CN207038544U - A kind of low pressure diffusion furnace fire door heat insulation structural - Google Patents
A kind of low pressure diffusion furnace fire door heat insulation structural Download PDFInfo
- Publication number
- CN207038544U CN207038544U CN201720600957.9U CN201720600957U CN207038544U CN 207038544 U CN207038544 U CN 207038544U CN 201720600957 U CN201720600957 U CN 201720600957U CN 207038544 U CN207038544 U CN 207038544U
- Authority
- CN
- China
- Prior art keywords
- tubulose
- thermal insulation
- quartz ampoule
- insulation layer
- sealing ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000009413 insulation Methods 0.000 title claims abstract description 65
- 238000009792 diffusion process Methods 0.000 title claims abstract description 24
- 239000010453 quartz Substances 0.000 claims abstract description 45
- 238000007789 sealing Methods 0.000 claims abstract description 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 45
- 239000003708 ampul Substances 0.000 claims abstract description 43
- 230000007704 transition Effects 0.000 claims description 17
- 239000000498 cooling water Substances 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 8
- 239000002826 coolant Substances 0.000 claims description 3
- 238000002955 isolation Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000005439 thermosphere Substances 0.000 description 3
- 229920002449 FKM Polymers 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 229920006169 Perfluoroelastomer Polymers 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Abstract
The utility model discloses a kind of low pressure diffusion furnace fire door heat insulation structural, including quartz ampoule and sealing ring, the sealing ring is sheathed on the end outer wall of the mouth of pipe of the quartz ampoule, also include the thermal insulation layer of tubulose, the thermal insulation layer of the tubulose is arranged in the end of the mouth of pipe of the quartz ampoule and the axis of the thermal insulation layer of the tubulose overlaps with the axis of the quartz ampoule, the outer end opening of the thermal insulation layer of the tubulose extends the mouth of pipe of the quartz ampoule, the interior end opening of the thermal insulation layer of the tubulose extends beyond the corresponding position on the inner wall of end of the mouth of pipe of the quartz ampoule of the sealing ring.The low pressure diffusion furnace fire door heat insulation structural when input and output material is door opened there are a large amount of heat energy to be overflowed out of quartz ampoule when, the thermal insulation layer of tubulose plays isolation and guide effect well, high temperature heat sheds from the thermal insulation layer of tubulose, avoid high temperature heat and directly affect sealing ring, extend the service life of sealing ring.
Description
Technical field
Low pressure diffusion furnace field is the utility model is related to, more particularly to a kind of heat-insulated knot of low pressure diffusion furnace fire door
Structure.
Background technology
As photovoltaic industry develops, in industry mainly production high temperature dispersing furnace production technology also constantly obtain improve and
Thus development, New Low Voltage high temperature dispersing furnace also produce.Low pressure diffusion is spread maximum difference relative to normal pressure and is, it reacts
Indoor needs vacuumize, thus need to do sealing structure between reaction chamber and fire door.Generally use O-ring seal is come close at present
Envelope, but due to being up to 1100 degrees Celsius of technological temperature in reaction chamber, have a large amount of heat energy when input and output material is door opened from stone
Overflow in English pipe, sealing ring directly can be influenceed by high temperature, and this service life to sealing ring has no small challenge, therefore logical
The life-span that normal sealing ring uses was less than one month, and sealing ring frequently changes the operation for having a strong impact on equipment, therefore how
Extending the service life of sealing ring becomes very urgent and important.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of low pressure diffusion furnace fire door heat insulation structural, by quartz
The thermal insulation layer of tubulose is set in the end of the mouth of pipe of pipe, when high temperature heat is overflowed out of quartz ampoule, the thermal insulation layer isolation of tubulose
High temperature heat and sealing ring, high temperature heat shed from the thermal insulation layer of tubulose, avoid high temperature heat and directly affect sealing ring, extend
The service life of sealing ring.
The technical solution of the utility model is：A kind of low pressure diffusion furnace fire door heat insulation structural, including quartz ampoule and sealing ring,
The sealing ring is sheathed on the end outer wall of the mouth of pipe of the quartz ampoule, includes the thermal insulation layer of tubulose, the tubulose every
Thermosphere is arranged in the end of the mouth of pipe of the quartz ampoule and in the axis of the thermal insulation layer of the tubulose and the quartz ampoule
Axis overlaps, and the outer end opening of the thermal insulation layer of the tubulose extends the mouth of pipe of the quartz ampoule, the thermal insulation layer of the tubulose
Interior end opening extends beyond the corresponding position on the inner wall of end of the mouth of pipe of the quartz ampoule of the sealing ring.
