WO2018214306A1 - Furnace mouth heat insulation structure for low-pressure diffusion furnace - Google Patents

Furnace mouth heat insulation structure for low-pressure diffusion furnace Download PDF

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Publication number
WO2018214306A1
WO2018214306A1 PCT/CN2017/098533 CN2017098533W WO2018214306A1 WO 2018214306 A1 WO2018214306 A1 WO 2018214306A1 CN 2017098533 W CN2017098533 W CN 2017098533W WO 2018214306 A1 WO2018214306 A1 WO 2018214306A1
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Prior art keywords
quartz tube
heat insulation
flange
sealing ring
pressure diffusion
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PCT/CN2017/098533
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French (fr)
Chinese (zh)
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李致文
张勇
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深圳市捷佳伟创新能源装备股份有限公司
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Publication of WO2018214306A1 publication Critical patent/WO2018214306A1/en

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the utility model relates to the field of low-pressure diffusion furnaces, and more particularly to a heat insulation structure of a low-pressure diffusion furnace mouth.
  • the technical problem to be solved by the utility model is to provide a heat insulation structure of a low pressure diffusion furnace mouth, by providing a tubular heat insulation layer in the end of the nozzle of the quartz tube, when the high temperature heat energy overflows from the quartz tube, the tubular partition Thermal layer isolation Heat and seals, high temperature Heat is dissipated from the tubular insulation, avoiding high temperatures. Thermal energy directly affects the seals and extends the life of the seals.
  • a low-pressure diffusion furnace mouth insulation structure comprising a quartz tube and a sealing ring
  • the sealing ring is sleeved on the outer wall of the end of the nozzle of the quartz tube, and further comprises a tubular partition a thermal layer
  • the tubular insulating layer is disposed in an end of the nozzle of the quartz tube and a central axis of the tubular insulating layer coincides with a central axis of the quartz tube, the tubular insulating layer
  • the outer end opening extends out of the nozzle of the quartz tube, and the inner end opening of the tubular insulating layer extends beyond the position of the sealing ring corresponding to the inner wall of the end of the nozzle of the quartz tube.
  • the tubular insulating layer has a spacing from the quartz tube.
  • the spacing is from 2 mm to 4 mm.
  • the tubular insulating layer is made of stainless steel, and the inner surface of the tubular insulating layer made of stainless steel is a mirror surface.
  • the inner end opening of the tubular heat insulating layer extends beyond the position of the seal ring corresponding to the inner wall of the end of the nozzle of the quartz tube by 30 mm.
  • the utility model further includes a fixing flange, a first transition flange and a second excess flange, wherein the fixing flange, the first transition flange and the second excessive flange are sequentially disposed from the inner to the outer sleeve to the quartz tube The seal outer ring is sandwiched between the first transition flange and the second excess flange.
  • a cooling water channel is disposed in the first transition flange and the second excessive flange, and the first transition flange and the second excessive flange are respectively provided with cooling connected to the cooling water channel Water inlet and cooling water outlet.
  • the sealing ring is a fluoro rubber sealing ring.
  • the low-pressure diffusion furnace mouth insulation structure of the present invention is provided by placing a tubular heat insulation layer in the end of the nozzle of the quartz tube and the central axis of the tubular heat insulation layer and the middle of the quartz tube The axis overlaps, the outer end opening of the tubular insulating layer extends out of the nozzle of the quartz tube, and the inner end opening of the tubular insulating layer extends beyond the tube corresponding to the quartz tube in the sealing ring The position on the inner wall of the end of the mouth.
  • the tubular insulation layer serves as a good isolation and guiding function.
  • the high temperature heat energy is dissipated from the tubular insulation layer, avoiding high temperature.
  • the heat directly affects the sealing ring and prolongs the service life of the sealing ring.
  • the sealing ring is replaced once in the original one month, and it is replaced once every six months, which improves the production efficiency of the equipment.
  • FIG. 1 is a schematic view showing a heat insulating structure of a low pressure diffusion furnace mouth in an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view showing the heat insulating structure of the low pressure diffusion furnace mouth in the embodiment of the present invention.
