CN108950678A - A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket - Google Patents
A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket Download PDFInfo
- Publication number
- CN108950678A CN108950678A CN201710357457.1A CN201710357457A CN108950678A CN 108950678 A CN108950678 A CN 108950678A CN 201710357457 A CN201710357457 A CN 201710357457A CN 108950678 A CN108950678 A CN 108950678A
- Authority
- CN
- China
- Prior art keywords
- water
- cooled jacket
- heat shielding
- shielding component
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides a kind of heat shielding component with water-cooled jacket and single crystal pulling furnace thermal field structure, and the heat shielding component with water-cooled jacket includes heat shielding, and positioned at the water-cooled jacket of the heat shielding inner wall surface.It is big, at high cost to solve the problems, such as to carry out difficulty of processing when large area high temperature coating using the prior art for the heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket through the invention.
Description
Technical field
The invention belongs to semiconductor equipment manufacturing fields, more particularly to a kind of heat shielding component and monocrystalline with water-cooled jacket
Lifting furnace thermal field structure.
Background technique
With the development of modern crystal growing technology, the technology for preparing monocrystalline silicon using vertical pulling method is constantly to higher quality and bigger
Develop in size, while in order to meet market demands, under the premise of guaranteeing quality and size, it is also necessary to constantly reduce cost；
It is thus proposed that the key technology of two modern thermal fields: heat shielding and water-cooled jacket, reduce from two in terms of respectively long crystalline substance at
This.Heat shielding improves the thermal insulation property on thermal field top by the way of filling thermal insulation material, reduces long brilliant power consumption；And water-cooled jacket then leads to
The temperature gradient for increasing crystal block section is crossed to improve pulling rate to improve production efficiency.Moreover, the presence pair of heat shielding and water-cooled jacket
It is particularly important in preparing for large size single crystal silicon.
Thermal field structure most widely used at present is as shown in Figure 1, heat shielding 13 is located at 12 top of crucible and protects with crucible liquid level
Certain distance is held, and water-cooled jacket 14 is then fixed at the top of bell；During actual (tube) length crystalline substance, monocrystalline silicon is by inside water-cooled jacket 14
It is continuous cooling to reach target crystal quality.
It is more demanding to its surface refractory since it is used under high temperature environment for a long time for water-cooled jacket, so
Existing water-cooled jacket generally uses special material to make and is aided with high temperature coating；But the plating of large area high temperature is carried out using the prior art
Layer, difficulty of processing is big, at high cost.
In consideration of it, it is necessary to design a kind of new heat shielding component with water-cooled jacket and single crystal pulling furnace thermal field structure to
Solve above-mentioned technical problem.
Summary of the invention
In view of the foregoing deficiencies of prior art, the heat shielding group with water-cooled jacket that the purpose of the present invention is to provide a kind of
Part and single crystal pulling furnace thermal field structure, when for solving to carry out large area high temperature coating using the prior art difficulty of processing it is big, at
This high problem.
In order to achieve the above objects and other related objects, the present invention provides a kind of heat shielding component with water-cooled jacket, described
Heat shielding component with water-cooled jacket includes heat shielding, and positioned at the water-cooled jacket of the heat shielding inner wall surface.
Preferably, the length of the water-cooled jacket is 200~800mm.
Preferably, the water-cooled jacket with a thickness of 10~300mm.
Preferably, the radial section of the heat shielding is circular ring shape, and the radial section of the water-cooled jacket is circular ring shape.
Preferably, the water-cooled jacket includes water-cooled jacket ontology, and is plated positioned at the high temperature resistant of the water-cooled jacket body surface
Layer.
Preferably, the material of the water-cooled jacket ontology is in refractory metal material, including silver, nickel, molybdenum, tungsten or its alloy
One kind.
Preferably, the heat shielding includes graphite heat shielding.
The present invention also provides a kind of single crystal pulling furnace thermal field structure, the single crystal pulling furnace thermal field structure includes:
Furnace body；
Positioned at the intracorporal crucible of the furnace；And
The heat shielding component as described in any one of the above embodiments with water-cooled jacket above the crucible.
Preferably, the single crystal pulling furnace thermal field structure further includes the primary heater positioned at the crucible lateral surface, and
Positioned at the bottom heater of the crucible bottom.
As described above, the heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket of the invention, has with following
Beneficial effect:
1. the heat shielding component of the present invention with water-cooled jacket realizes benefit by the way that water cooling is set on heat shielding inner wall surface
Increase the temperature gradient of thermal field with the lesser water-cooled jacket of area, to improve production efficiency by improving pulling rate.
2. the heat shielding component of the present invention with water-cooled jacket reduces the difficulty of processing of water-cooled jacket since area is smaller,
Manufacturing cost is reduced simultaneously.