There is spacing between the thermal insulation layer of the tubulose and the quartz ampoule.
The spacing is 2mm to 4mm.
The thermal insulation layer of the tubulose is made of stainless steel, and the inner surface of the thermal insulation layer for the tubulose being made of stainless steel is
Minute surface.
The interior end opening of the thermal insulation layer of the tubulose extends beyond the corresponding mouth of pipe in the quartz ampoule of the sealing ring
Inner wall of end on position 30mm.
Also include mounting flange, First Transition flange and the second excessive flange, the mounting flange, the First Transition method
On the end outer wall for the mouth of pipe that blue and described second excessive flange is sheathed on the quartz ampoule from the inside to the outside successively, the sealing ring
It is clipped between the First Transition flange and the second excessive flange.
The outer end opening of the thermal insulation layer of the tubulose is fixed on the described second excessive flange.
Cooling water channel, and the First Transition are provided with the First Transition flange, the second excessive flange
The cooling water inlet and coolant outlet connected with the cooling water channel is provided with flange, the second excessive flange.
The sealing ring is viton seal ring.
The utility model proposes low pressure diffusion furnace fire door heat insulation structural by the way that the thermal insulation layer of tubulose is arranged at into the stone
In the end of the mouth of pipe of the English pipe and axis of the thermal insulation layer of the tubulose overlaps with the axis of the quartz ampoule, the tubulose
The outer end opening of thermal insulation layer extend the mouth of pipe of the quartz ampoule, the interior end opening of the thermal insulation layer of the tubulose extends beyond
The corresponding position on the inner wall of end of the mouth of pipe of the quartz ampoule of the sealing ring.So have largely when input and output material is door opened
When heat energy overflows out of quartz ampoule, the thermal insulation layer of tubulose plays isolation and guide effect well, high temperature heat from tubulose every
Thermosphere sheds, and avoids high temperature heat and directly affects sealing ring, extends the service life of sealing ring；And due to sealing ring
Service life is grown, and sealing ring is changed once by original January, becomes half a year replacing once, improves the production effect of equipment
Rate.
Brief description of the drawings
Fig. 1 is the schematic diagram of the low pressure diffusion furnace fire door heat insulation structural in the utility model embodiment.
Fig. 2 is the sectional view of the low pressure diffusion furnace fire door heat insulation structural in the utility model embodiment.
Embodiment
Such as Fig. 1 and Fig. 2, the low pressure diffusion furnace fire door heat insulation structural in the utility model embodiment, including mounting flange 1,
First Transition flange 2, the second excessive flange 3, quartz ampoule 4 and sealing ring 5, quartz ampoule 4 have two mouths of pipe, the peace of two mouths of pipe
Assembling structure is identical, and mounting flange 1,2 and second excessive flange 3 of First Transition flange are sheathed on quartz ampoule 4 from the inside to the outside successively
On the end outer wall of the mouth of pipe, the mouth of pipe of quartz ampoule 4 is against on the second excessive flange 3.Mounting flange 1 is fixed by screws in low pressure
In the frame of diffusion furnace, First Transition flange 2 is fixed by screws on mounting flange 1, and the second excessive flange 3 is consolidated by screw
It is scheduled on First Transition flange 2, fire door 10 is covered on the second excessive flange 3.Sealing ring 5 is sheathed on the mouth of pipe of quartz ampoule 4
On the outer wall of end, and sealing ring 5 is clipped between 2 and second excessive flange 3 of First Transition flange.