  • the low-pressure diffusion furnace mouth insulation structure of the embodiment of the present invention comprises a fixed flange 1, a first transition flange 2, a second excessive flange 3, a quartz tube 4 and a sealing ring 5
  • the quartz tube 4 has two nozzles, the installation structure of the two nozzles is the same, and the fixing flange 1, the first transition flange 2 and the second excessive flange 3 are sequentially disposed from the inside to the nozzle of the quartz tube 4. On the outer wall of the end, the nozzle of the quartz tube 4 abuts against the second excess flange 3.
  • the fixing flange 1 is fixed on the frame of the low-pressure diffusion furnace by screws
  • the first transition flange 2 is fixed on the fixing flange 1 by screws
  • the second excess flange 3 is fixed on the first transition flange 2 by screws.
  • the oven door 10 is overlaid on the second excess flange 3.
  • the seal ring 5 is sleeved on the outer wall of the end of the nozzle of the quartz tube 4, and the seal ring 5 is sandwiched between the first transition flange 2 and the second transition flange 3.
  • the low pressure diffusion furnace mouth insulation structure further comprises a tubular heat insulation layer 6, the tubular heat insulation layer 6 is made of stainless steel, and the inner surface of the tubular heat insulation layer made of stainless steel is a mirror surface.
  • the tubular insulating layer 6 is disposed in the end of the nozzle of the quartz tube 4 and the central axis of the tubular insulating layer 6 coincides with the central axis of the quartz tube 4, and the outer end opening of the tubular insulating layer 6 extends out of the quartz tube At the nozzle of 4, the outer end opening of the tubular insulating layer 6 is fixed to the second excess flange 3.
  • the inner end opening of the tubular heat insulating layer 6 extends beyond the position of the sealing ring corresponding to the inner wall of the end of the nozzle of the quartz tube 4 by 30 mm.
  • the tubular insulation layer serves as a good isolation and guiding function.
  • the high temperature heat energy is dissipated from the tubular insulation layer, avoiding high temperature. Thermal energy directly affects the seal and extends the life of the seal.
  • the sealing ring was replaced once in the original month, and it was changed once every six months, which improved the production efficiency of the equipment.
  • the tubular insulating layer 6 and the quartz tube 4 have a spacing of 2 mm to 4 mm. Since the tubular heat insulating layer 6 is made of stainless steel, the stainless steel expands when heated, and therefore, the tubular insulating layer and the quartz tube have a spacing, which can well avoid the tubular insulating layer from being thermally expanded. Squeezing the quartz tube causes the quartz tube to rupture.
  • the first transition flange 2 and the second excessive flange 3 are each provided with a cooling water channel 7, and the first transition flange 2 and the second transition flange 3 are both provided with cooling and cooling.
  • a cooling water inlet 8 and a cooling water outlet 9 are connected to the water channel 7, and the cooling water channel 7 is disposed around the quartz tube 4 in the first transition flange 2 and the second excess flange 3.
  • the sealing ring 5 is made of a fluororubber sealing ring with good heat resistance, and may be a fluorine-containing rubber sealing ring or a perfluoro rubber sealing ring, and A fluorine-containing rubber seal is preferred for reasons of equipment economy.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Pressure Vessels And Lids Thereof (AREA)

Abstract

Provided is a furnace mouth heat insulation structure for a low-pressure diffusion furnace. The structure comprises a quartz tube (4) and a sealing ring (5), the sealing ring being sheathed on an outer wall of an end portion of an orifice of the quartz tube, and further comprises a tubular heat insulation layer (6), wherein the tubular heat insulation layer is arranged in the end portion of the orifice of the quartz tube, and a central axis of the tubular heat insulation layer coincides with a central axis of the quartz tube, an outer end opening of the tubular heat insulation layer extends out of the orifice of the quartz tube, and an inner end opening of the tubular heat insulation layer extends to exceed a position, corresponding the sealing ring, on an inner wall of the end portion of the orifice of the quartz tube. According to the furnace mouth heat insulation structure for a low-pressure diffusion furnace, when a charge and discharge furnace door is opened and a large amount of heat energy spills from the quartz tube, the tubular heat insulation layer achieves good functions of insulation and guiding, and the high-temperature heat energy is diffused from the tubular heat insulation layer, thus preventing the high-temperature heat energy from directly affecting the sealing ring, and prolonging the service life of the sealing ring.

