CN113161267A - Double-layer air inlet pipe with vacuum heat insulation function in process pipe - Google Patents
Double-layer air inlet pipe with vacuum heat insulation function in process pipe Download PDFInfo
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- CN113161267A CN113161267A CN202110441490.9A CN202110441490A CN113161267A CN 113161267 A CN113161267 A CN 113161267A CN 202110441490 A CN202110441490 A CN 202110441490A CN 113161267 A CN113161267 A CN 113161267A
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- pipe
- air inlet
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- heater
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- 238000000034 method Methods 0.000 title claims abstract description 112
- 238000009413 insulation Methods 0.000 title claims abstract description 36
- 238000007789 sealing Methods 0.000 claims abstract description 28
- 238000005516 engineering process Methods 0.000 claims description 21
- 235000012431 wafers Nutrition 0.000 claims description 20
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 2
- 238000004891 communication Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 2
- 238000012423 maintenance Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004321 preservation Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 3
- 238000007596 consolidation process Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L59/00—Thermal insulation in general
- F16L59/06—Arrangements using an air layer or vacuum
- F16L59/065—Arrangements using an air layer or vacuum using vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
Abstract
The invention discloses a double-layer air inlet pipe with a vacuum heat insulation function in a process pipe, which is characterized by comprising a frame body, wherein a heater is arranged on the frame body, a process pipe is arranged on the inner side of the heater, the process pipe is arranged between the heaters and is fixedly arranged in a non-contact manner, a process pipe sealing flange is arranged at the pipe orifice of the process pipe to compress a process pipe sealing ring, and a swinging furnace door is arranged on the outer side of the pipe orifice. The invention has the advantages that the invention is fundamentally different from the traditional equipment in that the original common air inlet pipe is changed into the double-layer air inlet pipe with the vacuum heat insulation function, thereby well solving the problems that the air inlet pipe is easy to block, the air inlet pipe needs to be frequently changed, the working time of a machine table is seriously influenced, the air inlet pipe does not need to be frequently changed, the fatal influence on the productivity is caused, the equipment maintenance time is obviously reduced, the cost and the workload are effectively reduced, the large production value is obvious, and the advantage effect is obvious.
Description
Technical Field
The invention relates to the field of semiconductors and photovoltaics, in particular to a double-layer air inlet pipe with a vacuum heat insulation function in a process pipe.
Background
The air inlet pipe in the traditional process pipe is a pure circular pipe, and in the LPCVD equipment process, SIH4 gas enters the interior of the process pipe through the air inlet pipe to grow polycrystalline silicon on the surface of a wafer, namely a film is formed on the surface of the wafer, so that the problem is that the air inlet pipe is a thin pipe with a small diameter, the space in the process pipe is not occupied, and the coordination relationship among an internal wafer, a wafer boat, the process pipe, the air inlet pipe and a thermocouple pipe is influenced because the air flow is small and the air pipe cannot be too large; because the process temperature inside the process tube is 600-, the yield of the machine is influenced, the process cost is increased, and the quality of the wafer process is directly influenced if the wafer is not replaced in time.
Disclosure of Invention
The invention aims to solve the problems and designs a double-layer air inlet pipe with a vacuum heat insulation function in a process pipe.
The technical scheme of the invention is that the double-layer air inlet pipe with the vacuum heat insulation function in the process pipe comprises a frame body, wherein a heater is installed on the frame body, the process pipe is installed on the inner side of the heater, the process pipe is installed between the heaters and is fixedly installed in a non-contact mode, a process pipe sealing flange is arranged at the pipe orifice of the process pipe to compress a process pipe sealing ring, and a swinging furnace door is arranged on the outer side of the pipe orifice.
As a further explanation of the invention, a cushion block is arranged between the heater and the process tube, and the process tube is fixed in the heater through the cushion block.
As a further explanation of the present invention, one end of the process tube is provided with a tail heat insulation block, and the tail heat insulation block is fixedly installed between the heaters.
As a further explanation of the present invention, one end of the heater is provided with an opening thermal insulation soft block, the opening thermal insulation soft block is fixedly installed between the heater and the process pipe, and the opening thermal insulation soft block is arranged at a port of one end of the heater.
As a further explanation of the invention, the inner wall of the lower end of the process tube is provided with a double-layer air inlet tube, and the double-layer air inlet tube comprises an air inlet inner tube and a vacuum outer tube.