3. single crystal pulling furnace thermal field structure of the present invention has more due to eliminating original large area water-cooled jacket
More adjustment spaces grows the needs of crystalline substance is to thermal field to meet.
Detailed description of the invention
Fig. 1 is shown as the schematic diagram of existing single crystal pulling furnace thermal field structure.
Fig. 2 is shown as the structural schematic diagram of the heat shielding component of the present invention with water-cooled jacket.
Fig. 3 is shown as the schematic diagram of single crystal pulling furnace thermal field structure of the present invention.
Component label instructions
11 furnace bodies
12 crucibles
13 heat shieldings
14 water-cooled jackets
15 have the heat shielding component of water-cooled jacket
151 heat shieldings
152 water-cooled jackets
1521 water-cooled jacket ontologies
1522 high temperature resistant coating
16 insulation covers
Specific embodiment
Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book is understood other advantages and efficacy of the present invention easily.
Fig. 2 is please referred to Fig. 3.It should be clear that this specification structure depicted in this specification institute accompanying drawings, ratio, size etc., only to
Cooperate the revealed content of specification, so that those skilled in the art understands and reads, being not intended to limit the invention can be real
The qualifications applied, therefore do not have technical essential meaning, the tune of the modification of any structure, the change of proportionate relationship or size
It is whole, in the case where not influencing the effect of present invention can be generated and the purpose that can reach, it should all still fall in disclosed skill
Art content obtains in the range of capable of covering.Meanwhile in this specification it is cited as "upper", "lower", "left", "right", " centre " and
The term of " one " etc. is merely convenient to being illustrated for narration, rather than to limit the scope of the invention, relativeness
It is altered or modified, under the content of no substantial changes in technology, when being also considered as the enforceable scope of the present invention.
Embodiment one
As shown in Fig. 2, the present embodiment provides a kind of heat shielding component 15 with water-cooled jacket, the heat shielding with water-cooled jacket
Component 15 includes heat shielding 151, and the water-cooled jacket 152 positioned at 151 inner wall surface of heat shielding.
Specifically, the heat shielding 151 includes but is not limited to graphite heat shielding.
Specifically, the shape of the water-cooled jacket 152 is identical as the shape of the heat shielding 151.
Preferably, in the present embodiment, the heat shielding 151 includes horizontal part, the first inclination connecting with the horizontal part
Portion, and the second rake being connect with first rake.The water-cooled jacket 152 then includes being located at the horizontal part inner wall table
The water-cooled jacket horizontal part in face, positioned at the first rake inner wall surface and the water-cooled jacket that is connect with the water-cooled jacket horizontal part
First rake, and positioned at the second rake inner wall surface and the water-cooled jacket that is connect with first rake of water-cooled jacket
Second rake.Certainly, in other embodiments, the heat shielding and water-cooled jacket can also be other shapes.
Preferably, the length of the water-cooled jacket 152 is 200~800mm.
It is further preferred that in the present embodiment, the length of the water-cooled jacket 152 is 500mm；Certainly, in other implementations
In example, the length of the water-cooled jacket 152 can also be 200mm, 300mm, 400mm, 600mm, 700mm or 800mm etc..
Preferably, the water-cooled jacket 152 with a thickness of 10~300mm.
It is further preferred that in the present embodiment, the water-cooled jacket 152 with a thickness of 160mm；Certainly, in other implementations
In example, the thickness of the water-cooled jacket 152 can also be 10mm, 65mm, 140mm, 185mm, 220mm, 250mm or 300mm etc..
It should be noted that in the present embodiment, the water-cooled jacket is the water-cooled jacket of uniform thickness, i.e., water-cooled jacket is each
Partial thickness is identical；Certainly, in other embodiments, the water-cooled jacket may be the water-cooled jacket of non-uniform thickness, i.e. water
The thickness of the various pieces of cold set is different.
Specifically, the radial section of the heat shielding 151 is circular ring shape, the radial section of the water-cooled jacket 152 is also annulus
Shape.
Specifically, as shown in Fig. 2, the water-cooled jacket 152 include water-cooled jacket ontology 1521, and be located at the water-cooled jacket sheet
The high temperature resistant coating 1522 on 1521 surface of body.
Preferably, the material of the water-cooled jacket ontology 1521 be refractory metal material, including but not limited to silver, nickel, molybdenum,
One of tungsten silver alloy, nickel alloy, molybdenum alloy or tungsten alloy.
It should be noted that technique system of the high temperature resistant coating 1522 using existing any achievable high temperature coating
Make, and since the area of the high temperature resistant coating 1522 is smaller, is not only easy to realize using existing high temperature plating process, and
Processing cost is lower.