Description

一种低压扩散炉炉口隔热结构Low-pressure diffusion furnace mouth insulation structure 技术领域 Technical field
本实用新型涉及低压扩散炉领域，更具体地说是涉及一种低压扩散炉炉口隔热结构。 The utility model relates to the field of low-pressure diffusion furnaces, and more particularly to a heat insulation structure of a low-pressure diffusion furnace mouth.
背景技术Background technique
随着光伏行业发展，行业内主要生产高温扩散炉的生产工艺也不断的得到改进和发展，新型低压高温扩散炉也由此产生。低压扩散相对于常压扩散最大的区别在于，其反应室内需要抽真空,因而反应腔室与炉门之间需要做密封结构。目前通常采用O型密封圈来密封，但由于反应腔内最高达1100摄氏度的工艺温度，当进出料炉门开启时有大量热能从石英管内溢出，密封圈会直接受到高温的影响，这对密封圈的使用寿命存在不小的挑战,故通常密封圈使用的寿命不足一个月，而且 密封圈频繁的更换严重影响设备的运行， 因此如何延长密封圈的使用寿命变得十分紧迫和重要。 With the development of the photovoltaic industry, the production process of the main high-temperature diffusion furnaces in the industry has been continuously improved and developed, and new low-pressure high-temperature diffusion furnaces have also been produced. The biggest difference between low pressure diffusion and atmospheric pressure diffusion is that vacuum is required in the reaction chamber, so a sealing structure is required between the reaction chamber and the furnace door. O-rings are usually used for sealing, but due to the process temperature of up to 1100 degrees Celsius in the reaction chamber, a large amount of thermal energy overflows from the quartz tube when the inlet and outlet furnace doors are opened, and the sealing ring is directly affected by high temperature. The service life of the ring is no small challenge, so the life of the seal is usually less than one month, and The frequent replacement of the seals seriously affects the operation of the equipment, so how to extend the service life of the seal becomes very urgent and important.
实用新型内容Utility model content
本实用新型要解决的技术问题是提供一种低压扩散炉炉口隔热结构，通过在石英管的管口的端部内设置管状的隔热层，当高温 热能从石英管内溢出时， 管状的隔热层隔离高温 热能与密封圈， 高温 热能从 管状的隔热层散出，避免了高温 热能直接影响密封圈，延长了密封圈的使用寿命。 The technical problem to be solved by the utility model is to provide a heat insulation structure of a low pressure diffusion furnace mouth, by providing a tubular heat insulation layer in the end of the nozzle of the quartz tube, when the high temperature heat energy overflows from the quartz tube, the tubular partition Thermal layer isolation Heat and seals, high temperature Heat is dissipated from the tubular insulation, avoiding high temperatures. Thermal energy directly affects the seals and extends the life of the seals.
本实用新型的技术方案为：一种低压扩散炉炉口隔热结构，包括石英管和密封圈，所述密封圈套设于所述石英管的管口的端部外壁上，还包括管状的隔热层，所述管状的隔热层设置于所述石英管的管口的端部内且所述管状的隔热层的中轴线与所述石英管的中轴线重合，所述管状的隔热层的外端开口延伸出所述石英管的管口，所述管状的隔热层的内端开口延伸至超过所述密封圈对应在所述石英管的管口的端部内壁上的位置。 The technical scheme of the utility model is: a low-pressure diffusion furnace mouth insulation structure, comprising a quartz tube and a sealing ring, the sealing ring is sleeved on the outer wall of the end of the nozzle of the quartz tube, and further comprises a tubular partition a thermal layer, the tubular insulating layer is disposed in an end of the nozzle of the quartz tube and a central axis of the tubular insulating layer coincides with a central axis of the quartz tube, the tubular insulating layer The outer end opening extends out of the nozzle of the quartz tube, and the inner end opening of the tubular insulating layer extends beyond the position of the sealing ring corresponding to the inner wall of the end of the nozzle of the quartz tube.
