CN211103496U - Ultra-low temperature auxiliary micro-abrasive air jet processing device for PDMS substrate micro-channel - Google Patents
Ultra-low temperature auxiliary micro-abrasive air jet processing device for PDMS substrate micro-channel Download PDFInfo
- Publication number
- CN211103496U CN211103496U CN201921417560.1U CN201921417560U CN211103496U CN 211103496 U CN211103496 U CN 211103496U CN 201921417560 U CN201921417560 U CN 201921417560U CN 211103496 U CN211103496 U CN 211103496U
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- China
- Prior art keywords
- micro
- ultra
- air pump
- low temperature
- pdms substrate
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/02—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
- B24C3/04—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other stationary
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model discloses a little abrasive gas efflux processingequipment is assisted to ultra-low temperature of PDMS substrate microchannel, including the reaction chamber, fixedly connected with motor and arm respectively are shown to the inside end of reaction chamber wall both sides. The utility model discloses in, set up the depression bar on the connecting rod, the inside of reaction formula has set up the arm, has set up the nozzle on the arm, has set up the control part on the nozzle, and the top of reacting chamber has set up the second air pump, has set up the intake pipe on the second air pump, adopts the benefit of this design to lie in: firstly, the connecting rod can be pushed to move by stretching the electric push rod, and the axial thrust of the electric push rod is transmitted to the direction vertical to the axial direction of the electric push rod due to the sliding connection of the press rod and the frame, so that the press rod can clamp a workpiece, and the space of a clamping structure is saved by the structure; secondly, when the workpiece needs to be processed on two sides, the motor drives the frame to rotate 180 degrees, so that the workpiece can be turned over, and the processing efficiency is improved.
Description
Technical Field
The utility model relates to a PDMS substrate processing technology field especially relates to a little abrasive air jet processingequipment is assisted to PDMS substrate microchannel's ultra-low temperature.
Background
PDMS polydimethylsiloxane is one of organic silicon, and is a polymer material widely applied to the fields of microfluidics and the like due to the characteristics of low cost, simple use, good adhesion with silicon wafers, good chemical inertness and the like.
The method is characterized in that a low-temperature micro-abrasive air jet technology is mostly adopted for processing the PDMS substrate, but the existing processing device still has defects, firstly, most of clamps of the existing processing device are not adjustable, when the PDMS substrate needs to be subjected to double-sided processing, the substrate needs to be dismounted and turned over by the conventional processing device, and the mode causes a great deal of time waste and is not beneficial to improving the working efficiency; secondly, current processingequipment mostly is the temperature that reduces whole reacting chamber is whole, because the space of reacting chamber is great, need consume more nitrogen gas and cool down, and more nitrogen gas resource can be wasted to this kind of mode, and is not low carbon environmental protection.
Disclosure of Invention
The utility model aims to provide a: the ultralow-temperature auxiliary micro-abrasive air jet processing device for the PDMS substrate micro-channel aims to solve the problems that a clamp of the existing ultralow-temperature auxiliary micro-abrasive air jet processing device cannot be adjusted and a large amount of nitrogen resources are wasted.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
The utility model provides a little abrasive gas efflux processingequipment is assisted to ultra-low temperature of PDMS substrate microchannel, includes the reaction chamber, fixedly connected with motor and arm respectively are distinguished to the inside end table wall both sides of reaction chamber, the output shaft transmission of motor is connected with the frame of rectangle, the inboard fixedly connected with electric putter of frame, electric putter's flexible end is rotated and is connected with the connecting rod, electric putter's one end is kept away from to the connecting rod is rotated and is connected with the depression bar, the top of arm is rotated and is connected with the nozzle.
As a further description of the above technical solution:
The depression bar is equipped with two, the both ends of two depression bars all with frame sliding connection.
As a further description of the above technical solution:
The nozzle is provided with a control part, and the control part consists of a temperature measuring probe and a processor.
As a further description of the above technical solution:
The top fixedly connected with first air pump and the second air pump of reaction chamber, second air pump inlet end communicates respectively has intake pipe and feed inlet, and the end of giving vent to anger of second air pump passes through connecting pipe and nozzle intercommunication, the inlet end and the reaction chamber intercommunication of first air pump, the end of giving vent to anger of first air pump pass through three-way valve and intake pipe intercommunication, the top of feed inlet is equipped with the valve.
As a further description of the above technical solution:
And a sealing door is arranged on the side end surface of the reaction chamber.
