CN105316759A - Coated heat shield having internal water cooling and used for single crystal furnace - Google Patents
Coated heat shield having internal water cooling and used for single crystal furnace Download PDFInfo
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- CN105316759A CN105316759A CN201410311347.8A CN201410311347A CN105316759A CN 105316759 A CN105316759 A CN 105316759A CN 201410311347 A CN201410311347 A CN 201410311347A CN 105316759 A CN105316759 A CN 105316759A
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- heat shield
- shielding
- internal
- insulation layer
- thermal insulation
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Abstract
The invention discloses a coated heat shield having internal water cooling and used for single crystal furnaces. The coated heat shield includes an outer heat shield, an inner heat shield and a heat preservation layer. The outer heat shield, the inner heat shield and the heat preservation layer are arranged uniformly with a central axis of the coated heat shield as center. The coated heat shield is provided with the outer heat shield, the heat preservation layer and the inner heat shield from exterior to exterior. A cooling pipe is disposed in the center position of the inner heat shield and penetrates the whole heat preservation layer. A cooling water pipe inlet and a cooling water pipe outlet are respectively disposed at the two sides of the top of the coated heat shield. The coated heat shield used for the single crystal furnace is simple in operation, is convenient to use and has good temperature control effects.
Description
Technical field
The present invention relates to single crystal growing furnace heat shield arrangement field, particularly relate to a kind of with internal water cooling coating thermal shielding for monocrystal furnace.
Background technology
At present, along with the development of science and technology, the application of single crystal growing furnace heat shielding gets more and more, existing single crystal growing furnace heat shielding mainly contains internal heat shield, the thermal insulation layer of outer heat shielding and centre is formed, be conducive to the release of silicon single crystal rod heat like this, improve its growth efficiency, but traditional stove heat shielding can not active heat removal, makes the growth of silicon single crystal be in very passive state.
Summary of the invention
In order to overcome the defect of above-mentioned prior art, the object of this invention is to provide a kind of with internal water cooling coating thermal shielding for monocrystal furnace.
The present invention takes following technical scheme to realize: a kind of with internal water cooling coating thermal shielding for monocrystal furnace, it comprises outer heat shielding, internal heat shield and thermal insulation layer, and described outer heat shielding, internal heat shield and thermal insulation layer are evenly arranged centered by stove heat shielding central shaft; Described stove heat shielding ecto-entad is provided with outer heat shielding, thermal insulation layer and internal heat shield; The central position of described internal heat shield is provided with cooling duct; Described cooling duct runs through whole thermal insulation layer and is respectively equipped with water-cooled tube entrance and water-cooled tube outlet at top two side position of stove heat shielding; Described internal heat shield and outer heat shielding all adopt static pressure graphite to make; The thermal insulation layer material of described coating thermal shielding for monocrystal furnace is graphite soft felt.
The present invention has following beneficial effect in sum: coating thermal shielding for monocrystal furnace of the present invention has the advantages such as simple to operate, easy to use and temperature control is effective, and set water-cooled tube effectively can add the heat radiation of macrocrystal, improves the speed of growth of crystal; Described thermal insulation layer can reduce blow-on power consumption further, provides cost savings.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Wherein: 1, internal heat shield layer; 2, outer heat shielding layer; 3, insulating liner; 4, cooling water pipeline; 5, water-cooled tube entrance; 6, water-cooled tube outlet.
Embodiment
As shown in Figure 1, a kind of with internal water cooling coating thermal shielding for monocrystal furnace, it comprises outer heat shielding, internal heat shield and thermal insulation layer, and described outer heat shielding, internal heat shield and thermal insulation layer are evenly arranged centered by stove heat shielding central shaft; Described stove heat shielding ecto-entad is provided with outer heat shielding, thermal insulation layer and internal heat shield; The central position of described internal heat shield is provided with cooling duct; Described cooling duct runs through whole thermal insulation layer and is respectively equipped with water-cooled tube entrance and water-cooled tube outlet at top two side position of stove heat shielding; Described internal heat shield and outer heat shielding all adopt static pressure graphite to make; The thermal insulation layer material of described coating thermal shielding for monocrystal furnace is graphite soft felt.
The above is the embodiment of the present invention, therefore all equivalences done according to structure, feature and the principle described in the present patent application scope change or modify, and are included in patent claim of the present invention.
Claims (3)
1. with an internal water cooling coating thermal shielding for monocrystal furnace, it comprises outer heat shielding, internal heat shield and thermal insulation layer, it is characterized in that: described outer heat shielding, internal heat shield and thermal insulation layer are evenly arranged centered by stove heat shielding central shaft; Described stove heat shielding ecto-entad is provided with outer heat shielding, thermal insulation layer and internal heat shield; The central position of described internal heat shield is provided with cooling duct; Described cooling duct runs through whole thermal insulation layer and is respectively equipped with water-cooled tube entrance and water-cooled tube outlet at top two side position of stove heat shielding.
2. one according to claim 1 is with internal water cooling coating thermal shielding for monocrystal furnace, it is characterized in that: described internal heat shield and outer heat shielding all adopt static pressure graphite to make.