所述管状的隔热层与所述石英管之间具有间距。 The tubular insulating layer has a spacing from the quartz tube.
所述间距为2mm至4mm。 The spacing is from 2 mm to 4 mm.
所述管状的隔热层采用不锈钢制成，且由不锈钢制成的管状的隔热层的内表面为镜面。 The tubular insulating layer is made of stainless steel, and the inner surface of the tubular insulating layer made of stainless steel is a mirror surface.
所述管状的隔热层的内端开口延伸至超过所述密封圈对应在所述石英管的管口的端部内壁上的位置30mm。 The inner end opening of the tubular heat insulating layer extends beyond the position of the seal ring corresponding to the inner wall of the end of the nozzle of the quartz tube by 30 mm.
还包括固定法兰、第一过渡法兰和第二过度法兰，所述固定法兰、所述第一过渡法兰和所述第二过度法兰依次由里至外套设于所述石英管的管口的端部外壁上，所述密封圈夹在所述第一过渡法兰和所述第二过度法兰之间。 The utility model further includes a fixing flange, a first transition flange and a second excess flange, wherein the fixing flange, the first transition flange and the second excessive flange are sequentially disposed from the inner to the outer sleeve to the quartz tube The seal outer ring is sandwiched between the first transition flange and the second excess flange.
所述管状的隔热层的外端开口固定在所述第二过度法兰上。 An outer end opening of the tubular insulating layer is secured to the second excess flange.
所述第一过渡法兰、所述第二过度法兰内均设置有冷却水道，以及所述第一过渡法兰、所述第二过度法兰上均设置有与所述冷却水道连通的冷却水进口和冷却水出口。 a cooling water channel is disposed in the first transition flange and the second excessive flange, and the first transition flange and the second excessive flange are respectively provided with cooling connected to the cooling water channel Water inlet and cooling water outlet.
所述密封圈为氟橡胶密封圈。 The sealing ring is a fluoro rubber sealing ring.
本实用新型提出的低压扩散炉炉口隔热结构通过将管状的隔热层设置于所述石英管的管口的端部内且所述管状的隔热层的中轴线与所述石英管的中轴线重合，所述管状的隔热层的外端开口延伸出所述石英管的管口，所述管状的隔热层的内端开口延伸至超过所述密封圈对应在所述石英管的管口的端部内壁上的位置。这样 当进出料炉门开启有大量热能从石英管内溢出时， 管状的隔热层 起到很好的隔离和导向作用， 高温 热能从 管状的隔热层散出，避免了高温 热能直接影响密封圈，延长了密封圈的使用寿命；而且由于密封圈的使用寿命长了，密封圈由 原来的一月更换一次，变成了半年更换一次，提升了设备的生产效率。 The low-pressure diffusion furnace mouth insulation structure of the present invention is provided by placing a tubular heat insulation layer in the end of the nozzle of the quartz tube and the central axis of the tubular heat insulation layer and the middle of the quartz tube The axis overlaps, the outer end opening of the tubular insulating layer extends out of the nozzle of the quartz tube, and the inner end opening of the tubular insulating layer extends beyond the tube corresponding to the quartz tube in the sealing ring The position on the inner wall of the end of the mouth. such When the inlet and outlet furnace doors open and there is a large amount of thermal energy overflowing from the quartz tube, the tubular insulation layer serves as a good isolation and guiding function. The high temperature heat energy is dissipated from the tubular insulation layer, avoiding high temperature. The heat directly affects the sealing ring and prolongs the service life of the sealing ring. Moreover, due to the long service life of the sealing ring, the sealing ring is replaced once in the original one month, and it is replaced once every six months, which improves the production efficiency of the equipment.