As a further description of the above technical solution:
And the inner surface wall of the connecting pipe is provided with a heat insulation layer.
As a further description of the above technical solution:
The processor is electrically connected with the temperature measuring probe and the valve.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. The utility model discloses in, the inside of reacting chamber has set up the motor, and the output shaft of motor has set up the frame, and the inboard of frame has set up electric putter, and electric putter's flexible end has set up the connecting rod, has set up the depression bar on the connecting rod, and the inside of reaction formula has set up the arm, has set up the nozzle on the arm, has set up the control part on the nozzle, and the top of reacting chamber has set up the second air pump, has set up the intake pipe on the second air pump, adopts the benefit of this design to lie in: firstly, the connecting rod can be pushed to move by stretching the electric push rod, and the axial thrust of the electric push rod is transmitted to the direction vertical to the axial direction of the electric push rod due to the sliding connection of the press rod and the frame, so that the press rod can clamp a workpiece, and the space of a clamping structure is saved by the structure; secondly, when the workpiece needs to be processed on two sides, the motor drives the frame to rotate 180 degrees, so that the workpiece can be turned over, and the processing efficiency is improved.
2. The utility model discloses in, the top of reacting chamber has set up first air pump, and its one of which air pump passes through the three-way valve to be connected with the second air pump, has set up the feed inlet on the second air pump, has set up the valve on the feed inlet, and the control part comprises temperature probe and treater, has set up the connecting pipe between nozzle and the second air pump, and the inboard of connecting pipe has set up the heat preservation, adopts the benefit of this design to lie in: firstly, the temperature measuring probe can detect the temperature of a workpiece and transmit data to the processor, when the temperature is reduced to the working temperature of the abrasive, the abrasive can enter the reaction chamber by opening the valve through the processor, and the processing precision can be improved by automatic control; second, first air pump can be before processing with the reaction chamber pump become nearly vacuum state, avoids the steam in the air to condense into the frost on the workpiece surface when the nitrogen gas cooling to first air pump can be with nitrogen gas and abrasive material circulation in the in-process of processing, helps the use amount of sparingly raw materials, makes production low carbon environmental protection.
Drawings
Fig. 1 shows a schematic view of an internal structure of a reaction chamber provided according to an embodiment of the present invention;
Fig. 2 is a schematic structural diagram of a nozzle and a connecting pipe provided according to an embodiment of the present invention;
Fig. 3 shows an external structure diagram of a reaction chamber provided according to an embodiment of the present invention.
Illustration of the drawings:
1. A reaction chamber; 2. a motor; 3. a frame; 4. an electric push rod; 5. a connecting rod; 6. a pressure lever; 7. a mechanical arm; 8. a nozzle; 9. a control unit; 901. a temperature measuring probe; 902. a processor; 10. a first air pump; 11. a second air pump; 12. an air inlet pipe; 13. a feed inlet; 14. a three-way valve; 15. a valve; 16. a connecting pipe; 17. a heat-insulating layer; 18. and (4) sealing the door.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a little abrasive air jet processingequipment is assisted to ultra-low temperature of PDMS substrate microchannel, including reaction chamber 1, fixedly connected with motor 2 and arm 7 respectively are on the inside end of reaction chamber 1, the output shaft transmission of motor 2 is connected with the frame 3 of rectangle, the inboard fixedly connected with electric putter 4 of frame 3, electric putter 4's flexible end is rotated and is connected with connecting rod 5, connecting rod 5 keeps away from electric putter 4's one end and rotates and be connected with depression bar 6, the top of arm 7 is rotated and is connected with nozzle 8, electric putter 4 promotes connecting rod 5 and removes, and then drive depression bar 6 and remove, through transmitting to the vertically direction with 4 axial thrust of electric putter, the space that the structure occupy has been saved, and it can process the back of work piece to drive the rotation of frame 3 through motor 2.
Specifically, as shown in fig. 1, two pressure rods 6 are provided, and two ends of each of the two pressure rods 6 are slidably connected with the frame 3, so that the stability of the pressure rods 6 during movement is improved.
Specifically, as shown in fig. 1 and 2, a control part 9 is arranged on the nozzle 8, the control part 9 is composed of a temperature probe 901 and a processor 902, the processor 902 is electrically connected with the temperature probe 901 and the valve 15, the temperature probe 901 can detect the temperature of the workpiece and transmit data to the processor 902, and the processor 902 can control the opening of the valve 15, so that the device can be automatically processed.