As a further explanation of the present invention, the inner gas inlet pipe is disposed inside the outer vacuum pipe, and the vacuum outer pipe is provided with inner and outer pipe plugging blocks at the end inside the process pipe.
As a further description of the present invention, the vacuum outer tube of the double-layer air inlet tube extending from the process tube to the outer portion of the heater is branched upward, and valve interfaces are provided at the ends of the vacuum outer tube and the air inlet inner tube.
As a further explanation of the invention, an air outlet pipe and a vacuum pipe are arranged from the middle position of the process pipe to the outside of the heater, and valves are arranged at the end heads of the air outlet pipe and the vacuum pipe.
As a further explanation of the present invention, a process furnace mouth flange is disposed on one side of the process tube sealing flange, the process tube sealing ring is disposed between the process tube, the process tube sealing flange and the process furnace mouth flange, the swing furnace door is disposed on one side of the process furnace mouth flange, and a furnace mouth sealing ring is disposed between the swing furnace door and the process tube furnace mouth flange.
As a further explanation of the present invention, a wafer boat is disposed inside the process tube, and wafers are fixed to the wafer boat.
The vacuum heat insulation double-layer air inlet pipe has the advantages that the original common air inlet pipe is changed into the double-layer air inlet pipe with the vacuum heat insulation function, the problem that the air inlet pipe is easy to block and needs to be frequently replaced (in a detachable mode), the working time of a machine table is seriously influenced, the air inlet pipe does not need to be frequently replaced, the fatal influence on productivity is caused, the equipment maintenance time is obviously reduced, the cost and the workload are effectively reduced, the large production value is obvious, and the advantage effect is obvious is solved;
a valve is arranged outside and connected with the air inlet system to control air inlet in order; sleeving an outer pipe on the outer wall of the air inlet pipe, wherein the length of the outer pipe is shorter than that of the inner pipe, two ends of the outer pipe are respectively sealed by welding with the inner pipe and the outer pipe through inner and outer pipe plugs, an inner pipe opening is exposed, a sealed annular space is formed between the inner pipe and the outer pipe, a vacuum outer pipe interface is arranged on the outer pipe at one end outside the process pipe and communicated with the annular space, and a valve is arranged to be connected with a vacuum system to perform a controllable vacuumizing function; after the vacuum is pumped through the vacuum outer pipe interface, the closed space between the inner pipe and the outer pipe forms vacuum, because the vacuum has good heat insulation function, all the inner pipes bear the process temperature in the process pipe, but the temperature of the air inlet inner pipe can be well solved not to be too high through the annular vacuum space in the double-layer pipe, the problem that the gas is not rapidly heated and decomposed and volatilized in the process of entering the process pipe through the air inlet inner pipe is well solved, the SIH4 gas is effectively prevented from being decomposed through the air inlet inner pipe, and only enters the process pipe and then is decomposed at high temperature, so that the process is carried out, the process gas in the process pipe only meets the effective process in the process pipe, is not consumed in the air inlet inner pipe, and is more favorable for the process quality of wafers.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a partially enlarged schematic view of portion A of FIG. 1;
FIG. 3 is a partially enlarged schematic view of a portion B of FIG. 1;
FIG. 4 is a partially enlarged schematic view of a portion C of FIG. 1;
FIG. 5 is a schematic view of the structure of a wafer and a boat.
In the figure, 1, a frame body; 2. a heater; 201. the tail part is a heat insulation block; 202. cushion blocks; 203. the mouth part is provided with a heat-insulating soft plugging block; 3. a process tube; 301. an air inlet inner pipe; 302. a vacuum outer tube; 303. inner and outer pipe plugging blocks; 401. a wafer boat; 402. a wafer; 5. a process furnace mouth flange; 501. a process tube sealing flange; 502. a process tube seal ring; 6. swinging the oven door; 601. a furnace mouth sealing ring.
Detailed Description
The invention is described in detail below with reference to the accompanying drawings, and as shown in fig. 1 to 5, a double-layer air inlet pipe with a vacuum heat insulation function in a process pipe comprises a frame body 1, a heater 2 is installed on the frame body 1, a process pipe 3 is installed on the inner side of the heater 2, a wafer boat 401 is arranged inside the process pipe 3, a wafer 402 is fixed on the wafer boat 401, the process pipe 3 is installed between the heaters 2 and is fixedly installed in a non-contact manner, a process pipe sealing flange 501 is arranged at the pipe orifice of the process pipe 3 to press a process pipe sealing ring 502, and a swing furnace door 6 is arranged on the outer side of the pipe orifice.