附图说明 DRAWINGS
图1为本实用新型实施例中的低压扩散炉炉口隔热结构的示意图。 1 is a schematic view showing a heat insulating structure of a low pressure diffusion furnace mouth in an embodiment of the present invention.
图2为本实用新型实施例中的低压扩散炉炉口隔热结构的剖视图。 2 is a cross-sectional view showing the heat insulating structure of the low pressure diffusion furnace mouth in the embodiment of the present invention.
具体实施方式detailed description
如图1和图2，本实用新型实施例中的低压扩散炉炉口隔热结构，包括固定法兰1、第一过渡法兰2、第二过度法兰3、石英管4和密封圈5，石英管4具有两个管口，两个管口的安装结构相同，固定法兰1、第一过渡法兰2和第二过度法兰3依次由里至外套设于石英管4的管口的端部外壁上，石英管4的管口抵在第二过度法兰3上。固定法兰1通过螺钉固定在低压扩散炉的机架上，第一过渡法兰2通过螺钉固定在固定法兰1上，第二过度法兰3通过螺钉固定在第一过渡法兰2上,炉门10覆盖在第二过度法兰3上。密封圈5套设于石英管4的管口的端部外壁上，且密封圈5夹在第一过渡法兰2和第二过度法兰3之间。 1 and 2, the low-pressure diffusion furnace mouth insulation structure of the embodiment of the present invention comprises a fixed flange 1, a first transition flange 2, a second excessive flange 3, a quartz tube 4 and a sealing ring 5 The quartz tube 4 has two nozzles, the installation structure of the two nozzles is the same, and the fixing flange 1, the first transition flange 2 and the second excessive flange 3 are sequentially disposed from the inside to the nozzle of the quartz tube 4. On the outer wall of the end, the nozzle of the quartz tube 4 abuts against the second excess flange 3. The fixing flange 1 is fixed on the frame of the low-pressure diffusion furnace by screws, the first transition flange 2 is fixed on the fixing flange 1 by screws, and the second excess flange 3 is fixed on the first transition flange 2 by screws. The oven door 10 is overlaid on the second excess flange 3. The seal ring 5 is sleeved on the outer wall of the end of the nozzle of the quartz tube 4, and the seal ring 5 is sandwiched between the first transition flange 2 and the second transition flange 3.
该低压扩散炉炉口隔热结构还包括管状的隔热层6，管状的隔热层6采用不锈钢制成，且由不锈钢制成的管状的隔热层的内表面为镜面。管状的隔热层6设置于石英管4的管口的端部内且管状的隔热层6的中轴线与石英管4的中轴线重合，管状的隔热层6的外端开口延伸出石英管4的管口，该管状的隔热层6的外端开口固定在第二过度法兰3上。管状的隔热层6的内端开口延伸至超过密封圈对应在石英管4的管口的端部内壁上的位置30mm。 当进出料炉门开启有大量热能从石英管内溢出时， 管状的隔热层 起到很好的隔离和导向作用， 高温 热能从 管状的隔热层散出，避免了高温 热能直接影响密封圈，延长了密封圈的使用寿命。而且由于密封圈的使用寿命长了，密封圈由 原来的一月更换一次，变成了半年更换一次，提升了设备的生产效率。 The low pressure diffusion furnace mouth insulation structure further comprises a tubular heat insulation layer 6, the tubular heat insulation layer 6 is made of stainless steel, and the inner surface of the tubular heat insulation layer made of stainless steel is a mirror surface. The tubular insulating layer 6 is disposed in the end of the nozzle of the quartz tube 4 and the central axis of the tubular insulating layer 6 coincides with the central axis of the quartz tube 4, and the outer end opening of the tubular insulating layer 6 extends out of the quartz tube At the nozzle of 4, the outer end opening of the tubular insulating layer 6 is fixed to the second excess flange 3. The inner end opening of the tubular heat insulating layer 6 extends beyond the position of the sealing ring corresponding to the inner wall of the end of the nozzle of the quartz tube 4 by 30 mm. When the inlet and outlet furnace doors open and there is a large amount of thermal energy overflowing from the quartz tube, the tubular insulation layer serves as a good isolation and guiding function. The high temperature heat energy is dissipated from the tubular insulation layer, avoiding high temperature. Thermal energy directly affects the seal and extends the life of the seal. Moreover, due to the long service life of the sealing ring, the sealing ring was replaced once in the original month, and it was changed once every six months, which improved the production efficiency of the equipment.