Specifically, as shown in fig. 1, a first air pump 10 and a second air pump 11 are fixedly connected to the top of the reaction chamber 1, an air inlet end of the second air pump 11 is respectively communicated with an air inlet pipe 12 and a feed inlet 13, an air outlet end of the second air pump 11 is communicated with the nozzle 8 through a connecting pipe 16, an air inlet end of the first air pump 10 is communicated with the reaction chamber 1, an air outlet end of the first air pump 10 is communicated with the air inlet pipe 12 through a three-way valve 14, a valve 15 is arranged at the top of the feed inlet 13, the first air pump 10 can pump out air in the reaction chamber 1, and nitrogen and abrasive are circularly introduced into the air inlet pipe 12, so that the consumption of raw materials is saved by circularly.
Specifically, as shown in fig. 3, a sealing gate 18 is provided on the side end surface of the reaction chamber 1, so that the sealing property of the reaction chamber 1 is improved and nitrogen gas leakage is prevented.
Specifically, as shown in fig. 2, the inner surface wall of the connecting pipe 16 is provided with an insulating layer 17, and the temperature of nitrogen is reduced and increased by the insulating layer 17, so that the cooling speed is increased.
The working principle is as follows: when the device is used, commercial power is supplied to the motor 2, the electric push rod 4, the mechanical arm 7, the control part 9, the first air pump 10 and the second air pump 11, firstly, the sealing door 18 is opened, a workpiece is placed between the two pressure rods 6 of the frame 3, the electric push rod 4 is stretched to push the pressure rods 6 to move towards the inner side of the frame 3 through the connecting rod 5 until the workpiece is attached, the workpiece is further fixed at the inner side of the frame 3, then the sealing door 18 is closed, the first air pump 10 is opened, the three-way valve 14 is adjusted to enable the first air pump 10 to be communicated with the outside, the inside of the reaction chamber 1 is pumped into a near vacuum state through the first air pump 10, then nitrogen is introduced from the air inlet pipe 12, the second air pump 11 is opened, the three-way valve 14 is adjusted to enable the first air pump 10 to be communicated with the air inlet pipe 12, the mechanical arm, the temperature measuring probe 901 can measure the temperature of the workpiece, the measured data is transmitted to the processor 902, when the temperature is reduced to the temperature at which the abrasive can be processed, the processor 902 controls the valve 15 to be opened, the abrasive enters from the feeding hole 13 and is sprayed out from the nozzle 8 along with nitrogen to process the workpiece; secondly, first air pump 10 can inhale the inside nitrogen gas of reaction chamber 1 and abrasive material and carry intake pipe 12 back, the use amount of nitrogen gas and abrasive material has been saved through recycling, when needs carry out two-sided man-hour to the work piece, it drives frame 3 rotation 180 to open motor 2, can process the back of work piece, through foretell step, the back of work piece need not pause processing, and can solve the problem that current supplementary little abrasive material gas jet processing device's of ultra-low temperature anchor clamps can not be adjusted and waste a large amount of nitrogen gas resources through local cooling and circulation materials.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (7)
- The utility model provides a little abrasive gas jet processingequipment is assisted to ultra-low temperature of PDMS substrate microchannel, including reaction chamber (1), its characterized in that, fixedly connected with motor (2) and arm (7) respectively are shown to the inside end of reaction chamber (1) wall both sides, the output shaft transmission of motor (2) is connected with frame (3) of rectangle, the inboard fixedly connected with electric putter (4) of frame (3), the flexible end of electric putter (4) is rotated and is connected with connecting rod (5), the one end that electric putter (4) were kept away from in connecting rod (5) is rotated and is connected with depression bar (6), the top of arm (7) is rotated and is connected with nozzle (8).
- 2. The ultra-low temperature auxiliary micro-abrasive air-jet processing device for the PDMS substrate micro-channel according to claim 1, wherein two pressure rods (6) are provided, and both ends of the two pressure rods (6) are slidably connected with the frame (3).
- 3. The ultra-low temperature auxiliary micro-abrasive gas jet processing device of the PDMS substrate micro-channel of claim 1, wherein the nozzle (8) is provided with a control part (9), and the control part (9) comprises a temperature probe (901) and a processor (902).