A spacer block 202 is arranged between the heater 2 and the process tube 3, and the process tube 3 is supported inside the heater 2 through the spacer block 202.
One end of the process pipe 3 is provided with a tail heat insulation block 201, the tail heat insulation block 201 is fixedly installed between the heaters 2, and the tail heat insulation block of the heater 2 is used for sealing the tail of the heater 2 to prevent heat from being dissipated.
The one end of heater 2 is provided with oral area heat preservation soft sprue 203, just oral area heat preservation soft sprue 203 fixed mounting in between heater 2 and the technology pipe 3, oral area heat preservation soft sprue 203 set up in the port department of 2 one ends of heater, 2 oral areas of heater set up the heat dissipation that oral area heat preservation soft sprue 203 was used for the clearance between shutoff heater 2 and the technology pipe 3, and the sealing washer of protection stove mouth flange avoids thermal radiation's influence.
The inner wall of the lower end of the process pipe 3 is provided with a double-layer air inlet pipe, the double-layer air inlet pipe comprises an air inlet inner pipe 301 and a vacuum outer pipe 302, the air inlet inner pipe 301 is arranged inside the vacuum outer pipe 302, an inner pipe and outer pipe plugging block 303 is arranged at the end of the vacuum outer pipe inside the process pipe 3, the process pipe 3 extends to the upper branch of the vacuum outer pipe 302 of the double-layer air inlet pipe of the external part of the heater 2, valve interfaces are arranged at the end of the vacuum outer pipe 302 and the air inlet inner pipe 301, the double-layer air inlet pipe is sealed by welding the air inlet inner pipe 301 and the vacuum outer pipe 302 with the inner pipe and the outer pipe through inner pipe and outer pipe plugging, annular spaces of the inner pipe and the outer pipe are closed, and the annular spaces of the inner pipe and the outer pipe are connected with a peripheral vacuum system through the vacuum outer pipe 302 interface.
An air outlet pipe and a vacuum pipe are arranged from the middle position of the process pipe 3 to the outer part of the heater 2, valves are arranged at the end heads of the air outlet pipe and the vacuum pipe, and the air outlet or vacuum pipe (with the valve) is used for exhausting or vacuumizing process gas.
One side of technology pipe sealing flange 501 is provided with technology fire door flange 5, technology pipe sealing washer 502 sets up between technology pipe 3, technology pipe sealing flange 501 and technology fire door flange 5, swing furnace gate 6 set up in one side of technology fire door flange 5, just be provided with fire door sealing washer 601 between swing furnace gate 6 and the 3 fire door flanges of technology pipe, 5-technology pipe 3 fire door flanges (can take the water-cooling) of technology pipe 3 mouth and 1-support body consolidation, compress tightly technology pipe sealing washer 502 through technology pipe sealing flange 501 and carry out the sealing connection of technology pipe 3, swing furnace gate 6 carries out the moving away of furnace gate and closes the door and seals through the furnace door sealing washer.
The working principle is as follows: the principle is that the air inlet inner pipe 301 is an air inlet pipe, and a valve is arranged outside the air inlet inner pipe and connected with an air inlet system to control air inlet in order; sleeving an outer pipe on the outer wall of the air inlet pipe, wherein the length of the outer pipe is shorter than that of the inner pipe, two ends of the outer pipe are respectively sealed by welding with the inner pipe and the outer pipe through inner and outer pipe plugs, an inner pipe opening is exposed, a sealed annular space is formed between the inner pipe and the outer pipe, a vacuum outer pipe 302 interface is arranged on the outer pipe at one end outside the process pipe 3 and communicated with the annular space, and a valve is arranged to be connected with a vacuum system to perform a controllable vacuumizing function; after the vacuum is pumped through the vacuum outer pipe 302 interface, the closed space between the inner pipe and the outer pipe forms vacuum (like a vacuum cup), because the vacuum has good heat insulation function, although all the inner pipes bear the process temperature in the process pipe 3, the temperature of the air inlet inner pipe 301 can be well solved not to be too high through the annular vacuum space in the double-layer pipe, the problem that the gas is not rapidly heated and decomposed and volatilized in the process of entering the process pipe 3 through the air inlet inner pipe 301 is well solved, the SIH4 gas is effectively prevented from being decomposed through the air inlet inner pipe 301, and only enters the process pipe 3 and then enters high temperature and is decomposed, so that the process is carried out, the process gas in the process pipe 3 only meets the effective process with the process in the process pipe 3, is not consumed in the air inlet inner pipe 301, and the process quality of the wafer 402 is better facilitated.