管状的隔热层6与石英管4之间具有间距，间距为2mm至4mm。由于管状的隔热层6采用不锈钢制成，不锈钢在受热时会膨胀，因此，管状的隔热层与石英管之间具有间距，可以很好的避免了管状的隔热层在受热膨胀时因挤压石英管而导致石英管破裂。 The tubular insulating layer 6 and the quartz tube 4 have a spacing of 2 mm to 4 mm. Since the tubular heat insulating layer 6 is made of stainless steel, the stainless steel expands when heated, and therefore, the tubular insulating layer and the quartz tube have a spacing, which can well avoid the tubular insulating layer from being thermally expanded. Squeezing the quartz tube causes the quartz tube to rupture.
为了进一步降低密封圈的环境温度，第一过渡法兰2、第二过度法兰3内均设置有冷却水道7，以及第一过渡法兰2、第二过度法兰3上均设置有与冷却水道7连通的冷却水进口8和冷却水出口9，冷却水道7在第一过渡法兰2、第二过度法兰3内环绕石英管4设置。 In order to further reduce the ambient temperature of the sealing ring, the first transition flange 2 and the second excessive flange 3 are each provided with a cooling water channel 7, and the first transition flange 2 and the second transition flange 3 are both provided with cooling and cooling. A cooling water inlet 8 and a cooling water outlet 9 are connected to the water channel 7, and the cooling water channel 7 is disposed around the quartz tube 4 in the first transition flange 2 and the second excess flange 3.
密封圈5采用耐热性能良好的氟橡胶密封圈，可以为含氟橡胶密封圈或全氟橡胶密封圈，而 出于设备经济性考虑优选含氟橡胶密封圈。 The sealing ring 5 is made of a fluororubber sealing ring with good heat resistance, and may be a fluorine-containing rubber sealing ring or a perfluoro rubber sealing ring, and A fluorine-containing rubber seal is preferred for reasons of equipment economy.
以上的具体实施例仅用以举例说明本实用新型的构思，本领域的普通技术人员在本实用新型的构思下可以做出多种变形和变化，这些变形和变化均包括在本实用新型的保护范围之内。 The above specific embodiments are only used to exemplify the concept of the present invention, and various modifications and changes can be made by those skilled in the art in the concept of the present invention. These modifications and variations are included in the protection of the present invention. Within the scope.

Claims (9)

  1. 一种低压扩散炉炉口隔热结构，包括石英管和密封圈，所述密封圈套设于所述石英管的管口的端部外壁上，其特征在于，还包括管状的隔热层，所述管状的隔热层设置于所述石英管的管口的端部内且所述管状的隔热层的中轴线与所述石英管的中轴线重合，所述管状的隔热层的外端开口延伸出所述石英管的管口，所述管状的隔热层的内端开口延伸至超过所述密封圈对应在所述石英管的管口的端部内壁上的位置。 The low-pressure diffusion furnace mouth insulation structure comprises a quartz tube and a sealing ring, and the sealing ring is sleeved on an outer wall of the end of the nozzle of the quartz tube, and is characterized in that it further comprises a tubular heat insulation layer. a tubular insulating layer is disposed in an end of the nozzle of the quartz tube and a central axis of the tubular insulating layer coincides with a central axis of the quartz tube, and an outer end of the tubular insulating layer is open Extending out of the nozzle of the quartz tube, the inner end opening of the tubular insulating layer extends beyond the position of the sealing ring corresponding to the inner wall of the end of the nozzle of the quartz tube.