3. one according to claim 1 is with internal water cooling coating thermal shielding for monocrystal furnace, it is characterized in that: the thermal insulation layer material of described coating thermal shielding for monocrystal furnace is graphite soft felt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311347.8A CN105316759A (en) | 2014-07-02 | 2014-07-02 | Coated heat shield having internal water cooling and used for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410311347.8A CN105316759A (en) | 2014-07-02 | 2014-07-02 | Coated heat shield having internal water cooling and used for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105316759A true CN105316759A (en) | 2016-02-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410311347.8A Pending CN105316759A (en) | 2014-07-02 | 2014-07-02 | Coated heat shield having internal water cooling and used for single crystal furnace |
Country Status (1)
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| CN (1) | CN105316759A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106319621A (en) * | 2016-09-22 | 2017-01-11 | 东莞市联洲知识产权运营管理有限公司 | Large-size czochralski silicon single crystal growth method |
| CN107523869A (en) * | 2017-09-21 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace can lift water cooling heat shield arrangement |
| CN108950678A (en) * | 2017-05-19 | 2018-12-07 | 上海新昇半导体科技有限公司 | A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket |
| CN110904498A (en) * | 2019-12-18 | 2020-03-24 | 西安奕斯伟硅片技术有限公司 | Guide cylinder for crystal pulling furnace and crystal pulling furnace |
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| CN201506845U (en) * | 2009-10-16 | 2010-06-16 | 常州天合光能有限公司 | Heat shield for single crystal furnace |
| CN201785546U (en) * | 2010-09-14 | 2011-04-06 | 安徽中科太阳能有限公司 | Heat shield for single crystal furnace |
| CN102102219A (en) * | 2011-03-16 | 2011-06-22 | 常州天合光能有限公司 | Cooling device capable of increasing growth rate of single crystal furnace |
| CN201901722U (en) * | 2010-12-11 | 2011-07-20 | 江阴市华英光伏科技有限公司 | Heat shield for straight-pulling single-crystal furnace |
| WO2011160293A1 (en) * | 2010-06-23 | 2011-12-29 | 常州天合光能有限公司 | Efficient heat shield for silicon single crystal furnace |
| CN202246987U (en) * | 2011-07-01 | 2012-05-30 | 江苏大学 | Czochralski monocrystalline furnace heat shield with internal water cooling |
| CN103451721A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Single crystal growth furnace with water-cooling heat shield |
| CN103710742A (en) * | 2013-12-30 | 2014-04-09 | 上海涌真机械有限公司 | Single crystal furnace capable of improving czochralski-method single crystal growth speed |
-
2014
- 2014-07-02 CN CN201410311347.8A patent/CN105316759A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5316742A (en) * | 1991-06-24 | 1994-05-31 | Komatsu Electronic Metals Co., Ltd. | Single crystal pulling apparatus |
| WO2000050671A1 (en) * | 1999-02-26 | 2000-08-31 | Memc Electronic Materials, Inc. | Heat shield assembly for crystal puller |
| JP2001270798A (en) * | 2000-03-28 | 2001-10-02 | Wacker Nsce Corp | Apparatus for producing silicon single crystal |
| CN1608147A (en) * | 2001-03-23 | 2005-04-20 | Memc电子材料有限公司 | Heat shield assembly for crystal puller |
| CN201506845U (en) * | 2009-10-16 | 2010-06-16 | 常州天合光能有限公司 | Heat shield for single crystal furnace |
| WO2011160293A1 (en) * | 2010-06-23 | 2011-12-29 | 常州天合光能有限公司 | Efficient heat shield for silicon single crystal furnace |
| CN201785546U (en) * | 2010-09-14 | 2011-04-06 | 安徽中科太阳能有限公司 | Heat shield for single crystal furnace |
| CN201901722U (en) * | 2010-12-11 | 2011-07-20 | 江阴市华英光伏科技有限公司 | Heat shield for straight-pulling single-crystal furnace |
| CN102102219A (en) * | 2011-03-16 | 2011-06-22 | 常州天合光能有限公司 | Cooling device capable of increasing growth rate of single crystal furnace |
| CN202246987U (en) * | 2011-07-01 | 2012-05-30 | 江苏大学 | Czochralski monocrystalline furnace heat shield with internal water cooling |
| CN103451721A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Single crystal growth furnace with water-cooling heat shield |
| CN103710742A (en) * | 2013-12-30 | 2014-04-09 | 上海涌真机械有限公司 | Single crystal furnace capable of improving czochralski-method single crystal growth speed |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106319621A (en) * | 2016-09-22 | 2017-01-11 | 东莞市联洲知识产权运营管理有限公司 | Large-size czochralski silicon single crystal growth method |
| CN108950678A (en) * | 2017-05-19 | 2018-12-07 | 上海新昇半导体科技有限公司 | A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket |
| CN107523869A (en) * | 2017-09-21 | 2017-12-29 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace can lift water cooling heat shield arrangement |
| CN107523869B (en) * | 2017-09-21 | 2024-03-05 | 浙江晶盛机电股份有限公司 | Single crystal furnace device capable of lifting water-cooling heat shield |
| CN110904498A (en) * | 2019-12-18 | 2020-03-24 | 西安奕斯伟硅片技术有限公司 | Guide cylinder for crystal pulling furnace and crystal pulling furnace |
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| PB01 | Publication | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160210 |