The low pressure diffusion furnace fire door heat insulation structural also includes the thermal insulation layer 6 of tubulose, and the thermal insulation layer 6 of tubulose uses stainless steel
Into, and the inner surface of the thermal insulation layer for the tubulose being made of stainless steel is minute surface.The thermal insulation layer 6 of tubulose is arranged at the pipe of quartz ampoule 4
Mouthful end in and the axis of the thermal insulation layer 6 of tubulose overlapped with the axis of quartz ampoule 4, the outer end of the thermal insulation layer 6 of tubulose is opened
Mouth extends the mouth of pipe of quartz ampoule 4, and the outer end opening of the thermal insulation layer 6 of the tubulose is fixed on the second excessive flange 3.Tubulose every
The interior end opening of thermosphere 6 extends beyond the corresponding position 30mm on the inner wall of end of the mouth of pipe of quartz ampoule 4 of sealing ring.When entering
Discharging door is opened when having a large amount of heat energy to be overflowed out of quartz ampoule, and the thermal insulation layer of tubulose plays isolation and guide effect well,
High temperature heat sheds from the thermal insulation layer of tubulose, avoids high temperature heat and directly affects sealing ring, and extend sealing ring uses the longevity
Life.And because the service life of sealing ring is grown, sealing ring is changed once by original January, become half a year replacing one
It is secondary, improve the production efficiency of equipment.
There is spacing, spacing is 2mm to 4mm between the thermal insulation layer 6 and quartz ampoule 4 of tubulose.Because the thermal insulation layer 6 of tubulose is adopted
It is made of stainless steel, stainless steel can be expanded when heated, therefore, have spacing between the thermal insulation layer and quartz ampoule of tubulose, can be with
Avoid the thermal insulation layer of tubulose well causes quartzy tracheal rupture in expanded by heating because extruding quartz ampoule.
In order to further reduce the environment temperature of sealing ring, it is provided with First Transition flange 2, the second excessive flange 3
The cooling water connected with cooling water channel 7 is provided with cooling water channel 7, and First Transition flange 2, the second excessive flange 3 to enter
Mouth 8 and coolant outlet 9, cooling water channel 7 are set in First Transition flange 2, the second excessive flange 3 around quartz ampoule 4.
Sealing ring 5 can be fluorine-containing rubber sealing ring or FFKM using the good viton seal ring of heat resistance
Sealing ring, and consider preferred fluorine-containing rubber sealing ring for equipment economy.
Only to illustrate design of the present utility model, one of ordinary skill in the art's specific embodiment above exists
Various deformation and change can be made under design of the present utility model, these deformations and change are included in guarantor of the present utility model
Within the scope of shield.
Claims (9)
1. a kind of low pressure diffusion furnace fire door heat insulation structural, including quartz ampoule and sealing ring, the sealing ring are sheathed on the quartz
On the end outer wall of the mouth of pipe of pipe, it is characterised in that the also thermal insulation layer including tubulose, the thermal insulation layer of the tubulose are arranged at described
In the end of the mouth of pipe of the quartz ampoule and axis of the thermal insulation layer of the tubulose overlaps with the axis of the quartz ampoule, the pipe
The outer end opening of the thermal insulation layer of shape extends the mouth of pipe of the quartz ampoule, and the interior end opening of the thermal insulation layer of the tubulose extends to super
Cross the corresponding position on the inner wall of end of the mouth of pipe of the quartz ampoule of the sealing ring.
2. low pressure diffusion furnace fire door heat insulation structural according to claim 1, it is characterised in that the thermal insulation layer of the tubulose with
There is spacing between the quartz ampoule.
3. low pressure diffusion furnace fire door heat insulation structural according to claim 2, it is characterised in that the spacing be 2mm extremely
4mm。
4. the low pressure diffusion furnace fire door heat insulation structural according to claim 1 or 3, it is characterised in that the tubulose it is heat-insulated
Layer is made of stainless steel, and the inner surface of the thermal insulation layer for the tubulose being made of stainless steel is minute surface.
5. the low pressure diffusion furnace fire door heat insulation structural according to claim 1 or 3, it is characterised in that the tubulose it is heat-insulated
The interior end opening of layer extends beyond the corresponding position 30mm on the inner wall of end of the mouth of pipe of the quartz ampoule of the sealing ring.
6. low pressure diffusion furnace fire door heat insulation structural according to claim 1, it is characterised in that also including mounting flange,
One counter flange and the second excessive flange, the mounting flange, the First Transition flange and the second excessive flange are successively
It is sheathed on from the inside to the outside on the end outer wall of the mouth of pipe of the quartz ampoule, the sealing ring is clipped in the First Transition flange and institute
State between the second excessive flange.
7. low pressure diffusion furnace fire door heat insulation structural according to claim 6, it is characterised in that the thermal insulation layer of the tubulose
Outer end opening is fixed on the described second excessive flange.