  2. 根据权利要求1所述的低压扩散炉炉口隔热结构，其特征在于，所述管状的隔热层与所述石英管之间具有间距。  The low pressure diffusion furnace mouth insulation structure according to claim 1, wherein the tubular heat insulation layer and the quartz tube have a spacing therebetween.
  3. 根据权利要求2所述的低压扩散炉炉口隔热结构，其特征在于，所述间距为2mm至4mm。  The low pressure diffusion furnace mouth insulation structure according to claim 2, wherein the pitch is 2 mm to 4 mm.
  4. 根据权利要求1或3所述的低压扩散炉炉口隔热结构，其特征在于，所述管状的隔热层采用不锈钢制成，且由不锈钢制成的管状的隔热层的内表面为镜面。 The low pressure diffusion furnace mouth insulation structure according to claim 1 or 3, wherein the tubular heat insulation layer is made of stainless steel, and the inner surface of the tubular heat insulation layer made of stainless steel is a mirror surface. .
  5. 根据权利要求1或3所述的低压扩散炉炉口隔热结构，其特征在于，所述管状的隔热层的内端开口延伸至超过所述密封圈对应在所述石英管的管口的端部内壁上的位置30mm。 The low pressure diffusion furnace mouth insulation structure according to claim 1 or 3, wherein an inner end opening of the tubular heat insulation layer extends beyond the nozzle ring corresponding to the nozzle of the quartz tube The position on the inner wall of the end is 30 mm.
  6. 根据权利要求1所述的低压扩散炉炉口隔热结构，其特征在于，还包括固定法兰、第一过渡法兰和第二过度法兰，所述固定法兰、所述第一过渡法兰和所述第二过度法兰依次由里至外套设于所述石英管的管口的端部外壁上，所述密封圈夹在所述第一过渡法兰和所述第二过度法兰之间。 The low pressure diffusion furnace mouth insulation structure according to claim 1, further comprising a fixing flange, a first transition flange and a second excess flange, the fixing flange, the first transition method And the second excess flange is sequentially disposed from the inside to the outer wall of the end of the nozzle of the quartz tube, the sealing ring being clamped between the first transition flange and the second excessive flange between.
  7. 根据权利要求6所述的低压扩散炉炉口隔热结构，其特征在于，所述管状的隔热层的外端开口固定在所述第二过度法兰上。 The low pressure diffusion furnace mouth insulation structure according to claim 6, wherein an outer end opening of the tubular heat insulation layer is fixed to the second excessive flange.
  8. 根据权利要求6所述的低压扩散炉炉口隔热结构，其特征在于，所述第一过渡法兰、所述第二过度法兰内均设置有冷却水道，以及所述第一过渡法兰、所述第二过度法兰上均设置有与所述冷却水道连通的冷却水进口和冷却水出口。 The low-pressure diffusion furnace mouth insulation structure according to claim 6, wherein the first transition flange and the second excess flange are provided with a cooling water passage, and the first transition flange And the second excess flange is provided with a cooling water inlet and a cooling water outlet connected to the cooling water channel.
  9. 根据权利要求1所述的低压扩散炉炉口隔热结构，其特征在于，所述密封圈为氟橡胶密封圈。  The low-pressure diffusion furnace mouth insulation structure according to claim 1, wherein the sealing ring is a fluororubber sealing ring.
PCT/CN2017/098533 2017-05-26 2017-08-22 Furnace mouth heat insulation structure for low-pressure diffusion furnace WO2018214306A1 (en)

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CN110528084A (en) * 2018-12-03 2019-12-03 北京北方华创微电子装备有限公司 The sealing system and encapsulating method of low pressure diffusion furnace
CN110846639A (en) * 2019-11-27 2020-02-28 通威太阳能(眉山)有限公司 Coating film high-temperature equipment capable of preventing sealing ring from aging
CN112962140A (en) * 2021-02-01 2021-06-15 中国电子科技集团公司第四十八研究所 Silicon carbide epitaxial furnace reaction chamber

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