- 4. The ultra-low temperature auxiliary micro-abrasive air-jet processing device for the PDMS substrate micro-channel according to claim 3, wherein a first air pump (10) and a second air pump (11) are fixedly connected to the top of the reaction chamber (1), an air inlet end of the second air pump (11) is respectively communicated with an air inlet pipe (12) and a feed inlet (13), an air outlet end of the second air pump (11) is communicated with the nozzle (8) through a connecting pipe (16), an air inlet end of the first air pump (10) is communicated with the reaction chamber (1), an air outlet end of the first air pump (10) is communicated with the air inlet pipe (12) through a three-way valve (14), and a valve (15) is disposed at the top of the feed inlet (13).
- 5. The ultra-low temperature auxiliary micro-abrasive gas jet processing device of PDMS substrate micro-channel of claim 1, wherein the side end face of the reaction chamber (1) is provided with a sealing door (18).
- 6. The ultra-low temperature auxiliary micro-abrasive air-jet processing device of PDMS substrate micro-channel of claim 4, wherein the inner surface wall of the connecting pipe (16) is provided with a thermal insulation layer (17).
- 7. The ultra-low temperature auxiliary micro-abrasive gas jet processing device of the PDMS substrate micro-channel of claim 4, wherein the processor (902) is electrically connected with the temperature probe (901) and the valve (15).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921417560.1U CN211103496U (en) | 2019-08-29 | 2019-08-29 | Ultra-low temperature auxiliary micro-abrasive air jet processing device for PDMS substrate micro-channel |
| PCT/CN2020/099001 WO2021036481A1 (en) | 2019-08-29 | 2020-06-29 | Cryogenic auxiliary micro-abrasive gas jet machining device for pdms substrate microchannel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921417560.1U CN211103496U (en) | 2019-08-29 | 2019-08-29 | Ultra-low temperature auxiliary micro-abrasive air jet processing device for PDMS substrate micro-channel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211103496U true CN211103496U (en) | 2020-07-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921417560.1U Expired - Fee Related CN211103496U (en) | 2019-08-29 | 2019-08-29 | Ultra-low temperature auxiliary micro-abrasive air jet processing device for PDMS substrate micro-channel |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN211103496U (en) |
| WO (1) | WO2021036481A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112157597A (en) * | 2020-09-29 | 2021-01-01 | 南京航太机电有限公司 | Low-temperature nitrogen cooling focusing abrasive gas jet machining machine tool |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10291161A (en) * | 1997-04-17 | 1998-11-04 | Kiyokuyou Kankyo Syst:Kk | Abrading method for contamination and abrading device |
| US6012968A (en) * | 1998-07-31 | 2000-01-11 | International Business Machines Corporation | Apparatus for and method of conditioning chemical mechanical polishing pad during workpiece polishing cycle |
| CN204603927U (en) * | 2015-05-12 | 2015-09-02 | 周志花 | Pneumatic manipulator |
| CN105751081B (en) * | 2016-04-13 | 2018-06-22 | 窦川忠 | A kind of abrasive blasting device and its application method |
| CN208068046U (en) * | 2017-12-20 | 2018-11-09 | 黄石市金桥铝业有限公司 | A kind of sand-blasting machine for aluminium section bar production |
| CN108436789A (en) * | 2018-02-05 | 2018-08-24 | 江门市海川容大实业有限公司 | A kind of hand behaviour's sand-blasting machine of vacuum high efficiente callback |
| CN109702656A (en) * | 2019-01-18 | 2019-05-03 | 重庆市妙格半导体研究院有限公司 | A kind of diode production sand blasting unit |
| CN109676538B (en) * | 2019-01-22 | 2021-03-16 | 南京航空航天大学 | Low-temperature micro-abrasive gas jet machining machine tool |
-
2019
- 2019-08-29 CN CN201921417560.1U patent/CN211103496U/en not_active Expired - Fee Related
-
2020
- 2020-06-29 WO PCT/CN2020/099001 patent/WO2021036481A1/en active Application Filing
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112157597A (en) * | 2020-09-29 | 2021-01-01 | 南京航太机电有限公司 | Low-temperature nitrogen cooling focusing abrasive gas jet machining machine tool |
| CN112157597B (en) * | 2020-09-29 | 2022-04-08 | 南京航太机电有限公司 | Low-temperature nitrogen cooling focusing abrasive gas jet machining machine tool |
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| Publication number | Publication date |
|---|---|
| WO2021036481A1 (en) | 2021-03-04 |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200728 Termination date: 20210829 |