8. low pressure diffusion furnace fire door heat insulation structural according to claim 6, it is characterised in that the First Transition flange,
It is provided with the second excessive flange on cooling water channel, and the First Transition flange, the second excessive flange
It is provided with the cooling water inlet and coolant outlet connected with the cooling water channel.
9. low pressure diffusion furnace fire door heat insulation structural according to claim 1, it is characterised in that the sealing ring is fluorubber
Sealing ring.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720600957.9U CN207038544U (en) | 2017-05-26 | 2017-05-26 | A kind of low pressure diffusion furnace fire door heat insulation structural |
| PCT/CN2017/098533 WO2018214306A1 (en) | 2017-05-26 | 2017-08-22 | Furnace mouth heat insulation structure for low-pressure diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720600957.9U CN207038544U (en) | 2017-05-26 | 2017-05-26 | A kind of low pressure diffusion furnace fire door heat insulation structural |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207038544U true CN207038544U (en) | 2018-02-23 |
Family
ID=61470082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720600957.9U Active CN207038544U (en) | 2017-05-26 | 2017-05-26 | A kind of low pressure diffusion furnace fire door heat insulation structural |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN207038544U (en) |
| WO (1) | WO2018214306A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110528084A (en) * | 2018-12-03 | 2019-12-03 | 北京北方华创微电子装备有限公司 | The sealing system and encapsulating method of low pressure diffusion furnace |
| CN110846639A (en) * | 2019-11-27 | 2020-02-28 | 通威太阳能(眉山)有限公司 | Coating film high-temperature equipment capable of preventing sealing ring from aging |
| CN112962140A (en) * | 2021-02-01 | 2021-06-15 | 中国电子科技集团公司第四十八研究所 | Silicon carbide epitaxial furnace reaction chamber |
| CN113357927A (en) * | 2021-07-09 | 2021-09-07 | 普乐新能源（蚌埠）有限公司 | Quartz tube sealing device for high-temperature heating furnace |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63285926A (en) * | 1987-05-18 | 1988-11-22 | Toshiba Corp | Semiconductor diffusion furnace |
| US5252062A (en) * | 1992-10-15 | 1993-10-12 | International Business Machines Corporation | Thermal processing furnace |
| KR20060036849A (en) * | 2004-10-26 | 2006-05-02 | 삼성전자주식회사 | Teflon ring of furnace apparatus |
| CN203947187U (en) * | 2014-06-10 | 2014-11-19 | 中国电子科技集团公司第四十八研究所 | A kind of tightness system of the diffusion furnace fire door that reduces pressure |
| CN204874828U (en) * | 2015-08-04 | 2015-12-16 | 深圳市捷佳伟创新能源装备股份有限公司 | Double -deck thermal -insulated connection structure of quartz capsule |
| CN205011866U (en) * | 2015-08-31 | 2016-02-03 | 深圳丰盛装备股份有限公司 | Low pressure diffusion furnace |
| CN205035499U (en) * | 2015-09-21 | 2016-02-17 | 深圳市捷佳伟创新能源装备股份有限公司 | Negative pressure is quartz capsule for diffusion furnace |
| CN105543976B (en) * | 2015-12-14 | 2018-07-24 | 中国电子科技集团公司第四十八研究所 | A kind of decompression diffusion furnace fire door cooling sealing device |
-
2017
- 2017-05-26 CN CN201720600957.9U patent/CN207038544U/en active Active
- 2017-08-22 WO PCT/CN2017/098533 patent/WO2018214306A1/en active Application Filing
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110528084A (en) * | 2018-12-03 | 2019-12-03 | 北京北方华创微电子装备有限公司 | The sealing system and encapsulating method of low pressure diffusion furnace |
| CN110846639A (en) * | 2019-11-27 | 2020-02-28 | 通威太阳能(眉山)有限公司 | Coating film high-temperature equipment capable of preventing sealing ring from aging |
| CN112962140A (en) * | 2021-02-01 | 2021-06-15 | 中国电子科技集团公司第四十八研究所 | Silicon carbide epitaxial furnace reaction chamber |
| CN113357927A (en) * | 2021-07-09 | 2021-09-07 | 普乐新能源（蚌埠）有限公司 | Quartz tube sealing device for high-temperature heating furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018214306A1 (en) | 2018-11-29 |
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