The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.
Claims (10)
1. The utility model provides a take double-deck intake pipe of vacuum heat insulation function in technology pipe, a serial communication port, including support body (1), install heater (2) on support body (1), technology pipe (3) are installed to the inboard of heater (2), install between heater (2) technology pipe (3), and be non-contact fixed mounting, the mouth of pipe department of technology pipe (3) is provided with technology pipe sealing flange (501) and compresses tightly technology pipe sealing washer (502), is provided with swing furnace gate (6) in the orificial outside.
2. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 1, characterized in that a spacer block (202) is arranged between the heater (2) and the process pipe (3), and the process pipe (3) is supported in the heater (2) through the spacer block (202).
3. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 1, wherein a tail heat insulation block (201) is arranged at one end of the process pipe (3), and the tail heat insulation block (201) is fixedly installed between the heaters (2).
4. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 3, wherein one end of the heater (2) is provided with a mouth heat insulation soft block (203), the mouth heat insulation soft block (203) is fixedly installed between the heater (2) and the process pipe (3), and the mouth heat insulation soft block (203) is arranged at a port of one end of the heater (2).
5. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 1, wherein the double-layer air inlet pipe is arranged on the inner wall of the lower end of the process pipe (3), and comprises an air inlet inner pipe (301) and a vacuum outer pipe (302).
6. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 5, characterized in that the air inlet inner pipe (301) is arranged inside an outer vacuum pipe (302), and the outer vacuum pipe is provided with an inner pipe blocking block and an outer pipe blocking block (303) at the end inside the process pipe (3).
7. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe is characterized in that an outer vacuum pipe (302) of the double-layer air inlet pipe extending from the process pipe (3) to the outer part of the heater (2) branches upwards, and valve interfaces are arranged at the ends of the outer vacuum pipe (302) and the inner air inlet pipe (301).
8. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 1, wherein an air outlet pipe and a vacuum pipe are arranged from the middle position of the process pipe (3) to the outside of the heater (2), and valves are arranged at the ends of the air outlet pipe and the vacuum pipe.
9. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 1, wherein a process furnace mouth flange (5) is arranged on one side of the process pipe sealing flange (501), the process pipe sealing ring (502) is arranged among the process pipe (3), the process pipe sealing flange (501) and the process furnace mouth flange (5), the swinging furnace door (6) is arranged on one side of the process furnace mouth flange (5), and a furnace mouth sealing ring (601) is arranged between the swinging furnace door (6) and the process pipe (3).
10. The double-layer air inlet pipe with the vacuum heat insulation function in the process pipe as claimed in claim 1, wherein a wafer boat (401) is arranged inside the process pipe (3), and wafers (402) are fixed on the wafer boat (401).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110441490.9A CN113161267A (en) | 2021-04-23 | 2021-04-23 | Double-layer air inlet pipe with vacuum heat insulation function in process pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110441490.9A CN113161267A (en) | 2021-04-23 | 2021-04-23 | Double-layer air inlet pipe with vacuum heat insulation function in process pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113161267A true CN113161267A (en) | 2021-07-23 |
Family
ID=76869799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110441490.9A Pending CN113161267A (en) | 2021-04-23 | 2021-04-23 | Double-layer air inlet pipe with vacuum heat insulation function in process pipe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113161267A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342527A (en) * | 2020-09-11 | 2021-02-09 | 安徽贝意克设备技术有限公司 | Bidirectional liquid source evaporation CVD system |
-
2021
- 2021-04-23 CN CN202110441490.9A patent/CN113161267A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112342527A (en) * | 2020-09-11 | 2021-02-09 | 安徽贝意克设备技术有限公司 | Bidirectional liquid source evaporation CVD system |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20220314 Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Applicant after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 826 Huadong Road, high tech Zone, Qingdao, Shandong Applicant before: QINGDAO SUNRED ELECTRONIC TECHNOLOGY Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Applicant after: Sairuida Intelligent Electronic Equipment (Wuxi) Co.,Ltd. Address before: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Applicant before: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. |