Embodiment two
As shown in figure 3, the present embodiment provides a kind of single crystal pulling furnace thermal field structure, the single crystal pulling furnace thermal field structure packet
It includes:
Furnace body 11；
Crucible 12 in the furnace body 11；And
The heat shielding component 15 with water-cooled jacket as described in embodiment one above the crucible 12.
Specifically, the crucible 12 includes graphite crucible, and the silica crucible in the graphite crucible.
It should be noted that the graphite crucible is fixed on above the bottom of the furnace body 11 by supporter, wherein institute
Stating supporter includes the crucible pressure pin for being fixed on 11 bottom of furnace body, and is fixed on the crucible pallet above the crucible pressure pin；
By the way that the crucible 12 to be fixed in the crucible pallet, the crucible 12 is mounted on the bottom of the furnace body 11 by realization
Side.
Specifically, the heat shielding component 15 with water-cooled jacket includes heat shielding 151, and it is located at the 151 inner wall table of heat shielding
The water-cooled jacket 152 in face
It should be noted that the upper of furnace body is equipped with insulation cover 16, the water-cooled jacket 152 is bonded the heat shielding 151
Afterwards, it is fixed on the insulation cover 16, then the insulation cover 16 is fixed on the furnace body 11 by pressure ring, realize institute
State the fixation of the heat shielding component with water-cooled jacket, wherein pressure ring is not shown.
Specifically, the single crystal pulling furnace thermal field structure further includes the primary heater positioned at 12 lateral surface of crucible, with
And the bottom heater positioned at the crucible bottom.
Preferably, the primary heater and the bottom heater are graphite heater.
It should be noted that the bottom of the furnace body 11 is provided with graphite electrode, the primary heater and bottom heater
It is fixed on by electrode bolts on the graphite electrode of the bottom of furnace body, and by graphite electrode to the primary heater and bottom
Heater conveys electric current, realizes heating.
Specifically, the interior side-wall surface of the furnace body 11 is additionally provided with insulation cover, the insulation cover includes heat-preservation cylinder, and packet
Wrap up in the Multi-layer graphite carbon felt of the heat-preservation cylinder；By the way that the number of plies of different graphite carbon felts is arranged on heat-preservation cylinder surface, by insulation cover
It is divided into insulation cover, middle insulation cover and lower insulation cover, to make in the heat preservation for reinforcing crucible portion, crucible top and crucible bottom
With, reduce thermal loss while, form different temperature gradients.
It should be noted that the number of plies of the graphite carbon felt depending on actual temperature requirements, i.e., the described furnace is intracorporal
Temperature requirement is higher, and the number of plies of the graphite carbon felt is more.
In conclusion the heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket of the invention, has with following
Beneficial effect:
1. the heat shielding component of the present invention with water-cooled jacket realizes benefit by the way that water cooling is set on heat shielding inner wall surface
Increase the temperature gradient of thermal field with the lesser water-cooled jacket of area, to improve production efficiency by improving pulling rate.
2. the heat shielding component of the present invention with water-cooled jacket reduces the difficulty of processing of water-cooled jacket since area is smaller,
Manufacturing cost is reduced simultaneously.
3. single crystal pulling furnace thermal field structure of the present invention has more due to eliminating original large area water-cooled jacket
More adjustment spaces grows the needs of crystalline substance is to thermal field to meet.
So the present invention effectively overcomes various shortcoming in the prior art and has high industrial utilization value.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should be covered by the claims of the present invention.
Claims (9)
1. a kind of heat shielding component with water-cooled jacket, which is characterized in that the heat shielding component with water-cooled jacket includes heat shielding, and
Positioned at the water-cooled jacket of the heat shielding inner wall surface.
2. the heat shielding component according to claim 1 with water-cooled jacket, which is characterized in that the length of the water-cooled jacket is
200~800mm.
3. the heat shielding component according to claim 1 with water-cooled jacket, which is characterized in that the water-cooled jacket with a thickness of 10
~300mm.
4. the heat shielding component according to claim 1 with water-cooled jacket, which is characterized in that the radial section of the heat shielding is
Circular ring shape, the radial section of the water-cooled jacket are circular ring shape.
5. the heat shielding component according to claim 1 with water-cooled jacket, which is characterized in that the water-cooled jacket includes water-cooled jacket
Ontology, and the high temperature resistant coating positioned at the water-cooled jacket body surface.
6. the heat shielding component according to claim 5 with water-cooled jacket, which is characterized in that the material of the water-cooled jacket ontology
For one of refractory metal material, including silver, nickel, molybdenum, tungsten, silver alloy, nickel alloy, molybdenum alloy or tungsten alloy.
7. the heat shielding component according to claim 1 with water-cooled jacket, which is characterized in that the heat shielding includes graphite thermal
Screen.
