CN206359658U - A kind of heavy duty detergent ingot furnace - Google Patents
A kind of heavy duty detergent ingot furnace Download PDFInfo
- Publication number
- CN206359658U CN206359658U CN201621287247.7U CN201621287247U CN206359658U CN 206359658 U CN206359658 U CN 206359658U CN 201621287247 U CN201621287247 U CN 201621287247U CN 206359658 U CN206359658 U CN 206359658U
- Authority
- CN
- China
- Prior art keywords
- heater
- heat exchange
- graphite
- exchange platform
- graphite shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model is related to production of polysilicon apparatus field, specifically related to a kind of heavy duty detergent ingot furnace, including the body of heater with mezzanine space, aspirating hole is provided with body of heater, stay-warm case is provided with body of heater, crucible is provided with inside stay-warm case, the graphite shield of the correspondence crucible, top heater is provided with the top of the graphite shield, it is in downwardly projecting shape in the middle part of the top heater, the graphite shield side is provided with side heater, the graphite shield bottom is provided with heat exchange platform, the heat exchange platform is in convex and the raised one side of heat exchange platform is opposite with graphite shield bottom；The stay-warm case and heat exchange platform are supported by being arranged on the graphite pillar of bottom of furnace body.The utility model to heat silicon liquid center and good heat dissipation effect, and the temperature difference diminishes in the silicon liquid horizontal direction inside crucible, and heating is more uniform, improves ingot casting efficiency.
Description
Technical field
The utility model is related to production of polysilicon apparatus field, and in particular to a kind of heavy duty detergent ingot furnace.
Background technology
At present, in polycrystalline silicon casting ingot process, because side heater is relative with silica crucible motionless, side heater is to stone
English crucible has been at heated condition, and the temperature for so allowing for the silicon liquid at silica crucible inside center is less than at crucible sidepiece
Temperature so that center silicon liquid solidifies prior to sidepiece, and the solid liquid interface obtained from is all convex, and thermograde difference is larger,
Hardly result in more horizontal solid liquid interface.Obtained silicon ingot will cut off upper end impurity, the finished product resection rate of convex silicon ingot
Compare high, so as to have impact on the yield of ingot casting.Simultaneously as being difficult to reach the laterally uniform of temperature, so very unfavorable
Grown in the homogenization of crystal.Meanwhile, the crucible bottom in polycrystalline ingot furnace is provided with flat heat exchange platform, this heat
Board, because radiating is uneven, occurs convex crystal face during long crystalline substance, and forms dislocation, and depositing contaminants have impact on polysilicon
Quality.
The content of the invention
Temperature more uniform ingot furnace in crucible inner horizontal direction when the purpose of this utility model is to provide heating, heating
Effect is good, and polysilicon quality is high.
In order to solve the above technical problems, what the purpose of this utility model was realized in：
It is provided with aspirating hole, body of heater and sets on a kind of heavy duty detergent ingot furnace, including the body of heater with mezzanine space, body of heater
Have and be provided with top at the top of the graphite shield provided with crucible, the correspondence crucible, the graphite shield inside stay-warm case, stay-warm case
It is in downwardly projecting shape in the middle part of heater, the top heater, the graphite shield side is provided with side heater, the graphite
Shield bottom is provided with heat exchange platform, and the heat exchange platform is protected in convex and the raised one side of heat exchange platform with graphite
Cover bottom opposite；The stay-warm case and heat exchange platform are supported by being arranged on the graphite pillar of bottom of furnace body.
On the basis of such scheme and it is used as the preferred scheme of such scheme：Several are provided with the graphite shield
The through hole corresponding with top heater and side heater respectively.
