seal fire door (2)
Outside and cooling liquid bath (22) corresponding with the seal groove (21) lead to coolant liquid in the cooling liquid bath (22).
8. the stove gate device according to any one of claim 1 to 3 for low pressure diffusion furnace, it is characterised in that: described
Sealing extension tube (1) is quartz ampoule, and the external seal fire door (2) is metal fire door, and the interior sealing fire door (4) is quartzy furnace
Door.
9. the stove gate device according to claim 8 for low pressure diffusion furnace, it is characterised in that: the interior sealing fire door
It (4) include cylinder (41), one end of the cylinder (41) close the reaction tube (3) is equipped with end plate (42) and in cylinder (41)
Equipped with partition (43), heat-insulation chamber (44) are formed between the end plate (42) and the partition (43).
10. a kind of low pressure diffusion furnace, including reaction tube (3), it is characterised in that: further include described in any one of claims 1 to 9
The stove gate device for low pressure diffusion furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710740056.4A CN109423697B (en) | 2017-08-25 | 2017-08-25 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710740056.4A CN109423697B (en) | 2017-08-25 | 2017-08-25 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
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| Publication Number | Publication Date |
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| CN109423697A true CN109423697A (en) | 2019-03-05 |
| CN109423697B CN109423697B (en) | 2021-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710740056.4A Active CN109423697B (en) | 2017-08-25 | 2017-08-25 | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace |
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Cited By (2)
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| CN110867399A (en) * | 2019-11-06 | 2020-03-06 | 陈叶源 | Pressure control system suitable for negative pressure diffusion furnace |
| CN112542410A (en) * | 2020-12-22 | 2021-03-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Reaction furnace |
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| CN106048731A (en) * | 2016-08-12 | 2016-10-26 | 深圳市捷佳伟创新能源装备股份有限公司 | Low-pressure diffusion furnace door sealing device |
| CN106546101A (en) * | 2016-10-27 | 2017-03-29 | 湖南红太阳光电科技有限公司 | A kind of diffusion furnace stove gate device |
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| CN201532119U (en) * | 2009-09-25 | 2010-07-21 | 深圳市捷佳伟创微电子设备有限公司 | Automatic furnace door cover of diffusion furnace |
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| Publication number | Publication date |
|---|---|
| CN109423697B (en) | 2021-02-23 |
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