8. a kind of single crystal pulling furnace thermal field structure, which is characterized in that the single crystal pulling furnace thermal field structure includes:
Furnace body；
Positioned at the intracorporal crucible of the furnace；And
The heat shielding component as described in any one of claims 1 to 7 with water-cooled jacket above the crucible.
9. single crystal pulling furnace thermal field structure according to claim 8, which is characterized in that the single crystal pulling furnace thermal field structure
It further include the primary heater positioned at the crucible lateral surface, and the bottom heater positioned at the crucible bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710357457.1A CN108950678A (en) | 2017-05-19 | 2017-05-19 | A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710357457.1A CN108950678A (en) | 2017-05-19 | 2017-05-19 | A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket |
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| Publication Number | Publication Date |
|---|---|
| CN108950678A true CN108950678A (en) | 2018-12-07 |
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| CN201710357457.1A Pending CN108950678A (en) | 2017-05-19 | 2017-05-19 | A kind of heat shielding component and single crystal pulling furnace thermal field structure with water-cooled jacket |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0725169A1 (en) * | 1995-02-02 | 1996-08-07 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Apparatus for manufacturing a single crystal |
| CN1608147A (en) * | 2001-03-23 | 2005-04-20 | Memc电子材料有限公司 | Heat shield assembly for crystal puller |
| CN101575731A (en) * | 2009-06-22 | 2009-11-11 | 上虞晶盛机电工程有限公司 | Vertical pulling silicon single crystal growing furnace with water-cooling jacket |
| CN101838841A (en) * | 2010-02-23 | 2010-09-22 | 上海汉虹精密机械有限公司 | Single crystal furnace device |
| CN102102219A (en) * | 2011-03-16 | 2011-06-22 | 常州天合光能有限公司 | Cooling device capable of increasing growth rate of single crystal furnace |
| CN202246987U (en) * | 2011-07-01 | 2012-05-30 | 江苏大学 | Czochralski monocrystalline furnace heat shield with internal water cooling |
| JP2012101971A (en) * | 2010-11-09 | 2012-05-31 | Mitsubishi Materials Techno Corp | Apparatus for producing single crystal silicon |
| CN202643884U (en) * | 2012-02-24 | 2013-01-02 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace water-cooled sleeve structure |
| CN103451721A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Single crystal growth furnace with water-cooling heat shield |
| CN103710742A (en) * | 2013-12-30 | 2014-04-09 | 上海涌真机械有限公司 | Single crystal furnace capable of improving czochralski-method single crystal growth speed |
| CN105316759A (en) * | 2014-07-02 | 2016-02-10 | 安徽旭特电子科技有限公司 | Coated heat shield having internal water cooling and used for single crystal furnace |
| CN205839185U (en) * | 2016-07-19 | 2016-12-28 | 河北宁通电子材料有限公司 | A kind of special-shaped guide shell structure |
-
2017
- 2017-05-19 CN CN201710357457.1A patent/CN108950678A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0725169A1 (en) * | 1995-02-02 | 1996-08-07 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Apparatus for manufacturing a single crystal |
| CN1608147A (en) * | 2001-03-23 | 2005-04-20 | Memc电子材料有限公司 | Heat shield assembly for crystal puller |
| CN101575731A (en) * | 2009-06-22 | 2009-11-11 | 上虞晶盛机电工程有限公司 | Vertical pulling silicon single crystal growing furnace with water-cooling jacket |
| CN101838841A (en) * | 2010-02-23 | 2010-09-22 | 上海汉虹精密机械有限公司 | Single crystal furnace device |
| JP2012101971A (en) * | 2010-11-09 | 2012-05-31 | Mitsubishi Materials Techno Corp | Apparatus for producing single crystal silicon |
| CN102102219A (en) * | 2011-03-16 | 2011-06-22 | 常州天合光能有限公司 | Cooling device capable of increasing growth rate of single crystal furnace |
| CN202246987U (en) * | 2011-07-01 | 2012-05-30 | 江苏大学 | Czochralski monocrystalline furnace heat shield with internal water cooling |
| CN202643884U (en) * | 2012-02-24 | 2013-01-02 | 宁夏日晶新能源装备股份有限公司 | Single crystal furnace water-cooled sleeve structure |
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| CN103710742A (en) * | 2013-12-30 | 2014-04-09 | 上海涌真机械有限公司 | Single crystal furnace capable of improving czochralski-method single crystal growth speed |
| CN105316759A (en) * | 2014-07-02 | 2016-02-10 | 安徽旭特电子科技有限公司 | Coated heat shield having internal water cooling and used for single crystal furnace |
| CN205839185U (en) * | 2016-07-19 | 2016-12-28 | 河北宁通电子材料有限公司 | A kind of special-shaped guide shell structure |
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