The beneficial effects of the utility model are：Because the concave structure in the middle part of top heater in downwardly projecting shape causes pair
Silicon liquid center heating effect is good, makes its temperature close to silicon liquid sidepiece temperature, convex solid liquid interface gradually tends to smooth solid-liquid circle
Face, improves ingot casting efficiency.The design of through hole is so that heating effect more preferably on graphite shield simultaneously, and firing rate is fast.Heat is handed over
Change platform thick middle surrounding thin structure and make it that radiating is more uniform, it is to avoid it is long it is brilliant during there is convex crystal face, improve
The quality and production efficiency of production.
Brief description of the drawings
Fig. 1 is schematic diagram of the present utility model.
Embodiment
The utility model is further illustrated with specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of heavy duty detergent ingot furnace, including the body of heater 1 with mezzanine space, pumping is provided with body of heater 1
Graphite shield 5 provided with crucible 4, the correspondence crucible, the graphite are provided with inside stay-warm case 3, stay-warm case in hole 2, body of heater
It is in downwardly projecting shape, the concave structure of top heater to be provided with the top of shield in the middle part of top heater 6, the top heater
So that it is good to silicon liquid center heating effect, make its temperature close to silicon liquid sidepiece temperature, convex solid liquid interface gradually tends to be smooth
Solid liquid interface, improves ingot casting efficiency.The graphite shield side is provided with side heater 7, the graphite shield and is provided with
Several through holes 10 corresponding with top heater and side heater respectively, accelerate heat transfer, improve the efficiency of heating.Institute
State graphite shield bottom and be provided with heat exchange platform 8, the heat exchange platform is in convex and the raised one side of heat exchange platform
Opposite with graphite shield bottom, heat exchange platform thick middle surrounding thin structure make it that radiating is more uniform, it is to avoid long brilliant mistake
Occur convex crystal face in journey, improve the quality of production；The stay-warm case and heat exchange platform are by being arranged on bottom of furnace body
Graphite pillar 9 support.
Preferred embodiment of the present utility model described in detail above.It should be appreciated that the ordinary skill people of this area
Member just can make many modifications and variations without creative work according to design of the present utility model.Therefore, all this technology necks
Technical staff passes through logic analysis, reasoning or limited reality on the basis of existing technology according to design of the present utility model in domain
Available technical scheme is tested, all should be in the protection domain being defined in the patent claims.
Claims (2)
- It is provided with 1. being provided with a kind of heavy duty detergent ingot furnace, including the body of heater with mezzanine space, body of heater in aspirating hole, body of heater Graphite shield provided with crucible, the correspondence crucible inside stay-warm case, stay-warm case, it is characterised in that：At the top of the graphite shield It is in downwardly projecting shape to be provided with the middle part of top heater, the top heater, and the graphite shield side is heated provided with sidepiece Device, the graphite shield bottom is provided with heat exchange platform, and the heat exchange platform is in convex and heat exchange platform is raised It is simultaneously opposite with graphite shield bottom；The stay-warm case and heat exchange platform are by being arranged on the graphite pillar branch of bottom of furnace body Support.
- 2. heavy duty detergent ingot furnace according to claim 1, it is characterised in that：Several points are provided with the graphite shield The not other through hole corresponding with top heater and side heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621287247.7U CN206359658U (en) | 2016-11-28 | 2016-11-28 | A kind of heavy duty detergent ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621287247.7U CN206359658U (en) | 2016-11-28 | 2016-11-28 | A kind of heavy duty detergent ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206359658U true CN206359658U (en) | 2017-07-28 |
Family
ID=59372423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621287247.7U Expired - Fee Related CN206359658U (en) | 2016-11-28 | 2016-11-28 | A kind of heavy duty detergent ingot furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206359658U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371459A (en) * | 2018-12-21 | 2019-02-22 | 内蒙古中环光伏材料有限公司 | A kind of ladder-like heater improving melt temperature gradient |
-
2016
- 2016-11-28 CN CN201621287247.7U patent/CN206359658U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371459A (en) * | 2018-12-21 | 2019-02-22 | 内蒙古中环光伏材料有限公司 | A kind of ladder-like heater improving melt temperature gradient |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170728 Termination date: 20181128 |